• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.486-492
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• 1998

The amorphous Co-based magnetic films have a large saturation flux density, a low coercive force, and a zero magnetostriction constant. Therefore, they have been studied for application to magnetic recoding heads and micro magnetic devices. However, it was found that the magnetic anisotropy was changed for each film fabrication processes. In this study, we investigated how to control the anisotropy of sputtered amorphous $Co_{89}Nb{8.5}Zr{2.5}$ films. After deposition, the rotational field annealing ant the uniaxial field annealing were performed under the magnetic field of 1.5 kOe. the annealing was done at the temperature range from 400 to $600^{\circ}C$ for one hour. As-deposited amorphous $Co_{89}Nb{8.5}Zr{2.5}$ thin film had saturation magnetization ($4\piM_5$) of 0.8 T, coercive force($_IH_C$) of 1.5 Oe, and anisotropy field($H_k$) of 11 Oe. The amorphous $Co_{89}Nb{8.5}Zr{2.5}$ thin films annealed by rotational field annealing at $500^{\circ}C$ for one hour was found to be isotropy, and $4\piM_5$ of 0.9 T was obtained from these films, Also, the magnetic anisotropy of as-deposited films could be controlled by uniaxial field annealing at $400^{\circ}C$ for one hour. Anisotropy field($H_k$) of 17 Oe and $4\piM_5$ of 1.0 T were obtained by this method.

• 한국자기학회지
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• 제9권6호
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• pp.285-290
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• 1999

고투자율 및 고포화자화 특성을 동시에 만족하는 새로운 연자성 박막을 개발하기 위해 Fe-Zr-B계 조성에 Fe원소와 비고용 원소인 Ag를 첨가시킨 Fe86.7Zr3.3B4Ag6 비정질 박막을 DC 마그네트론 스퍼터링법으로 제조한 후 일축 자장중에서 1시간 동안 진공 열처리를 한 후 fan을 이용하여 냉각하여 특성을 조사하였다. Fe86.7Zr3.3B4Ag6 박막을 40$0^{\circ}C$에서 열처리한 후 1.7T의 높은 포화자화와 1 Oe의 낮은 보자력으로 인해 50 MHz에서 투자율이 7,800(0.2 mOe)으로 우수한 연자기 특성을 나타내었으며, 1 MHz에서 손실이 1.4 W/cc(B=0.1T)로 매우 낮았다. 이러한 고주파 연자기 특성은 Ag 첨가에 의해 비정질 기지에 미세한 bcc $\alpha$-Fe cluster가 균일하게 형성되었기 때문이라 생각된다.