• Title/Summary/Keyword: 질량측정

Search Result 915, Processing Time 0.041 seconds

A Study on Etching of Si3N4 Thin Film and the Exhausted Gas Using C3F6 Gas for LCD Process (LCD 공정용 C3F6 가스를 이용한 Si3N4 박막 식각공정 및 배출가스에 관한 연구)

  • Jeon, S.C.;Kong, D.Y.;Pyo, D.S.;Choi, H.Y.;Cho, C.S.;Kim, B.H.;Lee, J.H.
    • Journal of the Korean Vacuum Society
    • /
    • v.21 no.4
    • /
    • pp.199-204
    • /
    • 2012
  • $SF_6$ gas is widely used for dry etching process of semiconductor and display fabrication process. But $SF_6$ gas is considered for typical greenhouse gas for global warming. So it is necessary to research relating to $SF_6$ alternatives reducing greenhouse effect in semiconductor and display. $C_3F_6$ gas is one of the promising candidates for it. We studied about etch characteristics by performing Reactive Ion Etching process of dry etching and reduced gas element exhausted on etching process using absorbent Zeolite 5A. $Si_3N_4$ thin film was deposited to 500 nm with Plasma Enhanced Chemical Vapor Deposition and we performed Reactive Ion Etching process after patterning through photolithography process. It was observed that the etch rate and the etched surface of $Si_3N_4$ thin film with Scanning Electron Microscope pictures. And we measured and compared the exhausted gas before and after the absorbent using Gas Chromatograph-Mass Spectrophotometry.

Preparation and Gas Barrier Properties of Chitosan/Clay Nanocomposite Film (Chitosan/Clay 나노복합재료 필름의 제조와 기체투과 특성)

  • Nam Sang Yong;Park Ji Soon;Rhim Ji Won;Park Byung Gil;Kong Sung-Ho
    • Membrane Journal
    • /
    • v.15 no.3
    • /
    • pp.247-254
    • /
    • 2005
  • Chitosan film has potential applications in agriculture, food, and pharmacy. However, films made only from chitosan lack gas barrier and have poor mechanical properties. For enhanced gas barrier and mechanical properties, chitosan/clay nanocomposites have been prepared with montmorillonite (MMT) which is a layered structure of clays and chitosan. The cationic biopolymer, chitosan is intercalated into $Na^+-montmorillonite$ through cationic exchange and hydrogen bonding process. Diluted acetic acid is used as solvent f3r dissolving and dispersing chitosan. Chitosan was intercalated or exfoliated in MMT and it was confirmed by X-ray diffraction method. D-spacing of the characteristic peak from MMT plate in chitosan/clay nanocomposites was moved and diminished. The thermal stability and the mechanical properties of the nanocomposites are measured by TGA and Universal Testing Machine. Gas permeability through the chitosan/clay nanocomposites films decreased due to increased tortuosity made by intercalation of clay in chitosan.

Preparation and Characterization of Fluorenyl Polymer Electrolyte Membranes Containing PFCB Groups (PFCB Group을 포함한 Fluorene계 고분자 전해질막 제조 및 특성연구)

  • Kim Jeong-Hoon;Kim Dong-Jin;Chang Bong-Jun;Shin Chong-Kyu;Lee Soo-Bok;Joo Hyeok-Jong
    • Membrane Journal
    • /
    • v.16 no.1
    • /
    • pp.16-24
    • /
    • 2006
  • We report on the preparation and characterization of sulfonated polymer membranes containing perfluorocyclobutane (PFCB) units and fluorene units. The polymers were prepared through three synthetic steps, that is, the synthesis of a trifluorovinylether-terminated monomer, its thermal polymerization, and post-sulfonation using chlorosulfonic acid. A series of sulfonated polymers with different ion exchange capacity (IEC) were prepared by changing the content of chlorosulfonic acid during the post-sulfonation reaction. All the synthesized compounds were characterized by FT-IR, $^{1}H-NMR,\;^{19}F-NMR$, and Mass spectroscopy. As the content of chlorosulfonic acid increased, the SD, IEC, water uptake, and ion conductivity of the sulfonated polymer membranes increased. The sulfonated polymer 4 showed higher values of ion conductivity than the Nafion-$115^{\circledR}$ in a wide range of temperatures ($25{\sim}80^{\circ}C$).

Immobilization of Cyclodextrin Glucanotransferase for Production of 2-O-\alpha-D-Glucopyranosyl L-Ascorbic Acid. (2-O-\alpha-D-Glucopyranosyl L-Ascorbic acid 생산을 위한 Cyclodextrin glucanotransferase의 고정화)

  • 성경혜;김성구;장경립;전홍기
    • Microbiology and Biotechnology Letters
    • /
    • v.31 no.4
    • /
    • pp.368-376
    • /
    • 2003
  • Cyclodextrin glucanotransferase (CGTase) from Paenibacillus sp. JB-13 was immobilized on various carriers by several immobilization methods such as ionic binding, covalent linkage and ultrafiltration to improve the process performance. The ultrafiltration and covalent linkage with CNBr-activated sepharose 4B were found as the best method for immobilization of CGTase. The ability of CGTase immobilization onto CNBr-activated sepharose 4B was as high as 18,000 units/g resin when the conditions was as follows: contact time 9 hrs at $37^{\circ}C$, pH 6.0, 100 nm and enzyme loading 24,000 units/g resin. The optimum conditions for production of 2-O-$\alpha$-D-Glucopyranosyl L-Ascorbic acid by immobilized CGTase turned out to be: pH 5.0, temperature $37^{\circ}C$, 20% substrate solution containing 8% (w/v) of soluble starch and 12% (w/v) of L-ascorbic acid sodium salt, 100 rpm, far 25 hrs and with 800 units of immobilized CGTase/ml substrate solution. Moreover the CGTase activity could be stably maintained for 8 times of repetitive reactions after removing products by ultrafiltration through YM 10 membrane.

Development of Gastric Retentive Bi-layered Tablet using Floating Drug Delivery System (부유 기술을 이용한 위체류 이중정의 개발)

  • Park, Jun-Bom
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.16 no.11
    • /
    • pp.7549-7554
    • /
    • 2015
  • The aim of this study was to develop gastric retentive bi-layered tablet using floating drug delivery technique. Metformin was selected as a model drug due to its narrow absorption window as well as very highly water solubility. These properties of metformin led to be difficult controlling the drug release. The bi-layered tablet was prepared with bi-layered compression machine to minimize interference between floating part and controlling part. The tablet weight, appearance and hardness were evaluated after compression process. The times of 'time to floating' and 'Floating duration' were tested for floating ability and drug release study was also carried out to understand drug release behavior. Furthermore, the drug release of bi-layered tablet was compared with marketed metformin tablet with sustained release pattern (Glucopharge XR$^{(R)}$).The floating ability and drug release behaviors were well controlled by changing amounts of $NaHCO_3$ (floating substance) and hydroxypropyl methylcellulose (HPMC; release control material). Bi-layered tablet had 13s of time to float, over 10h of floating duration and very similar drug release behavior compared with Glucopharge XR$^{(R)}$($f_2$: 89.6). Consequently, the bi-layered tablet with floating ability was successfully prepared and these properties can maximize the efficacy of metformin.

Antifungal and Insecticidal Activity of Essential Oil from Asarum sieboldii against Wood Contaminant Fungi and Lasioderma serricorne L. (세신 정유추출물의 목재부후균과 궐련벌레에 대한 항진균 및 살충활성)

  • Kang, Soyeong;Chung, Yong Jae;Lim, Jin A
    • Journal of Conservation Science
    • /
    • v.28 no.4
    • /
    • pp.395-401
    • /
    • 2012
  • To investigate bioactive materials for development of natural conservative agent on organic cultural heritage, essential oil from Asarum sieboldii was screened for antifungal and insecticidal activity against 4 wood rotting fungi and adult of Lasioderma serricorne. Antifungal activity of essential oil was tested by using paper disc soaking method. Antifungal activity expressed as $IC_{50}$ value showed $1.50{\sim}2.84{\mu}l/disc$ range and the most significant antifungal activity was observed in Lentinus lepideus. The insecticidal activity of essential oil was examined by topical application method against L. serricorne adults. 50% and 100% of essential oil gave 98.3% and 100% mortality for 24 hours, respectively. The major components of the essential oil were methyl eugenol (56.32%), eucarvone (11.53%), safrole (5.79%), ${\delta}$-3-carene (2.09%), which were identified by gas chromatography-mass spectrometry. From these results, essential oil from A. sieboldii could be useful for conservation of organic cultural heritage against biological deterioration by insect and wood rotting fungi.

Study About Filling-Material for Clay Layer Restoration of Seated Amitabha Triad at Muwisa Temple (Treasure No. 1312) (보물 제1312호 무위사 아미타여래삼존좌상 소조층 보수 충전제에 관한 연구)

  • Lee, Su Yea
    • Journal of Conservation Science
    • /
    • v.31 no.1
    • /
    • pp.1-11
    • /
    • 2015
  • Seated Amitabha Triad at Muwisa Temple (Treasure No. 1312) had been known as wooden Buddha statue, but a precise safety inspection revealed that the statue is terracotta Buddha statue made with clay. The clay layer of Amitabha Triad was conserved due to its severe damage. In this study, experiments were conducted to produce the most appropriate filler for the conservation treatment of the seated Amitabha Triad. Mixed clay samples with various ratios were produced and surface hardening state, crack, color change, and shrinkage of the samples during dry process were measured. Loess, fine sand powder, and cotton were used to produce the mixed clay for the filler with six different ratios and then 12 different concentration glues made with glutinous rice glue, Pachymeniopsis Elliptica glue, and animal glue were added as adhesives. Total 72 types of samples were prepared and comparative study was conducted. As a result, when the mixed clay contains 2.5% cotton compared to the weight per cent of loess and fine sand powder and also loess and fine sand in the mixed clay have a 15:1 ratio, the mixed clay had the lowest shrinkage. Animal glue is considered as an appropriate glue since it had small color change, low physical property change and shringkage. Therefore, mixed clay (loess:fine sand=15:1) mixed with 15ml animal glue is likely to be a suitable filler for conservation treatment of the seated amitabha triad at the Muwisa Temple.

Operation Characteristic Analysis of a Comb Actuator due to a Anisotropy Variation in RIE Etching (RIE 식각시 발생하는 비등방도 변화에 따른 머리빗형 액튜에이터의 동작 특성 분석)

  • Kim, Bong-Soo;Park, Ho-Jun;Pak, Jung-Ho
    • Journal of Sensor Science and Technology
    • /
    • v.8 no.5
    • /
    • pp.368-376
    • /
    • 1999
  • This paper predicts the changes in the spring constant, the resonant frequency, the electrostatic force, and the displacement of a resonant structure due to non-ideal anisotropic RIE etching process. First, a $6\;{\mu}m$ thick polysilicon was etched by RIE and the anisotropy of the etched structure was measured as a function of a RF power, a $Cl_2$ flow rate and a chamber pressure. In the experimental results, an anisotropy was decreased as the RF power, the $Cl_2$ flow rate, or the chamber pressure was increased. A comb actuator's operation characteristic was predicted depending on the anisotropy variations in RIE etching. Comb actuators with three different support beam structures were investigated : fixed-fixed, crab-leg, and double crab-leg. As the RIE etch anisotropy becomes non-ideal, i.e. the cross section becomes rather a trapezoidal than a rectangular shape, it decreases spring constant, resonant frequency and electrostatic force of a comb actuator but it increases the displacement of the mass. Among the three structures, the comb actuator with double crab-leg support beams is more influenced by anisotropy variation in RIE etch than other two.

  • PDF

Estimation of Indicator PCBs Exposure in Infants via Breast-Feeding Period (수유기간에 따른 모유 중 Indicator PCBs 분석을 통한 영유아의 인체노출평가)

  • We, Sung-Ug;Yoon, Cho-Hee;Min, Byung-Yun
    • Journal of Korean Society of Environmental Engineers
    • /
    • v.34 no.1
    • /
    • pp.7-15
    • /
    • 2012
  • The levels of indicator PCBs were determined in 132 human milk samples (Colostrum, 30th days after delivery, 60th days after delivery) collected in 2006 according to World Health Organization's (WHO) protocol. In addition, concentrations of indicator polychlorinated biphenyls (PCBs) were measured by the isotope dilution method with high resolution gas chromatograph/high resolution mass detector (HRGC/HRMS), which gave accurate and precise data for estimations of international trend and comparisons. Average daily intakes (ADIs) of all analytes were calculated. The median level of total indicator PCBs was 14 ng/g lipid, which is significantly lower than the level found in individuals from other countries. PCB congeners 138, 153 and 180 accounted for about 65% of the sum of the indicator congeners analyzed. The concentration of the most abundant PCB 153 is positively correlated with the concentration of the sum indicator PCBs (p<0.001). In this study, concentrations of total indicator PCBs significantly decreased with increasing number of children for a mother, indicating that parity and breast-feeding period an important role in the accumulation and elimination of these compounds in lactating women. The ADI for the median of total indicator PCBs for an infant was evaluated at $0.077{\mu}g/kg{\cdot}bw/day$ from birth to 6 months of age. The present study shows that concentrations of PCB 118 primipara breast milk have decreased 25~35 since 1998, and that this trend is continuing.

Analysis of toluene diisocyanate of adhesives in food contact materials by GC/MS (GC/MS에 의한 식품 포장재에 사용되는 접착제의 Toluene diisocyanate 분석)

  • Oh, Chang-Hwan;Kim, Ji-Young;Jo, Cheon-Ho;Park, Heera;Kwun, Ki-Sung;Kim, Meehye;Myung, Seung-Woon
    • Analytical Science and Technology
    • /
    • v.18 no.6
    • /
    • pp.511-519
    • /
    • 2005
  • A method for determination of toluene diisocyanates (TDI) in toluene diisocynate (TDI)-based polyurethane (PUR) packing material was investigated, and also the migration of TDI to food was studied. TDI was extracted using food simulants such as n-haptane and 4% aqueous acetic acid. The determinations were performed using gas chromatography/mass spectrometry (GC/MS). One of major components for polyurethane, toluene diisocyanates, were detected in ten samples among twenty six food contact materials with the concentration range of $0.51{\sim}60.88{\mu}g/ml$. However the highest extracted amount was just 0.7% of $60.88{\mu}g/ml$ if the contact surface of food packing for extracting liquid was limited to the outer layer without exposure of the cutting edge of food packing multi-layers. The result of this study and the analysis method for TDI diisocyanate will be very useful for further study about food contact material, and the monitoring result could be used for evaluating the safety of food contact material before it is to be used for food, preservation.