• Title/Summary/Keyword: 저압공정

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Fabrication of CVD SiC Double Layer Structure from the Microstructural Change Through Input Gas Ratio (입력기체비를 이용한 미세구조 변화로부터 화학증착 탄화규소의 복층구조 제작)

  • 오정환;왕채현;최두진;송휴섭
    • Journal of the Korean Ceramic Society
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    • v.36 no.9
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    • pp.937-945
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    • 1999
  • In an effort to protect a RBSC(reaction -bonded SiC) tube SiC films from methyltrichlorosilane(MTS) by low pressure chemical vapor deposition were deposited in hydrogen atmosphere on the RBSC(reaction-bonded SiC) substrates over a range of input gas ratio(${\alpha}=P_{H2}/P_{MTS}=Q_{H2}/Q_{MTS}$=1 to 10) and deposition temperatures(T=1050~1300$^{\circ}C$). At the temper-ature of 1250$^{\circ}C$ the growth rate of SiC films increased and then decreased with decreasing the input gas ratio. The microstructure of SiC films was changed from granular type structure exhibiting (111) preferred orientation in the high input gas ratios to faceted columnar grain structure showing (220) in the low input gas ratios. The similar microstructure change was obtained by increasing the deposition temperature. These results were closely related to a change of deposition mechanism. Double layer structure having granular type and faceted ciolumnar grain structure from the manipulation of mechanism. Double layer structure having granular type and faceted columnar grain structure from the manipulation of the input gas ratio without changing the deposition temperatue was successfully fabricated through in -site process.

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Study on the Membrane Cleaning-in-place (CIP) Conditions for the Dye Wastewater Treatment Process Using Polyamide Composite Membranes (폴리아마이드계 복합막을 이용한 염료 폐수 처리 공정 분리막 세척 조건 연구)

  • JeGal, Jong-Geon;Lee, Yong-Hwan;Hwang, Jeong-Eun;Jaung, Jae-Yun
    • Membrane Journal
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    • v.18 no.1
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    • pp.94-102
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    • 2008
  • For the treatment of the dye wastewater, a polyamide nano-composite membrane and reverse osmosis (RO) membranes were prepared using interfacial polymerization technique, in which piperazine, meta-phenylene diamine, and trimesoyl chloride were used as monomers, Their permselective properties were characterized with aqueous solutions of PEG 600, $Na_2SO_4$, and NaCl, and their performance was compared with that of Osmonics Co, They were found to be a typical nano-composite membrane and a low pressure RO membrane. Using them, a real dye wastewater supplied from the Kyungin Corporation, one of the domestic dye producer, was treated, studying the separation performances of the membranes, Also, during the wastewater treatment, cleaning in place (CIP) of the membranes was carried out regularly to recover the flux of the membranes. Three different chemical cleaners were employed for the CIP process and their performance were compared in this study.

Solvent-assisted sealing of poly(methylmethacrylate) microchannel under mild conditions (용매를 이용한 Poly(methylmethacrylate)의 저온 저압 본딩 및 마이크로 채널 표면의 선택적 소수성 코팅기법 개발)

  • Lee, Jae-Seon;Lee, Nae-Yun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.110-110
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    • 2017
  • 마이크로 플루이딕 디바이스는 화학, 생물학 실험 및 생체 의학 진단을 위한 플랫폼으로 지난 20년간 그 사용 및 연구가 증가되어 왔다. 마이크로 플루이딕 디바이스를 제작하는 데 있어 가장 일반적으로 사용되는 재료는 실리콘이지만 비용이 많이 들고 불투명하므로 광학 검출이 필요한 곳에 적용이 제한된다. 이러한 측면에서 열가소성 플라스틱은 상업화의 중요한 요소인 대량 생산에 있어 큰 잠재력을 가지고 있으며 저렴하고, 가공이 쉽고, 유연하고, 광학적으로 투명하고, 화학적으로 불활성이며, 생체적합성을 가진다. 본 연구에서는 열가소성 플라스틱의 일종인 PMMA Poly(methylmethacrylate)를 효율적으로 접합하기 위해 비교적 낮은 온도와 낮은 압력에서 에탄올을 활용한 접착방식을 개발하였다. 먼저, PMMA 기판의 전체 표면을 $80^{\circ}C$에서 20 분 동안 에탄올로 처리한 후, $60^{\circ}C$에서 20 분간 열 압착하는 방식으로 영구적인 결합이 이루어졌다. 결합 강도 및 채널의 sealing 정도를 확인하기 위해, 인장 강도, 누수 및 파열 테스트를 수행하였다. 결합강도는 약 12.4 MPa로 타 연구와 비교할 때 매우 높았으며 마이크로 채널의 전체 내부 체적보다 거의 450 배 높은 강한 액체 흐름을 견딜 정도로 견고한 결합이 유지되었다. 열가소성 플라스틱의 본딩에 사용되는 유기 용매는 광학 특성을 희생시키지 않으면서 결합 속도를 높일 수 있지만, 결합 공정 중에 용매로 인해 마이크로 채널이 막히는 현상이 발생될 수 있다. 따라서, 견고한 본딩을 유지하면서 채널 막힘을 방지하기 위해 마이크로 채널을 소수성으로 선택적으로 처리하여 내벽의 표면 특성을 튜닝해 주는 기법을 추가로 적용하였다. 본 연구에서 사용한 방법은 아민-PDMS (polydimethylsiloxane) 링커를 적용하여 기판 표면의 극성을 변경시켜 주었다. 아민-PDMS 링커는 PC (polycarbonate), PET (polyethylene terephthalate), PVC (polyvinyl chloride) 및 PI (polyimide)와 같은 다양한 열가소성 플라스틱의 표면 소수성을 현저히 증가시키며 화학적, 열적 안정성이 뛰어나다. 아민-PDMS 링커는 PMMA의 카보닐 그룹과 반응할 수 있는 아민 사이드 그룹을 포함하는 PDMS 백본으로 구성되며 처리된 대상표면을 소수성으로 만든다. 아민-PDMS 링커 처리 이후 채널은 소수성으로 변화되었으며 이는 접촉각(contact angle)의 증가로 확인되었다. 코팅된 채널을 에탄올로 30분간 80도에서 처리하여도 소수성은 그대로 유지되어 마이크로 채널의 선택적인 소수성 코팅이 성공적으로 수행되었다.

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A Study on the Sintering of Diamond Composite at Low Temperature Under Low Pressure and its Subsequent Conductive PVD Process for a Cutting Tool (절삭 공구용 다이아몬드 복합체의 저온 저압 소결 합성 및 후속 도전형 박막 공정 특성 연구)

  • Cho, Min-Young;Ban, Kap-Soo
    • Journal of the Korean Society of Industry Convergence
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    • v.23 no.1
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    • pp.25-32
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    • 2020
  • Generally, high-temperature, high-pressure, high-priced sintering equipment is used for diamond sintering, and conductivity is a problem for improving the surface modification of the sintered body. In this study, to improve the efficiency of diamond sintering, we identified a new process and material that can be sintered at low temperature, and attempted to develop a composite thin film that can be discharged by doping boron gas to improve the surface modification of the sintered body. Sintered bodies were sintered by mixing Si and two diamonds in different particle sizes based on CIP molding and HIP molding. In CVD deposition, CVD was performed using WC-Co cemented carbide using CH4 and H2 gas, and the specimen was made conductive using boron gas. According to the experimental results of the sintered body, as the Si content is increased, the Vickers hardness decreases drastically, and the values of tensile strength, Young's modulus and fracture toughness greatly increase. Conductive CVD deposited diamond was boron deposited and discharged. As the amount of boron added increased, the strength of diamond peaks decreased and crystallinity improved. In addition, considering the release processability, tool life and adhesion of the deposition surface according to the amount of boron added, the appropriate amount of boron can be confirmed. Therefore, by solving the method of low temperature sintering and conductivity problem, the possibility of solving the existing sintering and deposition problem is presented.

Characteristics of Diamond Like Carbon Thin Film Deposited by Plasma Enhanced Chemical Vapor Deposition Method with Gas Flow Rate and Radio Frequency Power (가스 유량과 RF Power에 따라 PECVD 방법으로 증착된 DLC 박막의 특성)

  • Jeong, Seon-Yeong;Kim, Hyeon-Gi;Ju, Seong-Hu
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.88-88
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    • 2018
  • DLC(Diamond Like Carbon) 박막은 높은 열전도도, 큰 전기저항, 높은 강도 등의 다이아몬드와 유사한 특성을 가지고 있으면서 저온 저압에서도 합성이 가능하고, 합성 조건에 따라 물리 화학적 특성도 넓게 조절 할 수 있으며 상대적으로 넓은 면적에서 균일하고 평활한 박막의 합성이 가능하여 산업적 응용 면에서도 경쟁력을 갖추고 있다[1]. 이러한 DLC 박막을 합성함에 있어서 RF-PECVD(Radio Frequency Plasma Enhanced Chemical Vapor Deposition) 방법은 PECVD 방법 중 가장 보편적으로 사용되고 또 캐패시터 타입의 RF-PECVD 방법은 균일한 대면적 증착과 대량생산이 가능하다[1,2]. 본 연구에서는 우수한 특성을 갖는 DLC 박막의 증착 조건을 찾기 위해 캐패시터 타입의 RF-PECVD를 사용하여 공정 가스의 유량과 RF Power를 변화하여 박막을 증착하고, 증착된 박막의 특성을 연구하였다. DLC 박막은 ITO(Indium Tin Oxide) 유리 기판 위에 $100^{\circ}C$에서 5 min 동안 아세틸렌($C_2H_2$) 가스를 사용하여 가스 유량과 RF Power를 변화하여 증착하였다. 증착된 DLC 박막의 특성은 투과도, 평탄도, 두께를 측정하여 비교하였다. 가시광선 영역(380-780 nm)에서 투과도를 측정한 결과 ITO 유리 기판을 기준으로 한 DLC 박막의 투과도는 가시광선 영역 평균 94.8~98.8% 사이의 값으로 매우 높은 투과율을 나타내었다. 투과도는 가스 유량이 증가함에 따라 증가하는 경향을 나타내었고, RF Power의 변화에는 특정한 변화를 나타내지 않았다. 박막의 평탄도($R_a$, $R_{rms}$)와 두께는 AFM(Atomic Force Microscope)을 사용하여 측정하였다. 평탄도 $R_{rms}$는 0.8~3.3 nm, $R_a$는 0.6~2.5 nm 사이를 나타내었고 RF Power와 가스 유량의 변화에 따른 경향성을 나타내지는 않았다. 두께는 RF Power 25 W에서 55 W로 증가함에 따라 증가하는 경향을 나타내었으나 70W에서는 가스의 유량에 따라 상이한 결과를 나타내었다.

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Evaluation of Exposure to Isocyanates Used in Furniture Industry (가구산업에 사용되는 이소시안화물 폭로에 대한 평가)

  • Lee, Su-Gil;Lee, Nae-Woo;Pisaniello, Dino. L
    • Journal of the Korean Society of Safety
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    • v.21 no.2 s.74
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    • pp.138-142
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    • 2006
  • Occupational asthma is commonly known to be induced by isocyanate exposure. Spray painters generally use isocyanates for 2-pack spray painting to coat wooden panel surfaces in the furniture industry in South Australia. Due to a lack of actual exposure data, this study conducted environmental and dermal/ocular monitoring from a company in the furniture industry. According to this study, there was no significant airborne contamination, due to the use of high volume low pressure (HVLP) spray guns, low concentration of hardener in paint solutions and appropriate respirator like full face-air line respirator. There was no significant HDI detection in the general work area around the spray booths. Owing to the use of disposable nitrile gloves during the spray painting, no significant dermal exposure was found. According to color monitoring, there was a possible dermal exposure from surfaces in the workplace, unless either protective gloves were worn or appropriate working practices like clean-up process and storage in a secure places. No eye contamination was detected from the spray painters. No significant exposure levels from inhalational, dermal, ocular were found. The area of most concern was work practices.

Design and fabrication of the $1.3/1.55\mum$ WDM coupler with the PSG waveguide films (PSG 광도파박막을 이용한 $1.3/1.55\mum$ WDM coupler의 설계 및 제작)

  • 전영윤;김한수;이용태;이형종
    • Korean Journal of Optics and Photonics
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    • v.6 no.4
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    • pp.310-316
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    • 1995
  • We designed the $1.3/1.55\mum$ WDM directional coupler and its coupling length was calculated with the variation of the two waveguide's core separation and other variables by the Fourier transformed scalar wave equation. We deposited the PSG films for optical waveguide by low pressure chemical vapor deposition and fabricated the WDM coupler using the laser lithography and $CF_4/O_2$ reactive ion etching process. A V -groove which was made to support and fix the optical fiber is fabricated on Si substrate by chemical etching. The WDM coupler and the V-groove are connected using UV curing epoxy. We found that propagation mode of each port of WDM coupler is single mode and maximum extinction ratio between two out ports is 6 dB for $1.3.\mum$, and 12 dB for $1.55\mum$. /TEX>.

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Dual-mode CMOS Current Reference for Low-Voltage Low-Power (저전압 저전력 듀얼 모드 CMOS 전류원)

  • Lee, Geun-Ho
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.4
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    • pp.917-922
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    • 2010
  • In this paper, a new temperature-insensitive CMOS dual-mode current reference for low-voltage low-power mixed-mode circuits is proposed. The temperature independent reference current is generated by summing a proportional to absolute temperature(PTAT) current and a complementary to absolute temperature(CTAT) current. The temperature insensitivity was achieved by the mobility and the other which is inversely proportional to mobility. As the results, the temperature dependency of output currents was measured to be $0.38{\mu}A/^{\circ}C$ and $0.39{\mu}A/^{\circ}C$, respectively. And also, the power dissipation is 0.84mW on 2V voltage supply. These results are verified by the $0.18{\mu}m$ n-well CMOS parameter.

Hydraulic Cleaning Effect on Fouling Mechanisms in Pressurized Membrane Water Treatment (가압식 멤브레인 수처리에서 수리학적 세정이 파울링 기작에 미치는 영향)

  • Charfi, Amine;Jang, Hoseok;Kim, Jeonghwan
    • Membrane Journal
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    • v.27 no.6
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    • pp.519-527
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    • 2017
  • Membrane fouling is the main issue hindering the expansion of low pressure membrane processes for surface water treatment. Therefore, applying periodic hydraulic cleaning for fouling control should be well optimized. Better understanding of membrane fouling associated with periodic hydraulic cleaning would be useful to optimize membrane cleaning strategies. By comparing experimental permeability data with the classical Hermia blocking laws, this study aims at analyzing membrane fouling and understanding dominant fouling mechanisms occurring when filtering a synthetic surface water solution with a pressurized membrane process during six filtration cycles of 30 min each, separated with cyclic cleaning of 1 min by backwashing and forward flushing separately and combined. When applying single cleaning technique, membrane fouling during the first cycles was controlled by complete blocking mechanism while the last cycles were dominated by cake formation. Nevertheless, when combining cleaning technique better membrane regeneration was obtained and fouling was mainly due to cake formation.

Investigation of Gas Evolution in Shell Cores during Casting Processes of Aluminum Alloys (알루미늄 합금 주조공정의 쉘 코아 가스 발생 전산모사 연구)

  • In-Sung Cho;Jeong-Ho Nam;Hee-Soo Kim
    • Journal of Korea Foundry Society
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    • v.43 no.4
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    • pp.187-193
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    • 2023
  • Shell core making is an excellent process in terms of formability and desanding, but when the molten aluminum comes into con- tact with the shell core, gas generation by pyrolysis of the resin is inevitable. In addition, when the ventilation is inadequate, pores will remain inside the casting, which can directly lead to defects of the casting. While studies on the gas generation behavior of shell core making have been reported, the modeling of gas generation has not been extensively investigated. We will develop a gas evolution analysis method that considers the relationship between temperature and gas quantity for the core to be developed. We then use the developed method to analyze the flow and solidification behavior of metal molten metal during core mold design and low-pressure casting of cylinder head products, and predict the occurrence of casting defects to derive a casting method that min- imizes the occurrence of defects.