• Title/Summary/Keyword: 입자운동

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CMP Properties of TCO Film by kind of Slurry (슬러리 종류에 따른 투명전도박막의 연마특성)

  • Park, Ju-Sun;Choi, Gwon-Woo;Lee, Woo-Sun;Na, Han-Yong;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.539-539
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    • 2008
  • 본 논문에서는 투명전도박막의 균일한 표면특성을 확보하기 위해 광역평탄화 공정을 적용하여 투명전도 박막의 표면 거칠기를 연구하였으며 슬러리의 종류에 따른 박막의 연마특성을 연구하였다. 본 실험에서 사용된 ITO 박막은 RF Sputtering에 의해 제작되었고 하부 기판은 석영 Glass가 사용되었다. 광역평탄화를 위한 CMP 공정은 고분자 물질계열의 패드위에 슬러리입자를 공급하고 웨이퍼 캐리어에 하중을 가하며 웨이퍼의 표면을 연마하는 방법으로 가공물을 탄성패드에 누르면서 상대 운동시켜 가공물과 친화력이 우수한 부식액으로 화학적 제거를 함과 동시에 초미립자로 기계적 제거를 하는 것이다. ITO 박막의 평탄화를 위한 공정조건은 Polisher pressure 300 g/$cm^2$, 슬러리 유속 80 ml/min, 플레이튼속도 60 rpm으로 하였다. 위의 조건에 따라 공정을 진행 후 연마특성을 측정하였으며 이때 사용된 슬러리는 산화막에 사용되는 실리카슬러리와 금속연마용 슬러리인 EPL을 사용하였다. 연마율은 실리카 슬러리가 EPL슬러리에 비해 높음을 확인 하였다. CMP 공정에 의해 평탄화를 수행 할 경우 실리카슬러리와 EPL슬러리 모두 CMP전에 비해 돌출된 힐록들이 감소되었음을 알 수 있었다. 비균일도 특성은 모든 슬러리가 양호한 특성을 나타내었다. 평탄화된 박막의 표면과 거칠기 특성은 AFM(XE-200, PSIA Company) 을 이용하여 분석을 하였다.

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A study on the radiation effect of silicon solar cells in a low Earth orbit satellite by using high energy electron beams (고에너지 전자빔을 이용하여 저궤도 인공위성의 실리콘 태양센서의 내방사선 특성 연구)

  • Chung, Sung-In;Lee, Jae-Jin;Lee, Heung-Ho
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.3
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    • pp.1-5
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    • 2008
  • This paper analyzes on the radiation effect of silicon solar cells in a low Earth orbit satellite by using high energy electron beams. Generally, the satellite circling round in a low orbit go through Van Allen belt, in which electronic components are easily damaged and shortened by charged particles moving in a cycle between the South Pole and the North Pole. For example, Single Event Upset (SEU) by radiation could cause electronic devices on satellite to malfunction. From the ground experiment in which we used the high energy electron beam facility at Knrea Atomic Energy Research Institute (KAERI), we tried to explain sun sensor degradations on orbit could he caused by high energy electrons. While we focused on the solar cells used for light detectors, We convince our research also contributes to understand the radiation effect of solar cells generating electric powers on satellites.

Control Effects of the Hydrodynamic Force of the Submerged NACA0018 arranging in a Row in a Uniform Stream (균일흐름 중에 놓인 병렬구조를 가진 몰수형 NACA0018의 간격변화가 유체력 제어효과에 미치는 영향)

  • Gim, Ok-Sok;Shon, Chang-Bae;Lee, Gyoung-Woo
    • Journal of Navigation and Port Research
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    • v.34 no.5
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    • pp.325-330
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    • 2010
  • An open water rudder test was carried out to figure out the flow characteristics around a twin rudder at $Re=1.5{\times}10^4$. In the analysis, the unique characteristics of a twin rudder, which affects rudder forces, were explained. The analysis includes varying angles of attack from 10 to 30 degrees. In this paper, the measured results have been compared with each other to predict the performance characteristics of a twin rudder's 2-dimensional section by 2-frame grey level cross correlation PIV method. The length L=0.75C between upper and lower rudders could be defined as the critical length.

The Carbon Plume Simulation by Pulsed Laser Ablation Method - Interactions between Ar plasmas and Carbon Plume - (레이져 용삭법에 의한 탄소입자 운동모델 - 플라즈마와의 상관관계 -)

  • So, Soon-Youl;Chung, Hae-Deok;Lee, Jin;Park, Gye-Choon;Park, Gye-Chun;Kim, Chang-Sun;Moon, Chae-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.12a
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    • pp.96-100
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    • 2006
  • A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films. This paper was focused on the understanding and analysis of the motion of carbon atom (C) and carbon ion ($C^+$) particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=10~100 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are C, $C^+$ and electron were considered in the calculation of particle method. The motions of energetic $C^+$ and C deposited upon the substrate were investigated and compared.

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Numerical analysis on thermal-fluidic characteristics of the magnetic fluid in a cavity using GSMAC (GSMAC법을 이용한 밀폐된 정방형관내 자성유체의 열-유동 특성에 관한 해석적 연구)

  • Seo, Jae-Hyeong;Lee, Moo-Yeon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.3
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    • pp.997-1002
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    • 2013
  • The article is aiming to investigate the thermal-fluidic characteristics of magnetic fluid in a cavity using GSMAC (generalized-simplified marker and cell method). The transport equations of the magnetic fluid are including the continuity equation, momentum equation and energy equation for natural convection and Maxwell equation and magnetization equation of magnetite nano-sized particles motion. In addition, the heat transfer characteristics such as temperatures and Nusselt numbers and flow characteristics such as streamlines and isotherms of the magnetic fluid were analyzed with the intensity and direction of the magnetic fields. As a result, the thermal-fluidic characteristics of the magnetic fluid in a cavity were could be controlled by the intensity and direction of the magnetic fields.

Numerical Simulation far the Non-Spherical Aggregation of Charged Particles (하전 입자의 비구형 응집 성장에 대한 수치적 연구)

  • Park, Hyeong-Ho;Kim, Sang-Su;Jang, Hyeok-Sang
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.2
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    • pp.227-237
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    • 2002
  • A numerical technique for simulating the aggregation of charged particles was presented with a Brownian dynamic simulation in the free molecular regime. The Langevin equation was used for tracking each particle making up an aggregate. A periodic boundary condition was used for calculation of the aggregation process in each cell with 500 primary particles of 16 nm in diameter. We considered the thermal force and the electrostatic force for the calculation of the particle motion. The electrostatic force on a particle in the simulation cell was considered as a sum of electrostatic forces from other particles in the original cell and its replicate cells. We assumed that the electric charges accumulated on an aggregate were located on its center of mass, and aggregates were only charged with pre-charged primary particles. The morphological shape of aggregates was described in terms of the fractal dimension. In the simulation, the fractal dimension for the uncharged aggregate was D$\_$f/ = 1.761. The fractal dimension changed slightly for the various amounts of bipolar charge. However, in case of unipolar charge, the fractal dimension decreased from 1.641 to 1.537 with the increase of the average number of charges on the particles from 0.2 to 0.3 in initial states. In the bipolar charge state, the average sizes of aggregates were larger than that of the uncharged state in the early and middle stages of aggregation process, but were almost the same as the case of the uncharged state in the final stage. On the other hand, in the unipolar charge state, the average size of aggregates and the dispersion of particle volume decreased with the increasing of the charge quantities.

Leap Motion Framework for Juggling Motion According to User Motion in Virtual Environment

  • Kim, Jong-Hyun
    • Journal of the Korea Society of Computer and Information
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    • v.26 no.11
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    • pp.51-57
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    • 2021
  • In this paper, we propose a new framework that calculates the user's hand motions using a Leap Motion device, and uses this to practice and analyze arm muscles as well as juggling motions. The proposed method can map the movement of the ball in a virtual environment according to the user's hand motions in real time, and analyze the amount of exercise by visualizing the relaxation and contraction of the muscles. The proposed framework consists of three main parts : 1) It tracks the user's hand position with the Leap Motion device. 2) As with juggling, the action pattern of the user throwing the ball is defined as an event. 3) We propose a parabola-based particle method to map the movement of a juggling shape to a ball based on the user's hand position. As a result, using the our framework, it is possible to play a juggling game in real-time.

Influence of Droplet Size and Oil Viscosity on the Descending Velocity of Droplets Using Water Model With and Without Stirring (교반 유무에 따른 수모델을 사용한 액적의 하강 속도에 대한 액적 크기 및 오일 점도의 영향)

  • Hyeok-In Kwon;Alberto Conejo;Sung Yong Jung;Sun-Joong Kim
    • Resources Recycling
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    • v.32 no.2
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    • pp.33-42
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    • 2023
  • Metal emulsions have been studied for several decades as a method of increasing the efficiency of the steelmaking process. This study was performed using a water model, observable at room temperature, to compensate for the disadvantages of the high-temperature experiment, the results of which are difficult to observe visually. As a substitute for metal-in-slag emulsions, experiments were conducted by dropping distilled water into silicone oil and comparing the results with the results of a calculation by momentum balance equations. The descending velocity of the water droplet decreased as the diameter of the droplet and viscosity of the fluid (silicon oil) increased. To simulate the descending velocity of a water droplet in silicon oil under stirring conditions, the flow rate of the fluid (silicon oil) was measured by particle image velocimetry (PIV) methods. The calculation of the descending velocity of the water droplet was in good agreement with the measured values, with and without stirring a viscous silicone oil.

In situ posture of anterior body of Metagonimus yokogawai in experimentally infected dog (개의 실험적 요꼬가와흡충증에서 충체의 자세)

  • 장영기;강신영
    • Parasites, Hosts and Diseases
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    • v.23 no.2
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    • pp.203-213
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    • 1985
  • The in situ posture of anterior body of Metagonimus yokogawai was observed in experimental metagonimiasis of dog. The metacercariae were collected from naturally infected sweetfish by peptic digestion; a total of 8 dogs was orally infected with 10,000 metacercariae respectively. Two dogs were killed on 3 days, 9 days, 4 weeks and 10 weeks after the infection. The postures of worms in histological section of small intestine and of whole worms collected from the fixed intestinal mucosa were examined by light and scanning electron microscope. The results were summarized as follows: 1. The recovery rates of worms were 42.6% on 3 days, 55.0% on 9 days, 33.2% on 4 weeks and 9. 8% on 10 weeks after the infection respectively. 2. In histological sections of small intestine, most of worms were found at intervillous spaces as ovoid sections of posterior body. However, many worms, especially in 3 day-old worms, revealed protruded anterior body in glandular lumens of crypt. Some sections of anterior body were bifurcated or sacculated. 3. The worms collected from fixed intestinal mucosa under dissecting microscope exhibited a variety of postures. Many worms showed flat shapes with a concavity or curvatures. However, in many worms, the anterior body made a single or multiple protrusions. 4. By SEM observation of protruded anterior body, a longitudinal groove was found. 5. The frequency of worms with protruded anterior body decreased in 9 days, 4 weeks and 10 weeks than in 3 day-old worms. The above findings indicated that the anterior body of juvenile and adult M. yokogawai protruded to lumens of glandular crypt by folding their lateral portions to make a reversible tubelike structure. Frequent multiple protrusions were considered to be made to adapt the microniche of glandular crypts of dog intestine.

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EVALUATION ON THE ABRASION RESISTANCE OF A SURFACE SEALANT (레진전색제의 마모저항성에 대한 평가)

  • Kim, Soo-Mee;Han, Sae-Hee;Cho, Young-Gon
    • Restorative Dentistry and Endodontics
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    • v.32 no.3
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    • pp.180-190
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    • 2007
  • The purpose of this study was to evaluate the abrasion resistance of surface penetrating sealant which was applied on a composite resin restoration and to provide proper time to reapply sealant on composite resin surface. Two hundred rectangular specimens, sized $8\times3\times2mm$, were made of Micronew (Bisco, Inc., Schaumburg, IL, U.S.A) and divided into two groups; F group (n = 10) was finished with coarse and medium grit of Sof-Lex discs and BisCoverwas applied B group (n = 190) after finishing with discs. B group was again subdivided into nineteen subgroups From B-1 group to B-18 group were subjected to toothbrush abrasion test using a distilled water-dentifrice slurry and toothbrush heads B-IM group was not subjected to toothbrush abrasion test. Average surface roughness (Ra) of each group was calculated using a surface roughness tester (Surfcorder MSE-1700: Kosaka Laboratory Ltd., Tokyo, Japan) . A representative specimen of each group was examined by FE-SEM (S-4700: Hitachi High Technologies Co., Tokyo, Japan). The data were analysed using cluster analysis, paired t-test, and repeated measure ANOVA. The results of this study were as follows; 1. Ra off group was $0.898{\pm}0.145{\mu}m$ and B-IM group was $0.289{\pm}0.142{\mu}m$. Ra became higher from B-1 group $(0.299{\pm}0.48{\mu}m$ to B-18 group $(0.642{\pm}0.313{\mu}m$. 2. Final cluster center of Ra was $0.361{\mu}m$ in cluster 1 $(B-IM\simB-7)$, $0.511{\mu}m$ in cluster 2 $(B-8\simB-14)$ and $0.624{\mu}m$ in cluster 3 ($(B-15\simB-18)$. There were significant difference among Ra of three clusters. 3 Ra of B-IM group was decreased 210.72% than Ra of F group. Ra of B-8 group and B-15 group was increased 35.49% and 51.35% respectively than Ra of B-IM group. 4. On FE-SEM, B-IM group showed the smoothest resin surface. B-8 group and B-15 group showed vertically shallow scratches , and wide and irregular vertical scratches on composite resin surface respectively. Within a limitation of this study, finished resin surface will be again smooth and glazy if BisCover would be reapplied within 8 to 14 months after applying to resin surface.