A Novel Fabrication Method of the High-Aspect-Ratio Nano Structure (HAR-Nano Structure) Using a Nano X-Ray Shadow Mask (나노 X-선 쉐도우 마스크를 이용한 고폭비의 나노 구조물 제작)
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- Transactions of the Korean Society of Mechanical Engineers A
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- v.30 no.10 s.253
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- pp.1314-1319
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- 2006