• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1995년도 추계학술대회 논문집
• /
• pp.1093-1097
• /
• 1995

A micro ion drag pump with planar electrodes on a glass substrate is fabricated and tested. the pump consisted of a 2- dimensional electrode pair array is driven by DC voltage using unipolar conduction. Ethy alcohol is pumped in both directions, and the flow rate and the pressure are measured, in channels of depth 100 .mu m or 200 .mu. m and width fixed at 3mm. It is found that the pump could be fabricated easily and at lower cost than the micro ion drag pumps previously investigated.