• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.412-412
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• 2010

플라즈마는 미세 전기 소자 제작에 있어 박막의 증착, 식각, 세정등 여러 가지 공정에서 널리 사용되고 있다. 미세 소자의 선폭의 감소와 높은 생산성을 위한 웨이퍼 면적의 대형화가 진행됨에 따라 플라즈마의 균일도는 공정 수율 향상의 관점에서 중요한 요소로 그것의 계측과 공정 중 실시간 감시에 필요성이 부각되고 있다. 플라즈마에 존재하는 라디칼의 밀도, 이온의 밀도, 전자 온도 등의 웨이퍼 상에서의 공간 분포와 공정 결과물과의 상관관계에 대한 연구는 현재까지 다양하게 진행 되었으며 특히, 라디칼의 공간 분포가 공정 결과물의 균일도와 큰 상관 관계가 있는 것으로 알려져 있다. 라디칼의 농도 분포를 계측은 레이저 유도 형광법, 발광 분광법, 흡수 분광법 등을 통하여 이루어져 왔으며, 특히 발광 분광법의 경우 계측의 민감성, 편의성등을 이유로 가장 널리 사용되고 있다. 그러나 현재 까지 진행된 발광 분광법을 이용한 라디칼의 공간 분포 계측은 그 자체로 공간 분포를 계측하는 것이 아닌 플라즈마 밀도의 축 대칭성을 가정하여 Abel inversion을 적용하거나, 광섬유를 플라즈마에 직접 삽입하는 방식을 사용하기 때문에 실제 반도체 제작공정을 비롯한 미세소자 공정 플라즈마의 라디칼 밀도 분포를 실시간, 비 접촉 방식으로 계측 하는데 한계가 있다. 본 연구에서는 반도체 공정 플라즈마의 밀도 균일성 분석을 위한 공간 분해 발광 분광기를 제안한다. 기존의 발광 분광법과 비교하여 공간 분해능 향상을 위하여 직렬로 설치된 다수의 렌즈, 개구, 그리고 핀홀을 이용하였다. 공간 분해 발광 분광기의 공간 분해능을 계산하였으며, 실험을 통하여 검증 하였다. 또, HDP CVD를 이용한 $SiO_2$ 박막 증착 공정에서 산소 라디칼의 농도와 증착된 박막의 두께 분포의 상관 관계를 계측 함으로써 공간 분해 발광 분광기의 플라즈마 공정 적용 가능성 입증 하였다.

• Journal of Korean Ophthalmic Optics Society
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• v.19 no.2
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• pp.171-177
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• 2014

Purpose: The present study was conducted to investigate whether the elution of the dyes from the circle contact lenses existed or not when rubbed with cotton swab. Methods: The change of lens surface was observed by scanning electron microscope when a total of seven kinds of circle contact lens were rubbed with cotton swab, and the dye elution was further compared when the lenses were soaked in multi-purpose solution in $20^{\circ}C$ and $36.5^{\circ}C$ for a week. Results: Five of a total of 7 circle contact lenses showed the dye elution from the front or the back surface of the lens when rubbed with cotton swabs, and existence of dye elution was varied depending on the type of contact lenses and different at the front and back surface even in the same lens. The tear-off of the pigmented portion by the rubbing was found through scanning electron microscopic observation when the dye elution existed. However, the dye was not eluted when the circle contact lenses was soaked in a multi-purpose solution in $20^{\circ}C$ or $36.5^{\circ}C$ for a week. Ingredient of colorant was not provided by the manufacturers in more than 50% of the circle contact lenses investigated for this study and the basic information such as the pigmentation method was provided inappropriately. Conclusions: In this study, the result was the dye elution from circle contact lenses was obtained when a physical force is applied thus, it may appear to contribute the development of circle contact lenses and safety of lens wear.

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.7
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• pp.138-143
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• 2016

The designed and fabricated millimeter-wave security screening system receives radiation energy from an object and a human body. The imaging system consist of sixteen array antennas, sixteen four-stage LNAs, sixteen detectors, an infrared camera, a CCD camera, reflector, and a focusing lens. This system requires high sensitivity and wide bandwidth to detect the input thermal noise. The LNA module of the system has been measured to have 65.8 dB in average linear gain and 82 GHz~102 GHz in bandwidth to enhance the sensitivity for thermal noise, and to receive it over a wide bandwidth. The detector is used for direct current (DC) output translation of millimeter-wave signals with a zero bias Schottky diode. The lens and front-end of the millimeter-wave sensor are important in the system to detect the input thermal noise signal. The frequency range in the receiving sensitivity of the detectors was 350 to 400 mV/mW at 0 dBm (1 mW) input power. The developed W-band imaging system is effective for detecting and identifying concealed objects such as metal or plastic.

• The Journal of the Korea institute of electronic communication sciences
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• v.10 no.4
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• pp.499-505
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• 2015

Trend Impact Analysis(: TIA) is an advanced forecasting tool used in futures studies for identifying, understanding and analyzing the consequences of unprecedented events on future trends. An adaptive neuro-fuzzy inference system is a kind of artificial neural network that integrates both neural networks and fuzzy logic principles, It is considered to be a universal estimator. In this paper, we propose an advanced mechanism to generate more justifiable estimates to the probability of occurrence of an unprecedented event as a function of time with different degrees of severity using Adaptive Neuro-Fuzzy Inference System(: ANFIS). The key idea of the paper is to enhance the generic process of reasoning with fuzzy logic and neural network by adding the additional step of attributes simulation, as unprecedented events do not occur all of a sudden but rather their occurrence is affected by change in the values of a set of attributes. An ANFIS approach is used to identify the occurrence and severity of an event, depending on the values of its trigger attributes. The trigger attributes can be calculated by a stochastic dynamic model; then different scenarios are generated using Monte-Carlo simulation. To compare the proposed method, a simple simulation is provided concerning the impact of river basin drought on the annual flow of water into a lake.

• Journal of the Mineralogical Society of Korea
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• v.7 no.1
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• pp.14-24
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• 1994

The Sungsan clay deposits have been formed by the hydrothermal alteration of volcanic and volcanoclastic rocks of the Hwangsan Formation of Cretaceous age. Claystones are mainly composed of dickite, alunite, illitic minerals and tosudite. The mineralogical properties of clay minerals have been studied using X-ray diffraction analysis, electron microscopy, electron microprobe analysis, and infrared absorption analysis. The physicochemical condition for the clay deposits also have been studied by the activity diagrams and mineral assemblages. Dickite, the dominant mineral in clay deposits, occurs generally as massive aggregates. It shows book-structure of well-defined hexagonal plates. Chemistry of dickite agrees with its ideal formula. Peak depth ratios in infrared absorption spectra were used for discrimination between pure and mixture of kaolin minerals. Five hydrothermal alteration zones are divided according to the mineral assemblages. From center to margin, alunite, dickite, illite and albite zones are discernible. Quartz zone occurs as small lenticular form in dickite zone. The formation of dickite and illite zones are promoted by decreasing $a_{k^+}$. An increase in $a_{H_{2}SO_{4}}$ or $a_{K_{2}SO_{4}}$ is required for the formation of alunite zone. Estimated temperature of formation ranges 110-270 $^{\circ}C$

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.48 no.3
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• pp.1-12
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• 2011

Large-sized multi-touch screen is usually made using infrared rays. That is because it has technical constraints or cost problems to make the screen with the other ways using such as existing resistive overlays, capacitive overlay, or acoustic wave. Using infrared rays to make multi-touch screen is easy, but is likely to have technical limits to be implemented. To make up for these technical problems, two other methods were suggested through Surface project, which is a next generation user-interface concept of Microsoft. One is Frustrated Total Internal Reflection (FTIR) which uses infrared cameras, the other is Diffuse Illumination (DI). FTIR and DI are easy to be implemented in large screens and are not influenced by the number of touch points. Although FTIR method has an advantage in detecting touch-points, it also has lots of disadvantages such as screen size limit, quality of the materials, the module for infrared LED arrays, and high consuming power. On the other hand, DI method has difficulty in detecting touch-points because of it's structural problems but makes it possible to solve the problem of FTIR. In this thesis, we study the algorithms for effectively correcting the distort phenomenon of optical lens, and image processing algorithms in order to solve the touch detecting problem of the original DI method. Moreover, we suggest calibration algorithms for improving the accuracy of multi-touch, and a new tracking technique for accurate movement and gesture of the touch device. To verify our approaches, we implemented a table-based multi touch screen.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.6
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• pp.537-546
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• 2019

The paper actualizes the twin camera module system that is portable and very useful for the production of 3D contents. The suggested twin camera module system is a system to be able to display the 3D image after converting the inputted image from 2D stereo camera. To evaluate the performance of the twin camera module suggested in this paper, I assessed the correction of Rotation and Tilt created depending on the visual difference between the left and right stereoscopic image shot by the left and right lenses by using the Test Platform. In addition, I verified the efficiency of the twin camera module system through verifying Depth Error of 3D stereoscopic image by means of Scale Invariant Feature Transform(SIFT) algorithm. I think that if the user utilizes the suggested twin camera module system in displaying the image to the external after converting the shot image into the 3D stereoscopic image and the preparation image, it is possible to display the image in a matched way with an output device fit respectively for different 3D image production methods and if the user utilizes the system in displaying the created image in the form of the 3D stereoscopic image and the preparation image via different channels, it is possible to produce 3D image contents easily and conveniently with applying to lots of products.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.43-49
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• 1992

RHEED apparatus which is one of the systems of surface structure analysis has been constructed.Electron beam is focused by means of magnetic lens, and the beam divergence is about $1{\times}10^{-3}$ rad. The Acceleration voltage of this RHEED apparatus is continuously variable from 0 to 20 kV. K and Cs-adsorbed structureson Si(111)$7{\times}7$ surface at room and high temperatures($200{\times}700^{\circ}C$) have been investigated by RHEED. It is observed that the K and Cs-adsorbed Si(111)surface structures at saturation coverage are Si(111)$7{\tiems}7-K$ and Si(111)$1{\tiems}1-Cs$ at room temperature, respectively. When the specimen temperature was elevated during evaporation,the $3{\times}1$ structure appears in the range of temperature between $300^{\circ}C$ and $550^{\circ}C$, and the $1{\tiems}1$ structure appears above $550^{\circ}C$ in K/Si(111)system. Also, in Cs/Si(111) system the $\sqrt{3}{\times}\sqrt{3}$ structure appears at $300^{\circ}C$, and the $\sqrt{3}{\times}\sqrt{3}+3{\times}1$ structure appears between $350^{\circ}C$ and $400^{\circ}C$.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.9
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• pp.31-37
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• 2000

An angular selectivity through the focused readout beam is geometrically analyzed and experimental results are presented. Based on the analysis of geometrical results, we derive a new relation that the angular selectivity depends on incident conditions of the readout beam and independent on the writing conditions. In order to demonstrate our theory, we investigate angular selectivity as functions of following factors: writing beam incident angle, readout beam width and lens focal length. From the experimental results, it is shown that the angular selectivities are 2.632$^{\circ}$, 2.618$^{\circ}$, 2.604$^{\circ}$ when the external half-crossing angles of writing beam are 8$^{\circ}$, 10$^{\circ}$, 14$^{\circ}$, respectively. Applying the same incident angle of the recording beam, angular selectivity is changed by the control of readout beam width and then their properties are 2.632$^{\circ}$, 0.588$^{\circ}$. From these results, we have known that the angular selectivity is very critical to incident conditions of readout beam.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.46 no.4
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• pp.97-107
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• 2009

In image-based gait recognition systems, physical factors, such as the camera angle and the lens distortion, and environmental factors such as illumination determines the performance of recognition. In this paper we present a robust gait recognition method by compensating various types of image distortions. The proposed method is compared with existing gait recognition algorithm with consideration of both physical and environmental distortion factors in the input image. More specifically, we first present an efficient compensation algorithm of image distortion by using the projective transform, and test the feasibility of the proposed algorithm by comparing the recognition performances with and without the compensation process. Proposed method gives universal gait data which is invariant to both distance and environment. Gained data improved gait recognition rate about 41.5% in indoor image and about 55.5% in outdoor image. Proposed method can be used effectively in database(DB) construction, searching and tracking of specific objects.