• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Journal of the Korean Society for Precision Engineering
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• 제22권12호
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• pp.175-183
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• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1273-1276
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• 2005

A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the KSME Conference
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1559-1563
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• 2007

This paper presents a virtual machine design simulation program. Kinematics of various mechanisms can be modeled with 3 dimensional geometry and actuators. CAD data for any machine component can be easily imported in STL format. Machine components are assembled with kinematic joints simply by drag and drop function in virtual graphic simulator. Interference and collision of any component with other components can be identified during the motion simulation. Graphic user interface program is developed using Microsoft Direct X code. A precision micro stage system is demonstrated with the proposed virtual machine design simulator.

• Proceedings of the KIEE Conference
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 B
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• pp.527-529
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• 1999

본 논문에서는 압전 구동기의 모델링과 진상-지상 보상기를 이용한 정밀 위치 제어 시스템을 제안한다. 최근 압전 구동기는 고속, 고정밀도가 요구되는 분야에 널리 응용되고 있으나 압전 소자의 히스테리시스 현상으로 인하여 폐루프 제어가 어렵다. 압전 구동기는 개루프 제어 특성이 우수하지만 최근의 X-Y 스테이지나 반도체 공정과 같은 높은 정밀도가 요구되는 작업에서 필요한 성능을 얻기 위해서는 폐루프 제어가 수행되어져야 한다. 따라서 위치 피드백을 이용한 폐루프 제어를 위해 선형 압전 이론으로부터 압전 구동기의 모델링을 정립하고 이 모델로부터 진상-지상 보상기를 설계하며 제어기의 성능을 검토하기 위하여 모의 실험 결과를 보인다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.175-178
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.336-340
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• 1997

For optimal design of micro stage, we were measured to displacement of piezo-electric transducer that was based on voltage value. And then researchers were analyzed to microstage through FEM with displacement data including voltage value of piezo-electric transducer. For verification of analyzing results, we were gauged on displacement by using Laser-interferometer. And researchers were confirmed to propriety of micro stage design with FEM, were obtained error rate that are 3.5% between measurement results and analyzing results.