• Title/Summary/Keyword: 초격자 다층박막

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Determination of the Effective Elastic Constants of a Superlattice Film by Measuring SAW Velocities (표면탄성파 전파속도 측정에 의한 초격자 다층박막의 유효탄성계수 결정)

  • 김진오
    • The Journal of the Acoustical Society of Korea
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    • v.19 no.5
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    • pp.41-45
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    • 2000
  • The effective elastic constants of a single-crystal superlattice film have been determined by two methods based on the velocities of surface acoustic waves (SAW). One method uses formulas to calculate the effective elastic constants of a superlattice from the known elastic constants of the constituent layers. The calculated effective elastic constants are tested by comparing the corresponding SAW velocities calculated for thin-film/substrate systems with the corresponding SAW velocities measured by line-focus acoustic microscopy (LFAM). The other method determines the effective elastic constants of the superlattices by inverting the SAW velocity dispersion data measured by LFAM. The results of both methods applied to a TiN/NbN superlattice film are in good agreement.

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Effects of Sputtering Ar Gas Pressure on Magnetic and Magneto-Optical Properties in Compositonally Modulated Co/Pt Superlattice Thin Films (조성변조 Co/Pt 초격자 박막의 Ar 가스 압력변화에 따른 자기 및 자기광학적 특성)

  • 유천열;김진홍;신성철
    • Journal of the Korean Magnetics Society
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    • v.4 no.1
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    • pp.32-38
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    • 1994
  • We have investigated the effects of sputtering Ar gas pressure on magnetic and magneto-optical properties in compositionally modulated Co/Pt superlattice thin films. The samples were prepared by dc magnetron sputtering. Sputtrering Ar gas pressure was varied from 2 to 30 mTorr. The microstructure of the samples was examined by scanning electron microscope and the x-ray diffractometry. The magnetization, the Kerr rotation angle, and the reflectivity of the samples were measured. The columnar structure was developed, and the coercivity was drasti- cally increased, when the sputtering Ar gas pressure was higher than 20 mTorr. We explained that the variation of the magnetization, the Kerr rotation angle, and the reflectivity was related with the microstructure influenced by the variation of the Ar gas pressure.

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Magnetic and Magneto-Optical Properties of FeCo/Pd Multilayers (FeCo/Pd 초격자 다층박막의 자기 및 자기광학적 특성)

  • 김진홍;신성철
    • Journal of the Korean Magnetics Society
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    • v.3 no.1
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    • pp.56-60
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    • 1993
  • We have investigated the dependence of the magnetization, anisotropy, coercivity, and Kerr rotation on the Fe concentration in FeCo/Pd multilayer thin films, where the Fe concentration in the FeCo sublayer varied between 0 and 100% with maintaining the same sublayer thickness of $2.5\;{\AA}$ FeCo and $10.5\;{\AA}$A Pd. The maximum saturation magnetization was observed at the Fe concentration of about 48at.% in the FeCo sublayer. Perpendicular magnetic anisotropy and coercivity of the FeCo/Pd multilayer thin film decreased monotonically with increasing the Fe con-centration. The Kerr rotation angle also decreased with increasing the Fe concentration and the amount of vari-ation was remarkably changed with decreasing the light wavelength.

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Hardness of AlTiN/TiAlN multilayer coatings deposited by Cathodic Vacuum Arc Deposition (음극 진공 아크 증착법에 의한 AlTiN/TiAlN 다층막의 경도)

  • Gwon, O-Jin;Kim, Mi-Seon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.35-35
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    • 2018
  • 물리적 증착법에 의해 제조되는 초고경도 박막은 나노다층과 나노복합 구조가 대표적이며, 본 연구에서는 음극 아크 증착법으로 TiAlN과 AlTiiN 층 조합을 이용하여 나노다층구조를 포함하는 다층막 시편을 제작하였다. 초격자 두께 주기 12.1 ~ 15.6 nm에서 35 ~ 55 GPa의 경도값을 가졌으며, 절삭공구 코팅분야에 적용할 예정이다.

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Study on Formation of FePd Nano-dot Using Agglomeration of Fe/Au Bilayer (Fe/Au 이중층의 응집현상을 이용한 FePd 나노 점 형성에 관한 연구)

  • Koo, J.K.;Kim, J.M.;Ryua, D.H.;Choi, B.J.;Kim, D.W.;Lee, D.H.;Kim, U.I.;Mitani, S.;J.G., M. Kamiko;Ha, J.G.
    • Journal of the Korean Vacuum Society
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    • v.20 no.1
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    • pp.7-13
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    • 2011
  • [ $L1_0$ ]phase FePd nano-dot structures were successfully fabricated on self-organized Fe/Au bilayers. With atomic force microscopy, it is determined that surface morphologies of initially flat Fe/Au bilayer films were agglomerated and transformed their shape into nano-dots structures with increasing annealing temperature. With this bilayer as a template, FePd multilayers were deposited at various temperatures, i.e. $300^{\circ}C$, $350^{\circ}C$, $400^{\circ}C$, and $450^{\circ}C$. Surface morphologies of FePd superlattice had a near resemblance to self-organized bilayer. According to X-ray diffraction results, it is confirmed that $L1_0$ superlattice structures of FePd were obtained from samples which were annealed above $350^{\circ}C$. Results of X-ray photoelectron spectroscopy depth-profile analysis showed that chemical composition is identical to deposition sequence. As a result, without additional etching processes, fabrication of chemically ordered FePd superlattice nano-dots was achieved.