• Title/Summary/Keyword: 초전도 박막

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Crystallization Behavior and Electrical Properties of BNN Thin Films prepared by IBASD Methods (IBASD법으로 제조된 BNN 박막의 결정화 및 전기적 특성)

  • Woo, Dong-Chan;Jeong, Seong-Won;Lee, Hee-Young;Cho, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.489-493
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    • 2004
  • [ $Ba_2NaNb_5O_{15}$ ]은 orthorhombic tungsten bronze 결정구조를 갖는 강유전체로서, 단결정의 경우 $LiNbO_3$에 비해 우수한 비선형 전광계수 값을 나타내는 것으로 알려져 있으며, 또한 주목할만한 초전, 압전, 강유전특성을 나타내고 있다. 본 연구에서는 다른 강유전체박막에 비하여 상대적으로 연구가 덜 이루어진 BNN 박막을 세라믹 타겟을 사용하여 이온빔 보조 증착법을 사용하여 제조하였으며, $Ar/O_2$ 분위기에서 증착된 BNN 박막에 대한 결정화 및 배향 특성을 고찰하였고, 이에 따른 전기적 특성의 변화를 살펴보았다. 연구에 사용된 기판은 $Pt(100)/TiO_2/SiO_2/Si(100)$이었으며, 이온빔 보조 증착법에서 보조 이온빔의 에너지를 $0{\sim}400eV$로 변화 시키며 BNN 박막을 증착한 후, 열처리하였다. BNN 박막의 전기적 특성은 MFM 박막 커패시터의 형태로 제조하여 강유전 특성에 대해 살펴보았다.

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Characteristics of PLT Thin Films on MgO Substrates and Fabrication of Infrared Sensor (MgO 기판 위에 올린 PLT 박막의 특성과 적외선 센서의 제작)

  • Cho, Sung-Hyun;Jung, Jae-Mun;Lee, Jae-Gon;Kim, Ki-Wan;Hahm, Sung-Ho;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.6 no.3
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    • pp.188-193
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    • 1997
  • The lanthanum-modified lead titanate (PLT) thin films on (100) cleaved MgO single crystal substrate have been prepared by RF magnetron sputtering method using PbO-rich target with varing La contents. The substrate temperature, working pressure, $Ar/O_{2}$, and RF power density of PLT thin films were $580^{\circ}C$ 10mTorr, 10/1, and $1.7W/cm^{2}$, respectively. In these conditions, the c-axis growth and tetragonality of the PLT thin films decreased for addition of La content and the PLT thin films showed diffuse phase transition from high temperature XRD patterns. The infrared sensor was fabricated. The remanent polarization was above $1.71{\mu}C/cm^{2}$ and the pyroelectric voltage was above 500mV with 10:1 signal to noise ratio.

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Fabrication of YB$_{a2}Cu_3O_{7-{\delta}}/SrTiO_3/YB_{a2}Cu_3O_{7-{\delta}}$ multilayer structure for ground plane of single flux quantum digital circuit (단자속 양자 디지털 회로의 접지면을 위한 YB$_{a2}Cu_3O_{7-{\delta}}/SrTiO_3/YB_{a2}Cu_3O_{\7-{\delta}}$ 다층 구조의 제작)

  • Jang, Ju-Eok;Kim, Young-Hwan;Kim, Young-Hwan;Lee, Jong-Min;Park, Jong-Hyeog;Kang, Joon-Hee
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.71-74
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    • 1999
  • We have fabricated high-T$_c$ superconducting YBa$_2Cu_3O_{7-{\delta}}\;/SrTiO_3/\;YBa_2Cu_3O_{7-{\delta}}$ (YBCO/STO/YBCO) multilayer structure on (001) $SrTiO_3$ substrate by using pulsed laser deposition technique for applying to ground plane of single flux quantum digital circuits. In this structure, the top and bottom YBCO layers were connected through the holes in the STO insulating layer. The critical temperature of the two YBCO layers connected each other was 86 K after annealing at 500 $^{\circ}C$ in $O_2$ atm for about 60 hr. This result shows that the annealing process is very important fabricating YBCO/STO/YBCO multilayer structure An experiment to optimize the fabrication process of YSCO/ST0/YBCO multilayer structure with good quality is in progress.

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Development of PLT($PbLaTiO_{3}$) pyroelectric materials (PLT($PbLaTiO_{3}$) 초전재료 개발(II))

  • Park, Sung-Kun;Bae, Seung-Choon;Kim, Ki-Wan
    • Journal of Sensor Science and Technology
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    • v.6 no.6
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    • pp.491-499
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    • 1997
  • We fabricated the ceramic PLT tablet which was composed of 5, 10 and 15 mol% lanthanum concentration and thin film PLT to develope pyroelectric materials, and investigated their characteristics. Using TG/DTA, we determined calcination and sintering temperature to sinter the PLT completely and to prevent volatilization of the Pb components. The calcination and sintering temperature were $850^{\circ}C$, $1150^{\circ}C$ respectively, and there was a lot of mass loss at higher sintering temperature. By measuring temperature-dielectric constant characteristics of ceramic tablet we investigated dielectric constant characteristics depends on La concentration. The Curie point of PLT with 5, 10 and 15 mol% lanthanum concentration were $330^{\circ}C$, $269^{\circ}C$ and $210^{\circ}C$ respectively. Using PLT ceramic tablet we observed IR detection characteristics, and then deposited PLT thin film by rf magnetron sputtering. We verified that PLT thin film fabricated with completely sintered PLT target had the same structure to target by investigating lattice constant and optical transparency.

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Effect of nano-sized powder addition on the microstructure and superconducting properties of the YBCO thin film. (나노분말 첨가에 따른 YBCO 초전도 박막의 미셀구조 및 초전도 특성변화 연구)

  • Park, Jin-A;Kim, Byung-Joo;Im, Sun-Won;Ahn, Ji-Hyun;Kim, Ho-Jin;Hong, Gye-Won;Lee, Hee-Gyun
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.1998-2000
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    • 2005
  • The effects of the addition of nanocrystalline Y2O3 powder on the microstructure and superconducting properties have been investigated in YBCO films prepared by TFA-MOD process. Precursor solution doped with extra $Y_2O_3$ Powder was prepared by adding $Y_2O_3$ powder into a stoichiometic precursor solution with a cation ratio of Y:Ba:Cu=1:2:3. Coating solutions with and without $Y_2O_3$ doping were coated on $LaAlO_3(100)$ single crystal by a dip coating method, cacination and conversion heat treatments were performed at the controlled atmosphere containing water vapor Current carry capacity(Jc) of YBCO film was enhanced about 50% by $Y_2O_3$ doping. It is thought that the enhancement of Jc is due to the better connectivity of YBCO grains and/or the flux pinning by the presence of nanocrystalline $Y_2O_3$ Particles embedded in YBCO grains.

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Substrate effects on the characteristics of $YBa_2Cu_3O_{7-x}$ thin films prepared by RF magnetron sputtering (RF마그네트론 스퍼터링법으로 제조한 $YBa_2Cu_3O_{7-x}$전도체 박막의 특성에 대한 기판의 영향)

  • 신현용;박창엽
    • Electrical & Electronic Materials
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    • v.8 no.1
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    • pp.6-12
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    • 1995
  • High Tc superconducting YBa$_{2}$Cu$_{3}$$O_{7-x}$ thin films were prepared on various substrates by off-axis rf magnetron sputtering method to examine the substrate effects on the film structure and its R-T characteristics. The SEM analysis showed that the surface morphology of the grown YBa$_{2}$Cu$_{3}$O.sub 7-x/, film has different characteristic structure with different substrate used. The film on (100) SrTiO$_{3}$ substrate has critical current density of 3*10$^{5}$ A/cm$^{2}$ at 77K under zero magnetic field. The X-ray diffraction measurements revealed that the films on (100) SrTiO$_{3}$ substrate have mixed a-axis and c-axis normal to the substrate surface and the films on (100) MgO and ZrO$_{2}$/sapphire substrates have c-axis normal orientation to the substrate surface. However, YBa$_{2}$Cu$_{3}$$O_{7-x}$ films on (100) sapphire substrates showed no preferential orientation.ion.

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Pyroelectric Properties of the PLT Thin Films Prepared by Sol-Gel Method (Sol-Gel법으로 제조한 PLT박막의 초전 특성)

  • 김양선;정장호;박인길;이성갑;이영희
    • Electrical & Electronic Materials
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    • v.10 no.6
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    • pp.541-547
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    • 1997
  • (Pb$_{1-x}$ La$_{x}$)Ti$_{1-x}$ $_4$O$_3$(x=0, 0.02, 0.04, 0.08) ceramic thin films were fabricated by Sol-Gel method. A stock solution of (Pb, La)TiO$_3$ with excess Pb 10 mol% was made and spin-coated on the Pt/Ti/SiO$_2$/Si substrate at 400rpm for 30 seconds. Coated specimens were dried on the hot-plate at 35$0^{\circ}C$ for 10 min and sintered at 500~75$0^{\circ}C$ for 1 hour. The dielectric constant, remanent polarization and coercive field of the PLT(6at.%) thin films sintered at $650^{\circ}C$ were 884, 13.95$\mu$C/$\textrm{cm}^2$ and 8.7kV/cm, respectively. Pyroelectric coefficient, figure of merit of pyroelectric current, voltage responsivity and detectivity of PLT(6at.%) thin films were 3.2$\times$10$^{-8}$ C/$\textrm{cm}^2$K, 1.02$\times$10$^{-8}$ C.cm/J, 2.9 $\times$10$^{-11}$ C.cm/J, 0.29$\times$10$^{-8}$ C.cm/J, respectively.ely.

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