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Oxygen flooding을 이용한 shallow junction SIMS 분석

  • 이영진;정칠성;박주철;최홍민
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.171-171
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    • 2000
  • 차세대 반도체 제조에서 Design rule 이 점점 더 shrink 됨에 따라 shallow junction 분석의 중요성이 강조되고 있다. 이러한 shallow junction에 대한 분석방법중의 하나인 SIMS 분석에 있어서 depth resolution을 향상시키는 것이 중요하며, 일차이온의 에너지를 낮추어 줌으로써 이러한 효과를 달성할 수 있다. 그러나 최근의 연구에 따르면 O2+를 이용한 low energy SIMS 분석 시에 non-zero incidence angle로 분석할 경우 surface roughness가 발생한다는 사실이 보고되었으며, surface roughness를 줄이고 분석 초기의 transient region을 줄이기 위한 방법으로 oxygen flooding을 사용하는 경우 특정 각도에서 surface roughness가 여전히 존재할 뿐 아니라 분석 초기영역에서의 sputter rate이 변화하는 문제가 있음이 보고된바 있다. 본 연구에서는 2keV O2+ 일차이온을 이용하여 oxygen flooding 하에서 기존 조건인 60도 incidence로 분석하는 방법의 문제점을 파악하고 incidence angle을 45도로 바꾸어 분석하는 방법을 검토하였다. 그 결과 기존의 분석조건에서는 분석도중 표면부근에서 sputter rate이 변화하고 surface roughness가 증가하는 것을 확인하였고, 그로 인하여 oxygen flooding을 하지 않은 경우와 많은 차이가 발생하는 것을 발견하였다. Incidence angle을 45도로 바꾼 결과 이러한 문제가 해결되는 것을 확인하였으며, 특히 GaAs $\delta$layer 분석을 통하여 이 분석조건이 기존의 분석조건에 비하여 획기적으로 향상되는 것을 확인 할 수 있었다. 또한 여러 가지 shallow junction 분석을 통하여 이 분석방법이 상당히 신뢰성이 있음을 알 수 있었다. 그러나 여전히 oxygen flooding을 하지 않은 경우에 비하여 다소간의 차이가 있는 것이 발견되었는데, 이는 주로 표면에 잔존하는 산화막에 의한 효과와 oxygen flooding에서 보다 더 depth resolution이 좋음으로 인하여 발생하는 것으로 추정되었으며 그 밖에 다른 가능성도 제기되었다. 따라서 이 방법은 표면 산화막이 거의 없는 시료에 대하여 적용한다면 oxygen flooding을 하지 않은 경웨 비하여 transient region이 거의 없고 junction depth를 보다 신뢰성 있게 측정할 수 잇는 장점이 있는 것으로 판단되었다. As, P의 저 에너지이온 주입시료에 대해 이 분석방법을 적용할 경우 C+s 분석법에 비하여 depth resolution을 비교적 쉽게 향상시킬 수 있었고, oxygen follding을 쓰지 않은 경우에 비해서는 검출한도를 약 100배 정도 향상시킬 수 있었다. 그러나 2.5keV Cs+ 분석법에 비하면 아직 depth resolution이 불충분하여 실제로 shallow As 분석에 적용하기에는 다소 문제점이 있었다.

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Endurance Life of Taper Roller Bearing for Wheel Loader Axles (휠 로더 차축 테이퍼 롤러 베어링의 내구수명)

  • Yoo, Dae Won;Lee, Jai Hak
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.11
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    • pp.1323-1330
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    • 2013
  • A wheel loader is a type of construction machinery that is capable of performing a variety of tasks, and demands on its functional diversity and structural reliability are growing. A wheel bearing is one of the core components that determine the life of the loader; taper roller bearings are commonly used for this purpose. The lifetime of a bearing is typically calculated based only on its load and revolution speed. The initial preload of a taper roller bearing is a critical factor that directly affects its endurance life. In this study, the relations between the endurance life and preload characteristics including the amount of preload according to the weight, rotational speed, and thermal modification applied to tapered roller bearings are presented. When the temperature is $100^{\circ}C$, an excessive preload condition is expected compared with that at room temperature, and the durable life decreases by 20.3 %.

Operative Treatment for Cardiac Tamponade with Ventricular Rupture of Post Myocardial Infarction without Cardiopulmonary Bypass - A case report - (급성심근경색 후 발생한 양심실파열로 인한 심장압전에서 체외순환의 사용없이 시행한 수술적 치료 - 1예 보고 -)

  • Choi, Chang-Seock;Kim, Han-Yong;Park, Jae-Hong
    • Journal of Chest Surgery
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    • v.41 no.1
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    • pp.95-97
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    • 2008
  • Ischemic ventricular rupture is one of the most fatal complications following myocardial infarction, and this requires prompt diagnosis and operation. A 75-year-old female was admitted to the ER in a semicomatous mentality with cyanotic extremities. Cardiac echography was carried out in the ER, and a $1.5{\sim}2\;cm$ thickness of effusion in the pericardium was seen. Because the patient's heart had declined to 35 times per min, an emergency operation was started while giving cardiac massage. After observing a 1 cm rupture on the right ventricular wall and a necrotic hemorrhagic scar with a rupture on the left ventricular apical wall, repair of the ruptured areas with a large Satinsky clamp was carried out to control bleeding without cardiopulmonary bypass. On the 28th day after surgery, she was discharged home with a minimal degree of dyspnea.

화학적 식각법을 이용한 사파이어 기판의 결함 구조 연구

  • Lee, Yu-Min;Kim, Yeong-Heon;Ryu, Hyeon;Kim, Chang-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.327-327
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    • 2012
  • 사파이어는 우수한 광학적, 물리적, 화학적 특성을 가지고 있는 물질 중의 하나이며, 청색 발광특성을 나타내는 GaN와 격자상수, 열팽창 계수가 가장 유사할 뿐만 아니라 가격도 상대적으로 저렴하기 때문에 GaN 성장을 위한 기판으로 사용될 수 있다. 실제로 사파이어는 프로젝터와 전자파 장치, 군사용 장비 등 다양한 분야에 응용되고 있으며, 발광 다이오드(LED)를 위한 기판으로 활용됨으로써 그 수요가 급격히 증가하고 있다. 그러나 사파이어 결정의 성장 중에 생길 수 있는 전위(dislocation)와 적층결함(stacking fault) 등의 결정 결함들은 결정 내에 존재하여 역학적, 전기적 성질에 큰 영향을 미칠 수 있다. 특히 사파이어가 청색 발광소자의 기판으로 사용되는 경우, 사파이어 기판 내부의 결정 결함은 증착되는 박막 특성에 영향을 미치게 된다. 따라서 사파이어의 보다 나은 응용을 위해서는 결정 결함에 대한 평가기술과 결함의 형성 메커니즘 등에 대한 이해가 필요하다. 특히, 결함의 정량적 평가 기술의 개발은 사파이어의 상용화에 중요한 핵심요소 중 하나이다. 결정을 산이나 염기 등을 이용하여 화학적 식각을 하게 되면 분자나 원자 간의 결합이 약한 부분이나 높은 에너지 상태에 있는 부분부터 반응을 하게 되는데, 이러한 반응을 통해 결정의 표면에 형성되는 것을 에치 피트(etch pit)라고 한다. 일반적으로 결정 내에 존재하는 전위는 높은 에너지 상태이므로, 이러한 에치 피트는 전위와 관련되어 있다. 따라서 사파이어 결정과 같은 결정질 물질은 표면의 식각을 통하여 관찰되는 에치 피트 등의 형상이나 반응성 등을 평가하여 결정 특성을 연구할 수 있다. 본 연구는 화학적 식각법으로 사파이어 결정의 특성을 평가하기 위하여 진행하였다. 사파이어 결정의 식각을 위하여 다양한 산-염기 용액들이 사용되었다. 식각 용액의 종류에 따른 사파이어 결정의 식각거동을 연구하고, 표면에 나타나는 형상을 연구하여 사파이어 결정의 구조적 특성을 파악하였다. 특히, 에치 피트 형성거동의 시간 및 온도 의존성에 관한 연구를 진행하였다.

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Characteristics of Yeast Flora and Gas Generation during Fermentation of Doenjang (된장의 발효숙성에 관여하는 효모의 분포와 가스발생 특성)

  • Oh, Nam-Soon;Lee, Nam-Suk
    • Applied Biological Chemistry
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    • v.39 no.4
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    • pp.255-259
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    • 1996
  • In order to improve the quality of commercially manufactured Doenjang, yeast florae, gas and alcohol formation during fermentation of Doenjang were periodically examined. Candida rugosa, Candida zeylanoides, Pichia farinosa Saccharomyces cerevisiae and Zygosaccharomyces rouxii were isolated and identified from Doenjang at various fermentation stage. S. cerevisiae and Z. rouxii showed distintive gas and alcohol formation activities and the distribution ratio of Z. rouxii was 26% at 14 days and 76% as prevailed yeast strain after 30 days fermentation, respectively. Ethanol content of Doenjang was gradually increased into 2.19% at final stage of fermentation. The amount of gas generated during fermentation was 9.75 ml/g after 14 days, 4.5 ml/g after 30 days and decreased into negligible amount after 45 days fermentation. These inhibitory effects on gas generation by fermentation period would be ascribed to the ethanol Produced for fermentation. This results suggest that gas generation in commercially manufactured Doenjang could be eliminated through the effective control of fermentation by yeast without application of any preservatives.

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Effect of Apical Ear Removal on Characters of Subapical Ear in Corn Inbreds (옥수수 백식계통의 상부이삭 제거가 하부이삭의 형질에 미치는 영향)

  • Lee, Myoung-Hoon
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.40 no.3
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    • pp.334-339
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    • 1995
  • Removal of apical ear after silking is a method to increase seed production in corn inbreds. Due to the phenomenon of apical dominance, the subapical ear would develope and produce seeds following the removal of the apical ear. This experiment was conducted to investigate the varietal difference in subapical ear development and seed production. Days to silking of subapical ears were delayed by about 4 days compared to normal apical ears. Cob length and filled ear length of subapical ears across seven inbreds tested were reduced by 21% and 36%, respectively. Those of inbred INV302 decreased less and subapical ear of inbred NC246 were barren, which incicated the varietal defferences. Number of kernel rows, kernels per row, and total kernels per ear also decreased. The mean reduction rates for those characters were 28%, 37%, and 47%, respectively. Weights of ears and kernels were reduced and showed different response among inbred lines. Coefficients of variations for cob and filled ear lengths, number of kernel rows and kernels were greater in subapical ears than in apical ears. Seed production of subapical ears was 40 ~ 80% of apical ears, depending on inbred lines when the apical ear is removed immediately after silking.

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Physiological and Behavioral Studies on the Stimulating Effect of Strobe Light -III - Heart Rate Change of Jack Mackerel by Strobe Light Intensity - (스트로보광의 자극효과에 관한 행동 생리학적 연구 -III - 스트로보광 강도에 의한 전갱이의 심박수변화 -)

  • 안영일;유원귀문
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.39 no.2
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    • pp.128-133
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    • 2003
  • Stimulus effects of strobe light on jack mackerel Trachurus japonicus were studied by measuring the heart rate change according to the different strobe light intensity of 5~75 lx$\cdot$s. Heart rate was observed for 60 min: 10 min before, 30 min during and 20 min after the strobe light stimulus. The measurement of heart rate was repeated three times at 2 hour intervals. The results showed that the heart rate increased during stimulus but temporarily decreased immediately after ending of stimulus. The heart rate changes in both during and after stimulus were decreased with reducing light intensities. The heart rate change according to the repeated experiment was not remarkably different under the lower light intensity

Rheological Study on Concentrated Kochujang (Korean Red Pepper Paste)-Water Suspensions (농후 고추장-물 현탁액의 리올로지 연구)

  • Kim, Kap-Soo;Lee, Beom-Soo;Lee, Sang-Gyou;Lee, Shin-Young
    • Korean Journal of Food Science and Technology
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    • v.21 no.6
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    • pp.826-831
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    • 1989
  • The rheological properties of concentrated Kochujang (Korean red pepper paste)-water suspensions were investigated. The rheological behavior of Kochujang-water suspension was illustrated by Herschel-Bulkley equation. All Kochujang-water suspensions with 12.5-100% of water addition showed pseudoplasticity in yield stress at the shear rate range of $0.25-179.20sec^{-1}$., but at the shear rate above $5.16 sec^{-1}$, more shear thinning behavior was observed with increasing shear rate. Also, pseudoplasticity of the suspension became weak by increasing water addition and decreasing temperature, The temperature dependence of consistency index on Kochujang-suspension was very low and the values of consistency index was lowered by increasing solid contents, but as heating, the values of that was increased. It was suggested that the main components responsible for rheological behavior of the suspensions at high temperature might be undigested starch or protein in Kochujang. Also, the changes of rheological behavior with vinegar addtion was only due to dilution effect.

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Improvement of DHP Association Rules Algorithm for Perfect Hashing (완전해싱을 위한 DHP 연관 규칙 탐사 알고리즘의 개선 방안)

  • 이형봉
    • Journal of KIISE:Databases
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    • v.31 no.2
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    • pp.91-98
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    • 2004
  • DHP mining association rules algorithm maintains previously independent direct hash table to reduce the sire of hash tree containing the frequency number of each candidate large itemset. It performs pruning by using the direct hash table when the hash tree is constructed. The mort large the size of direct hash table increases, the higher the effort of pruning becomes. Especially, the effect of pruning in phase 2 which generate 2-large itemsets is so high that it dominates the overall performance of DHP algorithm. So, following the speedy trends of producing VLM(Very Large Memory) systems, extreme increment of direct hash table size is being tried and one of those trials is perfect hash table in phase 2. In case of using perfect hash table in phase 2, we found that some rearrangement of DHP algorithm got about 20% performance improvement compared to simply |H$_2$| reconfigured DHP algorithm. In this paper, we examine the feasibility of perfect hash table in phase 2 and propose PHP algorithm, a rearranged DHP algorithm, which uses the characteristics of perfect hash table sufficiently, then make an analysis on the results in experimental environment.

High-speed W Address Lookup using Balanced Multi-way Trees (균형 다중 트리를 이용한 고속 IP 어드레스 검색 기법)

  • Kim, Won-Iung;Lee, Bo-Mi;Lim, Hye-Sook
    • Journal of KIISE:Information Networking
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    • v.32 no.3
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    • pp.427-432
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    • 2005
  • Packet arrival rates in internet routers have been dramatically increased due to the advance of link technologies, and hence wire-speed packet processing in Internet routers becomes more challenging. As IP address lookup is one of the most essential functions for packet processing, algorithm and architectures for efficient IP address lookup have been widely studied. In this paper, we Propose an efficient I address lookup architecture which shows yeW good Performance in search speed while requires a single small-size memory The proposed architecture is based on multi-way tree structure which performs comparisons of multiple prefixes by one memory access. Performance evaluation results show that the proposed architecture requires a 280kByte SRAM to store about 40000 prefix samples and an address lookup is achieved by 5.9 memory accesses in average.