• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.45-47
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• 2002

반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2～7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10～15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.3 no.1 s.4
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• pp.85-96
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• 2004

The study begin with a basic concept, if the occupancy length of vehicle detector is directly proportional to the delay of vehicle. That is, it analogize vehicle's delay of a occupancy time. The results of a study was far superior in the estimation of a queue length. It is a very good points the operator is not necessary to optimize s1, s2, Thdoc. Thdoc(critical congestion degree) replaced 0.7 with 0.2 - 0.3. But, if vehicles have been experience in delay was not occupy vehicle detector, the study is in existence some problems. In conclusion, it is necessary that stretch queue detector or install paired queue detector. Also I want to be made steady progress a following study relation to this study, because it is required traffic signal control on congestion.

• Journal of KIISE:Software and Applications
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• v.36 no.10
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• pp.836-850
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• 2009

Human posture recognition has attracted tremendous attention in ubiquitous environment, performing arts and robot control so that, recently, many researchers in pattern recognition and computer vision are working to make efficient posture recognition system. However the most of existing studies is very sensitive to human variations such as the rotation or the translation of body. This is why the feature, which is extracted from the feature extraction part as the first step of general posture recognition system, is influenced by these variations. To alleviate these human variations and improve the posture recognition result, this paper presents 3D Star Skeleton and Principle Component Analysis (PCA) based feature extraction methods in the multi-view environment. The proposed system use the 8 projection maps, a kind of depth map, as an input data. And the projection maps are extracted from the visual hull generation process. Though these data, the system constructs 3D Star Skeleton and extracts the rotation invariant feature using PCA. In experimental result, we extract the feature from the 3D Star Skeleton and recognize the human posture using the feature. Finally we prove that the proposed method is robust to human variations.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.11
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• pp.984-997
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• 2015

Chang'e-3 consisting of a lunar lander and exploration rover was launched on December 1, 2013 aboard a Long March 3B rocket flying from Xichang space launch center. Chang'e-3 was inserted into the lunar orbit after about a 5-day transit to the Moon and landed on the targeted landing site after orbiting around the Moon for 8 days. The successful landing of the Chang'e-3 gives a lot of help to analyze the future needs of the subsystem technologies and to figure out the trajectory from launch to lunar landing as well as operation sequences in the development of Korean lunar exploration is scheduled. Therefore, the configuration and analysis of overall mission of Chang'e-3 is performed based on the public information from the press and website. As a result, overall mission trajectory is reconstructed by solving boundary condition and then estimating control variable. Visibility status and eclipse status also analyzes so communication and power charge condition is as good as to operate lunar lander. Mass budget of the lander is derived using ${\Delta}V$ according to specific impulse.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.11
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• pp.7990-8000
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• 2015

Plant factories are plant cultivation systems which produce farm products uniformly under the controlled environmental condition regardless of seasons and places. Thermal flow in the plant factory is an important parameter in cultivating plants. In this research, we study thermal flow characteristics for a hybrid plant factory with multi-layer cultivation shelves using computer simulation techniques. In order to obtain numerical solutions for thermal flow characteristics, a finite volume method was applied. We consider a low-Reynolds-number ${\kappa}-{\epsilon}$ turbulence model, incompressible viscous flows, and pressure boundary conditions for numerical simulation. Commercial software Solid Works Flow Simulation is then used to investigate characteristics of thermal flows in the plant factory applying several different inflow air velocities and arrangements of cultivation shelves. From numerical analysis results, we found that temperatures in cultivation shelves were uniformly distributed for Case 3 when the inflow air velocity was 1.6 m/s by using a blower in the plant factory. However in Case 1 lower temperature distributions were observed in test beds, TB2 and TB3, which indicated that additional temperature control efforts would be required. Average shelf temperature increased by $3^{\circ}C$ using artificial light source (DYLED47) with 50% blue and 50% red LED ratios. Korea Academia-Industrial cooperation Society.

• The KIPS Transactions:PartA
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• v.12A no.4 s.94
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• pp.327-332
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• 2005

In the field of computer graphics, we have several research results to display the ocean waves on the screen, while we still not have a complete solution yet. Though ocean waves are constructed from a variety of sources, the dominant one is the surface gravity wave, which is generated by the gravity and the wind. In this Paper, we Present a real-time surface gravity wave simulation method, derived from a precise ocean wave model in the oceanography. There are research results based on the Pierson-Moskowitz(PM) model[1], which assumes infinite depth of water and thus shows some mismatches in the case of shallow seas. In this paper, we started from the Texel, Marsen and Arsloe(TMA) model[2], which is a more precise wave model and thus can be used to display more realistic ocean waves. We derived its implementation model for the graphics applications and our prototype implementation shows about 30 frames per second on the Intel Pentium 4 1.6GHz-based personal computer. Our major contributions to the computer graphics area ill be (1) providing more user-controllable parameters to finally generate various wave shapes and (2) the improvement on the expression power of waves even in the shallow seas.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.4
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• pp.639-647
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• 2019

Recently, as the semiconductor integration technology due to miniaturization and high density of electronic equipment have developed, it is importantly recognized the application of thermal control system in order to release inner heat generated from chips, modules, In this study, we considered the heat transfer and pressure drop characteristics in a horizontal channel with four blocks using k-${\omega}$ SST turbulence model During CFD (Computational Fluid Dynamics) analysis, the parameters applied block width, block height, heat source and turbulence generator placement etc. As the boundary conditions of analysis, the channel inlet temperature and flow velocity were respectively 300 K and 3.84 m/s, the heat flux was $358W/m^2$. As a result, the heat transfer performance was decreased as the block width ratio (w/h) was increased, while it was increased as the block height ratio (h/w) was increased. In addition, as the arrangement of heat source size was increased to high heat flux from low heat flux, it was influenced by heat source size and the heat transfer coefficient showed a tendency to increase, When the turbulence generator was installed in the upper part of block No. 1 position the closely to the channel entrance, the heat transfer characteristics was greatly influenced on the whole of four heating blocks. and in oder to consider the pressure drop characteristics, we are able to select the most appropriate turbulence generator's position.

• Journal of Korean Society of Forest Science
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• v.100 no.1
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• pp.34-41
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• 2011

Vegetation structure, composition and diversity were quantified for 10 samples ($10m{\times}10m$) representing woody vegetation and for 30 samples ($1m {\times}3m$) representing understory vegetation in Pinus parviflora and Tsuga sieboldii forest of Taeharyeong, Ulleung-gun (Gyeongsangbuk-do). P. parviflora was limitedly advanced to sapling layer from seedling stage, and based on Mantel tests, composition of canopy layer was not established in ground woody vegetation. Non-metric multidimensional scaling revealed influence of biotic and abiotic factors in species composition of woody and understory vegetation. In the result of multiple regression model, abundance of P. parviflora (density and breast height area) and percent cover of woody debris were significant predict variables for understory diversity. These results suggest that relatively large disturbance is required for regeneration of P. parviflora and T. sieboldii forest, and control of expansion of monocultural understory species that monopolize resources such as Carex blepharicarpa and Maianthemum dilatatum, is necessary for maintenance of diversity.

• Korean Journal of Construction Engineering and Management
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• v.23 no.4
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• pp.57-64
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• 2022

A plant factory is a facility that creates an artificial environment in a controlled space and produces plants systematically through automated facilities. However, automation in the cultivation process is insufficient compared to the internal environment control technology in plant factories. This causes the problem of an increase in operating costs due to the input of a large number of workers. Therefore, this study aims to evaluate economic feasibility by comparing before and after introducing automation in the cultivation process of plant factories. The target plant factory to be analyzed was selected, and the break-even point analysis method was used by comparing the cost required compared to the operating period. As a result, the break-even point was analyzed to be 3.4 years when automation was introduced into six processes for plant cultivation. Therefore, it can be judged that the introduction of automation is excellent in terms of economic feasibility when the target plant factory has been operated for more than 3.4 years. This study is expected to be used as basic data to analyze the economic feasibility of introducing automation in domestic and foreign plant factories.

• Journal of Bio-Environment Control
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• v.23 no.4
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• pp.337-341
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• 2014

Due to the nature of the ambient air temperature in summer in korea, the growth of crops in greenhouse normally requires cooling and dehumidification. Even though various cooling and dehumidification methods have been presented, there are many obstacles to figure out in practical application such as excessive energy use, cost, and performance. To overcome this problem, the lab scale experiments using lithium bromide(LiBr) solution and cooling coil for dehumidification and cooling in greenhouses were performed. In this study, preliminary experiment of dehumidification and cooling for the greenhouse was done using LiBr solution as the dehumidifying materials, and cooling coil separately and then combined system was tested as well. Hot and humid air was dehumidified from 85% to 70% by passing through a pad soaked with LiBr, and cooled from 308K to 299K through the cooling coil. computational Fluid Dynamics(CFD) analysis and analytical solution were done for the change of air temperature by heat transfer. Simulation results showed that the final air temperature was calculated 299.7K and 299.9K respectively with the deviation of 0.7K comparing the experimental value having good agreement. From this result, LiBr solution with cooling coil system could be applicable in the greenhouse.