• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.08a
• /
• pp.340-340
• /
• 2011

플라즈마 공정에서의 생산률이 플라즈마의 밀도에 비례한다는 많은 연구가 이루어진 후, 초대면적 고밀도 플라즈마 소스의 개발은 플라즈마 소스 개발에서 중요한 부분을 차지하기 시작하였다. 이로 인해, 전자 공명 플라즈마, 유도 결합 플라즈마와 헬리콘 플라즈마 등 새로운 고밀도 플라즈마 개발 연구가 활발히 진행되고 있다. 최근에는 고밀도 플라즈마 개발과 더불어, 대면적 플라즈마 소스의 개발이 플라즈마 공정 기술의 중요한 이슈가 되고 있는데, 이는 450 mm 이상의 반도체, 2 m${\times}$2 m 이상의 8세대 평판 디스플레이와 1 m${\times}$1 m 태양광 전지 생산 공정에서 플라즈마의 기술이 요구되고 있기 때문이다. 대면적 공정영역의 이러한 경향은 균일한 대면적 고밀도 플라즈마 개발을 촉진시켜왔다. 밀도가 낮은 축전 결합 플라즈마를 제외한, 대면적 공정에 적합한 고밀도 플라즈마원으로 유도 결합 플라즈마와 헬리콘 플라즈마를 선택한 후, 병렬연결 시의 특성을 알기 위하여 ICP와 헬리콘의 단일 튜브와 다수 튜브의 플라즈마 내부, 외부 변수를 측정하여 조사하였다. 두 가지 플라즈마 소스의 비교 실험을 위하여, 자기장을 제외한 모든 조건을 동등하게 한 후 실험을 하였다. 단일 헬리콘 실험을 바탕으로, 대면적 실험에 가장 적합한 자기장의 세기, 자석의 위치 및 튜브의 치수를 정한 후, fractal 구조를 위한 16개 다수 방전을 ICP와 헬리콘을 비교하였다. 병렬연결 시, RF 플라즈마에서는 같은 전압을 가져도, 안테나 디자인을 고려하지 않으면 모든 튜브의 방전이 이루어 지지 않았다. 이를 컴퓨터 모의 전사를 통해 확인하고, 가장 최적화된 안테나를 설계하여 실험을 하였다. ICP에서는 모든 튜브가 방전에 성공한 반면, 헬리콘 플라즈마는 ICP에 10배에 달하는 높은 밀도를 냈으나, 오직 4개 튜브만이 켜지고 안정적으로 방전이 이루어 지지 않았다. ICP의 경우, RF 전송선의 디자인을 통해 파워의 균등 분배가 가능하지만, 헬리콘의 경우 자기장을 추가해서 고려해야 되는 것을 확인하였다. 모든 튜브에 비슷한 자기장을 형성하기 위해서는 자석의 크기가 커지는 문제점이 있으나, 매우 낮은 압력에서 방전이 가능하고, 같은 압력에서 ICP에 비해 10배 이상 달하는 장점이 있다. 실험 결과를 바탕으로, ICP와 헬리콘 플라즈마의 다수 방전에 대한 분류를 하였고, 바로 현장에 투입이 가능한 소스로 판단된다.

• The Korean Journal of Applied Statistics
• /
• v.37 no.2
• /
• pp.191-207
• /
• 2024

Many studies have been conducted to quickly detect out-of-control situations in autocorrelated processes. The most traditionally used method is a residual control chart, which uses residuals calculated from a fitted time series model. However, many procedures for monitoring autocorrelated processes using statistical learning methods have recently been proposed. In this paper, we propose a monitoring procedure using the latent vector of LSTM Autoencoder, a deep learning-based unsupervised learning method. We compare the performance of this procedure with the LSTM Autoencoder procedure based on the reconstruction error, the RNN classification procedure, and the residual charting procedure through simulation studies. Simulation results show that the performance of the proposed procedure and the RNN classification procedure are similar, but the proposed procedure has the advantage of being useful in processes where sufficient out-of-control data cannot be obtained, because it does not require out-of-control data for training.

• Journal of the Korean Magnetics Society
• /
• v.11 no.2
• /
• pp.72-77
• /
• 2001

Top spin valve films with PtMn antiferromagnetic layers were deposited using a multi-target dc magnetron sputtering in (100)Si substrates overcoated with 500 $\AA$ of Al$_2$O$_3$. Firstly, the post-deposition annealing was performed at 270$\^{C}$ in a unidirectional magnetic field of 3 kOe to induce the crystallographic transformation of the PtMn layer from a fcc (111) to a fct (111) structure. Secondly, the spin valve films were annealed without magnetic fields and magnetic properties were measured. In Si/A1$_2$O$_3$ (500$\AA$)/Ta(50$\AA$)NiFe(40$\AA$)/CoFe(17$\AA$)/Cu(28$\AA$)/CoFe (30$\AA$)PtMn(200$\AA$)Ta(50$\AA$) top spin valve samples, the MR ratio decreased slowly with increasing annealing temperature up to 325$\^{C}$. But above 325$\^{C}$, the MR ratio decreased rapidly to 1%, due to a collapse of the exchange coupling between a antiferromagnetic layer and a pinned layer with increasing annealing temperature. Also above 325$\^{C}$, the exchange biased field rapidly decreased and the interlayer coupling field rapidly increased with increasing annealing temperature. A change in the interlayer coupling field was resulted from the increase in interface roughness due to Mn-interdiffusion through the grain boundaries. We confirmed the temperature in changing magnetic properties agreed well with the blocking temperature of PtMn based spin valve structure.

• Journal of the Korean Magnetics Society
• /
• v.8 no.6
• /
• pp.374-379
• /
• 1998

$Mn_1-xCr_xPt_3$ alloy films have been prepared by depositing (Mn, Cr)/Pt multilayers using a rf magnetron sputterer followed by heat treatment. Small and wide angle x-ray diffractometry, magnetic hysteresis loops and Kerr rotation angle spectra of the films have been measured and used to investigate structural, magnetic and magneto-optic properties of the films. The films had a crystal structure of ordered AuCu$_3$ type and the strong preferred orientation of a (111)plane parallel to the film surface. The saturation magnetization of the films was decreased with Cr content reaching almost zero near x=0.58 and then increased for further increasement of Cr content up to x=0.77 over that stayed almost constant. This indicated that Cr atoms were antiferromagnetically coupled with Mn atoms. The magnetic easy axis of MnPt$_3$(x=0) film was parallel to the film surface but those of the films with x$\geq$0.58 increased as Cr content increased reaching about 4 kOe at x=1(CrPt$_3$). The dependence of the Kerr rotation angle on the Cr content was similar to that of the saturation magnetization on the Cr content. The films with x=0.77 and x=1 showed the larger Kerr rotation angle at the wavelengths of near infrared compared to the magneto-optic recording medium, TbFeCo, currently being used.

• Journal of Astronomy and Space Sciences
• /
• v.25 no.2
• /
• pp.149-156
• /
• 2008

Forbush Decreases (FDs) are representative events of abrupt decrease in galactic cosmic ray intensity. They are known to be strongly associated with solar wind events such as interplanetary shock (IP shock) and magnetic cloud (MC). In order to examine effectiveness of the MC on FDs, I studied the 44 MCs that occurred during the 2 years from 1998 to 1999 and investigated the properties of interplanetary magnetic field (IMF) and solar wind. As a result, I found that 11 out of 44 MCs are associated with the FDs. In particularly, it is noted that the FDs are driven by the IP shock sheaths which are associated with over 13 nT of IMF magnitude, 3 nT of IMF turbulence, and 550km/s of solar wind speed. This result indicates that magnetic cloud and its interplanetary shock sheath work as a modulator of the cosmic ray intensity.

• Journal of Digital Convergence
• /
• v.17 no.11
• /
• pp.395-407
• /
• 2019

This study attempted to verify the structural model of the effects of stress, self-efficacy, and self-control on smartphone addiction in University students. The subjects of this study were 440 University students in G and P city. Results, First the most influential variables on smartphone addiction were self-control, followed by stress, and two variables explained explanation about smartphone addiction in 34%. Second, self-efficacy had a positive effect on self-control and stress had a negative effect. Both variables had an indirect effect on smartphone addiction through self-control. In groups less than 4 hours and above, there was a partial regulation effect because of differences between groups in the smartphone addiction pathway coefficients of stress and self-efficacy. Therefore, in order to reduce smartphone addiction, it is important to find ways to reduce stress and increase self-control and self-efficacy, and necessary to develop various programs and tailor educational interventions for each individual situation.

• The Journal of the Petrological Society of Korea
• /
• v.13 no.1
• /
• pp.16-33
• /
• 2004

By relating mineralogy, petrology and geochemistry to observed magnetic properties, an understanding of the geological factors that control magnetic signatures is obtained. Magnetic susceptibility measurements and geochemical analyses were carried out for 160 samples in the Jurassic to Cretaceous granitoids, which is distributed to Pocheon, Jipori, Geumsan, Namwon, Songnisan, Yongdam, Masan, Jindong, and Taebaeksan areas. The magnetic properties of igneous infusion in these granites reflect bulk rock composition, reduction-oxidation state, hydrothermal alteration which are controlled by tectonic setting, composition and history of the source region, depth of emplacement and nature of wall rocks.

• Journal of the Korean Magnetics Society
• /
• v.11 no.4
• /
• pp.173-178
• /
• 2001

The effects of heat-treatment with magnetic or non-magnetic field on magnetic properties of gas-atomized MPP dust cores subjected to various cooling processes after annealing were investigated. Upon magnetic-field annealing, ac permeability and core loss decreased with the increase of cooling rate, which were attributed to the generation of inhomogeneous internal stress and anomalous eddy current loss, respectively. It was not observed the formation of ordered phase and the related change in magnetic properties at the cooling stage for MPP dust cores. In MPP alloys, magnetic anisotropy was easily induced through the directional order, and permeability and core loss were changed under the conditions of low cooling rate and magnetic annealing.

• Proceedings of the Korea Concrete Institute Conference
• /
• 2008.11a
• /
• pp.349-352
• /
• 2008

The research conducts a four-point loading test by making two reinforced concrete beams(HSCC test specimen and conventional concrete test specimen) in order to apply an HSCC with a normal strength(30MPa) to a structure. Also, it compares and analyzes the characteristics of the flexural behavior of HSCC and conventional concrete. The stiffness and ductility of the test specimens of HSCC and conventional concrete show similar behavior, but HSCC is more effective in crack control than conventional concrete. The result of the research demonstrates that HSCC can be applied in the construction site.

• The Journal of the Korea institute of electronic communication sciences
• /
• v.12 no.6
• /
• pp.1057-1064
• /
• 2017

High sensitivity magnetic sensor having foreign metal detection capability is proposed utilizing giant magneto-impedance effect. Strip sensor showed the increasing output voltage when the external magnetic field was applied along with strip from strip grounding point, although the initial DC voltage varied depending on the pointing direction of strip sensor. Proposed sensor was able to eliminate more than half of background noise using active noise filter to achive high sensitivity, and it showed the capability to detect magnetized foreign metal object independent of ambient electro-magnetic noise and earth magnet. In case of ferrous sphere, the metal detection up to 0.8mm diameter was experimentally demonstrated at 5mm distance from strip sensor.