• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.09a
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• pp.42-54
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• 2007

${\blacksquare}$ 매엽실 세정장비의 양산적용 확대 ${\centerdot}$ 역오염 감소로 수율개선, 짧은 TAT ${\centerdot}$ Throughput 개선필요 : Process Module + Wafer Transfer ${\blacksquare}$ 향후 $2{\sim}3$년 동안 세정기술의 패러다임 변화 예상 ${\centerdot}$ 초미세 패턴에서의 입자 제거 대책 (${\sim}22.5nm$), 신재료에 따른 케미컬 대응 (에칭, 부식, 물성변화). ${\blacksquare}$ 세정기술의 통합 솔루션 필요 ${\centerdot}$ 초임계 유체세정 : 극미세 패턴까지도 대응 가능 ${\centerdot}$ 장비와 공정 측면에서 많은 연구 필요

• Proceedings of the Korean Society of Rheology Conference
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• 2006.06a
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• pp.153-156
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• 2006

• Proceedings of the Korean Society of Crop Science Conference
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• 2021.04a
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• pp.138-138
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• 2021

• Clean Technology
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• v.17 no.2
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• pp.110-116
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• 2011

The dyeing of polyester fiber with two different disperse dyes (Disperse Red 60 and Disperse Yellow 54) was carried out using supercritical carbon dioxide ($SCCO_2$) as a dyeing medium at temperatures ranging from $50^{\circ}C$ to $90^{\circ}C$ and at pressures from 15 MPa to 30 MPa. The dye uptake of Disperse Red 60 on polyester fiber was found to increase with temperature at constant pressure and $SCCO_2$ density (700 kg/$m^3$). At $90^{\circ}C$ and 30 MPa, the dye uptake on polyester fiber increased with dyeing time and the saturation concentration of Red 60 was attained within 240 min, while a longer dyeing time was required for Yellow 54 to reach its saturation concentration. When dyestuff mixtures with mixing ratios of 0.01 to 9.0 (Red 60/Yellow 54) were used, the uptake ratio of the two dyes was found to be proportional to 0.26 power of their mixing ratio. Dyed fibers showed an orange color and the depth of the color depended upon the mixing ratio of the dyestuffs.

• KSBB Journal
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• v.22 no.5
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• pp.328-335
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• 2007

In this work ursolic acid (UA), a poorly water-soluble compound, was inclusion complexed with 2-hydroxypropyl-$\beta$-cyclodextrin (HP-$\beta$-CD) by various methods such as kneading, solvent evaporation and two types of supercritical fluid processes. The solubility and characteristics of these UA/HP-$\beta$-CD complexes were investigated by scanning electron microscopy, x-ray diffraction and HPLC. The water solubilities of the two complexes obtained from solvent evaporation and ASES processes were observed to increase up to 6$\sim$240 folds and 12$\sim$56 folds, respectively, compared with that of unprocessed UA. The stability of UA/HP-$\beta$-CD complex samples in cosmetic formulations was examined at various temperatures for one month. The UA/HP-$\beta$-CD complex prepared by solvent evaporation was found to be most stable among all the cosmetic formulations tested in our experiments.

• Proceedings of the KAIS Fall Conference
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• 2007.05a
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• pp.264-266
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• 2007

지구의 온난화를 가속시키는데 일조하고 있는 이산화탄소($CO_{2}$)와 Epoxy를 Tetrabutylammonium bromide를 촉매로 하여 초임계 상태에서 반응시켜 2차 전지의 전해질 물질로 사용 가능한 4-ethyl-l,3-dioxolan-2-one, 4-methyl-1,3-dioxlan-2-one, 4-phenyl-1,3-dioxolan-2-one, 4-Chloromethyl-1,3-dioxolan-2-one을 합성하여 $^{l}H-NMR$을 이용하여 분석하였다.

• KSBB Journal
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• v.19 no.6 s.89
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• pp.421-426
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• 2004

The extraction and separation of isoflavones from Korean soybean were peformed by various mechanical and chemical extraction methods. They included solvent extraction, stirring, supersonification and sub/supercritical water extraction. From the experimental results of the variation of solvent extraction by change in composition, the increase in extraction of a specific compound by stirring or supersonic energy, and the application of supercritical fluid with superior solvating power over solvents, the sonification was the most desirable extraction method in extracting aglycone isoflavones, daidzein and genistein from Korean soybean.

• 한국생물공학회:학술대회논문집
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• 2003.04a
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• pp.701-705
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• 2003

The study was done to determine the effect of storage property and qualities of soybean sauce and paste by adding different amount of pyroligneous liquor obtained by supercritical fluid extraction(SFE). Purified pyroligneous liquor obtained by SFE at $40^{\circ}C$/110bar contained ${\rho}$-cresol, o-cresol and m-cresol food sterilizers, but no toxic substances such as tar, scorched, furfuraland and monophenol. Thus pyroligneous liquor was suitable as natural food preservative. In case of soybean sauce, pyroligneous liquor was tested for the possibility of utilizing it as natural food preservative to prevent film formation on soybean sauce for the test period of 15days at $30^{\circ}C$. In case of paste, pyroligneous liquor was tested for the possibility of utilizing it as natural food preservative to inhibit browning on paste for the test period of 60days at $30^{\circ}C$. As a result, purified pyroligneous liquor offered a promising way of improving the quality and storage property of soybean sauce and paste .

• KSBB Journal
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• v.25 no.4
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• pp.379-386
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• 2010

In the present study, biocompatible poly (ethylene glycol) (PEG) microparticles containing coriander essential oil were prepared using a supercritical particles from gas saturated solution (PGSS) process to improve the stability of the coriander oil. The effects of various process parameters such as temperature, pressure, and nozzle diameter on the morphology and entrapment efficiency of coriander oil loaded PEG microparticles were then investigated. A positive influence on the formation of spherical microparticles was observed with increasing temperature and decreasing pressure. Furthermore, somewhat more porous microparticles were produced with an increase in pressure. At a given temperature, the highest entrapment efficiency of coriander essential oil in PEG microparticles was observed under the lowest experimental pressure condition.

• Tribology and Lubricants
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• v.36 no.3
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• pp.153-160
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• 2020

In this paper, we present a hydrostatic bearing design and rotordynamic analysis of a pump-and-drive turbine module for a 250-kW supercritical CO₂ cycle application. The pump-and-drive turbine module consists of the pump and turbine wheel, assembled to a shaft supported by two hydrostatic radial and thrust bearings. The rated speed is 21,000 rpm and the rated power is 143 kW. For the bearing operation, we use high-pressure CO₂ as the lubricant, which is supplied to the bearing through the orifice restrictor. We calculate the bearing stiffness and flow rate for various orifice diameters, and then select the diameter that provides the maximum bearing stiffness. We also conduct a rotordynamic analysis based on the design parameters of the pump-and-drive turbine module. The predicted Campbell diagram shows that there is no critical speed below the rated speed, owing to the high stiffness of the bearings. Furthermore, the predicted damping ratio indicates that there is no unstable mode. We conduct the operating tests for the pump and drive turbine modules within the supercritical CO₂ cycle test loop. The pressurized CO₂, at a temperature of 136℃, is supplied to the turbine and we monitor the shaft vibration during the test. The test results show that there is no critical speed below the rated speed, and the shaft vibration is controlled to below 3 ㎛.