• Title/Summary/Keyword: 접합의 깊이

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InSb 적외선 감지 소자용 $Si_3N_4$, $SiO_2$ 절연막 계면 특성 연구

  • Park, Se-Hun;Lee, Jae-Yeol;Kim, Jeong-Seop;Kim, Su-Jin;Seok, Cheol-Gyun;Yang, Chang-Jae;Park, Jin-Seop;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.163-163
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    • 2010
  • 중적외선 영역 ($3{\sim}5\;{\mu}m$)은 공기 중에 존재하는 이산화탄소나 수증기에 의해 흡수가 일어나지 않기 때문에 군사적으로 중요한 파장 영역이며, 야간에 적을 탐지하는데 응용되고 있다. InSb는 77 K에서 중적외선 파장 흡수에 적합한 밴드갭 에너지 (0.228 eV)를 갖고 있으며, 다른 화합물 반도체와 달리 전하 수송자 이동도 (전자: $10^6\;cm^2/Vs$, 정공: $10^4\;cm^2/Vs$)가 매우 빠르기 때문에 적외선 화상 감지기 재료로 매우 적합하다. 또한 현재 중적외선 영역대에서 널리 사용되는 HgCdTe (MCT)와 대등한 소자 성능을 나타냄과 동시에 낮은 기판 가격, 소자의 제작 용이성 때문에 MCT를 대체할 물질로 주목 받고 있다. 하지만, 기판과 절연막의 계면에 존재하는 결함 때문에 에너지 밴드갭 내에 에너지 준위를 형성하여 높은 누설 전류 특성을 보인다. 따라서 InSb 적외선 소자의 구현을 위하여 고품질의 절연막의 연구가 필수적이라고 할 수 있겠다. 절연막의 특성을 알아보기 위해, n형 InSb 기판에 플라즈마 화학 기상 증착법 (PECVD)을 이용하여 $SiO_2$, $Si_3N_4$를 증착하였으며, 증착 온도를 $120^{\circ}C$에서 $240^{\circ}C$까지 $40^{\circ}C$ 간격으로 변화하여 증착온도가 미치는 영향에 대하여 알아보았다. 절연막과 기판의 계면 특성을 분석하기 위하여 77 K에서 커패시턴스-전압 (C-V) 분석을 하였으며, 계면 트랩 밀도는 Terman method를 이용하여 계산하였다 [1]. $Si_3N_4$를 증착하였을 경우, $120{\sim}240^{\circ}C$의 증착 온도에서 $2.4{\sim}4.9{\times}10^{12}\;cm^{-2}eV^{-1}$의 계면 트랩 밀도를 가졌으며, 증착 온도가 증가할수록 계면 트랩 밀도가 증가하는 경향을 보였다. 또한 모든 증착 온도에서 flat band voltage가 음의 전압으로 이동하였다. $SiO_2$의 경우 $120{\sim}200^{\circ}C$의 증착온도에서 $7.1{\sim}7.3{\times}10^{11}\;cm^{-2}eV^{-1}$의 계면 트랩 밀도 값을 보였으나, $240^{\circ}C$ 이상에서 계면 트랩밀도가 $12{\times}10^{11}\;cm^{-2}eV^{-1}$로 크게 증가하였다. $SiO_2$ 절연막을 사용함으로써, $Si_3N_4$ 대비 약 25% 정도 낮은 계면 트랩 밀도를 얻을 수 있었으며, 모든 증착 온도에서 양의 전압으로 flat band voltage가 이동하였다. 두 절연막에 대한 계면 트랩의 원인을 분석하기 위하여 XPS 측정을 진행하였으며, 깊이에 따른 조성 분석을 하였다. 본 실험에서 최적화된 $SiO_2$ 절연막을 이용하여 InSb 소자의 pn 접합 연구를 진행하였다. Be+ 이온 주입을 진행하고, 급속열처리(RTA) 공정을 통하여 p층을 형성하였다. -0.1 V에서 16 nA의 누설 전류 값을 보였으며, $2.6{\times}10^3\;{\Omega}\;cm^2$의 RoA (zero bias resistance area)를 얻을 수 있었다.

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Characteristics of Dose Distribution at Junctional Area Using the Divergency Cutout Block in the Abutted Field of Photon and Electron Beams (광자선과 전자선의 인접조사에서 선속 퍼짐현상이 고려된 전자선 차폐물을 이용한 접합 조사면의 선량분포 특성)

  • Im, In-Chul;Lee, Jae-Seung
    • Journal of Radiation Protection and Research
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    • v.36 no.3
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    • pp.168-173
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    • 2011
  • This study investigated characteristics of dose distribution at junction field of X-ray and electron beams according to the method for fabricating the insert block on the electron cone. Insert block were fabricated to the divergency cutout block and the straight cutout block. For the 6 MV X-ray and 10 MeV nominal energy of electron beam, we was adjacent to the light field of X-ray and electron beam at a surface of matrix chamber and measured to beam profile of abutted field in the 0, 1, 2, 3 cm measurement depth. As a result, characteristics of dose distribution at junction field, straight block was existent that over dose area exceed the give dose more than 5% and under dose area with a rapid change in dose distribution. However, divergency block had remarkably decreased the over dose area caused by the lateral scattering effects of decrease, and being existed uniformity dose distribution in the junction field. Therefore, divergency block were the benefits of radiation dose delivery, in order to applied the clinical, measurement of electron beams according to the fabrication method of the block should be considered carefully.

On the Crystal Growth of Gap by Synthesis Solute Diffusion Method and Electroluminescence Properties. (합성용질확산법에 의한 GaP결정의 성장과 전기루미네센스 특성)

  • Kim, Seon-Tae;Mun, Dong-Chan
    • Korean Journal of Materials Research
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    • v.3 no.2
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    • pp.121-130
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    • 1993
  • The GaP crystals were grown by synthesis solute diffusion method and its properties were investigated. High quality single crystals were obtained by pull-down the crystal growing ampoule with velocity of 1.75mm/day. Etch pits density along vertical direction of ingot was increased from 3.8 ${\times}{10^4}$c$m^{-2}$ of the first freeze to 2.3 ${\times}{10^5}$c$m^2$ of the last freeze part. The carrier concentration and mobilities at room temperature were measured to 197.49cc$m^2$/V.sec and 6.75 ${\times}{10^{15}}$c$m^{-3]$, respectively. The temperature dependence of optical energy gap was empirically fitted to $E_g$(T)=[2.3383-(6.082${\times}{10^{-4}}$)$T^2$/(373. 096+TJeV. Photoluminescence spectra measured at low temperature were consist with sharp line-spectra near band-gap energy due to bound-exciton and phonon participation in band edge recombination process. Zn-diffusion depth in GaP was increased with square root of diffusion time and temperature dependence of diffusion coefficient was D(Tl = 3.2 ${\times}{10^3}$exp( - 3.486/$k_{\theta}$T)c$m^2$/sec. Electroluminescence spectra of p-n GaP homojunction diode are consisted with emission at 630nm due to recombination of donor in Zn-O complex center with shallow acceptors and near band edge emission at 550nm. Photon emission at current injection level of lower than 100m A was due to the band-filling mechanism.

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Conservation of The Human Shaped Terra Cotta Mask Excavated from Jungcheon-ri, Jinju (진주 중천리 출토 인두형토기(人頭形土器)의 보존)

  • Lee, Hyunkyoung;Choi, Hyunwook;Lee, Seungli;Gwak, Hongin
    • Conservation Science in Museum
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    • v.14
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    • pp.23-28
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    • 2013
  • This paper aimed to show the whole conservation process of the human shaped terra cotta mask that was excavated from one of construction sites at Jungcheon-ri, Geumsan-myeon, Jinju. This mask was X-rayed to get the correct making techniques and there are 4 holes on the top of the head and each diameter of the 3 holes is exact and the other hole is different from the three. The long and sharp shape of the nose is in trapezoid which was separately made with clay and put on (the face). It's found that there are round grooves each around upper and down lips. (upper in length: 10mm, down in length: 6 mm). All restoring materials and adhesives used for restoration to associate each piece are reversibility materials. According to a few points on buried bones of animals distributed around the sites, holes and grooves on the top of the head, ears and teeth to wear something, it academically presumes that this mask could be possibly used for the group ritual. Especially, the whole procedure from excavation to scientific conservation process resulted to have a special exhibition to give the public new eyes how the exhibition realizes to the public.

Studies on the Juvenile Grafts with Plastic Tubes for Forcing Stock Growth in Juglans sinensis (호도나무 대목촉성재(臺木促成材) Plastic원통(圓筒)을 이용(利用)한 유경녹기(幼莖綠技) 접목(接木)에 관(關)한 연구(硏究))

  • Youn, Ki Sik;Goo, Gwan Hyo;Jo, Chung Suk
    • Journal of Korean Society of Forest Science
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    • v.78 no.2
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    • pp.189-197
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    • 1989
  • This study was carried out to produce the grafts of Juglans sinensis by juvenile grafting method which epicotyl of newly germinated seeds were used as stocks and juvenile fresh shoots were used as scion. The results obtained were as follows ; 1. When plastic tube installed covering up seed with soil up to 6cm height for diameter increment of epicotyl, the epicotyl can be grown up to thickness of 10mm. 2. When the soft fruit branches and the soft water sprout with the terminal bud 8cm to 12cm long were used as scions, the survival rates showed 90 Percent. 3. The optimum date for making juvenile grafts was around the 20th of May, and the survival rates of grafted seedlings showed 86 percent in average. 4. The grafted seedlings showed first sprouting the 15th of June, that is 25 days after making graft, and the sprouting rate was 72 percent. 5. The height-growth of grafted seedlings finished at the end of July, and diameter growth lasted into the end of October. 6. There was positive correlation between the height of grafted seedlings and the diameter at root collar. 7. In general, it takes two years to make plantable graft seedlings from hardwood scion and stock, but the juvenile graft seedlings can be easily obtained in a year and so it seems to be economic.

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Application of Laser Surface Treatment Technique for Adhesive Bonding of Carbon Fiber Reinforced Composites (탄소복합재 접착공정을 위한 CFRP의 레이저 표면처리 기법의 적용)

  • Hwang, Mun-Young;Kang, Lae-Hyong;Huh, Mongyoung
    • Composites Research
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    • v.33 no.6
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    • pp.371-376
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    • 2020
  • The adhesive strength can be improved through surface treatment. The most common method is to improve physical bonding by varying the surface conditions. This study presents the effect of laser surface treatment on the adhesive strength of CFRP. The surface roughness was patterned using a 1064 nm laser. The effects of the number of laser shots and the direction and length of the pattern on the adhesion of the CFRP/CFRP single joint were investigated through tensile tests. Tests according to ASTM D5868 were performed, and the bonding mechanism was determined by analyzing the damaged surface after a fracture. The optimized number of the laser shots and the optimized depth of the roughness should be required to increase the bonding strength on the CFRP surface. When considering the shear stress in the tensile direction, the roughness pattern in the direction of 45° that increases the length of the fracture path in the adhesive layer resulted in an increase of the adhesive strength. The surface treatment of the bonding surface using a laser is a suitable method to acquire a mechanical bonding mechanism and improve the bonding strength of the CFRP bonding joint. The study on the optimized laser process parameters is required for utilizing the benefits of laser surface processing.

Pullout Tests on M12&M20 Stainless Steel Post-Installed Expansion Anchor for Seismic Design in Cracked Concrete (균열 콘크리트에 설치된 M12, M20 내진용 스테인리스스틸 확장식 후설치 앵커 인장 실험)

  • Kim, Jin-Gyu;Chun, Sung-Chul;An, Yeong-Seung
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.26 no.1
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    • pp.29-38
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    • 2022
  • Recently, seismic design for anchors is required, which are used for connecting structural members and non-structural and structural members. In this study, pull-out tests on the new expansion anchors which have been developed for cracked concrete. The anchors of 12 mm and 20 mm diameters were tested which are commonly used. Experiments were conducted on non-cracked concrete and cracked concrete to evaluate the seismic performance of the post-installed anchor. The experimental method complies with the specified test protocol (KCI, 2018). Three experimental variables are included in this study: presence of cracks, concrete compressive strength, and effective embedment depth. The strength of the anchors was evaluated with the characteristic capacity K5% determined from the test results incorporated with the safety of 5% fractile. The characteristic capacity K5% of the non-cracked and cracked concrete specified in KDS 14 20 54 are 9.8 and 7.0, respectively. Test results show that all groups except the three groups have higher characteristic capacity K5% than the KDS code and the nominal strengths of the tested anchors can be determined with the obtained characteristic capacity K5%.

Bond Characteristics and Splitting Bond Stress on Steel Fiber Reinforced Reactive Powder Concrete (강섬유로 보강된 반응성 분체 콘크리트의 부착특성과 쪼갬인장강도)

  • Choi, Hyun-Ki;Bae, Baek-Il;Choi, Chang-Sik
    • Journal of the Korea Concrete Institute
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    • v.26 no.5
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    • pp.651-660
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    • 2014
  • Structural members using ultra high strength concrete which usually used with steel fiber is designed with guidelines based on several investigation of SF-RPC(steel fiber reinforced reactive powder concrete). However, there are not clear design method yet. Especially, SF-RPC member should be casted with steam(90 degree delicious) and members with SF-RPC usually used with precast members. Although the most important design parameter is development method between SF-RPC and steel reinforcement(rebar), there are no clear design method in the SF-RPC member design guidelines. There are many controversial problems on safety and economy. Therefore, in order to make design more optimum safe design, in this study, we investigated bond stress between steel rebar and SF-RPC according to test. Test results were compared with previously suggested analysis method. Test was carried out with direct pull out test using variables of compressive strength of concrete, concrete cover and inclusion ratio of steel fiber. According to test results, bond stress between steel rebar and SF-RPC increased with increase of compressive strength of concrete and concrete cover. Increasing rate of bond stress were decrease with increase of compressive strength of SF-RPC and concrete cover significantly. 1% volume fraction inclusion of steel fiber increase the bond stress between steel rebar and SF-RPC with two times but 2% volume fraction cannot affect the bond stress significantly. There are no exact or empirical equations for evaluation of SF-RPC bond stress. In order to make safe bond design of SF-RPC precast members, previously suggested analysis method for bond stress by Tepfers were evaluated. This method have shown good agreement with test results, especially for steel fiber reinforced RPC.

Effect of rhPMP-2 coated implants on alveolar ridge augmentation in dogs (성견에서 골형성단백질이 코팅된 임플란트가 치조골 증대에 미치는 영향)

  • Park, Chan-Kyung;Kim, Jong-Eun;Shin, Ju-Hee;Ryu, Jae-Jun;Huh, Jung-Bo;Shin, Sang-Wan
    • The Journal of Korean Academy of Prosthodontics
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    • v.48 no.3
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    • pp.202-208
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    • 2010
  • Purpose: This study was aimed to evaluate the effect of rhPMP-2 coated implants on alveolar ridge augmentation in dogs. Materials and methods: Six Beagle dogs were used in this study. Six 8.0 mm long anodized surface titanium implants were placed 5 mm into the mandibular alveolar ridge following 6 month of healing period after extraction. Each animal received three implants coated with rhBMP-2 and three uncoated control implants using the randomized split-mouth design. Radiographic examinations were undertaken immediately at implant placement (baseline), at weeks 4 and 8 after implant placement. The amount of bone augmentation was evaluated by measuring the distance from the uppermost point of the coverscrew to the marginal bone. Implant Stability Quotient (ISQ) values were measured immediately at implant placement and 8 weeks after implant placement. For the statistical analysis, Man-Whitney ranksum test and Wilcoxon signed rank test of SPSS 12.0 software were used (P=.05). Results: The BMP group exhibited radiographic vertical bone augmentation about $0.6{\pm}0.7$ mm at 8 weeks later while controls showed bone loss about $0.4{\pm}0.6$ mm. There was significant difference among the rhBMP-2 group and controls in bone level change (P<.05). The ISQ values were significantly higher in the BMP-2 group than the control group at 8 weeks later (P<.05), while there was no significant difference at surgery. Conclusion: Within the limitation of this study, the rhBMP-2 coated on anodized implant could stimulate vertical alveolar bone augmentation, which may increase implant stability significantly on completely healed alveolar ridge.