Comparative study on TiN and TaN as the electrode of ${Ta}_2O_5$
(고유전물질인 ${Ta}_2O_5$ 의 전극재료로서 TiN과 TaN의 비교연구)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1997.10a
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- pp.65-65
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- 1997