• 제목/요약/키워드: 졸겔

검색결과 167건 처리시간 0.021초

Sol-Gel법에 의한 $TiO_{2}-V_{2}O_{5}$ 박막형 습도센서 ($TiO_{2}-V_{2}O_{5}$ Thin Film Type Humidity Sensor Fabricated by Sol-Gel Method)

  • 이덕출;유도현
    • 센서학회지
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    • 제4권3호
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    • pp.15-21
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    • 1995
  • 본 논문은 졸겔법에 의해 $TiO_{2}-V_{2}O_{5}$ 습도센서를 제조하고, 미세구조 및 결정구조를 분석하여 습도감지특성이 뛰어난 최적 제조조건을 찾았다. 그레인 크기는 $Ti^{4+}$ 사이트에 치환되는 $V^{5+}$비에 비례하여 증가하였다. X-선 회절분석 결과, $V_{2}O_{5}$비에 관계없이 $V^{5+}$피크는 확인할 수 없었다. 실험결과로부터 $V_{2}O_{5}$비가 1mol%, 열처리온도가 $700^{\circ}C$일때 가장 우수한 습도감지특성을 나타내었다. 시편의 정전용량은 주파수가 증가할수록 감소하였다.

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ULSI DRAM의 capacitor 절연막용 BST(Barium Strontium Titanate)박막의 제작과 특성에 관한 연구 (Preparation and properties of BST (Barium Strontium Titanate) thin films for the capacitor dielectrics of ULSI DRAM's)

  • 류정선;강성준;윤영섭
    • E2M - 전기 전자와 첨단 소재
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    • 제9권4호
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    • pp.336-343
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    • 1996
  • We have studied the preparation and the properties of $Ba_{1-x}$Sr$_{x}$TiO$_{3}$(BST) thin films by using the sol-gel method. Through the comparison of the effects of various solvents and additives in making solutions, we establish the production method of the stable solution which generates the high quality of BST film. We also set up the heat-treatment conditions for depositing the BST thin film through the TGA and XRD analyses. Through the comparison of the surface conditions of BST films deposited on Pt/Ta/SiO$_{2}$/Si and Pt/Ti/SiO$_{2}$/Si substrates, we find that Ta is more efficient diffusion barrier of Si than Ti so that Ta layer prevents the formation of hillocks. We fabricate the planar type capacitor and measure the dielectric properties of the BST thin film deposited on the Pt/Ta/SiO$_{2}$/Si substrate. Dielectric constant and dielectric loss tangent at 1V, 10kHz, and leakage current density at 3V of the BST thin film are 339, 0.052 and 13.3.mu.A/cm$^{2}$, respectively.ely.

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졸겔공정을 이용한 $Bi_{4-x}Sm_xTi_3O_{12}(0<\leqx\geq2)$ 박막제조 및 특성평가 (Preparation and Characterization of $Bi_{4-x}Sm_xTi_3O_{12}(0<\leqx\geq2)$ Thin Films Using Sol-Gel Processing)

  • 이창민;고태경
    • 한국세라믹학회지
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    • 제34권8호
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    • pp.897-907
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    • 1997
  • Thin films of Bi4-xSmxTi3O12(0$\leq$x$\leq$2) were prepared on Pt/Ti/SiO2/Si(100) at $700^{\circ}C$ using spin-coating with sols derived from Bi-Sm-Ti complex alkoxides. From X-ray diffraction analysis, it was observed that Sm-substituted phases resembled ferroelectric Bi4Ti3O12 in structure. Variations of their lattice parameters depending on the amount of Sm-substitution showed that an anomalous structural distortion might exist at x=1. The grain sizes of the thin films decreased from 0.115 ${\mu}{\textrm}{m}$ to 0.078${\mu}{\textrm}{m}$ with increasing the amount of Sm-substitution. The dielectric constants and the remanent polarizations of the thin films decreased with increasing the amount of the Sm-substitution, which were related to decrease of the stereo-active Bi3+ ion contributing to polarization. However, these values were exceptionally high at x=1, compared to those of the other substituted phases. Such an anomaly suggests that the phase of x=1 has 1:1 chemical ordering between Sm and Bi in structure. The thin films of all compositions except x=2 showed ferroelectricity. The thin film of x=2 was paraelectric, whose grains were too fine to exhibit ferroelectricity.

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저온 형성 가능한 "졸겔 ZnO / 은 나노선" 복합 투명전도막 (Low Temperature Processed Transparent Conductive Thin Films Based on Sol-Gel ZnO / Ag Nanowire)

  • 신원중;김보석;문찬수;조원기;백승재
    • Current Photovoltaic Research
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    • 제2권3호
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    • pp.110-114
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    • 2014
  • We propose a low temperature sol-gel ZnO/Ag nanowire composite thin film to fulfill low temperature and low cost requirements, which are essential criteria in future flexible electronic devices. In this proposed thin film, Ag nanowire plays the role of electrical conduction, and sol-gel ZnO provides a structural medium with a high visible transmittance. Low temperature restriction in the sol-gel fabrication process prevents sufficient oxidation of Zn acetate precursors, which were solved by a post-coating treatment with ultraviolet light irradiation. Composite thin film formation was performed by spin coating methods with a mixed precursor solution or in a sequential manner. We obtained an average visible transmittance larger than 85% and a sheet resistance smaller than $50{\Omega}/sq$. After optimization in a fabricated composite transparent conductive thin film with the thickness around 100 nm. Similar experimental demonstration in a flexible substrate (polyethyleneterephthalate) was successful, which implies a promising application opportunity of this technology.

보헤마이트 졸겔법에 의한 알루미나 세라믹스 저온소결 II.미세구조 및 기계적 특성 (Low Temperature Sintering of Alumina by Boehmite Sol-Gel Method II. Microstructure and mechanical Properties)

  • 이형민;이홍림
    • 한국세라믹학회지
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    • 제35권1호
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    • pp.66-78
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    • 1998
  • the microstructure and mechanical properties of seeded and ball-milled dry gels prepared by boehmite sol-gel method were discussed. The densification of seeded gels was improved with increasing seed content namely the number of seed The number of seed was 1.09, 3.35, 5.72${\times}$1012/cm3 boehmite when seeded with 1, 3, 5wt% respectively The ball milled gel contained about 0.5wt% seed and the number of seed was 4.72${\times}$1012/cm3 boehmite. The sintered density of 5wt% seeded gel was below 80% when sintered at 1300$^{\circ}C$ for 1h. On the other hand that of ball milled gel was very improved and reached to 97% In the case of 3wt% seeded gels the density over 97% was attained when sintered at 1500$^{\circ}C$for 1h. and the grain of the sintered body was several micrometers in size. However the sintered body of ball milled gel showed grain size of submicrometer when sintered at 1300$^{\circ}C$ for 1h. And this specimen showed highest harness value of 1900kg/mm2 The fracture toughness increased with increasing sintering temperature. The sintered body of ball milled gel showed the largest grain size and the highest fracture toughness without regard to sint-ering temperature.

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졸겔 연소법을 이용한 염료감응 태양전지용 나노 다공질 구조 $TiO_2$ 제작 (Synthesis of Nanoprous $TiO_2$ Materials for Dye-sensitized Solar Cells Application Using Sol-gel Combustion Method)

  • 한치환;성열문
    • 전기학회논문지
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    • 제58권2호
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    • pp.327-331
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    • 2009
  • Nano-porous $TiO_2$ powder was fabricated using Acetylene black, applied photo voltaic device based on the Dye-sensitized Solar Cells (DSCs) was investigated experimentally. $TiO_2$-powder was fabricated using Ti-isopropoxide and 2-propanol by sol-gel combustion method. For cases of variable Acetylene black, characteristic of porosity, size of particle and crystallite of obtained $TiO_2$ nano-powder was investigated. The photovoltaic efficiency of the prepared DSCs was measured using $TiO_2$ film which prepared on each different heat treatment temperature($400^{\circ}C{\sim}700^{\circ}C$) with paste of $TiO_2$ powder. The porosity and size of particle of $TiO_2$ powder made with Acetylene black 0.4g was influenced significantly effect to DSCs characteristic. Heat treatment at $500^{\circ}C$ makes the better photovoltaic efficiency which 5.02%($J_{sc}=11.79mA/cm^2$, $V_{oc}=0.73V$, ff=0.58). The sol-gel combustion method was useful to DSCs fabrication.

XPS에 의한 코디에리트의 특성 연구 (연구Ⅰ) (Characterization of Cordierite by XPS (Ⅰ))

  • 한병성
    • 대한전자공학회논문지
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    • 제26권3호
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    • pp.124-129
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    • 1989
  • 비유전율 및 팽창계수가 낮다는 장점을 갖고 있는 코디에리트는 IC페키지로서 매우 흥미있는 재료이다. 졸겔방법에 의해서 얻어진 코디에리트는 무정형 하얀 가루의 결정으로 이를 약 $900^{circ}C$ 로 열처리 하여, 구운 코디에리트 시료를 만들었다. XPS에 의해서, 코디에리트 시료의 미시적 특성을 연구하였는데, 시료 표면에서는 시료내부의 값들과 비교해 볼때, Mg의 많은 감소와 AI과 Si의 증가를 알 수 있었다. $100{\AA}$ 이하의 시료표면에는 ${pi}$ - 코딩리트 상을 갖는 결정이 존재하고, 시료내부는 적은량의 마그네슘 알루미나트($MgAl_2O_4$)가 존재하였다. 한편 코디에리트 표면에서 열처리에 다른 화학적 변화가 없는 것을 알 수 있었다.

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산성 Colloidal Silica와 TMOS/MTMS를 이용한 졸합성 (Synthesis of Sol using acid Colloidal Silica and TMOS/MTMS)

  • 강동필;박효열;안명상;명인혜;이태희;이태주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 방전 플라즈마 유기절연재료 초전도 자성체연구회
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    • pp.154-157
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    • 2004
  • 산성 colloidal silica(CS) 1034A, HSA와 TMOS, MTMS 실란 간의 졸겔반응조건이 코팅도막의 특성에 미치는 영향을 조사하기 위하여 1034A CS계에 대해서는 1단계로 실란들을 첨가하고 동일한 MTMS에 대해 CS/TMOS의 함량비, 반응시간을 달리하여 졸을 합성하였다. HSA계에 대해서는 2단계로 분리하여 TMOS, MTMS 실란을 첨가하는데 실란 첨가순서와 실란 함량비, 반응시간을 달리하여 졸을 합성하였다. 합성된 졸은 slide glass에 함침 코팅한 후 $300^{\circ}C$에서 경화시킨 도막의 특성들을 조사하였다. 1034A CS계는 CS/TMOS의 비가 70/30일 때 50/50인 경우보다 반응시간에 따라서 표면조도가 우수하여 접촉각에 영향을 덜 주므로 효과적인 균일 반응상으로 진행되었다. HSA CS계는 1단계로 MTMS를 먼저 첨가하고 MTMS/TMOS 비를 25/75로 첨가하면 반응시간에 따라서 표면조도 거칠기에 크게 영향 받지 않고 접촉각을 안정화시킬 수 있다.

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CS/MTMS/ES 졸겔코팅제 경화박막의 특성 (Characteristics on Cured Thin Film of Sol-Gel Materials Synthesized from CS/MTMS/ES)

  • 명인혜;강동필;안명상;나문경;강영택
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.1930-1932
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    • 2005
  • Colloidal Silica(CS)/methyltrimethoxy silane(MTMS) and CS/MTMS/epoxy silane(Es) sol solutions were prepared in variation with synthesizing parameters such as kinds of CS, kinds of silane and reaction time. In order to understand its physical and chemical properties, sol-gel coating films on glass were fabricated. In the case of CS/MTMS sol, the coating films had high contact angle and more enhanced flat surface than those in the case of CS/MTMS/ES sol. Also, the coating films obtained from single CS had a better flat surface than those obtained from mixed CS. In the case of thermal stability, thermal dissociation of CS/MTMS and CS/MTMS/ES sol-gel coating films did not occur up to $550^{\circ}C$ and $440^{\circ}C$ respectively. The thickness of coating films obtained from CS/MTMS sol increased than those of CS/MTMS/ES sol. In addition, the coating films obtained from single CS were more thicker than those obtained from mixed CS.

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상온에서 고결정성 나노기공 이산화티탄 제조기술 (Synthesis of highly crystalline nanoporous titanium dioxide at room temperature)

  • 정평진;권용석
    • 에너지공학
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    • 제25권2호
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    • pp.65-78
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    • 2016
  • 광촉매 연구의 초기는 태양에너지의 전환 및 저장에 관련된 분야들로부터 개발되어 왔다. 최근에는 광 또는 광촉매의 존재 하에서 자외선을 조사하여 물의 정제 및 폐수처리와 각종 유기화합물의 분해연구가 활발하게 진행되고 있다. 또한 산화물질-카본나노튜브, 그래핀 나노복합체 등이 광촉매물질로서 연구되고 있다. 이와 같은 복합체는 열적, 화학적으로 안정하기 때문에 플렉서블 소자를 포함한 광분해 태양전지 및 나노전자 소자를 구성하는 재료로서 적당하다.