• 전기학회논문지
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• 제64권10호
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• pp.1440-1447
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• 2015

This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles.

• 한국정밀공학회지
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• 제17권11호
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• pp.81-87
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• 2000

A new resonator that is fabricated by single polysilicon layer process is presented. The resonator can move in two orthogonal direction on the plane parallel to the substrate. And the resonant frequencies of the two modes are intrinsically designed to be identical since the overall structure of the resonator is symmetric about the two directions of motion. Since the resonator ideally has two identical vibration mode, it can be applied to various micro-devices that requires multi DOF motion, especially to microgyroscopes. To investigate the feasibility of application of the resonator, dynamic model of the resonator including the nonlinear behavior of driving electrodes is derived and evaluated with the fabricated one, and the self-tuning characteristics are proved though experiments.

• 한국광학회지
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• 제14권6호
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• pp.588-593
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• 2003

지능형 구조물에서의 진동 등과 같이 주파수가 1 KHz에 이르는 물리량을 고감도로 측정할 수 있는 광섬유센서를 위한 신호 처리기를 구현하기 위하여 광섬유자이로스코프에 적용되었던 전디지털 위상추적신호처리(ADPT)를 교류량 측정용(다이나믹)으로 변경하여 설계하였다. 구현된 다이나믹 ADPT 신호처리기를 광섬유 Mach-Zehnder간섭계에 적용하여 성능을 평가한 결과 ADPT신호처리방식의 한계인 -50 ㏈에 가까운 전고조파 왜율을 가짐을 확인하였다.

• 전기학회논문지
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• 제60권9호
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• pp.1733-1740
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• 2011

In this research, a MEMS vibratory gyroscope with dual-mass system in the sensing mode has been proposed to increase the stability of the device using wide bandwidth. A wide flat region between the two resonance peaks of the dual-mass system removes the need for a frequency matching typically required for single mass vibratory gyroscopes. Bandwidth, mass ratio, spring constant, and frequency response of the dual-mass system have been analyzed with MATLAB and ANSYS simulation. Designed first and second peaks of sensing mode are 5,917 and 8,210Hz, respectively. Driving mode resonance frequency of 7,180Hz was located in the flat region between the two resonance peaks of the sensing mode. The device is fabricated with anodically bonded silicon-on-glass substrate. The chip size is 6mm x 6mm and the thickness of the silicon device layer is $50{\mu}m$. Despite the driving mode resonance frequency decrease of 2.8kHz and frequency shift of 176Hz from the sensing mode due to fabrication imperfections, measured driving frequency was located within the bandwidth of sensing part, which validates the utilized dual-mass concept. Measured bandwidth was 768Hz. Sensitivity calculated with measured displacement of driving and sensing parts was 22.4aF/deg/sec. Measured slope of the sensing point was 0.008dB/Hz.

• 한국정밀공학회지
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• 제22권11호
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• pp.165-172
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• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2090-2092
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• 2004

In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.

• 한국정보통신학회논문지
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• 제21권1호
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• pp.8-16
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• 2017

줄넘기와 같은 반복적인 운동들의 횟수를 측정하는 방법은 다양하다. 그 중 대표적으로 가속도 센서의 가속도 값 또는 자이로스코프 센서의 각속도 값을 이용하여 파형과 데이터의 특징을 추출하고 선택한 후 선택한 특징을 알고리즘에 적용하여 측정하는 방법이 있다. 하지만 고정되지 않고 유동적인 운동들은 다양한 변수가 존재한다. 이러한 경우의 수를 하나의 센서만으로 찾기 쉽지 않으며, 잡음과 진동에 취약한 가속도계와 드리프트 현상이 발생하는 각속도의 문제점으로 인하여 정확한 줄넘기 개수를 세는데 다소 정확도가 떨어지는 현상이 발생한다. 본 논문에서는 기존의 방식인 단일 센서만의 값으로 회전운동을 검출하는 방법의 문제점을 개선하기 위해 가속도와 각속도의 데이터값에 상보 필터를 적용하고, 가속도와 각속도 값이 상호보완 하여 서로의 문제점을 최소화하여 보다 정확한 개수를 측정할 수 있는 방법을 제안한다. 제안하는 방법은 센서 값의 특징만을 보고 판단하는 방법과 비교하여 정확하게 줄넘기 개수를 측정하는 것을 실험 결과를 통해 확인할 수 있다.