• Proceedings of the KSME Conference
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• 2001.11a
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• pp.556-561
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• 2001

In order to investigate the vibration characteristics of fluid-structure interaction problem, we modeled two rectangular identical plates coupled with bounded fluid. The fixed boundary condition along the plate edges and an ideal fluid were assumed. An experimental modal analysis in order to extract the modal parameters of the system was performed. Finite element analysis was performed using ANSYS to verify modal parameters and analytic results were compared with experimental results. As a result, comparison of experiment and FEM showed good agreement and the transverse vibration modes, in-phase and out of-phase, were observed alternately in the fluid-coupled system. The effect of distance between two rectangular plates on the fluid-coupled natural frequency was investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.668-671
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• 1997

In order to investigate the vibration characteristics of fluid-structure interaction problem, we modeled two identical rectangular plates coupled with bounded fluid. The fixed boundary condition along the plate edges and an ideal fluid were assumed. A commercial computer code, ANSYS was used to perform finite element analysis and FEM solutions were compared with the experimental results to modify the finite element model. As a result, comparison of FEM and experiment showed good agreement, and the transverse vibration modes, in-phase and out of-phase. were observed alternately in the tluid-coupled system. The effects of distance between two rectangular plates and width to length ratio on the fluid-coupled natural frequency were investigated. And it was found that the ormalized natural frequency of the fluid-coupled system monotonically increased with an increase in the number of modes.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.249-249
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• 2014

대면적 사각형 기판의 플라즈마 표면처리를 위한 유도 결합 플라즈마 발생 시스템의 수치 계산을 유체 모델을 이용하여 진행하였다. 연산 자원이 많이 요구되는 3차원 모델임을 감안하여 준중성 조건을 이용한 간략화 알고리즘을 사용하였다. Poisson 방정식을 풀지 않고 준중성 조건에 의한 양극성 전기장을 계산하여 이용한다. 쉬스는 모델을 이용하여 처리하였다. 1차적으로 사각 spiral 형태의 안테나를 가정하여 LCD 3세대 급의 기판을 대상으로 작성하였다. 다중 분할을 하지 않고 4개의 가지를 갖는 single spiral을 적용하였고 1.125 turn의 low impedance 구조에 대해서 계산하였다. Ar을 이용한 sputter etching 공정을 타겟으로 하여 기판에서의 Ar 이온 밀도 분포의 균일도가 어떤 설계 변수에 의해서 영향을 받는지를 중점적으로 계산하였다.

• Journal of the Korean Society of Safety
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• v.17 no.2
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• pp.8-15
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• 2002

In order to investigate the vibration characteristics of fluid-structure interaction problem, we modeled two identical rectangular plates coupled with fluid. A commercial computer code, ANSYS was used to perform finite element analysis and FEM solutions were compared with the experimental results to verify the finite element model. As a result, comparison of FEM and experiment showed good agreement, and the transverse vibration modes, in-phase and out-of-Phase, were observed alternately in the fluid-coupled system. The effect of fluid gap size on the fluid-coupled natural frequency were investigated. It was shown that the mode numbers increased, the normalized natural frequencies monotonically increased. And it was also found that an increase of the fluid gap reduced the coupled natural frequencies for the in-phase modes but increased the coupled natural frequencies for the out-of phase modes, and eventually converged to the results of an infinite fluid gap.