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Elli-Situ 2000 (in situ, 실시간 표면 및 박막 모니터 장비)

  • 방현용;주한용
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.46-46
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    • 2000
  • 과학기술 및 산업의 발달로 인하여 실험 중 또는 공정 상에서 in situ, 실시간으로 측정하고 분석하며 이를 되먹임하는 품질제어의 중요성이 대두되고 있다. 반도체 공정 또는 박막제조 공정 중에서 박막의 두께, 굴절율, 물질의 조성비 등을 알아내는 것이 긴요한 과제로 대두되고 있으며, 이를 위하여 공정중인 제품의 품질을 실시간으로 평가하는 장비가 요구되고 있는 것이다. 나아가 공정중의 예상하지 못한 시료의 특성변화를 그대로 감지하여 적절히 보정해 주는 되먹임 기법은 높은 수율을 보장하는 첨단기법이라 할 수 있다. 이러한요구에 부응할 수 있는 본 제품(Elli-situ 2000)은 박막의 두께 표면변화를 sub 의 정밀도를 가지고 in situ, 실시간으로 정밀 측정할 수 있는 첨단 계측장비로서 빛의 편광상태 변화를 측정하기 때문에 공정 중의 시료에 영향을 주지 않는 비간섭 특성과 비접촉 특성의 장점 뿐만 아니라 공기중에서는 물론 진공이나 액체 등의 매질에서도 사용될 수 있어서 매질에 대한 제약이 거의 없다는 장점도 가지고 있다. 편광상태의 제어 및 측정을 필요한 광학장비의 경우, 제작이 까다롭기 때문에 대부분 가격이 높은 편이고 사용방법이나 측정 데이터에 대한 해석이 어렵다는 단점이 있으나, Elli-situ 2000의 경우 상용화된 외국제품(국내제품은 없슴)과 비교하여 성능 및 가격경쟁력에 있어서도 우위에 있으며 간단, 명료한 장비조작 및 컴퓨터를 사용한 구동의 전자동화를 이룸으로써 초보자도 쉽게 측정하고 데이터를 처리할 수 있도록 하였다. 또한 취부대의 경우, 진공포트 플랜지의 표준규격(2-3" Del-Seal 플랜지 규격)에 맞춤으로써 기존의 진공챔버에 부착하여 진공에 전혀 영향을 주지 않는 상태에서 시료의 변화를 in situ, 실시간으로 정밀 측정할 수 있도록 하였다. 하였다.O 박막은 산소 가스압력과 기판온도, 인가 전류를 변화시켜가며 증착하였으며 이에 따른 박막의 결정성 변화를 알아보았다. 기판온도를 실온에서 점차 증가시켜나가면 $\Delta$$\theta$50은 급격히 감소하며 30$0^{\circ}C$에서는 결정성이 우수한 막을 얻을 수 있었다. 또한 산소 가스 압력이 0.5~1mTorr에서 $\Delta$$\theta$50은 양호한 값을 나타내었지만 그 이상에서는 c-축 배향성이 나빠짐을 확인하였다. 따라서 대향타겟식스퍼터 장치를 이용하여 ZnO 박막을 증착시 가스압력 0.5~1mTorr, 기판온도 20$0^{\circ}C$이상의 막 제작조건에서 결정성이 우수하게 나타나는 것을 확인할 수 있었다. gluten이 단단해졌음을 알수 있었다. 유화제 stearly 칼슘, 혹은 hemicellulase를 amarans 10% 대체한 밀가루에 첨가하면 확연히 비용적을 증대시킬 수 있다는 사실을 알 수 있었다. quinoa는 명아주과 Chenopodium에 속하고 페루, 볼리비아 등의 고산지에서 재배 되어지는 것을 시료로 사용하였다. quinoa 분말은 중량의 5-20%을 quinoa를 대체하고 더욱이 분말중량에 대하여 0-200ppm의 lipase를 lipid(밀가루의 2-3배)에 대하여 품질개량제로서 이용했다. 그 결과 quinoa 대량 7.5%에서 비용적, gas cell이 가장 긍정적 결과를 산출했고 반죽의 조직구조가 강화되었다. 또 quinoa 대체에 의해 전분-지질 복합제의 흡열량이 증대된 것으로부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다. 이것은

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Machine learning model for residual chlorine prediction in sediment basin to control pre-chlorination in water treatment plant (정수장 전염소 공정제어를 위한 침전지 잔류염소농도 예측 머신러닝 모형)

  • Kim, Juhwan;Lee, Kyunghyuk;Kim, Soojun;Kim, Kyunghun
    • Journal of Korea Water Resources Association
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    • v.55 no.spc1
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    • pp.1283-1293
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    • 2022
  • The purpose of this study is to predict residual chlorine in order to maintain stable residual chlorine concentration in sedimentation basin by using artificial intelligence algorithms in water treatment process employing pre-chlorination. Available water quantity and quality data are collected and analyzed statistically to apply into mathematical multiple regression and artificial intelligence models including multi-layer perceptron neural network, random forest, long short term memory (LSTM) algorithms. Water temperature, turbidity, pH, conductivity, flow rate, alkalinity and pre-chlorination dosage data are used as the input parameters to develop prediction models. As results, it is presented that the random forest algorithm shows the most moderate prediction result among four cases, which are long short term memory, multi-layer perceptron, multiple regression including random forest. Especially, it is result that the multiple regression model can not represent the residual chlorine with the input parameters which varies independently with seasonal change, numerical scale and dimension difference between quantity and quality. For this reason, random forest model is more appropriate for predict water qualities than other algorithms, which is classified into decision tree type algorithm. Also, it is expected that real time prediction by artificial intelligence models can play role of the stable operation of residual chlorine in water treatment plant including pre-chlorination process.

Structural Static Test of Pylon for External Attachment Separation Load (외부장착물 분리하중에 대한 파일런 구조 정적시험)

  • Kim, Hyun-gi;Kim, Sungchan;Hong, Seung-ho;Choi, Hyun-kyung;Cho, Sang-hwan;Park, Hyung-bae
    • Journal of Aerospace System Engineering
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    • v.16 no.1
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    • pp.104-109
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    • 2022
  • The bomb rack unit (BRU) installed inside the pylon serves to fix external attachments such as external fuel tank or external weapon, and also serves to separate external attachments in case of emergency. In particular, the load generated when the external attachment is separated from the BRU is called the punching load. In this study, we present the results of a structural static test performed to verify the structural integrity of the pylon under the BRU punching condition acting on it. In the structural static test report, we present the implementation method for the separation load of the external attachment and the test profile for the BRU punching load condition, and compared the error between the load input signal and the feed-back signal to determine the appropriateness of load control in each test. Furthermore, we compared the strain results obtained in the numerical analysis and structural test at the main positions of the specimen. As a result, it was shown that the load of the actuators were properly controlled within the allowable error range in each test, and the numerical analysis effectively predicted the test result. Finally, through structural static tests conducted by design limit load and design ultimate load, we verified that the aircraft pylon dealt with in this study has sufficient structural strength for external attachment separation condition.

Electromechanical Relation of Conductive Materials with High Electrical Resistance and Its Application to the Estimation of In_situ Stress of Structural Tendons (고저항 전도체의 전기기계적 상관작용과 작용응력 예측이 가능한 긴장재의 제안)

  • Zi, Goangseup;Jun, Kiwoo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.2A
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    • pp.363-370
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    • 2006
  • It is proposed that the electromechanical relation of the conductive materials with high electrical resistance may be used to estimate the current stress of prestressing tendons. To choose the best conductive material to this end, we studied the electromechanical relations of carbon fibers and metalic heat wires experimentally. The strain of those materials was controlled instead of the stress during the experiment. It is found that the relation of carbon fibers can be modelled by a parabolic(or hyperbolic) function in the early stage of deformation. However because the relation is not consistent when it is unloaded and reload, carbon fibers are not suitable for this purpose. Metallic heat wires show a consistent linear relation during loading and unloading in the elastic deformation and are suitable for this purpose. To estimate the electromechanics relation of metallic wires, we developed a simple formula based on the rigid plasticity. We propose a new kind of prestressing tendons whose stress can be monitored. As a side result of this study, we found that the electromechanical relation of carbon fibers without epoxy matrix becomes almost linear after a certain strain.

Applicability of Partial Post-Tension Method for Deflection Control of Reinforced Concrete Slabs (RC슬래브의 처짐제어를 위한 상향긴장식 부분PT공법의 적용)

  • Lee, Deuck-Hang;Kim, Kang-Su;Kim, Sang-Sik;Kim, Yong-Nam;Lim, Joo-Hyuk
    • Journal of the Korea Concrete Institute
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    • v.21 no.3
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    • pp.347-358
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    • 2009
  • Recently, it is getting into a good situation for the flat-plate slab system to be applied. The flat-plate slab without beam, however, is often too weak to control deflection properly compared to other typical slab-beam structures, for which the post-tension method is generally regarded as one of best solutions. The post-tension (PT) method can effectively control deflection without increase of slab thickness. Despite this good advantage, however, the application of PT method has been very limited due to cost increase, technical problems, and lack of experiences. Therefore, in order to reduce difficulties on applying full PT method under the current domestic circumstances and to enhance constructability of PT system, this research proposed the partial PT method with top jacking anchorage applied in a part of span as need. For the top jacking anchorage system, the efficiency of deflection control shall be considered in detail because it can vary widely depending on the location of anchorage that can be placed anywhere as need, and tensile stresses induced at back of the anchorage zone also shall be examined. Therefore, in this study, analysis were performed on the efficiency of deflection control depending on the location of anchorage and on tensile stresses or forces using finite element method and strut and tie model in the proposed top jacking anchorage system. The proposed jacking system were also applied to the floor slabs at a construction site to investigate its applicability and the analysis results of slab behavior were compared to the measured values obtained from the PT slab constructed by the partial PT method. The result of this study indicates that the partial PT method can be very efficiently applied with little cost increase to control deflection and tensile stresses in the region as a need basis where problem exists.

Actual State of Structures and Environmental Control Facilities for Tomato Greenhouses in Chungnam Region (충남지역 토마토 재배온실의 구조와 환경조절설비 실태분석)

  • Nam, Sang-Woon;Kim, Young-Shik
    • Korean Journal of Agricultural Science
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    • v.36 no.1
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    • pp.73-85
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    • 2009
  • An investigation was conducted to get the basic data for establishing structural safety and environmental management of tomato greenhouses in Chungnam region. The contents of the investigation consisted of actual state of greenhouse structures and environmental control facilities. Most of greenhouses were arch type single-span plastic houses and they had too low height for growing tomatoes. Frameworks of multi-span greenhouses were suitable, but those of single-span were mostly insufficient. Every greenhouse had thermal curtain movable or covering fixed inside the greenhouse for energy saving, and heating facilities were mostly warm air heater. Irrigation facilities were mostly drip tube and controlled by manual operation or timer. Almost all of the greenhouses didn't install high level of environmental control facilities such as ventilator, air circulation fan, $CO_2$ fertilizer, insect screen, supplemental light, and cooling device.

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Vibration Characteristics of the Fruit and Vegetables during Transportation (I) - Vibration Charateristics of the Pear by Experimental Analysis - (유통중 청과물의 진동 특성 연구 (I) - 실험적 해석에 의한 배의 진동특성 -)

  • Kim, Man-Soo;Jung, Hyun-Mo;Kim, Ghi-Seok;Park, Chung-Gil
    • Korean Journal of Agricultural Science
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    • v.30 no.2
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    • pp.175-183
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    • 2003
  • Fruit and vegetables are subjected to complex dynamic stresses in the transportation environment. During a long journey from the production area to markets, there is always some degree of vibration present. Vibration inputs are transmitted from the vehicle through the packaging to the fruit. Inside, these cause sustained bouncing of fruits against each other and container wall. These steady state vibration input may cause serious fruit injury, and this damage is particularly severe whenever the fruit inside the package is free to bounce, and is vibrated at its resonance frequency. The determination of the resonance frequencies of the fruit and vegetables may help the packaging designer to determine the proper packaging system providing adequate protection for the fruit, and to understand the complex interaction between the components of fruit when they relate to expected transportation vibration inputs. Instrumentation and technologies are described for determining the vibration response characteristics of the fruits with frequency range 3 to 150 Hz. The computer program for controlling the vibration exciter and the function generator and for measuring the vibration response characteristics of the fruits was developed. The resonance frequency of the pear ranged from 64.5 to 72.2 Hz and the amplitude at resonance was between 1.78 and 2.21 G-rms. The resonance frequency and amplitude at resonance decreased with the increase of the sample mass, and they were slightly affected by mechanical properties such as bioyield deformation and rupture deformation. Regression analysis was performed among the relatively high correlated parameters from the results of correlation coefficient analysis.

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Development of relationship equation for vehicle sensor signal and observed rainfall (차량용 강우센서의 Signal과 관측강우의 관계식 개발)

  • Lee, Suk Ho;Kim, Young Gon;Kim, Byung Sik
    • Journal of Korea Water Resources Association
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    • v.50 no.1
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    • pp.29-35
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    • 2017
  • A vehicle rainfall sensor is made to control the operating speed of wipers depending on rainfall. Therefore this is the apparatus to determine the velocity phase of the wipers roughly based on the amount of rainfall. However, the technology which can judge the size of rainfall amount besides determining speed level of the wipers is developing according to the development of the function of rainfall sensor due to the development of technology. In this study, a rainfall measurement by using light scattering by precipitation particles was used. This measurement is to use light signal reflection from front glass and the bigger particle is the less detection of light by light scattering. The detection area of the rainfall sensor and detection channel were extended sizes to increase the accuracy of the rainfall. Also the W-S-R relational expression was developed by using a relationship between the specific precipitation (R) and the amount of sensor detection (S) when there is speed change of the wipers (W) and an indoor rainfall apparatus was used to convert sensing signal to rainfall. The signal system of vehicle rainfall sensor can be converted to the actual rainfall amount by using this formula and if this is provided to users then the vehicle observation network can produce higher-resolution than actual observation network can be produced.

Design and fabrication of a 300A class general-purpose current sensor (300A급 일반 산업용 전류센서의 설계 및 제작)

  • Park, Ju-Gyeong;Cha, Guee-Soo;Ku, Myung-Hwan
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.6
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    • pp.1-8
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    • 2016
  • Current sensors are used widely in the fields of current control, monitoring, and measuring. They have become more popular with the increasing demand for smart grids in a power network, generation of renewable energy, electric cars, and hybrid cars. Although open loop Hall effect current sensors have merits, such as low cost, small size, and weight, they have low accuracy. This paper describes the design and fabrication of a 300A open loop current sensor that has high accuracy and temperature performance. The core of the current sensor was calculated numerically and the signal conditioning circuits were designed using circuit analysis software. The characteristics of the manufactured open loop current sensor of 300 A class was measured at currents up to 300 A. According to the test of the current sensor, the accuracy error and linearity error were 0.75% and 0.19%, respectively. When the temperature compensation was carried out with the relevant circuit, the temperature coefficients were less than $0.012%/^{\circ}C$ at temperatures between $-25^{\circ}C$ and $85^{\circ}C$.

A Study of SBC Clustering Technology for 3D Environmental Modeling (3차원 환경 모델링을 위한 SBC 클러스터링 기술 연구)

  • Lee, Jun-Yeob;Oh, Jong-woo;Lee, DongHoon
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2017.04a
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    • pp.167-167
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    • 2017
  • 스마트팜 내부의 3차원 공간의 온도, 습도, 기압, 공기질 분석을 통한 돈사 미세 조절 기술에 대한 연구가 진행 중이다. 해당 특성 중에서 기압을 제외한 환경인자들은 돈사 내의 구조 특성상 위치별로, 시간별로 매우 상이한 변이의 형태를 보인다. 일정 시점을 기준으로 계측 지점 이외의 지점에 대한 환경인자들을 공간적으로 추정하는 기술은 대표적으로 컴퓨터 분석 기술에 의존하고 있다. 시간 복잡도가 매우 높은 CFD(Computer Fluid Dynamics) 방식은 정밀도 측면에서 유리하나, 상응하는 제어 기술/하드웨어 등의 부재로 모델링 결과의 활용도가 낮다고 볼 수 있다. 본 연구에서는 CFD를 수행하는 과정에 있어 실질적으로 유효한 단위로 공간 분해능을 낮추고, 동등한 크기의 세부 공간에 대한 모델링을 병렬적으로 수행하기 위한 방안을 연구하였다. 실험적으로 돈사 환경을 3차원으로 구성하기 위하여, 공기 흡입구, 배출구, 기둥, 덕트 요소를 포함시켰다. 실내 공간을 1차적으로 가로, 세로, 높이방향으로 $3{\times}3{\times}3$ 균등 분배한 후 3차원 행렬로 분할하였다. 각 분할된 행렬에 대한 연산 수행을 위하여 현재까지 대중에 공개된 SBC(Single Board Computer) 중 가장 높은 연산 수행 능력이 있는 Odroid-XU4(Hardkernel, AnYang, Korea) 16식을 병렬 클러스터링 기술로 연동하였다. 하나의 AP당 8개의 코어가 내장되어 있으므로, 총 128개의 코어를 이용하여 동시에 128개의 3D 정방행렬 연산이 가능하도록 구성하였다. 모델링을 위한 수학적 모델로는 실험적으로 Steady turbulent model (Newtonian coefficient)을 이용하였다. 클러스터링을 이용한 병렬 처리의 특성상 균등한 정보량을 동시에 배분해야 하므로 108 ($27{\times}4$)개의 코어를 이용하여 1차적으로 나뉜 공간을 다시 4등분하여 동시에 $12{\times}12{\times}12$에 해당하는 공간 분해능에 대한 처리를 동시에 수행할 수 있도록 하였다. 2단계에 걸쳐 분할한 공간 세그먼트에 대한 클러스터링 연산 수행 결과 초당 15회 정도의 연산을 수행할 수 있었으며, 시간 분해능을 100으로 설정한 경우 약 5초가 수행되었다. 선행적으로 수행하였던 CFD 모델링 (OpenFOAM)과 비교하였을 때 상대적으로 정밀도가 낮은 3차원 모델링 결과를 얻을 수 있었다. 모델링에 소요되는 시간을 비약적으로 경감 시킨 장점을 살려 적정한 공간 분할 기법과 추가로 발생하는 다수의 바운더리 조건을 근사적으로 추정할 수 있는 데이터 마이닝 기술이 보완되어야 할 것이다.

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