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경사코팅 기술과 이를 이용한 완전화 박막의 제조

  • Jeong, Jae-In;Yang, Ji-Hun;Jang, Seung-Hyeon;Park, Hye-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.506-507
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    • 2011
  • 경사코팅 기술(Oblique Angle Deposition; OAD)은 입사 증기가 기판에 수직으로 입사하지 않고 90도 보다 작은 각도로 비스듬히 입사하도록 조절하여 코팅하는 물리증착 기술의 하나로 피막의 조직을 다양하게 제어할 수 있는 방법으로 알려져 있다. 초기의 경사 코팅 기술은 경사각을 가진 정지된 기판 상에 코팅하였으나 최근에는 기판의 각도와 회전을 동시에 조절하여 이루어지는 소위 스침각 증착(Glancing Angle Deposition; GLAD) 기술이 개발되어 다양한 형태의 구조를 제어하는 연구가 활발히 진행되고 있다. 특히, 컴퓨터를 이용하여 입사각과 방위각을 정밀 제어함에 의해 나노 스케일의 Zigzag 및 나선형, 기둥형 조직 등 복잡한 형태의 박막을 제조하는 것이 가능하게 되었다. 현재, GLAD 기술과 다양한 형태의 나노 조직을 이용하여 각종 센서는 물론 태양전지와 같은 에너지 소자, 필터와 같은 광학코팅 등에 응용하기 위한 연구가 세계적으로 폭넓게 진행되고 있다. 본 연구에서는 조직의 치밀도 향상을 통한 특성 향상을 위해 Al 및 TiN 박막을 제조함에 있어서 경사코팅 기술을 응용하여 단층 및 다층 피막(각도를 반대로 하여 여러 층을 제조)을 제조하고 그 특성을 비교하였다. Al 박막은 UBM (Un-Balanced Magnetron) 스퍼터링 소스를 이용하여 타겟 표면과 기판 표면이 이루는 각도 즉, 입사빔과 기판이 이루는 각도를 각각 0, 30, 45, 60 및 90도의 각도에서 강판 및 실리콘 웨이퍼 상에 시편을 제조하되 단층 및 다층으로 시편을 제조하고 치밀도 및 내식성과 반사율 및 조도 등의 특성을 비교하였다. 그 결과 경사각으로 코팅한 시편에서 조도 및 반사율이 향상됨은 물론 치밀도 및 내식성이 향상됨을 확인하였다. 특히, 염수분무에 의한 내식성 시험에서 경사 코팅된 시편의 경우 내식성이 현저히 향상되었는데, 이는 경사 코팅 방법이 박막의 치밀도를 향상시켜 나타난 현상으로 판단된다. TiN 박막은 Cathodic Arc 방식을 이용하되 Al 박막과 동일한 방법으로 코팅을 하고 내식성 및 경도 등의 특성을 비교하였다. TiN 박막은 경사각이 커지면서 경도가 낮아지며 특히 다층막의 경우 경도 감소가 현저함을 알 수 있었다. 다만, 45도에서는 다른 경사각에 비해 약간의 경도 상승이 측정되었다. 경사각 코팅에서의 경도 감소는 피막의 경사에 의해 탐침이 미끄러지거나 또는 우선 방위에 의한 경도 증가 효과가 나타나지 않아 생기는 현상으로 판단되었다. Ferroxyl 시험을 이용한 기공도 시험에서는 경사각 코팅의 경우가 기공이 다소 감소함을 확인하였다.

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An Automatic Transfer System of the Path for an Unmanned Machine in the Greenhouse (온실내 무인작업기를 위한 경로 자동변환 시스템 개발)

  • 김창수;이대원;이승기
    • Journal of Bio-Environment Control
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    • v.9 no.4
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    • pp.237-243
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    • 2000
  • Agricultural machine is currently operated by man power in the greenhouse, which is oppressively hot and humid, and is for a farmer not to work in comfortable circumstances. In the future, agricultural machine will not have to operate by man power, but it will need do by unmanned power. In order to put into the automatic and unmanned operation of agricultural machine, this system was designed and built to move through the fixed path in the greenhouse. This system was composed of guiders(wires), a limit switch, an operating equipment, its software for automatizing a machine in the greenhouse. The guider was connected between the wall pillars, and the equipment was able to slide over the fixed path made of the guider, by rectilinear and rotational motion. A micro mouse was developed with a stepping motor to calculate on the success rate of its operation with the system As might be expected, this system with the micro mouse was moved the moved the paths with a success rate of 100% on the flat plane surface in our laboratory. However, on the sand plane or the other materials plane, the success rate was not better than 80%. If the micro mouse were well operated, the success rate was would be 100%. Based on the results of this research, this system would be expected to operate well on the path made of a simple wire.

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Regulation of Phenylalanine Specific Pathway in a Species of Intrasporangium (Intrasporangium속 방선균의 Phenylalanine 분지대사 경로의 조절)

  • 조원대;최용진;양한철
    • Microbiology and Biotechnology Letters
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    • v.16 no.3
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    • pp.238-245
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    • 1988
  • Studies were made on the regulation of chorismate mutase and prephenate dehydratase of a species of Intrasporangium, a phenylalanine producing Actinomycete isolated from soil. Two distinctly regulated species of chorismate mutase, designated CM I and CM IIwere resolved by DEAE Cellulose and DEAE Sephadex A 50 chromatography. The activity of CM II was inhibited by L-tyrosine, whereas that of CM I appeared to be unregulated. Single species of prephenate dehydyatase was also separated in the same purification steps. The activity of the enzyme was strongly feedback inhibited by L-phenylalanine, but by L-tyrosine or L-methionine it was rather slightly stimulated. Synthesis of chorismate mutase was not influenced by the presence of phenylalanine, tyrosine or tryptophan, whereas prephenate dehydratase was found to be subject to strong feedback repression by L-phenylalanine. The rate of repression was 94% at the concentration of 1mM L-phenylalanine but the repression was completely offset by the presence of 5mM tyrosine. The critical regulatory site of the phenylalanine terminal biopathway was, therefore, proved to be the second reaction which was catalyzed by the L-phenylalanine inhibitable and repressible prephenate dehydratase.

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Effect of Day Length on the Growth of Plug Seedlings and Bulbing after Planting in Onion (Allium cepa L.) (양파 공정육묘시 일장조건이 묘 생육 및 정식 후 구 비대에 미치는 영향)

  • 서전규
    • Journal of Bio-Environment Control
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    • v.12 no.2
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    • pp.101-105
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    • 2003
  • This experiment was conducted to find out the effect of day length on the production of high quality plug seedlings in onion (Allium cepa L.). Two cultivars, ‘Changnyongdaego’ and‘Wolryun’, were grown to seedlings in 200-cell plug trays under 11.5, 12.5, 13.5 hours and natural day length. These seedlings were transplanted to the pot (16 cm In diameter) and grown under 16 hours day length. Number of leaves and neck diameter showed better growth in the longer than shorter day length treatments, but plant height old sheath length were retarded in the longer day length treatments. Growth such as no. of leaves, neck diameter, plant height and sheath length increased with the passage of day, but plant height and neck diameter decreased by treatment over 20 days with 13.5 hours day length. Bulbing and bulb size of onion after transplanting were enhanced in the seedlings cultured under longer day lengths. From the above results, treatment of long day length during seedling culture in plug tray can control the overgrowth and produce high quality plug seedlings.

Effects of ATP on Regulatory Volume Decrease in Mouse Cholangiocytes (ATP가 마우스 담관세포의 세포크기 조절에 미치는 영향)

  • Park, Jae Seung
    • Korean Journal of Clinical Laboratory Science
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    • v.48 no.2
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    • pp.153-157
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    • 2016
  • Although the adenosine triphosphate (ATP) efflux pathway is thought to play a major regulatory role in RVD in some cells, including cholangiocarcinoma cells, the role of ATP in regulatory volume decrease (RVD) of normal cholangiocytes is not well defined. Thus, this study was conducted to investigate the role of extra cellular ATP and ATP pathways of BDCCs isolated from normal mice. Changes in cell volume of BDCCs were indirectly assessed by measurement of the cross-sectional area (CSA) by quantitative videomicroscopy. The relative CSA of BDCCs from normal mice increased with hypotonic maneuver to $1.20{\pm}0.02$ (n=20) within 10 min, but decreased to $1.06{\pm}0.03$ at 40 min. Administration of ATP, ATP hydrolase apyrase or the P2 receptor blocker suramin during RVD had no significant effects compared with untreated controls. In addition, treatment with the PKC inhibitors, Bisindolamide I and Ro 31-8220, during RVD had no significant effects when compared with untreated controls. These results indicate that unlike the results from cholangiocarcinoma cells, ATP plays no significant role in the RVD of normal mouse cholangiocytes.

Controlled Drug Delivery System (약물방출 조절 시스템의 현황)

  • Kim, Jin-Hong;Lee, Young-Moo
    • Applied Chemistry for Engineering
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    • v.2 no.2
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    • pp.87-96
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    • 1991
  • Controlled drug Delivery systems have been actively studied for the past twenty years. In the present article controlled drug delivery system was classified by the delivery mechanism and the drug delivery behavior was discussed. Also overall status of drug delivery system was introduced through the route of drug adiministration.

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