• Title/Summary/Keyword: 중착 층수

Search Result 1, Processing Time 0.018 seconds

The Surface Image Properties of BST Thin Film by Depositing Conditions (코팅 조건에 따른 BST 박막의 표면 이미지 특성)

  • Hong, Kyung-Jin;Ki, Hyun-Cheol;Ooh, Soo-Hong;Cho, Jae-Cheol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2002.05b
    • /
    • pp.107-110
    • /
    • 2002
  • The optical memory devices of BST thin films to composite $(Ba_{0.7}\;Sr_{0.3})TiO_{3}$ using sol-gel method were fabricated by changing of the depositing layer number on $Pt/Ti/SiO_{2}/Si$ substrate. The structural properties of optical memory devices to be ferroelectric was investigated by fractal analysis and 3-dimension image processing. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was $2500[\AA]$, $3500[\AA]$ and $3800[\AA]$. BST thin films exhibited the most pronounced grain growth. The surface morphology image was roughness with coating numbers. The thin films increasing with coating numbers shows a more textured and complex configuration.

  • PDF