• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.10
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• pp.800-809
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• 2008

Scanning Thermal Microscope (SThM) is the tool that can map out temperature or the thermal property distribution with the highest spatial resolution. Since the local temperature or the thermal property of samples is measured from the extremely small heat transferred through the nanoscale tip-sample contact, improving the sensitivity of SThM probe has always been the key issue. In this study, we develop a new design and fabrication process of SThM probe to improve the sensitivity. The fabrication process is optimized so that cantilevers and tips are made of thermally grown silicon dioxide, which has the lowest thermal conductivity among the materials used in MEMS. The new design allows much higher tip so that heat transfer through the air gap between the sample-probe is reduced further. The position of a reflector is located as far away as possible to minimize the thermal perturbation due to the laser. These full $SiO_2$ SThM probes have much higher sensitivity than that of previous ones.

• Journal of the KSME
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• v.46 no.7 s.308
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• pp.53-56
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• 2006

• Electrical & Electronic Materials
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• v.30 no.1
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• pp.22-29
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• 2017

• Ceramist
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• v.20 no.1
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• pp.32-38
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• 2017

• Electrical & Electronic Materials
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• v.24 no.10
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• pp.37-46
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• 2011

• Proceedings of the Korean Vacuum Society Conference
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• 2006.08a
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• pp.61-61
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• 2006

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.21.2-21.2
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• 2005

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.151.2-151.2
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• 2005

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.12
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• pp.957-962
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• 2014

We present a method to quantitatively measure the thermal conductivity of one-dimensional nanostructures by utilizing scanning thermal wave microscopy (STWM) at a nanoscale spatial resolution. In this paper, we explain the principle for measuring the thermal diffusivity of one-dimensional nanostructures using STWM and the theoretical analysis procedure for quantifying the thermal diffusivity. The SWTM measurement method obtains the thermal conductivity by measuring the thermal diffusivity, which has only a phase lag relative to the distance corresponding to the transferred thermal wave. It is not affected by the thermal contact resistances between the heat source and nanostructure and between the nanostructure and probe. Thus, the heat flux applied to the nanostructure is accurately obtained. The proposed method provides a very simple and quantitative measurement relative to conventional measurement techniques.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4095-4099
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• 2010

Nano-measurement systems such as scanning probe microscopes should be protected against external disturbances. For the design of a scanning probe microscope, the external vibrations need to be characterized and the vibrational properties of the structural frame itself should be modeled. Also, the influences of the external vibration on the apparatus need to be known for its utmost precision. In this paper, the combined vibrational-characteristics of the floor and the structural frame are analyzed and experimentally investigated.