• Title/Summary/Keyword: 중간열처리

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Phenomenal study on the dopant activation behavior in polysilicon thin films doped by non-mass separated ion mass doping technique (비질량 분리 이온 질량 주입법으로 도핑시킨 다결정 박막의 도판트 활성화 거동)

  • Yoon, Jin-Young;Choi, Duck-Kyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.1
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    • pp.143-150
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    • 1997
  • The electrical properties of polysilicon thin films implanted with $B_2H_6$ diluted in $H_2$ as dopant source using ion mass doping technique and the effect of radiation damage on the dopant activation behavior were investigated. Comparing the SIMS profiles of boron in polysilicon films with that obtained from computer simulation using TRIM92 the most probable ion species were $B_2H_x\;^+$(x=1, 2, 3‥‥) type molecular ions. As a result of the Implantation of energetic massive ions, a continuous amorphized layer was created in polysilicon films where the fraction of amorphized layer varied with doping time. This amorphization comes from the fact that mass separation of implanting species is not employed in this ion mass doping technique. In the dopant activation behavior, reverse annealing phenomenon appeared in the intermediate annealing temperature range for a severely damaged specimen. The experimental result showed that the off-state current of the p-channel polysilicon thin film transistor is dependent on the degree of radiation damage.

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Influence of Ag Thickness on the Properties of TiO2/Ag/TiO2 Trilayer Films (Ag 중간층 두께에 따른 TiO2/Ag/TiO2 박막의 광학적 특성 변화)

  • Kim, So-Young;Jeon, Jae-Hyun;Gong, Tae-Kyung;Kim, Sun-Kyung;Choi, Dong-Hyuk;Son, Dong-Il;Kim, Daeil
    • Journal of the Korean Society for Heat Treatment
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    • v.28 no.2
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    • pp.63-67
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    • 2015
  • $TiO_2/Ag/TiO_2$ trilayer films were deposited with radio frequency (RF) and direct current (DC) magnetron sputtering onto the glass substrate to consider the influence of Ag interlayer on the optical properties of the films. The thickness of $TiO_2$ films was kept at 24 nm, while the thickness of Ag interlayer was varied as 5, 10, 15, and 20 nm. As-deposited $TiO_2$ single layer films show the optical transmittance of 66.7% in the visible wave-length region and the optical reflectance of 16.5%, while the $TiO_2$ films with a 15 nm thick Ag interlayer show the enhanced optical transmittance of 80.2% and optical reflectance of 77.8%. The carrier concentration was also influenced by Ag interlayer. The highest carrier concentration of $1.01{\times}10^{23}cm^{-3}$ was observed for a 15 nm thick Ag interlayer in $TiO_2/Ag/TiO_2$ films. The observed result means that an optimized Ag interlayer in $TiO_2/Ag/TiO_2$ films enhanced the structural and optical properties of the films.

Effect of Alloying Elements on the Microstructure and Texture of the Secondary Ingots made by Al Used Beverage Cans (알루미늄 폐캔을 이용한 2차지금의 미세조직 및 집합조직에 미치는 합금원소의 영향)

  • 박차용;고흥석;강석봉
    • Resources Recycling
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    • v.9 no.2
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    • pp.46-52
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    • 2000
  • Aluminum can to can recycling was divided into two stpes. The first step was composed of the processes such as collection of used beverage cans (UBC), shredding, magnetic separation, De-laquiring, melting and casting. The second one was remelting and casting, heat treating, hot and cold rolling, annealing, and can making. In this study, the effect of alloying elements on the microstructure and texture of the secondary ingots made by Al UBC was investigated. In aluminum can to can recycling, the second phase particles appeared in the solidification stage must be controlled by heat treatment. The optimum heat treatment condition was $615^{\circ}C$ for 5hrs. the texture in hot rolled sheet was depressed with increasing Mn content, on the other hand, Si and Fe elements promoted the texture development. The textures of can-body sheet should be controlled in the hot rolling and annealing stage because can was formed from cold rolled sheet without heat treatment.

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Interaction of Co/Nb Bilayer with $SiO_2$ Substrate ($SiO_2$와 Co/Nb 이중층 구조의 상호반응)

  • Gwon, Yeong-Jae;Lee, Jong-Mu;Bae, Dae-Rok;Gang, Ho-Gyu
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.956-960
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    • 1998
  • The interfacial reaction between the CoINb bilayer and the $SiO_2$ substrate in the temperature range of $330^{\circ}C$-$800^{\circ}C$ in a vacuum has been investigated by X-ray photoelectron spectroscopy, glancing angle XRD, Auger Electron Spectroscopy and Atomic force microscopy. The Co and Nb were actively interdiffused at $600^{\circ}C$, and the layer inversion completed at $700^{\circ}C$. NbO was formed by interfacial reaction between the Nb interlayer and the $SiO_2$ substrate, while $Nb_20_5$ was formed on the surface by reaction of Nb with oxygen in the ambients. Free Si atoms obtained by the reaction between Nb and $SiO_2$ formed silicides like CoSi and $Nb_5Si_3$ by reacting with Co and Nb remnants. The sheet resistance of the Co/Nb bilayer increased substantially after annealing at $800^{\circ}C$. which is due to the agglomeration of the Co layer to reduce its surface energy.

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Preparation and Characterization of BaTiO3 Powders and Thin films (티탄산바륨 분말과 박막의 제조 및 특성 연구)

  • Jung, Miewon;Son, Hyunjin;Lee, Jiyun;Kim, Hyunjung
    • Analytical Science and Technology
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    • v.17 no.2
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    • pp.173-179
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    • 2004
  • The $BaTiO_3$ powders and thin films were prepared by an alkoxide modified sol-gel process (polymerization-complex route) using ethylene glycol. The stable starting (Ba-Ti)-mixed metal organic sol was made by addition of acetylacetone. The $BaTiO_3$ powders, which had a particle size of 40~77 nm, were crystallized from an amorphous to a tetragonal phase on annealing at 700 and $1100^{\circ}C$ for 1 h. From FT-IR, solid-state $^{13}C$ CP/MAS NMR spectroscopy and X-ray diffractometry, the trace of the Ba-Ti-oxycarbonate phase first appeared at $400^{\circ}C$. Hydrolyzed sol was spin coated on a quartz wafer at 3500 rpm for 60 s and pyrolyzed at $1100^{\circ}C$ for 1 h. After heat treatment, the coated layer became dense and smooth.

Protoplast Formation and Fusion between Anastomosis Groups of Rhizoctonia solani (Rhizoctonia solani 융합균(融合菌) 간(間)의 원형질체형성(原形質體形成) 및 융합(融合))

  • Chung, Hoo-Sup;Kim, Dal-Soo;Ahn, Hee-Suk
    • The Korean Journal of Mycology
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    • v.20 no.1
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    • pp.44-50
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    • 1992
  • The protoplast formation of Rhizoctonia solani in the fast growing anastomosis groups (AGs) 1 and 4, the intermediate AG-2 and AG-5, and the slow AG-3 yielded the most, moderate and the least in that order, respectively. Sclerotia formation varied with AGs. A high yield of protoplasts from AGs was obtained with a combined lytic enzyme system containing cellulase 'Onozuka' R-10, macerozyme R-10 and ${\beta}-glucuronidase$. When 3g (fresh weight) of 30 hr old mycelia was incubated for 3 hr at $32^{\circ}C$ with the enzyme mixture in 0.6 M mannitol, maximum protoplasts were obtained in the five AGs. A protoplast fusion between sclerotia forming AG-1 inactivated with heat and non-forming AG-5 was induced by polyethylene glycol and ${Ca}^{2+}$. Seven fusants obtained were based on characteristics of colony and sclerotium formation on culture plates. The fusants were confirmed by isozyme patterns of esterase and killing reaction between AG-1 and a fusant F1501.

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Synthesis of Potassium Octatitanate Whisker from Natural Rutile Ore using the Ion Exchange Reaction (금홍석으로부터 이온교환에 의한 Potassium Octatitanate Whisker의 합성)

  • Lee, Chul-Tae;Lee, Jin-Sik;Ko, Du-Wan;Kim, Hyun-Joong
    • Applied Chemistry for Engineering
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    • v.8 no.3
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    • pp.446-453
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    • 1997
  • The initial product was prepared by heating for 3 hrs at $1000^{\circ}C$ using a mixture of the rutile sand and industral $K_2CO_3$ in the molar ratio 2.0. And the intermediate product, fibrous potassium tetratitanate of layer structure, was obtained by the boiling water treatment of 10hrs for initial product using the calcination method. Also $KHTi_4O_9{\cdot}1.1H_2O$ was synthesized by ion exchange reaction through the acid treatment for 30 min at 0.005M HCl solution and then $K_2Ti_8O_{17}$ whisker of $length=10{\mu}m$, $diameter=0.2{\mu}m$ was synthesized by heat treatment at temperature range of $400{\sim}600^{\circ}C$.

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Study on OTFT-Backplane for Electrophoretic Display Panel (전기영동 디스플레이 패널용 OTFT-하판 제작 연구)

  • Lee, Myung-Won;Ryu, Gi-Sung;Song, Chung-Kun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.7
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    • pp.1-8
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    • 2008
  • We fabricated flexible electrophoretic display(EPD) driven by organic thin film transistors(OTFTs) on plastic substrate. We designed the W/L of OTFT to be 15, considering EPD's transient characteristics. The OTFTs employed bottom contact structure and used Al for gate electrode, the cross-linked polyvinylphenol for gate insulator, pentacene for active layer. The plastic substrate was coated by PVP barrier layer in order to remove the islands which were formed after pre-shrinkage process and caused the electrical short between bottom scan and top data metal lines. Pentacene active layer was confined within the gate electrodes so that the off current was controlled and reduced by gate electrodes. Especially, PVA/Acryl double layers were inserted between EPD panel and OTFT-backplane in order to protect OTFT-backplane from the damages created by lamination process of EPD panel on the backplane and also accommodate pixel electrodes through via holes. From the OTFT-backplane the mobility was $0.21cm^2/V.s$, Ion/Ioff current ratio $10^5$. The OTFT-EPD panel worked successfully and demonstrated to display some patterns.

Storage Trial of Tentatively Thermal-processed Orange Sac (오렌지 과립 1차가공품의 저장성)

  • Koo, Young-Jo;Lee, Dong-Sun;Lee, Seung-Choon;Lee, Hak-Tai;Shin, Dong-Hwa
    • Korean Journal of Food Science and Technology
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    • v.16 no.3
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    • pp.341-347
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    • 1984
  • In order to provide orange sac for off-season processing of sac-suspended orange juice, orange was processed into intermediate form of orange sac or segment, stored at $20^{\circ}C$ and after 5 months of storage the intermediate product was finally processed into sac-suspended orange juice. Adaptability of various process and packaging was assessed. Pasteurized orange sac and segment could be relatively stable in view of microbiological spoilage during 5 months of storage. Between pasteurization methods of hot fill process and each of in-pouch or in-can process, there is no difference in quality of preliminary processed product during storage and final sac-suspended orange juice. In packaging method, metal can gave the best result and the next was 3 ply (PE/AL/PET) pouch and the last 2 ply (PE/PET) pouch. Storage in segment form was superior to sac storage. Sensory evaluation revealed better scores in final product processed from stored orange sac or segment than in control (initially processed sac-suspended orange juice) except 2 ply packaged sac.

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Effects of Intermediate Heat Treatment on the Corrosion and Mechanical Properties of Zr Alloy Strip Incorporating Nb (니오븀이 첨가된 Zr 합금 스트립의 부식 및 기계적 특성에 대한 중간열처리 영향)

  • Lee, Myung Ho;Jung, Yang Il;Choi, Byoung Kwon;Park, Sang Yoon;Kim, Hyun Gil;Park, Jeong Yong;Jeong, Yong Hwan
    • Korean Journal of Metals and Materials
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    • v.47 no.8
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    • pp.482-487
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    • 2009
  • In order to investigate the effects of intermediate heat treatment between cold rolling passes on the hardness and corrosion properties of a Zr alloy incorporating Nb (Zr-1.49Nb-0.38Sn-0.20Fe-0.11Cr) strip, three different intermediate heat treatment processes ($580^{\circ}C{\times}4hrs$, $600^{\circ}C{\times}2hrs$ and $620^{\circ}{\times}1hrs$) were designed based on a recrystallization map and an accumulated annealing parameter. Test samples from the different processes were investigated by a hardness test, corrosion test, and microstructure analysis and appropriate heat-treatment conditions were thereupon proposed. The sample subjected to an intermediate heat treatment of $580^{\circ}C{\times}4hrs$ was harder than that undergoing $600^{\circ}C{\times}2hrs$ and $620^{\circ}C{\times}1hr$ while the corrosion resistance of the sample that received an intermediate heat treatment of $580^{\circ}C{\times}4hrs$ was superior to that of the other specimens. Considering the trade-off of hardness and corrosion resistance, an intermediate heat treatment process of $600^{\circ}C{\times}2hrs$ is proposed to improve the manufacturing process of the alloy strip.