• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
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• pp.137-137
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• 2002

• ETRI Journal
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• v.14 no.1
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• pp.40-51
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• 1992

$0.25{\mu} m$ 급 pMOSFET소자를 구현하기 위해, $P^+$ 폴리실리콘을 적용한 pMOS를 제작하였으며, $p^+$ 폴리실리콘 게이트 소자에서 심각하게 문제가 되고 있는 붕소이온 침투현상을 조사하고 붕소이온 침투가 일어나지 않는 최적열처리온도를 조사하였다. 소자제조 공정중 게이트 공정만 전자선 (EBML300)을 이용하여 직접묘사하고 그 이외의 공정은 stepper(gline) 을 사용하는 Mix & Match 방법을 사용하였다. 또한 붕소이온 침투현상을 억제하기 위한 한가지 예로서, 실리콘산화막과 실리콘질화막을 적층한 ONO(Oxide/Nitride/Oxide) 구조를 게이트 유전체로 적용한 소자를 제작하여 그 가능성을 조사하였다. 그 결과 $850^{\circ}C$의 온도와 $N_2$ 분위기에서 30분동안 열처리 하였을 경우, 붕소이온의 침투현상이 일어나지 않음을 SIMS(Secondary Ion Mass Spectrometer) 분석 및 C-V(Capacitance-Voltage) 측정으로 확인할 수 있었으며 그 이상의 온도에서는 붕소이온이 침투되어 flat band전압(Vfb)을 변화시킴을 알았다. 6nm의 얇은 게이트 산화막 및 $0.1{\mu} m$ 이하의 LDD(Lightly Doped Drain) $p^-$의 얇은 접합을 형성함으로써 소자의 채널길이가 $0.2 {\mu} m$까지 짧은 채널효과가 거의 없는 소자제작이 가능하였으며, 전류구동능력은 $0.26\muA$/$\mu$m(L=0.2$\mu$m, V$_DS$=2.5V)이었고, subthreshold 기울기는 89-85mV/dec.를 얻었다. 붕소이온의 침투현상을 억제하기 위한 한가지 방법으로 ONO 유전체를 소자에 적용한 결과, $900^{\circ}C$에서 30분의 열처리조건에서도 붕소이온 침투현상이 일어나지 않음으로 미루어 , $SiO_2$ 게이트 유전체보다 ONO 게이트 유전체가 boron 침투에 대해서 좋은 장벽 역활을 함을 알았다. ONO 게이트 유전체를 적용한 소자의 경우, subthreshold특성은 84mV/dec로서 좋은 turn on,off 특성을 얻었으나, ONO 게이트 유전체는 막자체의 누설전류와 실리콘과 유전체 계면의 고정전하량인 Qss의 양이 공정조건에 따라 변화가 심해서 문턱전압 조절이 어려워 소자적용시 문제가 된다. 최근 바닥 산화막(bottom oxide) 두께가 최적화된 ONO 게이트 유전체에 대하 연구가 활발히 진행됨을 미루어, 바닥 산화막 최적화가 된다면 더 좋은 결과가 예상된다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.3
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• pp.430-438
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• 1997

Deburring and edge finishing technology as the final process of machining operation is required for manufacturing of advanced precise conponents. But, deburring is considered as a difficult problem on going to the high efficient production and automation in the FMS. Removal of burr couldn't have a standard of its definition because of its various shapes, dimensions and properties and mostly depends on manual treatment. Especially, deburring for cross hole inside is very difficult owing to its shape passing through out perpendicular to a main hole. The electrochemical method is suggested as its solution in practical aspect. Therefore, electrochemical deburring technology needs to be developed for the high efficiency and automation of internal deburring in the cross hole. In this study, the new process in the eliminating burr inside cross hole, electrochemical deburring by the wheel electroplated with Cubic-Boron-Nitrade abrasives, is suggested. Its deburring mechanism is described and machining performances is investigated. Also, CBN electroplated wheel is designed and manufactured and then characteristics of electrochemical deburring are investigated through experiments. Overall electrochemical deburring performance against burr inside cross hole is examined in the various power sources such as peak current and direct current.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.19-23
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• 1996

Deburring and edge finishing technology as the last process of machining operation is required for manufacturing of advanced procesion components, duburring has treated as a difficult problem on going tothe highefficency, automation in the FMS. Removal of butt with various shapes, dimensions and properties coultn't has a standard and has depended on manual treatment. Especially, deburring for cross hole inside owing to passing through out perpendicular to a main hole is more difficult, the electrolytic method is proper as its solution at practical aspects. Therefore, for the high effciency and automation of intermal deburring in the cross hole, development of electrolytic debutting technology is needed. So, the new process in the burr treatment is supposed. In this study, in the eliminating burr inside cross hole, the principle and machining performances of electrochemical deburring by Cubic-Boron-Nitrade abrasive electroplate wheel are investigated, Design and manufacture of CBN electroplated wheel and analysis of characteristics with electrolytic debutting are achieved. Also deburring efficiency and electrolytic performance for cross hole were examined according to electrolytic current and electrolytic deburring condition corresponding to acquired edge quality was found out.

• Journal of the Korean Ceramic Society
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• v.35 no.1
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• pp.48-54
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• 1998

The effect of coating thickness on the contact fracture was studied, in Si3N4 coated Si3N4-BN system When the elastic/plastic mismatch is relatively large betwen two layers in bilayer certain critical coating thickness was required to prevent cone crack initiation and this critical thickness was decreased by de-creasing the elastic/plastic mismatch,. In addition the required critical thickness should be increased when higher loads apply. In conclusion an appropriate coating thickness should be designed by elastic/plastic mismatch between two layers and environment (applied load) to prevent the coating fracture

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.388.2-388.2
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• 2014

최근 그래핀 연구와 더불어 2차원 구조의 나노소재에 대한 관심이 급증하면서 육각형의 질화붕소(hexagonal boron nitride; h-BN) 박막(nanosheet) [1]이나 붕소 탄화질화물(boron caronitride; BCN) 박막 [2,3]와 같은 2차원 구조체에 대한 연구가 활발히 진행되고 있다. 그 중 BCN은 반금속(semimetal)인 흑연(graphite)과 절연체인 h-BN이 결합된 박막으로 원소의 구성 비율에 따라 전기적 특성을 제어할 수 있다는 장점이 있다. 따라서 다양한 나노소자로의 응용을 위한 연구가 활발히 진행되고 있다. 본 연구에서는 폴리스틸렌(polystyrene, PS)과 보레인 암모니아(borane ammonia)를 고체 소스로 이용하여 열화학기상증착법을 이용하여 BCN 박막를 SiO2 기판 위에 직접 합성하였다. SEM과 AFM 관측을 통해 합성된 BCN 박막을 확인하였으며, RMS roughness가 0.5~2.6 nm로 매우 낮은 것을 확인하였다. 합성과정에서 PS의 양을 조절하여 BCN 박막의 탄소의 밀도를 성공적으로 제어하였으며, 이에 따라 전기적인 특성이 제어되는 양상을 확인하였다. 또한 합성온도 변화에 따른 BCN 박막의 전기적인 특성이 제어되는 양상을 확인하였다. 추가적으로 같은 방법을 이용하여 BCN 박막을 Ni 위에서 합성하여 SiO2 기판위에 전사 하였다. 합성된 BCN 박막의 구조적 특징과 화학적 조성 및 결합 상태를 투과전자현미경(transmission electron microscopy), X-선 광전자 분광법(X-ray photoelectron spectroscopy)을 통해 조사하였다.

• Tribology and Lubricants
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• v.37 no.4
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• pp.125-128
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• 2021

A means of enhancing the performance of triboelectric nanogenerators (TENGs) is increasing the differences in work functions between contacting materials. Hexagonal boron nitride (h-BN) exhibits excellent mechanical properties and high chemical stability as well as a high work function. As a result, engineers in the field of energy harvesting have envisioned using h-BN in the electrification layer in TENGs. For the industrial application of h-BN in TENGs, large-scale production is necessary, and h-BN is generally exfoliated and dispersed in various solvents. In this study, we evaluate the performance of a TENG with h-BN nanoflakes in the polyimide (PI) layer. To synthesize a PI composite containing h-BN nanoflakes, h-BN powders are exfoliated and dispersed in poly(amic acid) (PAA), which is the precursor of PI. Then, h-BN dispersion is spin-coated onto the PI film and cured for 2 h under 300℃. This composite material can then be used for the electrification layer in TENGs. Below the electrification layer, an aluminum foil is placed and used as an electrode. When the contact and separation processes with polyethylene terephthalate are repeated, the fabricated TENG shows a maximum power density of 190.8 W/m². This study shows that h-BN is a promising material for enhancing the performance of the electrification layer in TENGs.

• Composites Research
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• v.34 no.1
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• pp.63-69
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• 2021

In order to develop an integrated heat dissipating material and gas barrier film for electronics, new polymer was designed and synthesized for preparing composites containing hexagonal boron nitride (hBN) filler. Depending on the size and content of the hBN filler, both thermal conductivity and oxygen transmission rate can be adjusted. The composite achieved a high thermal conductivity of 28.0 W·m-1·K-1 at most and the oxygen transmission rate was decreased by 62% compared to that of the filler free matrix. Effective filler aspect ratios could be estimated by comparing thermal conductivity and oxygen transmission rate with values predicted by theoretical models. Discrepancy on the aspect ratios extracted from thermal conductivity and oxygen transmission rate comparisons was also discussed.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.192-192
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• 2013

하이브리드 표면처리는 다른 표면처리법을 동시 또는 연속적으로 행하여 단일표면처리에 비해 더욱 우수한 특성을 부여시키기 위한 표면처리법이다. 본 연구는 붕소와 질소 원소를 이용한 하이브리드 표면처리를 오스테나이트계 스테인리스강인 STS 316L 소재에 적용하여 변화된 특성을 평가하였다. 본 실험에 사용된 하이브리드 표면처리법으로는 붕소분말을 이용한 보로나이징처리와 활성스크린을 이용한 이온질화처리법을 적용하였다. 하이브리드 표면처리된 STS 316L시편은 FE-SEM을 이용하여 표면형상 및 단면조직을 관찰하였으며 GDS와 XRD를 이용하여 깊이에 따른 원소 및 상분석을 실시하였다. 또한 마이크로비커스 경도계와 마모시험기를 이용하여 경도와 마모특성을 측정하였고, 염수분무시험을 통하여 해수환경에서 부식거동을 평가하였다.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.48-56
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• 2004

Ceramics are very difficult-to-cut materials because of its high strength and hardness. Their machining mechanism is characterized by cracking and brittle fracture. In this paper, to give good machinability to the ceramics, h-BN powders are added to $Si_3N_4$, by volume of 20, 25 and 30%. And the machinability of the produced ceramics is tested using micro drilling system. Through required experimental works, it is shown that the micro drilling machinability is varied along with the volumetric percentage of h-BN powders. Also, it is verified that the obtained results can be used to develop new machinable ceramics of good material properties and machinability.