• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.81-85
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• 2022

Mist-CVD is known to have advantages of low cost and high productivity method since the precursor solution is misting with an ultrasonic generator and reacted on the substrate under vacuum-free conditions of atmospheric pressure. However, since the deposition distribution is not uniform, various efforts have been made to derive optimal conditions by changing the angle of the substrate and the position of the outlet to improve the result of the preceding study. Therefore, in this study, a deposition distribution uniformity model was derived through the shape and position of the substrate support and the conditions of inlet flow rate using the particle tracking method of computational fluid dynamics (CFD). The results of analysis were compared with the previous studies through experiment. It was confirmed that the rate of deposition area was improved from 38.7% to 100%, and the rate of deposition uniformity was 79.07% which was higher than the predicted result of simulation. Particle tracking method can reduce trial and error in experiments and can be considered as a reliable prediction method.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.101-104
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• 2022

Mist-CVD is known to have advantages of low cost and high productivity compared to ALD and PECVD methods. It is capable of reacting to the substrate by misting an aqueous solution using ultrasonic waves under vacuum-free conditions of atmospheric pressure. In particular, Ga₂O₃ is regarded as advanced power semiconductor material because of its high quality of transmittance, and excellent electrical conductivity through N-type doping. In this study, Computational Fluid Dynamics were used to predict the uniformity of the thin film on a large-area substrate. And also the deposition pattern and uniformity were analyzed using the flow velocity and particle tracking method. The uniformity was confirmed by quantifying the deposition cross section with an FIB-SEM, and the consistency of the uniformity prediction was secured through the analysis of the CFD distribution. With the analysis and experimental results, the match rate of deposition area was 80.14% and the match rate of deposition thickness was 55.32%. As the experimental and analysis results were consistent, it was confirmed that it is possible to predict the deposition thickness uniformity of Mist-CVD.

• Journal of the Semiconductor & Display Technology
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• v.22 no.1
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• pp.134-138
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• 2023

This study focuses on the analysis of the results of computational fluid dynamics simulations of mist-chemical vapor deposition for the growth of an epitaxial wafer in power semiconductor technology using artificial intelligence techniques. The conventional approach of predicting the uniformity of the deposited layer using computational fluid dynamics and design of experimental takes considerable time. To overcome this, artificial intelligence method, which is widely used for optimization, automation, and prediction in various fields, was utilized to analyze the computational fluid dynamics simulation results. The computational fluid dynamics simulation results were analyzed using a supervised deep neural network model for regression analysis. The predicted results were evaluated quantitatively using Euclidean distance calculations. And the Bayesian optimization was used to derive the optimal condition, which results obtained through deep neural network training showed a discrepancy of approximately 4% when compared to the results obtained through computational fluid dynamics analysis. resulted in an increase of 146.2% compared to the previous computational fluid dynamics simulation results. These results are expected to have practical applications in various fields.

• Korean Chemical Engineering Research
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• v.51 no.5
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• pp.609-614
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• 2013

This study investigated the spontaneous combustion behavior of solvent-treated low rank coals. Indonesian lignite (a KBB and SM coal) and sub-bituminous (a Roto coal) were mixed with non-polar 1-methyl naphthalene (1MN) either by mechanical agitation or ultrasonication. The property change associated with 1MN treatment was then analyzed using proximate analysis, calorific value analysis, Fourier transform infrared (FT-IR), X-ray photoelectron spectroscopy and moisture re-adsorption test. Susceptibility to spontaneous combustion was evaluated using crossingpoint temperature (CPT) measurement along with gas analysis by GC. A FT-IR profile showed that oxygen functional groups and C-H bonding became weaker when treated by 1 MN. XPS results also indicated a decrease of the oxygen groups (C-O-, C=O and COO-). Increased hydrophobicity was found in the 1MN treated coals during moisture readsorption test. A CPT of the treated coals was ${\sim}20^{\circ}C$ higher than that of the corresponding raw coals and the ultrasonication was more effective way to enhance the stability against spontaneous combustion than the agitation. In the gas analysis less CO and $CO_2$ were emitted from 1MN treated coals, also indicating inhibition of pyrophoric behavior. The surface functional groups participating in the oxidation reaction seemed to be removed by the ultrasonication more effectively than by the simple mechanical agitation.

• Clean Technology
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• v.18 no.4
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• pp.390-397
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• 2012

Removal characteristics of lead-contaminated soil at the military shooting range located in the Changwon city were studied experimentally using soil washing process. As a washing solution, hydrogen chloride (HCl) concentrations of 0.001, 0.01, 0.1 and 0.2 N were used, and soil : solution ratios were 1 : 2, 1 : 3, 1 : 4, and 1 : 5. Particle diameter of contaminated soil of 4-0.075 mm, and washing period of 5, 10, 15, 20, 30, 60, and 120 min were used as operating parameters. The optimum concentration of HCl solution was 0.1 N (56.3% of Pb removal efficiency) with 15 minutes operation period in views of economics, and the optimum soil : solution ratio was determined as 1 g : 3 mL for 69.7% of Pb removal efficiency with 0.1 N HCl and 15 minutes washing period. As washing period increased, removal efficiency was increased until 20 min of the removal efficiency of 75.3%, and then almost stable. Pb removal efficiency in soil particle diameters of 0.075 mm or more was ranged from 77.0% to 82.0%, but it was decreased to 52.8% in diameter of less than 0.075 mm. Therefore, the optimum cut-off size of the soil particle diameter was found less than 0.075 mm. Combined HCl solution and ultrasonic washing method showed better removal efficiency compared to only water or HCl washing method for particle sizes above 0.075 mm.

• Applied Chemistry for Engineering
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• v.30 no.5
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• pp.569-579
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• 2019

In this study, the effect anti-oxidant, anti-inflammatory, and liver protective activity was investigated via quick ultrasonic disintegration of pine pollen using a probe sonicator (PS) followed by the extraction with water, 70% ethanol, and 100% ethanol. The anti-inflammatory effect was studied by measuring the production of nitric oxide (NO) and cytokine in RAW264.7 cells induced with lipopolysaccharides (LPS). The cell toxicity was also checked with an 3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide (MTT) assay, and the experiment was conducted using non-toxic $100{\mu}g/mL$. The NO inhibition rate was highest in the 70% ethanol PS group at $85.99{\pm}0.12%$. Also an excellent efficiency was obtained from the results of interlukin-1 beta ($IL-1{\beta}$) and tumor necrosis factor alpha ($TNF-{\alpha}$), which is related to inflammation-related cytokine, with the respective inhibition rates of 63 and 22%. To examine liver protective activity, HepG2 cells were treated with Taclin, and the generation of glutamic oxaloacetic transaminase (GOT) and lactate dehydrogenase (LDH) was measured in the culture solution. From GOT and LDH generation results, the inhibition rates in the 70% ethanol PS group were 28% and 13%, respectively, which was higher compared to that of using negative control group. Our results suggest that pine pollen extracted in 70% ethanol using PS may be used to develop food products that have anti-aging, anti-inflammatory, and liver protective effects.

• Food Science and Preservation
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• v.19 no.4
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• pp.470-476
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• 2012

Enzymatic action and microbial growth degrade the quality of fresh-cut lettuce. Browning, a bad smell, and softening during storage are the major forms of quality deterioration. Health-oriented consumers tend to avoid foods treated with chemicals to maintain their freshness. This study was conducted to evaluate the change in the quality of fresh-cut lettuce with combined low-temperature blanching (LB) and ultrasonication (US). The optimum condition was selected using the response surface methodology (RSM), through a regression analysis with the following independent variables; the ultrasonication time (X1), blanching temperature (X2), blanching time (X3), and dependent variable; ${\Delta}E$ value (y). It was found that the condition with the lowest ${\Delta}E$ value occurred with combined 90s US and $45^{\circ}C$ 90s LB (US+LB). The combined treatment group (US+LB) was stored at $10^{\circ}C$ for 9 days with the control group and each single-treatment group, with low-temperature blanching and ultrasonication. Overall, the US+LB group had a significantly high $L^*$ value, which indicates significantly low $a^*$, $b^*$, ${\Delta}E$, browning index, PPO, and POD activity values, and a low total bacteria count (p < 0.05). The US+LB group also had the highest sensory score (except for aroma and texture; p > 0.05).

• Journal of Conservation Science
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• v.27 no.1
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• pp.101-114
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• 2011

The rock-carved Buddha statue at Dosolam (Korea Treasure No. 1200) of the Seonunsa temple in Gochang is unique style sculptured on natural rock cliff of 13.0m height. The Buddha statue is composed of volcanic complex with tuff, dacitic tuff breccia, tuff bereccia and lithic tuff. Especially, the Buddha statue is characterized by hydrothermal alteration and fragmentation on the upper and lower part. As a result of damage diagnosis, exfoliation and detachment of physical weathering are high of 11.3% and 9.3%, respectively. Infrared thermography analysis, exfoliation and micro-cracks occurred in the measuring parts that have not been confirmed by naked eyes. Chemical index of alteration and weathering potential index of host rock for the Buddha statue are 55.16 to 64.01 and 6.14 to 9.92 which are represented within highly weathering degree. In surface, dark black, reddish brown and white discoloration are observed prominently in the lower. Brown discoloration 6.9% is highest. According to the P-XRF measurements, high concentration of Fe in common, in part of dark black discoloration was Mn, white and brown discoloration in part of S and Ca content were higher. Biological weathering that yellowish brown and dark gray crustoes lichenes appeared by 20.8% and 13.3%, respectively. Therefore, comprehensive deterioration rate of Buddha statue show physical damage by 21.2%, discoloration for inorganic contaminants by 10.8% and biological damage by 39.4%. Ultrasonic velocity measurement carried out of Buddha statue on the surface by 555 points. Measured value of ultrasonic velocity was about 2,273m/s(1,067 to 3,215m/s, and weathering coefficient is 0.5(0.4 to 0.8) that progress on MW(moderately weathered) to HW(highly weathered) grade of rocks.

• Journal of the Korean Chemical Society
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• v.47 no.4
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• pp.363-369
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• 2003

Selenized yeast (Se yeast) containing $0.1{\%}$(w/w) of selenium was obtained when the yeast was incubated at a selenium concentration of 1$1.14{\times}10_-3 M$ in rich medium. After washing several times, the inorganic selenium on the cell wall was confirmed with MBRT. There was no indication of inorganic selenium on the cell wall when the blue color in MBRT was stayed for 15 minutes. The selenized yeast was sonicated, then the selenium contained protein was obtained after salting out by ammonium sulfate at the concentration $80{\%}$ saturation. The seven protein bands were seperated by SDS-PAGE and the selenium concentration in protein was measured by ICP-AES. Analytical data showed that the large expressed protein band contained a relatively large amount of selenium. The proteins of the 47kDa was contained the concentrations of 69.5 ${\mu}$ Se/g of most many content. The protein (47 kDa) was seperated from PVDF membrane by tank-electroblotting. The isolated protein was hydrolyzed under acid condition and reacted with PITC. The derivatives of amino acids were analyzed by HPLC and compared with the data obtained from regular yeast. The resulting selenium-yeast was analyzed with the selenomethionine concentration of $2{\%}$ comparaed with general amino acids. The goal of this study is to analyze the selenium concentration in protein bands and measure the degree of biotransformation of selenomethionine in a specific protein.

• Microbiology and Biotechnology Letters
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• v.8 no.1
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• pp.33-39
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• 1980

In order to invertigate penicillin acylase produced by a strain of Genus Escherichia, 47 strains of Genus Escherichia were isolated and examined to the extend of the inactivation of penicillins and the ability of 6-amino penicillanic acid (6-APA) production. Among them, 12 strains were found to produce penicillin acylase and to form 6-APA. The strain No. 11 of the isolates was selected to be the most excellent one producing the acylase. Optimum culture conditions for the production of the acylase of the strain were found as follows : pH at 7.6~8.0, time on 18 hrs, temperature at 34 to 38$^{\circ}C$. And effective levels of the medium were found to be contained 0.3% phenylacetic acid, 1.0％ yeast extract, 1.0％ peptone and 0.3％ L-glutamate. And, the production of the acylase by the isolate was strongly inhibited by 1% glycerol and the growth was remarkably retarded by the addition of 1.0% n-butylacetate. The acylase was extracted from the isolate and the crude enzyme of the acylase was prepared and the characteristies of the enzyme were primary examined in optimum pH, temperature, stabilities and reaction time.