• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.53-62
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• 1999

Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.11
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• pp.217-223
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• 2019

The application of 3D printing technology is expanding due to the production of the complex-shape parts and the one-step manufacturing process. Moreover, various technical solutions in 3D printing are emerging through continuous research and development. Representative technologies include SLS technology, in which a desired area is sintered and laminated by irradiating a powder-type material with a laser. In addition, high-performance engineering plastic parts are being manufactured in increasing numbers. In this study, tensile specimens were fabricated from polyamide 12, a widely available polymer, and the glass bead-reinforced polyamide 12. The specimen-build orientation was divided into 0°, 45°, and 90° on the fabrication platform, and the tensile test temperature was -25℃, 25℃, and 60℃. The test results showed that the tensile modulus of both materials decreases as the build orientation becomes closer to 90°. In addition, the tensile strength of glass bead-reinforced PA12 showed more dependence on the build orientation than PA12. In addition, the tensile modulus and tensile strength decreased with increasing test temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.97-97
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• 2009

산업용 온수관련용 자동차용 등의 다양한 용도로 응용이 가능한 고기능성 세라믹 히터 제작을 위해 후막공정 기술을 적용한 적층형 세라믹 히터의 수요가 증가하고 있으며, 고열로 인한 변형의 우려가 있는 내열성 기판 제작에도 적층형 HTCC 세라믹 기판 적용이 확대되고 있다. 이러한 고내열성 세라믹 기판 제작을 위해서는 paste의 균일성, Low TCR 특성 및 세라믹과 paste 매칭성 확보가 중요한 요소이다. 본 연구에서는 W/Mo 함량비를 변화시켜가며 paste를 제조하여 비저항과 TCR 특성을 비교한 후 가장 낮은 값을 나타내는 조성을 선정하였다. 이 조성에 $Al_2O_3$, $Ta_2O_5$ 등의 첨가제를 사용하여 비저항 특성 개선을 위한 실험을 통해 우수한 고내열성 기판용 paste 조성을 확보하고자 하였다. 그리고 이 Paste를 적용하여 HTCC 그린시트와 매칭성 조건을 확인하고자 하였다.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.1
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• pp.19-24
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• 2003

A very small size 2.4 GHz ISM band BPF(Band Pass Filter) is realized using LTCC Multi-layer technology. Proposed design method enables to achieve BPF size $2.0\times1.2\times0.8mm^3$. A $lambda/4$ resonator with shunt-to-ground loaded capacitor is used to shorten resonator length, achieving higher quality factor. Also this resonator enables BPF to improve out-of-band rejection. Coupling coefficients between coupled strip-line resonators and external quality factor (Qe) of a resonator are derived and applied to the filter design. The measured results show good agreement with simulated data.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.11a
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• pp.91-95
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• 2002

A very small size BPF is realized using LTCC Multilayer technology. A λ/4 resonator with shunt-to-ground loaded capacitor is used to shorten resonator length and achieve higher qualityfactor. Also this resonator enable BPF to improve out-of-band rejection. Coupling coefficients between coupled stripline resonators and external qualityfactor of a resonator are derived and apply to the filter design. The measured results show a good agreement with the simulation.

• CDE review
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• v.2 no.2
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• pp.12-16
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• 1996

Rapid Prototyping(RP)이란 짧은 시간 내에 CAD 그래픽 데이터로부터 3차원 형상의 시제품을 만들어 내는 기술을 일컬으며, 1986년 3D Systems라는 회사에 의하여 상용화된 SLA(Stereolithography Apparatus)방식을 선두로 하여 지난 10년간 급속히 발전을 해왔다. 원하는 형상의 부품을 만들 때 기존의 machining은 원자재에서 재료를 깎아내면서 만드는 반면에, RP는 재료를 한 층씩 차례로 쌓아서 부품을 만드는 가산적인 공정 특징을 가지고 있다. 액체, 고체, 심지어 기체 상태의 재료까지 다양한 재료를 사용하고 있으며 또한 여러가지 적층방법으로 부품을 제작하고 있다. 성공적인 RP기술의 창출에는 RP기계제작에 직접 관계되는 기술뿐만 아니라, 재료 기술, RP제작에 적합한 CAD데이터 생성기술, 후처리 및 가공기술 등이 모두 관건이 된다. 여기서는 RP기술의 주요 파트 제작방법과 RP에 쓰이는 재료, RP의 용도 및 그 한계성 등에 대하여 생각하여 보았다. RP기술은 3차원 CAD 모델이 없으면 실현이 불가능하다. 3차원(3D)화는 제품을 설계하고 만드는 대부분의 회사가 경쟁력을 갖기 위하여 싫든 좋든 이루어야 하는 목표 중의 하나라고 할 수 있는데, RP기술 도입은 이러한 3차원화를 단축시키는 촉매제의 역할을 할 수 있다고 생각한다. RP기술이 부분적으로 정확도의 문제와 제작 가능한 재료의 종류 및 성능에 제한이 있지만, 현재로서도 여러 응용분야에 성공적으로 이용되고 있으며 향후에는 더욱 그 응용 범위를 넓혀갈 것으로 전망된다.

• The Journal of Korean Academy of Prosthodontics
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• v.59 no.2
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• pp.248-260
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• 2021

Cobalt-chromium alloys are used to fabricate various dental prostheses, and have advantages of low cost and excellent mechanical properties compared to other alloys. Recently, selective laser melting, which is an additive manufacturing method, has been used to overcome the disadvantages of the conventional fabrication method. A local rapid heating and cooling process of selective laser melting induces fine microstructures, grain refinement, and reduction of porosities of the alloys. Therefore, it can improve mechanical properties compared to the alloys fabricated by the conventional method. On the other hand, layering process and rapid heating and cooling cause accumulation of a large amount of residual stresses that can adversely affect the mechanical properties. A heat treatment for removing residual stresses through recovery and recrystallization process caused complicated changes in mechanical properties induced by phase transformation, precipitate and homogenization of the microstructures. The purpose of this review was to compare the manufacturing methods of Co-Cr alloys and to investigate the characteristics of Co-Cr alloys fabricated by selective laser melting.

• Journal of the Korea Convergence Society
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• v.11 no.6
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• pp.83-88
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• 2020

Recently, radiation shielding sheets made of eco-friendly materials have been widely used in medical institutions. The shielding sheet is processed into a solid form by thermoforming by mixing a shielding material with a polymer material. The base is resin-based and has a limit in tensile strength, and for this purpose, fibers such as non-woven fabrics are used on the surface. The shielding sheet process technology has a problem in that the tensile strength rapidly decreases when the content of the shielding material is increased to increase the shielding performance. In order to improve this, this study intends to compare and evaluate the method of laminating and coating the fibers in the sheet process. In comparison of the three types of sheets, there was no difference in shielding performance between the fiber-coated sheet and the compression sheet, but there was a large difference in tensile strength.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.239-239
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• 2011

최근에 감지막의 pH 감지특성을 평가하기 위해 electrolyte insulator semiconductor (EIS) 구조가 유용하게 이용되고 있다. EIS는 CMOS공정과 호환이 가능하고 구조가 간단하며 pH 변화에 반응속도가 빠르다는 장점을 가지고 있다. EIS 구조를 갖는 pH 센서의 동작 메커니즘은 pH 용액의 수소이온이 감지막의 표면에서 표면전위를 변화시키는 것에 기인한다. pH 감지막으로는 높은 유전율과 안정성이 뛰어난 high-k 물질이 많이 연구되고 있다. 그 중 high-k 물질인 ZrO2은 낮은 열전도도, 산성에서 알칼리성 영역까지의 넓은 화학안정성을 가지며 낮은 열 팽창성, 높은 유전상수 등 우수한 특성을 가지고 있다. 본 실험은 SiO2/ZrO2를 적층한 EIS 소자를 제작하여 열처리에 따른 전기적 특성과 pH 감지 특성을 평가해 보았다. EIS 적층막으로 사용된 SiO2는 실리콘과 high-k 감지막 사이의 계면상태를 양호하게 유지시키기 위한 완충막으로 성장되었다. 후속열처리는 rapid thermal annealing (RTA) 시스템을 이용하여 750$^{\circ}C$, 850$^{\circ}C$, 950$^{\circ}C$로 H2/N2 분위기에서 30초 동안 실시하였다. RTA 열처리 온도가 증가할수록 높은 pH 감지특성이 보였으며 hysteresis 현상과 drift 효과와 같은 non ideal 효과에 강한 immunity가 있는 것을 확인하였다. 결론적으로 SiO2/ZrO2 적층구조를 갖는 EIS는 RTA 950$^{\circ}C$ 열처리를 실시하였을 때 우수한 EIS pH 센서를 제작할 수 있을 것으로 기대된다.

• Journal of Internet of Things and Convergence
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• v.6 no.3
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• pp.75-80
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• 2020

Recently, the size of the IoT sensor has been decreased and the collecting direction of the IoT sensor for acquiring the data have been changed from 2D to 3D. It makes sensor structure complex. In the fabrication of the complex structure, 3D printing technology has more useful than traditional manufacturing technologies. Among 3D printing technologies, FDM (fused deposition modeling) is a candidate technology to fabricate a small IoT sensor because the price of the machine and the material is cheap. In the FDM process, a 3D shape is made by depositing the melted filament. Recently, the patent of FDM technology is expired and cheat machines are developed based on the open-source. In the FDM process, mechanical properties of a fabricated part is affected by a lots of factors such as the kind of material and process parameters. Among them, infill is affecting the mechanical properties and the production lead time as well. In this work, a new method to optimize the FDM process with the consideration of mechanical property and production lead time was proposed. To verify the method, the fabrications were performed with the different infill rates. The results of tensile tests were analyzed to verify the proposed method.