• Polymer(Korea)
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• v.28 no.6
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• pp.445-454
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• 2004

The requirement for a much finer line width circuits on semiconductors needs new developers such as supercritical fluid to prevent the collapse of the photoresist micro-patterns. The copolymers contain t-butyl methacrylate having an acid-cleavable t-butyl group and supercritical fluid $CO_2$ soluble perfluorinated decyl methacrylate segments. The supercritical fluid $CO_2$-philic properties of the photoresist changed to supercritical fluid $CO_2$-phobic properties after the deprotection reaction by exposure, which made the exposed resist insoluble in the supercritical fluid $CO_2$ developer. The synthesized copolymers containing more than 30% of perfluorinated decyl methacrylate were found to be soluble in supercritical fluid $CO_2$. The variation of film thickness before and after exposure was largest when the mole ratio of perfluorinated decyl methacrylate in the copolymer was 30%.

• KSBB Journal
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• v.16 no.4
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• pp.327-331
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• 2001

Catechin compounds from the Green tea cultivated in Bosung (Chollanamdo) were extracted using supercritical fluid and various additives, and analyzed by reversed-phase high performance liquid chromatography (RP-HPLC). The chromatographic column was packed with LiChrospher 100RP-18(15 $\mu$m), and water was used as the mobile phase with 0.05% phosphoric acid and acetonitrile. Gradient election was applied to separate EGCG by changing the mobile phase compositions. Comparing the extraction yield of three different types of supercritical fluids, pure CO$_2$, with additives of water and ethanol (5 wt,%), the extraction amount of EGCG was most abundant in the suprcritical CO$_2$with ethanol. However, more was extracted and pure higher purity was achieved by solvent extraction using ethanol.

• Clean Technology
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• v.11 no.3
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• pp.147-152
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• 2005

For estblishing the best technique for the micronization of Ibuprofen using supercritical fluids, the solubility should be known. The solubility of Ibuprofen in supercritical carbon dioxide was measured by observing the cloud point. The cloud point was observed using high pressure equipment equipped a variable volume view cell between temperature of 35, 40 and $45^{\circ}C$. The solubility data was correlated by the Peng-Robinson equation of state Solute physical properties, such as critical temperature (Tc), critical pressure (Pc) and acentric factor (${\omega}$) were estimated by the some group contribution method. As pressure was increased, the solubility increased at constant temperature. The retrograde phenomenon by a solute vapor pressure and a density of solvent was observed at the pressure of around 150bar. It was found that $CO_2$ can be used as a supercritical solvent in micronization of ibuprofen by RESS.