• Proceedings of the KSME Conference
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• 2003.11a
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• pp.893-898
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• 2003

An experiment was conducted to characterize water droplet charging performance of an electrostatic spraying nozzle for an electrostatic wet scrubber. Charge-to-mass ratios, the nozzle currents divided by the mass flow rate of water were obtained with respect to the applied voltage to the ring-electrode for 2 different flow conditions. It was shown that the charge-to-mass ratio increased in proportion to the applied voltage and tended to saturate at a certain higher voltage.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.10
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• pp.1841-1846
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• 2008

In this paper, we present the fabrication of microlens by electrohydrodynamic atomization(EHDA) of PDMS prepolymer. The diameter and contact angle of PDMS microlens can be altered by changing the applied voltage and substrate temperature at the experimental setup. It is considered that PDMS microlens can be integrated into the Lab-on-a-chip directly without any photolithographic process by EHDA. The property of PDMS microlens is confirmed by transmitting and measuring the Gaussian beam through microlens.

• Journal of the Korean Electrochemical Society
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• v.11 no.4
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• pp.262-267
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• 2008

Effective dispersion of noble metal Pt-Ru catalysts was conducted for the application of direct formic acid fuel cell(DFAFC) electrodes by electrospray method. The amount of catalysts deposited on the electrodes increased with increasing deposition time. However, the performance of cell test decreased with the deposition time after 80 min. because of agglomeration of catalysts. With the conventional hand-spray method, the density of the anode catalysts deposited was $3.0\;mg/cm^2$ and the maximum power density of the MEA was $74\;mW/cm^2$. On the other hand, the MEA prepared by the electrospray method, showed a similar power density of $72\;mW/cm^2$. However, the density of the anode catalysts deposited was much lower than the case of the hand-spray and the density the anode catalysts in this case was $1.85\;mg/cm^2$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.241-241
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• 2004

프린팅 기법은 크게 젯팅(Jetting) 기법과 코팅(Coating) 기법으로 나눌 수 있는데, 이중 젯팅 기법은 액체 상태의 재료를 노즐을 통하여 분사하는 기법을 말하며, 그 방식으로는 전하제어형, 확산형, 자성 잉크형 등의 연속 방식, 피에조형, 전기열 변환형, 방전형, 고체잉크형, 정전흡입형 등의 DOD 방식, 잉크 미스트형, 스프레이형 등의 기타 방식으로 나누어 볼 수 있다. 젯팅 공정을 이용하여 폴리머 계열을 2차원 흑은 3차원 형상으로 제작하는 것은, 기존의 잉크젯 분사시스템을 수정 보완하는 것으로도 기술적으로 가능하다.(중략)

• Journal of ILASS-Korea
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• v.5 no.3
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• pp.45-54
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• 2000

A novel electrostatic splaying method for solidifying a galvanized coating layer was studied. Our experimental results and computer simulations showed that electric field could assist the fine droplets to attach on the steel surface and change the sprayed droplets trajectory especially in the space near the steel surface. It was necessary to apply the electric voltage higher than - 20 kV to obtain the enough electrostatic attraction force between droplets and the steel sheet.

• The Transactions of the Korean Institute of Power Electronics
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• v.3 no.2
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• pp.85-91
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• 1998

This paper describes an study electric injection system for diesel engines. It is needed effective fuel injection which controls the solenoid valve of fuel pump. To solve this, this paper proposes DCC-PWM method which can realize fast reply and low holding current for solenoid valve on/off. For the proposed design method, simulation tools of ACSL are used to analyze the system. And the single-chip microcomputer is used to reduce the size of controller and to improve flexibility. And the systems validity can be verified through the experimental results.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.348-348
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• 2009

The conductive coating method is used for various industrial fields. For example, Sputtering process is used to coat ITO layer in LCD or OLED panel manufacture process and fabricate a base layer of substrate of an electric printing device. However, conventional coating processes (beam sputtering, spin coating etc.) has a problems in the industrial manufacturing process. These processes have a very high cost and critical manufacturing environment as a vacuum process. Recently, many researchers have proposed various printing process instead of conventional coating processes. In this paper, we propose an ESD printing process in ITO coating layer and apply to fabricate a conductive coating film. Furthermore, the effect of the nozzle and also the applied voltage on different configuration of the nozzle head was also studied for better understanding of the Electro Static deposition process.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.482-482
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• 2013

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 본 연구에서는 가스클러스터 장치를 이용한 세정 특성 평가에 관한 연구를 수행하였다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상을 최소화 하고 상대적으로 높은 효율로 오염입자를 제거하게 된다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 평가하기 위하여 이러한 변수에 따라서 오염 입자의 종류, 크기에 따른 PRE (particle removal efficiency)를 평가하고 다양한 선폭의 패턴을 이용하여 손상 실험을 수행하였다. 제거 효율에 사용된 입자는 $CeO_2$와 $SiO_2$이며, 각각 30, 50, 100, 300 nm 크기를 정량적으로 오염시킨 쿠폰 웨이퍼를 제조하여 세정 효율을 평가하였다. 정량적 오염에는 SMPS (scanning mobility particle sizer)를 이용한 크기 분류와 정전기적 입자 부착 시스템이 사용되었다. 또한 패턴 붕괴 평가에는 35~180 nm 선폭을 가지는 Poly-Si 패턴을 이용하였다. 실험 결과 클러스터 형성 조건에 따라 상대적으로 낮은 패턴 붕괴에서 95% 이상의 높은 오염입자 제거효율을 전반적으로 보이는 것을 확인할 수 있었다. 따라서 이론적 계산에 기반하여 세정에 요구되는 클러스터 크기를 가정하고, 이를 통하여 세정에 적용할 경우 높은 기존 세정 방법의 단점을 보완하면서 높은 세정 효율을 가지는 대체 세정 방안으로 이용할 수 있음을 확인하였다.

• Journal of the Korean Society of Propulsion Engineers
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• v.12 no.3
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• pp.76-86
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• 2008

The EP(electric propulsion) is unique in that several energy sources can be utilized to produce the electric energy and that high exhaust velocity can be achieved compared to the conventional chemical propulsion. Though a lot of variety of non chemical propulsion are under study, the fact that the EP's specific impulse ranges widely from 200s to 5000s led most research to concentrate on the electric propulsion research. This paper, therefore, is aimed to introduce the up-todate existing EP family such as electrothermal, electrostatic and electromagnetic thrusters where its operating concepts, characteristics and possible variants are presented for future applications.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.84.2-84.2
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• 2010

PEMS (printed electro-mechanical system) is fabricated by means of various printing technologies. Passive and active components in 2D or 3D such as conducting lines, resistors, capacitors, inductors and TFT, which are printed with functional materials, can be classified in this category. And the issue of PEMS is applied to a R2R process in the manufacturing process. In many electro-devices, the vacuum process is used as the manufacturing process. However, the vacuum process has a problem: it is difficult to apply toa continuous process as a R2R printing process. In this paper, we propose an ESD (electro static deposition) printing process has been used to apply an organic solar cell of thin film forming. ESD is a method of liquid atomization by electrical forces, anelectrostatic atomizer sprays micro-drops from the solution injected into the capillary, with electrostatic force generated by electric potential of about tens of kV. ESD method is usable in the thin film coating process of organic materials and continuous process as a R2R manufacturing process. Therefore, we experiment the thin films forming of PEDOT:PSS layer and Active layer which consist of the P3HT:PCBM. The result of experiment, organic solar cell using ESD thin film coated method is occurred efficiency of about 1.4%. Also, the case of only used to ESD method in the active layer coating is occurred efficiency of about 1.86% as the applying a spin coating in the PEDOT:PSS layer. We can expect that ESD method is possible for continuous process to manufacture in the organic solar cell or OLED device.