• Title/Summary/Keyword: 전기적 접촉 저항

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Electrical characterization of n-ZnO/p-Si heterojunction diode grown by MOCVD (MOCVD를 이용해 성장한 n-ZnO/p-Si 이종접합 다이오드의 전기적 특성 평가)

  • Han, Won-Seok;Gong, Bo-Hyeon;Kim, Dong-Chan;Jo, Hyeong-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.143-144
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    • 2007
  • 저온 성장이 가능한 MOCVD를 이용하여 단결정 p-Si 기판위에 n-ZnO를 산소분압을 달리하여 성장하였다. 산소유량에 따른 이종접합 다이오드의 전기적 특성을 평가하기위하여 n-ZnO의 전기전도도, 이동도, 캐리어 농도를 측정하였으며, 소자에 저항성 접촉(ohmic contact) 전극을 형성하여 전류-전압 특성을 파악하였다.

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Theoretical and experimental studies on influence of electrode variations in electrical resistivity survey for tunnel ahead prediction (터널 굴착면 전방조사를 위한 전기비저항 탐사에서 전극의 변화가 미치는 영향에 대한 이론 및 실험연구)

  • Hong, Chang-Ho;Chong, Song-Hun;Hong, Eun-Soo;Cho, Gye-Chun;Kwon, Tae-Hyuk
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.21 no.2
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    • pp.267-278
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    • 2019
  • Variety of tunnel ahead prediction methods have been performed for safe tunnel construction during tunnel excavation. Pole-pole array among the electrical resistivity survey, which is one of the tunnel ahead prediction method, has been utilized to predict water-bearing sediments or weak zone located within 5 times of tunnel diameter. One of the most important processes is the estimation of virgin ground resistivity and it can be obtained from the following process: 1) calculation of contact area between the electrodes and the medium, and 2) assumption of the electrodes as equivalent spherical electrodes which have a same surface area with the electrodes. This assumption is valid in a small contact area and sufficient distance between the electrodes. Since the measured resistance, in general, varies with the electrode size, shape, and distance between the electrodes, it is necessary to evaluate the influence of these factors. In this study, theoretical equations were derived and experimental tests were conducted considering the electrode size, shape, and distance of cylindrical electrodes which is the most commonly utilized electrode shape. Through this theoretical and experimental study, it is known that one should be careful to use the assumption of the equivalent half-spherical electrode with large ratio between the penetrated depth and radius of the cylindrical electrode, as the error may get larger.

The Electrical Characteristics of Pentacene Thin-Film for the active layer of Organic TFT deposited at the Various Evaporation conditions and the Annealing Temperatures (증착조건 및 열처리 온도에 따른 유기 TFT의 활성층용 펜타센 박막의 전기적 특성 연구)

  • 구본원;정민경;김도현;송정근
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.80-83
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    • 2000
  • In this work we deposited Pentacene thin film by OMBD at the various substrate temperatures, deposition rate and the various annealing temperatures for the fabrication of organic TFT and investigated the electrical and film surface characteristics such as sheet resistance, contact resistance and conductance Film thickness were measured by $\alpha$-step and the sheet resistance, contact resistance and conductance were extracted from the relation between the distance of the contacts and the resistance. During the film deposition the substrate temperature was held at 3$0^{\circ}C$, 4$0^{\circ}C$, 5$0^{\circ}C$, 6$0^{\circ}C$, 8$0^{\circ}C$ and 10$0^{\circ}C$, respectively. After the film deposition, Au contact was deposited by thermal evaporation. For the effect of annealing, the thin film was annealed in the nitrogen environment at 10$0^{\circ}C$ and 14$0^{\circ}C$ for 10 seconds, respectively. Film surface characteristics at the vatious substrate temperatures were measured by AFM. The crystallization of thin film was improved as the substrate temperatures were increased and the maximum gram size was 4${\mu}{\textrm}{m}$. The conductivity of thin film was found to be 7.40 $\times$10$^{-7}$ ~ 7.78$\times$10$^{-6}$ S/cm and the minimum contact resistance was 2.5324 ㏁.

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TFT 채널층으로 사용하기 위한 IGZO박막의 산소분압에 따른 특성변화

  • Sin, Ju-Hong;Kim, Ji-Hong;No, Ji-Hyeong;Lee, Gyeong-Ju;Kim, Jae-Won;Do, Gang-Min;Park, Jae-Ho;Jo, Seul-Gi;Yeo, In-Hyeong;Mun, Byeong-Mu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.260-260
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    • 2011
  • 투명 비정질 산화물반도체는 디스플레이의 구동소자인 박막 트랜지스터에 채널층으로 사용된다. 또한 투명하면서 유연성이 있는 소자를 저비용으로 제작할 수 있는 장점을 가진다. 투명 산화물반도체 재료 중 IGZO는 Si 또는 GaAs와 같은 공유결합성 반도체와는 다른 전자 배치로 전도대가 금속이온의 ns 궤도에서 형성되며, 가전도대가 산소 음이온의 2p 궤도에서 형성된다. 특히 큰 반경의 금속 양이온은 인접한 양이온과 궤도 겹침이 크게 발생하게 되며 캐리어의 효과적인 이동 경로를 제공해줌으로써 다른 비정질 반도체와는 다르게 높은 전하이동도(~10 $cm^2$/Vs)를 가진다. 따라서 저온공정에서 우수한 성능의 TFT소자를 제작할 수 있는 장점이 있다. 본 연구에서는 TFT 채널층으로 사용하기 위한 a-IGZO박막의 산소분압에 따른 특성변화를 분석 하였다. a-IGZO박막은 Pulsed Laser Deposition (PLD)를 이용하여 산소분압(20~200 mTorr) 변화에 따라 Glass기판에 증착하였다. 증착된 a-IGZO 박막의 구조적 특성으로는 X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM), 광학적 특성은 UV-vis spectroscopy 분석을 통해서 알아보았다. TFT 채널층의 조건으로는 낮은 off-current, 높은 on-off ratio를 위해 고저항 ($10^3\;{\Omega}cm$)의 진성반도체 성질과 source/drain금속과의 낮은 접촉저항(ohmic contact) 등의 전기적 성질이 필요하다. 따라서 이러한 전기적 특성확인을 위해 transmission line method (TLM)을 사용하여 접촉저항과 비저항을 측정하였고, 채널층으로 적합한 분압조건을 확인해볼 수 있었다.

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Application of electrochemical process to Si solar cells (전기화학적 공정의 실리콘 태양전지에 대한 응용)

  • Lee, Eun-Gyeong;Kim, Mi-Seong;Yu, In-Jun;Im, Jae-Hong;Lee, Gyu-Hwan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.172-173
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    • 2011
  • 실리콘 태양전지의 공정의 단순화와 효율을 극대화시키기 위하여 전기화학적 방법을 통하여 반사방지막(Anti-Reflection layer)의 선택적 식각공정과 선택적 오믹 전극을 형성하였다. Anti-Reflection coating 층의 식각 공정은 종전의 사진공정을 이용하지 않는 전기-화학적 나노식각을 적용하여 보다 용이한 공정을 연구하였다. 또한 태양전지의 효율을 증대시키기 위하여 전면에서 받은 빛 에너지로 발생된 전자가 전극부분에서 회로로 이동하기 위해 더욱 낮은 저항 값을 가지는 전극 구조가 필요하다. 이를 위해 Ni-P 박막을 형성시킨 전극부분을 열처리함으로써 오믹 접합 특성을 향상시켜 접촉 저항을 현격히 낮출 수 있는 기술을 연구하였다.

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Effects of Annealing on Ni/Au Ohmic Contact to Nonpolar p-type GaN

  • Lee, Dong-Min;Kim, Jae-Gwan;Yang, Su-Hwan;Kim, Jun-Yeong;Lee, Seong-Nam;Lee, Ji-Myeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.358-359
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    • 2012
  • 최근 분극 특성이 상이한 무분극 GaN 에피성장에 관한 심도 있는 연구와 함께 전자-전공 캐리어의 주입 및 캐리어의 거동, 방출되는 편광 특성 및 다양한 물리적 특성들에 대해 보고되고 있으며, 광학적 특성 및 물리적 특성의 확보를 위한 많은 연구가 활발히 진행 중이다 [1]. GaN의 ohmic 접촉(ohmic contact)의 형성은 발광 다이오드(light emitting diode), 레이저 다이오드(Laser), 태양전지(solar cell)와 같은 고신뢰도, 고효율 광전자 소자를 제조하기 위해서는 매우 중요하다 [2]. 그러나 이와 함께 병행 되어야 할 무분극 p-GaN 의 ohmic contact에 관한 연구는 많이 이루어지고 있지 않는 실정이다. 따라서 본 논문에서는 r-plane 사파이어 기판 상에 성장된 p-GaN에서의 ohmic 접촉 형성 연구를 위하여 Ni/Au ohmic 전극의 접촉저항 특성을 연구하였다. 본 실험에서는 성장된 a-plane GaN의 Hole농도가 $3.09{\times}1017cm3$ 인 시편을 사용하였다. E-beam evaporation 장비를 이용하여 Ni/Au를 각각 20 nm 그리고80 nm 증착 하였으며 비접촉저항을 측정하기 위해 Circle-Transfer Length Method (C-TLM) 패턴을 사용하였다. 샘플은 RTA (Rapid Thermal Annealing)를 사용하여 $300^{\circ}C$에서 $700^{\circ}C$까지 온도를 변화시키며 전기적 특성을 비교하여 그림 1(a) 나타내었다. 그림에서 알 수 있듯이 $400^{\circ}C$에서 가장 낮은 비접촉저항 값인 $6.95{\times}10-3{\Omega}cm2$를 얻을 수 있음을 발견하였다. 이 때의 I-V curve 도 그림1(b)에 나타낸 바와 같이 열처리에 의해 크게 향상됨을 알 수 있다. 그러나, $500^{\circ}C$ 이상 온도를 증가시키면 다시 비접촉 저항이 증가하는 것을 관찰하였다. XRD (x-Ray Diffraction) 분석을 통하여 $400^{\circ}C$ 이상열처리 온도가 증가하면 금속 표면에 $NiO_2$가 형성되며, 이에 따라 오믹특성이 저하 된다고 사료된다. 또한 $Ni_3N$의 존재를 확인 하였으며 이는 nonpolar surface의 특성으로 인해 nitrogen out diffusion 현상이 동시에 발생하여 계면에는 dopant로 작용하는 질소 공공을 남기고 표면에 $Ni_3N$을 형성하여 ohmic contact의 특성이 저하되기 때문인 것으로 사료된다.

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Inversion of Resistivity Data using Data-weighting (자료 가중을 통한 전기비저항 탐사 자료의 역산)

  • Cho, In-Ky;Lee, Keun-Soo;Kim, Yeon-Jung;Yoon, Dae-Sung
    • Geophysics and Geophysical Exploration
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    • v.18 no.1
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    • pp.9-13
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    • 2015
  • All the resistivity data contain various kinds of noise. The major sources of noise in DC resistivity measurement are high contact resistance, measurement errors, and sporadic background noise. Thus, it is required to measure data noise to accurately interpret resistivity data. Reciprocal measurements can provide a measure of data precision and noise. In this study, we proposed a data-weighting method from reciprocity measurement. Furthermore, a data-weighting method using both the reciprocity error and data-misfit in the inversion process was studied. Applying the data-weighting method to the inversion of 3D resistivity data, it was confirmed that local anomalies are slightly suppressed in the final inversion results.

Hazards and Solutions of Loss of the PEN Conductor in TN-C-S System (TN-C-S계통에서 PEN도체의 단선고장의 위험성 및 보호대책)

  • Lee, Bok-Hee;Lee, Kyu-Sun;Ahn, Chang-Hwan;Kim, Han-Su
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.21 no.8
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    • pp.113-120
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    • 2007
  • This paper presents the electric shock hazards and solutions of loss of the combined protective and neutral (PEN) conductor in TN-C-S system. In order to mitigate the touch voltage on exposed-conductive-parts in a break in the PEN conductor, the touch voltages on exposed-conductive-parts in a break in the PEN conductor were experimentally investigated as a function of the ground resistances of the source grounding electrode and customer's additional grounding electrode. As a result, the equipotential bonding is one of important requirements for installations supplied by TN-C-S system. A solution of mitigating the touch voltages on exposed-conductor-parts caused by a loss of the PEN conductor would be the installation of the additional grounding electrode at the customer's service entrance. The ground resistance of additional grounding electrode necessary to limit the touch voltage to a safety voltage of less than 50[V] depends on the load and circuit parameters. In addition, the undervoltage sensing devices oner affordable solutions to detect a loss of the PEN conductor in TN-C-S system.

Preparation and Characterization of Pitch-based Carbon Paper for Low Energy and High Efficiency Surface Heating Elements (저전력 및 고효율 면상발열체를 위한 피치기반 탄소종이 제조 및 특성)

  • Yang, Jae-Yeon;Yoon, Dong-Ho;Kim, Byoung-Suhk;Seo, Min-Kang
    • Composites Research
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    • v.31 no.6
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    • pp.412-420
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    • 2018
  • In this work, phenolic resins containing conductive carbon fillers, such as, petroleum coke, carbon black, and graphite, were used to improve the surface heating elements by impregnating a pitch-based carbon paper. The influence of conductive carbon fillers on physicochemical properties of the carbon paper was investigated through electrical resistance measurement and thermal analysis. As a result, the surface resistance and interfacial contact resistivity of the carbon paper were decreased linearly by impregnating the carbon fillers with phenol resins. The increase of carbon filler contents led to the improvement of electrical and thermal conductivity of the carbon paper. Also, the heating characteristics of the surface heating element were examined through the applied voltage of 1~5 V. With the applied voltage, it was confirmed that the surface heating element exhibited a maximum heating characteristic of about $125.01^{\circ}C$(5 V). These results were attributed to the formation of electrical networks by filled micropore between the carbon fibers, which led to the improvement of electrical and thermal properties of the carbon paper.

Effect of Total Resistance of Electrochemical Cell on Electrochemical Impedance of Reinforced Concrete Using a Three-Electrode System (3전극방식을 활용한 철근 콘크리트의 교류임피던스 측정 시 전기화학 셀저항의 영향)

  • Khan, Md. Al-Masrur;Kim, Je-Kyoung;Yee, Jurng-Jae;Kee, Seong-Hoon
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.26 no.6
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    • pp.82-92
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    • 2022
  • This study aims to investigate the effect of total electrochemical cell resistance (TECR) on electrochemical impedance (EI) measurements of reinforced concrete (RC) by electrochemical impedance spectroscopy (EIS) using a three-electrode system. A series of experimental study is performed to measure electrochemical behavior of a steel bar embedded in a concrete cube specimen, with a side length of 200 mm, in various experimental conditions. Main variables include concrete dry conditions, coupling resistance between sensing electrodes and concrete surface, and area of the counter electrode. It is demonstrated that EI values remains stable when the compliant voltage of a measuring device is sufficiently great compared to the potential drop caused by TECR of concrete specimens. It is confirmed that the effect of the coupling resistance of TECR is far more influential than other two factors (concrete dry conditions and area of the counter electrode). The results in this study can be used as a fundamental basis for development of a surface-mount sensor for corrosion monitoring of reinforced concrete structures exposed to wet-and-dry cycles under marine environment.