• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1466-1469
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• 2004

Micro spherical lens mold processing method based on mechanical one completes a spherical shape by setting a diamond tool of hundreds $\mu$m radius on spins with high speed and then using Z-axis vertical feeding motion like the fabrication of micro drilling. In this method, we can see unprocessed parts shaped like cylinder and cone and check increasing chatter marks and burrs by setting errors of the central axis of rotation on the edge of the tool. That is why this method doesn't suit for the optical lens mold. In this paper presents unprocessed parts are disappeared and chatter marks and burrs are decreased from centre of the lens after using Run-out measuring and setting system on run-out occurred from setting tool. Also the fabrication characteristics of 6：4 Brass, A1601, PMMA are compared and analyzed, establishing the optimum machining condition on each material.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1119-1122
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• 2004

In the UV-NIL process using an elementwise patterned stamp (EPS), which includes channels formed to separate each element with patterns, low-viscosity resin droplets with a nano-liter volume are dispensed on all elements of the EPS. Following pressing of the EPS, the EPS is illuminated with UV light to cure the resin; and then the EPS is separated from several thin patterned elements on a wafer. Experiments on UV-NIL were performed on an EVG620-NIL. 50 － 70 nm features of the EPS were successfully transferred to 4 in. wafers. Especially, the wafer deformation during imprint was analyzed using the finite element method (FEM) in order to study the effect of the wafer deformation on the UV-NIL using EPS.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.220-224
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• 2001

High-speed machining is one of the most effective technologies to improve productivity. Because of the high speed and high feedrate, high-speed machining can give great advantages for the machining of dies and molds. To perform efficient high-speed machining, evaluation of high speed machinability must be studied preferentially and it can be identified by investigation of cutting force. To measure cutting force in high-speed machining, dynamometer has to have high natural frequency. In this paper, The dynamometer which has high natural frequency used to measure the cutting force in various cutting conditions. High-speed machining characteristics are evaluated by the cutting force, FFT analysis of the cutting force and chip formation.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.26-31
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• 2001

Recently, miniaturization and mass production are the main trends in manufacturing fields. Therefore, ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products, such as PDP and IT components, in precision products manufacturing. However, the deburring is significant problem in making smooth and precise parts in micro endmilling. This paper shows removal characteristics of burr generated by micro endmilling process. Additionally, it is necessary to understand the formation mechanism of burr of micro barrier ribs to find proper deburring method.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.39-39
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• 2003

As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.29-38
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• 2003

As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.48-56
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• 2004

Ceramics are very difficult-to-cut materials because of its high strength and hardness. Their machining mechanism is characterized by cracking and brittle fracture. In this paper, to give good machinability to the ceramics, h-BN powders are added to $Si_3N_4$, by volume of 20, 25 and 30%. And the machinability of the produced ceramics is tested using micro drilling system. Through required experimental works, it is shown that the micro drilling machinability is varied along with the volumetric percentage of h-BN powders. Also, it is verified that the obtained results can be used to develop new machinable ceramics of good material properties and machinability.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.86-91
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• 1993

연삭숫돌은 드레싱에 의해 초기숫돌면의 상태가조정되며, 가공과 더불어 공작물과 연삭숫돌의 연속적인 간섭으로 공작물의 치수변화와함께 연삭숫돌도 작업면이 변화하게 된다. 공작물의 표면은 연삭조건 및 공작물과 숫돌의 접촉특성에 따라 Rubbging, Ploughing, Cutting 작용이 이루어져 가공면이 형성되며 이때의 공작물의 표면 품위( Surface Integrity)는 연삭숫돌의 상태변화에따라 매우 민감하게 영향을 받는다. 본 연구에서는 원통연삭작업 에서의 감시 및 진단기술개발을 위하여 AE 센서의 적용가능성을 살펴보기위하여, 센서의 설치위치에 따른 영향 및 연삭가공 특성을 잘나타내는 AE Parameter의 선정을 위한 실험을 수행하며, 가공시간에 따른 연삭숫돌작업면 의 상태변화에 의한 AE Parameter의 변화를 조사하며, 이와더불어 연삭중의 법선저항을 측정분석하고 통계적인 수법으로 ARMA (Autoregressive Moving Average)을 이용하여 가공특성변화를 분석한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.43-47
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• 1995

The ball screw is one of the important mechanical parts for the linear motion feeding systems. The usage of the ball screw has been growing in various industrial fields such as CNC machine tool, industrial robot and automated systems. Because of ever increasing demand for ball screws, increased accuracy and quality of the ball screw is needed,especially the surface roughness of the ball contact area in order to diminish noise and vibration. Therefore to improve the surface roughness of the area,we introduced magnetic assisted polishing which is one of the new potential polishing methods. In this study, diamond slurry and iron powder was used for magnetic assisted polishing of the ball bearing surface. This polishing process was experimentally confirmed to improve the surface roughness of the ball bearing.

• Transactions of Materials Processing
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• v.15 no.9 s.90
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• pp.673-678
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• 2006

Demands for micro parts have increased with recent advances in IT and machinery industries. However, the present technology loaves much to be desired to effectively produce parts with the volume of $1mm^{3}$ and less by mechanical method in large quantities. This paper provides a method for efficient quantity production of complete micro 3D structure using micro end-milling cutting process. The possibility has proven via manufacturing experiment of a multistage micro complex gear structure of $500{\mu}m$ in length, $500{\mu}m$ in maximum external diameter and a volume of $1mm^{3}$ and less.