• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.184-184
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• 2008

저온 동시 소성 세라믹(LTCC, Low Temperature Co-firing) 기술 중에서 테이프 캐스팅(tape casting)은 얇고 균일한 세라믹 그린 쉬트를 연속 성형할 수 있으며 성형된 쉬트의 밀도, 표면상태, 두께제어 등이 매우 중요하다. 얇고 균일한 세라믹 그린 쉬트를 제작하기 위해서 슬러리의 분산성과 레오로지 특성은 매우 중요한 요소이며 첨가되는 유기물 첨가제들의 종류와 함량비는 슬러리의 분산성과 점도에 큰 영향을 미친다. 본 연구에서는 유기물 첨가제의 종류와 함량에 따른 슬러리의 점도와 그린 쉬트의 밀도 및 두께 제어에 미치는 영향을 고찰하였다. 바인더로는 acryl, polyvinyl 계를 사용하였으며, 가소제는 glycol, phatalate 계를 사용하였다. 각각 2 종류의 바인더와 가소제의 함량에 따른 레올로지 거동과 그런 쉬트의 밀도를 측정하였다. 각 조성별로 준비된 슬러리를 사용하여 테이프 캐스팅 방법으로 제작된 그린 쉬트의 두께를 측정하여 유기물 첨가제 조성이 그린 쉬트의 두께제어에 미치는 영향을 평가하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.291-294
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• 2003

The circuit substrate was made from the Low Temperature Cofired Ceramics(LTCC) that a $\varepsilon_\gamma$ was 7.8. Accumulated Varactor and the low noise transistor which were a Surface Mount Device-type element on LTCC substrate. Let passive element composed R, L, C with strip-line of three dimension in the multilayer substrate circuit inside, and one structure accumulate band-pass filter, resonator, a bias line, a matching circuit, and made it. Used Screen-Print process, and made Strip-line resonator. A design produced and multilayer-type VCO(Voltage Controlled Oscillator), and recognized a characteristic with the Spectrum Analyzer which was measurement equipment. Measured multilayer structure VCO is oscillation frequency 1292[MHz], oscillation output -28.38[dBm], hamonics characteristic -45[dBc] in control voltage 1.5[V], A phase noise is -68.22[dBc/Hz] in 100 KHz offset frequency. The oscillation frequency variable characteristic showed 30[MHz/V] characteristic, and consumption electric current is approximately 10[mA].

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.11 no.2
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• pp.225-229
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• 2011

In this study, capacitive type pressure sensors based on low temperature co-fired ceramics (LTCC) technology for environmental monitoring were demonstrated. The LTCC is one of promising technology than is based one since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.) for sensor application. Especially, it has good mechanical and chemical properties for robust environmental application. The 3D LTCC diaphragm with thickness of 400 ${\mu}m$ were fabricated by laminating 4 green sheets using commercial powder (NEG, MLS 22C). To evaluate the sensing properties of the different cavity areas, two types of diaphragm which had different cavity areas with 25, 49 $mm^2$ respectively, were fabricated. To realize capacitive type pressure sensor, the Au top electrode was fabricated using thermal evaporator and the bottome electrode was compressed using aluminium foil. The sensing properties of the fabricated sensors showed linear characteristic under different pressure (0~30 psi) using pressure measurement system.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.245-248
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• 2012

In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

• Korean Chemical Engineering Research
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• v.49 no.5
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• pp.633-638
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• 2011

Mn substituted La, Sr or Ba-hexaaluminate were prepared by $(NH_4)_2CO_3$ co-precipitate method and calcined at $1,200^{\circ}C$ for 5 h. Catalysts were characterized by X-ray diffraction and $N_2$ physisorption and scanning electron microscope (SEM). Compared to $SrMnAl_{11}O_{19}$ and $BaMnAl_{11}O_{19}$, $LaMnAl_{11}O_{19}$ in which La located at mirror plane showed better crystallinity and high surface area, 13 $m^2/g$. $LaMnAl_{11}O_{19}$ revealed well developed plate-like structure which is characteristic structure of hexaaluminate. The catalytic activity of methane combustion increased in the following order: $LaMnAl_{11}O_{19}$ > $SrMnAl_{11}O_{19}$ > $BaMnAl_{11}O_{19}$ and was dependent on surface area of catalysts. 60 wt% $CeO_2/LaMnAl_{11}O_{19}$ calcined at $700^{\circ}C$ showed enhanced methane activity and methane was oxidized completely at low temperature ($700^{\circ}C$). It was confirmed that addition of ceria seems to be effective for the low and middle temperature combustion of methane. But, after calcination at high temperature of $1,200^{\circ}C$, it lost the promoting effect of ceria due to increase of ceria particle size and it had a limit to applying to the high temperature catalytic combustion.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.33-38
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• 2006

Aerosol slurry composed of dielectric materials, distilled water, and deflocculants was sprayed on the substrates, through a high-pressure spray gun as an aerosol. The coated layers were cofired together with $Al_{2}O_{3}$ substrates and green sheets on which the inner connectors were printed. Although the coating rate of coated layers strongly depended on slurry viscosity, spray shape, and the pressure of the spray gun, the coated density was not changed. Buried conductors were maintained as printed by high pressure spray coating method, because the pressing process was not used. At the optimum condition of air controller step 3-4 and slurry viscosity c.p 2000-4000, dense and uniform layers could be achieved. Comparing with conventional lamination process using green sheets, spray coating method enabled thin dielectric layers of $20{\sim}50{\mu}m$.

• Journal of the Korean Ceramic Society
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• v.42 no.2 s.273
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• pp.110-116
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• 2005

Suitable compositions which are sinterable at low temperature in the $BaO-B_{2}O_{3}-ZnO$ glass system were investigated as a function of the ratio between BaO and ZnO. The effect of $Al_{2}O_3$ filler on densification and physical characteristics of the glass was also examined. When the amount of $Al_{2}O_3$ filler increased, the densification rate and the values of dielectric constant, thermal expansion coefficient and hardness in the glass-filler composites decreased gradually. The decreasing rate of the physical properties accelerated when fine $Al_{2}O_3$ filler was used. However, the fracture toughness of the composite rather increased due to the existence of filler particles and pores which effectively suppressed crack propagation with addition of fine $Al_{2}O_3$ filler.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.29 no.2A
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• pp.214-217
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• 2004

In this paper, a Ka-band LTCC (low temperature co-fired ceramic) narrow bandpass filter (BPF) is firstly presented. This BPF shows very narrow 3dB fractional bandwidth of 4.5 ％ centered at 28.7㎓. The advantages of multi-layered LTCC technology such as high integration and vertical stacking capabilities were employed to design three-dimensional interdigital end-coupled embedded microstrip narrow BPF. The difficulties in controlling the precise distance between two adjacent resonators in LTCC end-coupled BPF were overcome by locating the resonators on different layers. The measured insertion loss is 3dB at 28.7㎓, pass band is from 27.9 ㎓ to 29.2 ㎓, and the return loss in the pass band is less than 10 dB.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.4
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• pp.297-302
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• 2011

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of sputtering gas ratio and annealing temperature on the crystal structure of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrate with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Pt / Ti / LTCC substrates by RF magnetron sputtering method. The results showed that the crystallization of the films were enhanced as increasing $O_2$ mixing ratio. At about 25% $O_2$ mixing ratio, was well crystallized in the perovskite structure. PZT thin films was annealed at various temperatures. When the annealing temperature is lower, the PZT thin films become a phyrochlore phase. However, when the annealing temperature is higher than $600^{\circ}C$, the PZT thin films become a perovskite phase. At the annealing temperature of $700^{\circ}C$, perovskite PZT thin films with good quality structure was obtained.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.8
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• pp.958-966
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• 2012

This paper presents a compact bluetooth/WiFi dual-mode dual-band RF front-end module(FEM) is realized by low temperature co-fired ceramic(LTCC) technology. The proposed RF front-end module consists of a diplexer, baluns in the LTCC substrate, and an SPDT switch, an SP3T switch on the LTCC substrate. In order to reduce the module size and increase integration level, the proposed diplexer and balun are designed using LC lumped elements. The parasitic elements caused by coupling effect between metal pattern layers and ground plane layer are considered during the design. The fabricated dual-mode RF front-end module has 13 pattern layers including three inner ground layers and it occupies less than $3.0mm{\times}3.7mm{\times}0.66mm$.