• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.123-123
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• 2012

최근 연구되고 있는 TSV(Through Silicon Via) 기술은 Si 웨이퍼 상에 직접 전기적 연결 통로인 관통홀을 형성하는 방법으로 칩간 연결거리를 최소화 할 수 있으며, 부피의 감소, 연결부 단축에 따른 빠른 신호 전달을 가능하게 한다. 이러한 TSV 기술은 최근의 초경량화와 고집적화로 대표되는 전자제품의 요구를 만족시킬 수 있는 차세대 실장법으로 기대를 모으고 있다. 한편, 납땜 재료의 주 원료인 주석은 주로 반도체 소자의 제조, 반도체 칩과 기판의 접합 및 플립 칩 (Flip Chip) 제조시의 범프 형성 등 반도체용 배선재료에 널리 사용되고 있다. 최근에는 납의 유해성 때문에 대부분의 전자제품은 무연솔더를 이용하여 제조되고 있지만, 주석을 이용한 반도체 소자가 고밀도화, 고 용량화 및 미세피치(Fine Pitch)화 되고 있기 때문에, 반도체 칩의 근방에 배치된 주석으로부터 많은 알파 방사선이 방출되어 메모리 셀의 정보를 유실시키는 소프트 에러 (Soft Error)가 발생되는 위험이 많아지고 있다. 이로 인해, 반도체 소자 및 납땜 재료의 주 원료인 주석의 고순도화가 요구되고 있으며, 특히 알파 방사선의 방출이 낮은 로우알파솔더 (Low Alpha Solder)가 요구되고 있다. 이에 따라 본 연구는 4인치 실리콘 웨이퍼상에 직경 $60{\mu}m$, 깊이 $120{\mu}m$의 비아홀을 형성하고, 비아 홀 내에 기능 박막증착 및 전해도금을 이용하여 전도성 물질인 Cu를 충전한 후 직경 $80{\mu}m$의 로우알파 Sn-1.0Ag-0.5Cu 솔더를 접합 한 후, 접합부 신뢰성 평가를 수행을 위해 고속 전단시험을 실시하였다. 비아 홀 내 미세구조와 범프의 형상 및 전단시험 후 파괴모드의 분석은 FE-SEM (Field Emission Scanning Electron Microscope)을 이용하여 관찰하였다. 연구 결과 비아의 입구 막힘이나 보이드(Void)와 같은 결함 없이 Cu를 충전하였으며, 고속전단의 경우는 전단 속도가 증가할수록 취성파괴가 증가하는 경향을 보였다. 본 연구를 통하여 전해도금을 이용한 비아 홀 내 Cu의 고속 충전 및 로우알파 솔더 볼의 범프 형성이 가능하였으며, 이로 인한 전자제품의 소프트에러의 감소가 기대된다.

• Korean Journal of Materials Research
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• v.8 no.4
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• pp.288-292
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• 1998

The p*-n ultra shallow junction diode with Co/Ti bilayer silicide was formed by ion implantation of $BF_{2}$ energy : 30KeV, dose : $5\times10^{15}cm^{-2}$] onto the n-well Si(100) region and RTA-silicidation of the evaporated Co($120\AA$)/Ti($40\AA$) double layer. The fabricated diode exhibited ideality factor of 1.06, specific contact resistance of $1.2\times10^{-6}\Omega\cdot\textrm{cm}^2$ and leakage current of $8.6\muA/\textrm{cm}^2$(-3V) under the reverse bias of 3V. The sheet resistance of silicided emitter region, the boron concentration at silicide/Si interface and the junction depth including silicide layer of ($500\AA$ were about $8\Omega\Box$, $6\times10^{19}cm^{-3}$, and $0.14\mu{m}$, respectively. In the fabrication of diode, the application of Co/Ti bilayer silicide brought improvement of ideality factor on the current-voltage characteristics as well as reduction of emitter sheet resistance and specific contact resistance, while it led to a little increase of leakage current.

• Journal of the Korean Wood Science and Technology
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• v.39 no.4
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• pp.318-325
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• 2011

Pitch pine (Pinus rigida Miller) retaining walls using Steel bar, of which the constructability and strength performance are good at the construction site, were manufactured and their strength properties were evaluated. The wooden retaining wall using Steel bar was piled into four stories stretcher and three stories header, which is 770 mm high, 2,890 mm length and 782 mm width. Retaining wall was made by inserting stretchers into Steel bar after making 18 mm diameter of holes at top and bottom stretcher, and then stacking other stretchers and headers which have a slit of 66 mm depth and 18 mm width. The strength properties of retaining walls were investigated by horizontal loading test, and the deformation of structure by image processing (AlCON 3D OPA-PRO system). Joint (Type-A) made with a single long stretcher and two headers, and joint (Type-B) made with two short stretchers connected with half lap joint and two headers were in the retaining wall using Steel bar. The compressive shear strength of joint was tested. Three replicates were used in each test. In horizontal loading test the strength was 1.6 times stronger in wooden retaining wall using Steel bar than in wooden retaining wall using square timber. The timber and joints were not fractured in the test. When testing compressive shear strength, the maximum load of type-A and Type-B was 130.13 kN and 130.6 kN, respectively. Constructability and strength were better in the wooden retaining wall using Steel bar than in wooden retaining wall using square timber.

• Progress in Medical Physics
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• v.12 no.2
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• pp.161-169
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• 2001

For the head and neck radiotherapy, the technique of half beam using independent collimator is very useful to avoid overlapping of fields particularly when the lateral neck fields are placed adjacent to anterior supraclavicular field. Also abutting photon field with electron field is frequently used for the irradiation of posterior neck when tolerable dose on spinal cord has been reached. Using 6 MV X-ray and 9 MeV electron beams of Clinac1800(Varian, USA) linear accelerator, we performed film dosimetry by the X-OMAT V film of Kodak in solid water phantom and the dose distribution at beam center of 2 half beams further examined according to depths(0 cm, 1.5 cm, 3 cm, 5 cm) for single anterior half beam and anterior/posterior half beam. The dose distribution to the junction line between photon and electron fields was also measured. For the single anterior half beam, the absorption doses at 0.3 cm, 0.5 cm and 1 cm distances from beam center were 88%, 93% and 95% of open beam, respectively. In the anterior/posterior half beams, the absorption doses at 0.3 cm, 0.5 cm and 1 cm distances from beam center were 92%, 93% and 95% of open beam, respectively At the junction line between photon and electron fields, hot spot was developed on the side of the photon field and a cold spot was developed on that of the electron field. The hot spot in the photon side was developed at depth 1.5 cm with 7 mm width. The maximum dose of hot spot was increased to 6% of reference doses in the photon field. The cold spot in the electron side was developed at all measured depths(0.5 cm-3 cm) with 1-12.5 mm widths. The decreased dose in the cold spot was 4.5-30% of reference dose in the electron field. With above results, we concluded that when using electron beam or independent jaw for head and neck radiotherapy, the hot and cold dose area should be considered as critical point.

• Proceedings of the KSEG Conference
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• 2005.04a
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• pp.101-106
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• 2005

The three-dimensional Tomography developed by Kim and Bae(2004) was applied to 64,024 P and 64,618 S wave arrival times observed at 238 seismic stations for 4050 local earthquakes in the depth range from 0 to 300 km in and around Hokkaido, Japan. High and low velocity zones for Vp/Vs were clearly imaged in and around Hokkaido. The upper seismic planes of the double seismic zone (DSZ) were found in the subducted Pacific Plate beneath Hokkaido at depth of 40- 80 km, which produced high seismicity around Hokkaido. The findings of high Vp/Vs anomalies beneath the Moho discontinuity supports an evidence of a surface triple-collision hypothesis prepared by Moriya(1994) that the Kuril Arc(Okhotsk Plate or North American Plate) is colliding against the NE Japanese Arc(Amurian Plate or Eurasian Plate), along and beneath the Hidaka Mountain Range, and at the same time the Pacific Plate is subducting into these two plates, making an equilibrium of tectonic forces along the Hikada Mountain Range (HMR) corner and the central tectonic axis(142 ~ 143E) in Hokkaido. The low Vp and Vs were also found in east and west along the central tectonic axis in which the focal mechanism represents the extensional forces. These phenomena are also consistent with low Bouguer gravity anomalies in this region. It is understood why most of great earthquakes occurred outside Hokkaido where the balance of tectonic forces are breaking from the triple junction of three tectonic forces in Hokkaido.

• Journal of the Korea Concrete Institute
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• v.14 no.3
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• pp.430-439
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• 2002

The development of reinforcing steel is required in reinforced concrete structures. The standard hooks that have been widely used for the tensile development in the beam-column joints tend to create difficulties of construction such as steel congestion as the member cross sections are becoming smaller due to the use of higher strength concrete and higher grade steel. Using the reinforcing bars with end mechanical anchoring device (headed reinforcement) provides potential economies in construction such as reduction in development lengths, simplified details, and improved responses to cyclic loadings. In this paper, the pullout strengths and behaviors of the headed reinforcement were experimentally studied. In 33 pullout tests performed using D25 deformed reinforcing bars, the test parameters were embedment depth, edge distance, head size, and the use of transverse reinforcement. The pullout strengths determined from tests closely agreed with the pullout strengths predicted using the CCD method. The pullout strengths increased with increasing embedment depths nd edge distances. The strengths tend to increase with the use of larger heads. From the experimental program where the effect of the transverse reinforcement was examined, a modification factor to the CCD was suggested to represent the effect of such reinforcement that is installed across the concrete failure plane on the pullout strengths.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.4
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• pp.606-612
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• 2019

The main causes of subsidence and sinkholes in the lower part of urban roads are sewage line foundation and inadequate compaction of backfill material. This leads to many problems, such as the breakage of joints in sewer pipes, poor connection, pipe breakage, and cracks. To solve this problem, the support factor related to the sewer foundation and the safety factor according to the excavation depth were evaluated. For the foundation of rigidity tolerance, crushed stone foundation, and abandoned concrete foundation, a recently newly developed site assembly-type lightweight plastic foundation were used. Backfill materials were applied on site (sandy soil and clayey soil) and fluid backfill was recycled onsite. To evaluate the depth of excavation and the safety factor of each sewer pipe foundation, the design load considering the load factor and the support factor was evaluated. The support coefficients were 0.377 for a crushed stone foundation, 0.243 and 0.220 for an abandoned concrete foundation ($180^{\circ}$ and $120^{\circ}$), and 0.231 for a lightweight plastic foundation and fluid backfill. Overall, the safety factor was low when using the crushed stone foundation, and the safety rate was the highest when the foreclosed concrete foundation ($180^{\circ}$) was used. In addition, when the combination of lightweight plastic and fluid backfill materials was used, the safety factor was higher than that of abandoned concrete foundation ($120^{\circ}$), which means that the newly developed lightweight plastic foundation can be used as another alternative base of a steel pipe.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.121-121
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• 2009

자동차는 코너 주행 시 In-corner와 Out-corner 의 바퀴 궤적이 달라지므로, 특별한 장치가 없이 좌우 구동 측의 바퀴가 같은 속도로 회전을 하게 되면 정상적인 주행이 불가능하다. 따라서 정상적인 코너 주행이 가능 하려면, 코너 안쪽 바퀴보다 바깥쪽 바퀴가 더 빨리 회전해야 하며 이러한 회전 차를 보상받지 못할 경우 바깥쪽 바퀴가 끌리는 현상이 발생하는데 이를 방지하기 위해 디퍼렌셜 기어가 필요하다. 현재 디퍼렌셜 기어는 디퍼렌셜 케이스와 링기어를 볼트로 체결하는 조립 공법을 통해 생산되고 있다. 하지만 볼트 체결 공법은 조립을 위한 볼트와 볼트 체결을 위한 플랜지와 볼팅을 위한 홀을 가공하는 공정이 필요하기 때문에 재료비 절감 및 생산 효율 향상에 매우 불리하고 볼트체결을 위한 부분 때문에 불필요한 무게가 증가하게 된다. 따라서 본 연구에서는 이러한 기계적 체결 방식을 레이저 용접 방식으로 대체하여 재료비를 절감하고 무게 저감을 통해 주행성능을 향상시키고자 하였다. 링기어의 소재는 침탄처리강(SCM420H)이며 디퍼렌셜 케이스의 소재는 주철(GCD500)을 사용하고 있다. 주철은 용접시 용접부와 열영향부에서 마르텐사이트 조직과 레데브라이트, 시멘타이트 조직이 생성되며 고탄소 모재의 탄소 확산으로 인한 부분 혼합영역에서 탄소 합금이 생성되어 균열이 발생하는 등 용접성이 매우 좋지 않은 것으로 알려져 있다. 이러한 주철의 난용접성을 해결하는 방법으로는 고탄소 모재 용접시 발생하는 탄소의 확산을 억제하거나 예열이나 후열 처리를 통한 냉각 속도의 제어하는 방법과 오스테나이트 안정화 원소를 첨가한 필러와이어를 사용하여 용접시 마르텐사이트와 시멘타이트의 성장을 방해하는 방법 등이 이용되고 있다. 본 연구에서는 예열처리나 후열처리를 통한 주철의 용접법은 대량 생산을 통한 원가절감을 노리는 자동차 업계의 특성에 비추어 볼 때 비용이나 프로세스 구성 면에서 적용하는 것이 어려울 것이라 판단하여 Ni-base filler metal을 통한 주철의 용접법을 선택하였고 그 결과 실차에 적용하기 위한 비틀림 강성 테스트나 내구 테스트는 통과하였으나 NVH 테스트 결과 볼팅 체결 방식에 비하여 소음이 커지는 문제가 발생하고 링기어의 HAZ부가 고경화 되는 문제가 발생하였다. 때문에 용입깊이를 초기 시제품인 5mm에서 4mm로 변경시켜 입열량 감소 및 용접변형을 줄여 소음 문제를 해결하고자 하였으며 링기어의 침탄층을 1mm 절삭하여 링기어 HAZ부의 고경화 문제를 해결하고자 하였다. 이러한 용접 구조 변경이 용접변형 및 강성과 피로에 미치는 영향력을 알아보고자 용접 및 열처리 상용 소프트웨어인 SYSWELD, 구조해석 상용소프트웨어인 NX_NASTRAN, 피로 해석 상용 소프트웨어인 FEMFAT을 이용하여 시뮬레이션 하였고 실제 구조 변경한 용접 시제품과 비교, 분석하였다.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1830-1832
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• 1999

고에너지 이온주입(1)에 기인한 격자 손상 발생 및 열처리에 따라 이들의 회복이 어느정도 가능한지에 대하여 측정 및 분석방법을 통하여 조사하였다. 그리고 본 실험에서는 이온주입시 형성되는 빈자리 결함(Vacancy defect)과 격자간 결함(interstitial defect)의 재결할(recombination)을 이용 점결합(point defect)를 감소 시킬 수 있는 effective RTA조건을 설정하여 well 특성을 개선하고자 하였다. 8inch p-type Si(100)기판에 pad oxide 100A을 형성한 후 NMOS 형성하기 위해 vtn${\sim}$p-well과 PMOS 형성을 위해 vtp$\sim$n-well을 이온주입 하였다. Mev damage anneal은 RTA(2)(Rapid Thermal Anneal)로 $1000\sim1150C$ 온도에서 $15\sim60$초간 spilt 하여 실험후 suprem-4 simulation data를 이용하여 실제 SIMS측정 분석결과를 비교하였으며 이온주입에 의해 발생된 격자손상이 열처리후 damage 정도를 알아보기 위해 T.W(Therma-Wave)을 이용하였으며 열처리후 면저항값은 4-point probe를 사용하였다. 이온주입후 열처리 전,후에 따른 불순물 분포를 SIMS(Secondary ion Mass Spectrometry)를 이용하여 살펴보았다. SIMS 결과로는 열처리 온도 및 시간의 증가에 따라서 dopant확산 및 활성화는 큰차이는 보이지 않고 오히려 감소하는 경향을 볼 수 있으며 또한 접합깊이와 농도가 약간 낮아지는 것을 볼 수 있었다. 결점(defect)을 감소시키기 위해서 diffusivity가 빠른 임계온도영역($1150^{\circ}C$-60sec)에서 RTA를 실시하여 dopant확산을 억제하고 점결점(point defect)의 재결합(recombination)을 이용하여 전위 (dislocation)밀도를 감소시켜 이온주입 Damage 및 면저항을 감소 시켰다. 이와 같은 특성을 process simulation(3)(silvaco)을 통하여 비교검토 하였다.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.116-126
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• 2009

It is becoming more difficult to improve the device operating speed by shrinking the size of semiconductor devices. Therefore, for a new leap forward in the semiconductor industry, the advent of silicon opto-electronic devices, i.e., silicon photonics is more desperate. Silicon Avalanche LED is one of the prospective candidates to realize the practical silicon opto-electronic devices due to its simplicity of fabrication, repeatability, stability, high speed operation, and compatibility with silicon IC processing. We conducted the measurement of the electrical characteristics and the observation of the light-emitting phenomena using optical microscopy. We analyzed the influence of the design elements such as the shape of the light-emitting area and the depth of the $n^{+}-p^{+}$ junction with simple device modeling and simulation. We compared the results of simulation and the measurement and explained the discrepancy between the results of the simulation and the measurement, and the suggestions for the improvement were given.