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$(Pb_{1-x}La_x)(Zr_{0.5}Ti_{0.5})O_3$ 박막의 La 치환량에 따른 특성 (Characteristics of $(Pb_{1-x}La_x)(Zr_{0.5}Ti_{0.5})O_3$ thin films as a function of La content)

  • 정낙원;이성환;이동영;김동훈
    • Journal of Advanced Marine Engineering and Technology
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    • 제30권8호
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    • pp.894-900
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    • 2006
  • The electrical characteristics associated with crystal structure changes as a function of La content for $(Pb_{1-x}La_x)(Zr_{0.5}Ti_{0.5})O_3$ thin films were investigated for applications in memory capacitors. Tetragonality of PLZT films decreased with increasing La content. Thin films with La $\geq$ 20 mol% were found to be cubic. Films with La $\geq$ 12 mol% exhibited broader dielectric peaks compared to those of bulk ceramics and behaved as relaxer ferroelectrics. Tetragonal PLZT film with 12 mol% La had a dielectric constant maximum of 1330 at room temperature and a charge storage density of ${\sim}18{\mu}C/cm^2$ at 5 V. Decrease in coercive field and remnant polarization with increase in La content were resulting from less dipolar response caused by the decreased crystal anisotropy. The leakage current densities $<10^{-8}A/cm^2$ up to 5 V bias voltage were observed for the films with La $\geq$ 14 mol%.