• Title/Summary/Keyword: 초전도 박막

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The properties of$Y_1Ba_2Cu_3O_{7-x}$ superconducting thin films deposited by 'off-axis' pulsed laser deposition (Off-axis'레이저 기법에 의한 고온 초전도 $Y_1Ba_2Cu_3O_{7-x}$박막의 특성)

  • 문병무
    • Electrical & Electronic Materials
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    • v.8 no.3
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    • pp.285-290
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    • 1995
  • High quality $Y_{1}$Ba$_{2}$Cu$_{3}$$O_{7-x}$ thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual 'off-axis' target-substrate geometry. Various properties of superconducting $Y_{1}$Ba$_{2}$Cu$_{3}$$O_{7-x}$ thin films have been studied systematically as a function of oxygen pressure during the deposition, in both 'on-axis' and the unusual 'off-axis' target substrate geometries. In the 'off-axis' geometry, one can completely eliminate the so-called 'laser droplets' from the film surface and thus obtain smooth high quality films. It is found that films with optimum structural and electrical properties are obtained at a lower oxygen pressure range during the 'off-axis' deposition when compared with that required in the 'on-axis' deposition geometry.

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Study on the Fabrication Step-edges on $\textrm{SrTiO}_3$ Substrates and the Characterization of $\textrm{YBa}_{2}\textrm{Cu}_{3}\textrm{O}_{7-\delta}$ Step-edge Junctions ($\textrm{SrTiO}_3$ 기판 위에 계단형 모서리 제작 및 $\textrm{YBa}_{2}\textrm{Cu}_{3}\textrm{O}_{7-\delta}$계단형 모서리 접합의 특성 연구)

  • Nam, Byeong-Chang;Kim, In-Seon;Lee, Sun-Geol;Park, Jong-Cheol;Park, Yong-Gi
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.950-955
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    • 1998
  • Ar 이온 식각법을 이용하여 (001) SrTiO3(STO) 단결정 기판 위에 200nm 높이의 계단형 모서리를 제작하였다. 계단식은 입사하는 Ar 이온 빔에 대한 Ar 이온 입사각과 마스크 회전각을 조절함으로써 38$^{\circ}$-70$^{\circ}$의 넓은 범위로 제어할 수 있었다. 초전도 YBa2Cu3O7-$\delta$박막은 계단이 있는 STO 기판 위에 펄스레이저 증착법을 이용하여 증착하였으며, 박막의 두께는 계단 높이에 대한 박막의 두께비가 0.5-1.2가 되도록 하였다. 계단형 모서리 조셉슨 접합의 임계전류밀도와 IcRn값은 77K에서 각각 104A/$\textrm{cm}^2$, 70-200$\mu$V이었다.

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Stability analysis of Au/YBCO film (Au/YBCO 박막의 안정성 해석)

  • 김진석;설승윤
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2002.02a
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    • pp.245-248
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    • 2002
  • One dimensional conduction equation is solved by finite difference method, to analyse the stability of Au/YBCO film deposited on a sapphire substrate. Jolue heat is included in the case of current sharing state. The analysis shows the quench and recovery of superconductor depending on the amount of thermal disturbance release on the center surface of superconductor. The critical disturbance energies for different filling factor and operating current are calculated.

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Growth Model of Bi-Superconducting Thin Film Fabricated by Co-sputtering Method (동시 스퍼터법으로 제작한 Bi 초전도 박막의 성장 모델)

  • Chun, Min-Woo;Park, Yong-Pil
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2002.11a
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    • pp.796-799
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    • 2002
  • BSCCO thin films are fabricated via a co-deposition process at an ultra-low growth rate using ion beam sputtering. The sticking coefficient of Bi element exhibits a characteristic temperature dependence. This temperature dependence of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi$_2$O$_3$.

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Fabrication and characterization of (개구결합을 이용한 H 형태 초전도 안테나의 제작 및 특성 해석)

  • Chung, Dong-Chul;Han, Byoung-Sung;Ryu, Ki-Su;Lee, Jong-Ha;Sok, Jung-Hyun;Lee, Eun-Hong
    • Journal of the Institute of Electronics Engineers of Korea TE
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    • v.37 no.1
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    • pp.63-69
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    • 2000
  • The high-$T_c$ Superconducting (HTS) antenna which consists of "H" type resonator has the benefits for the miniaturization of antenna in comparison with the microstrip antenna of the similar dimension. To fabricate the "H" type antenna, HTS $YBa_2Cu_3O_{7-x}$ (YBCO) thin films were deposited on MgO substrates using rf-magnetron sputtering. Standard etching processes were performed for the patterning of the "H" type antenna. For comparison between normal conducting antennas and superconducting antennas, the gold antennas with the same dimension were also fabricated. An aperture coupling was used for impedance matching between $50{\Omega}$ feed line and HTS radiating patch. The diverse experimental results were reported in terms of the resonant frequency, the return loss and the characteristics impedance. The "H" type superconducting antenna showed the performance of 1.36 in SWR, 24% in efficiency, and 14.6 dB in the return loss superior of the normal conducting counterpart.

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Crystalline and Electrical Properties of (Pb, La)TiO3 Ferroelectric Films ((Pb,La) TiO3 강유전체막의 결정성과 전기적특성)

  • 장호정
    • Journal of the Microelectronics and Packaging Society
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    • v.5 no.2
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    • pp.59-64
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    • 1998
  • Pt/SiO2/Si 기판구조위에 스크린인쇄법과 졸-겔법에 의해 (Pb, La)TiO3(PLT) 후막 과 박막을 도포시켜 $650^{\circ}C$후속열처리 온도에서 결정화한후 결정특성과 전기적 특성을 조사 하였다. $650^{\circ}C$ 온도에서 후속열처리된 PLT 시료의 경우 전형적인 perovskite 결정구조를 보 여주었다. SEM 단면형상으로부터 Pt 전극과 PLT막 사이에는 비교적 평활한 계면형상을 보여주었다. PLT 후막과 박막시료의 잔류분극(2Pr) 값은 약 1$\mu$C/cm2 으로각각 나타났으며 이와같이 후막 PLT시료에 비해 박막시료의 잔류분극값이 큰이유는 박막시료가 보다 양호 한 결정성을 지니기 때문이었다. 상온부근에서 후막과 박막시료의 초전계수값은 약 1.5nC/cm2.$^{\circ}C$와 4.0nC/cm2.$^{\circ}C$의 값을 각각 나타내었으며 누설전류의 크기는 약 0.3~0.8$\mu$ A/cm2의 비교적 양호한 누설전류 특성을 얻었다.