• Title/Summary/Keyword: 잉곳

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A Study of Optimum Growth Rate on Large Scale Ingot CCz (Continuous Czochralski) Growth Process for Increasing a Productivity (생산성 증대를 위한 대구경 잉곳 연속 성장 초크랄스키 공정 최적 속도 연구)

  • Lee, Yu-Ri;Roh, Ji-Won;Jung, Jae Hak
    • Korean Chemical Engineering Research
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    • v.54 no.6
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    • pp.775-780
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    • 2016
  • Recently, photovoltaic industry needs a new design of Czochralski (Cz) process for higher productivity with reasonable energy consumption as well as solar cell's efficiency. If the process uses the large size reactor for increasing productivity, it is possible to produce a 12-inch, rather than the 8-inch. Also the continuous czochralski process method can be maximized to increase productivity. In this study, it was designed to improve the yield value of ingot with optimal condition which reduce consumption of electrical power. It has increased the productivity of the 12-inch ingot process condition by using CFD simulation. I have found optimal growth rate, by comparing each growth rate the interface shape, Temperature gradient, power consumption. As a result, the optimal process parameters of the growth furnace has been derived to improve for the productivity and to reduce energy. This study will contribute to the improvement of the productivity in the solar cell industry.

Influence of relative distance between heater and quartz crucible on temperature profile of hot-zone in Czochralski silicon crystal growth (쵸크랄스키법 실리콘 성장로에서 핫존 온도분포 경향에 대한 히터와 석영도가니의 상대적 위치의 영향)

  • Kim, Kwanghun;Kwon, Sejin;Kim, Ilhwan;Park, Junseong;Shim, Taehun;Park, Jeagun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.5
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    • pp.179-184
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    • 2018
  • To lessen oxygen concentrations in a wafer through modifying the length of graphite heaters, we investigated the influence of relative distance from heater to quartz crucible on temperature profile of hot-zone in Czochralski silicon-crystal growth by simulation. In particular, ATC temperature and power profiles as a function of different ingot body positions were investigated for five different heater designs; (a) typical side heater (SH), (b) short side heater-up (SSH-up), (c) short side heater-low (SSH-low), (d) bottom heater without side heater (Only-BH), and (e) side heater with bottom heater (SH + BH). It was confirmed that lower short side heater exhibited the highest ATC temperature, which was attributed to the longest distance from triple point to heater center. In addition, for the viewpoint of energy efficiency, it was observed that the typical side heater showed the lowest power because it heated more area of quartz crucible than that of others. This result provides the possibility to predict the feed-forward delta temperature profile as a function of various heater designs.

A Czochralski Process Design for Si-single Crystal O2 Impurity Minimization with Pulling Rate, Rotation Speed and Melt Charge Level Optimization (Pulling rate, rotation speed 및 melt charge level 최적화에 의한 쵸크랄스키 공정 실리콘 단결정의 O2 불순물 최소화 설계)

  • Jeon, Hye Jun;Park, Ju Hong;Artemyev, Vladimir;Hwang, Seon Hee;Song, Su Jin;Kim, Na Yeong;Jung, Jae Hak
    • Korean Chemical Engineering Research
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    • v.58 no.3
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    • pp.369-380
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    • 2020
  • Most mono-crystalline silicon ingots are manufactured by the Czochralski (Cz) process. But If there are oxygen impurities, These Si-ingot tends to show low-efficiency when it is processed to be solar cell substrate. For making single-crystal Si- ingot, We need Czochralski (Cz) process which melts molten Si and then crystallizing it with seed of single-crystal Si. For melts poly Si-chunk and forming of single-crystalline Si-ingot, the heat transfer plays a main role in the structure of Cz-process. In this study to obtain high-quality Si ingot, the Cz-process was modified with the process design. The crystal growth simulation was employed with pulling rate and rotation speed optimization. Studies for modified Cz-process and the corresponding results have been discussed. The results revealed that using crystal growth simulation, we optimized the oxygen concentration of single crystal silicon by the optimal design of the pulling rate, rotation speed and melt charge level of Cz-process.

A Study on the Thermal Shock Resistance of Sintered Zirconia for Electron Beam Deposition (전자빔 증착을 위한 소결체 지르코니아의 열충격 저항성 연구)

  • Oh, Yoonsuk;Han, Yoonsoo;Chae, Jungmin;Kim, Seongwon;Lee, Sungmin;Kim, Hyungtae;Ahn, Jongkee;Kim, Taehyung;Kim, Donghoon
    • Journal of the Korean Society of Propulsion Engineers
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    • v.19 no.3
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    • pp.83-88
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    • 2015
  • Coating materials used in the electron beam (EB) deposition method, which is being studied as one of the fabrication methods of thermal barrier coating, are exposed to high power electron beam at focused area during the EB deposition. Therefore the coating source for EB process is needed to form as ingot with appropriate density and microstructure to sustain their shape and stable melts status during EB deposition. In this study, we tried to find the optimum powder condition for fabrication of ingot of 8 wt% yttria stabilized zirconia which can be used for EB irradiation. It seems that the ingot, which is fabricated through bi-modal type initial powder mixture which consists of tens of micro and nano size particles, was shown better performance than the ingot which is fabricated using monolithic nanoscale powder when exposed to high power EB.

Consolidation and casting technology of fine poly-Si powders for economical production of Si ingot (경제적인 Si 잉곳 생산을 위한 poly-Si 미세분말의 성형과 용해주조기술)

  • Moon, Byung-Moon;Kim, Bong-Hwan;Shin, Je-Sik;Lee, Sang-Mok;Park, Gi-Seong;Kim, Dae-Suk;Kim, Ki-Young
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.06a
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    • pp.261-264
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    • 2007
  • In this study, the consolidation and casting processes of fine Si powders, by-products of making high purity Poly-Si rods in the current method, were systematically investigated for use as economical solar-grade feedstock. Morphology, size, and contamination type of the poly-Si fine powders were inspected by combined analysis of SEM, particle size analyzer, and FT-IR. Poly-Si powder compacts were tried to fabricate by a consolidation process without a binding agent and then their density ratio and strength were evaluated. Finally, the electrical resistivity of the specimens prepared by an electromagnetic casting method was examined for purity assessment.

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A Study on the Creative Design of Pulling Module for Silicon Ingot and an Apparatus of Manufacturing Silicon Single Crystal Ingot by using TRIZ(6SC) (TRIZ(6SC)를 활용한 잉곳 인상모듈 및 실리콘 단결정 잉곳 제조장치의 창의적 설계)

  • Hong, Sung Do;Huh, Yong Jeong
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.2
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    • pp.39-43
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    • 2012
  • This paper presents a study on the design of a pulling module for silicon ingot and an apparatus of manufacturing silicon single crystal ingot using the same method. The pulling module is conceptually designed by using TRIZ. Czochralski method(CZ) is representative way to manufacture single crystal ingot for wafers. The seed can be broken by high tension which is caused by large weight of a silicon ingot. The solution of this problem has been derived using 6SC(6 steps creativity)TRIZ. The pulling module is actuated by DC motor and rollers. High tension in the seed is removed by the rotate-elevate motion of rollers in the pulling module. A rubber belt is included in the rotate-elevate mechanism for increasing friction between rollers and silicon ingot.