• Title/Summary/Keyword: 이용가능 시간과 불가능시간

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450mm 웨이퍼 공정용 system의 기하적 구조에 따른 플라즈마 균일도 수치 모델링

  • Yang, Won-Gyun;Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.256-256
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    • 2010
  • 최근 반도체 공정을 위한 증착이나 식각장비에 있어서 웨이퍼 크기의 증가는 새로운 연구 분야를 발생시켰다. 웨이퍼의 크기가 200 mm에서 300 mm, 450 mm로 커지지만, 같은 특성 혹은 더 좋은 특성을 필요로 하는 플라즈마를 이용하는 진공장비의 기하적 구조는 비례적으로 증가하지 않는다. 이런 이유로 450 mm의 웨이퍼 공정용 장비의 제작에 있어서 진공 부품과 플라즈마 발생 소스는 더 이상 시행착오로 실험하기에는 막대한 돈과 시간, 인력의 투자가 필요하기 때문에 불가능하게 되었다. 이런 시행착오를 줄이기 위함의 일환으로 본 연구에서는 450 mm 웨이퍼 공정용 장비의 챔버 구성에 따른 플라즈마 균일도를 수치 모델링으로 예측했다. 챔버를 구성함에 있어서 baffle의 형상과 위치, 배기 manifold에 따른 유동분포, 플라즈마 균일도를 위한 안테나의 구조 등 중요한 요소들이 많이 존재하지만, 일단 전체적인 챔버의 종횡비가 결정되어야 가능한 일들이다. 첫째, 기판홀더와 챔버 벽면 간의 거리, 기판홀더와 배기구까지의 거리, 기판과 소스와의 거리가 인입되는 가스 분포와 플라즈마 균일도에 가장 큰 영향을 끼칠 것으로 판단된다. 즉, 위의 세 가지 챔버 내부 구조물의 크기 비에 따라 기판 바로 위에서의 플라즈마 균일도가 가장 좋은 디자인을 최적화하는 것이 본 계산의 목적이다. 기판 표면에서의 플라즈마 밀도 균일도는 기판홀더와 벽면과의 거리, 기판과 소스와의 거리가 멀수록, 기판홀더와 배기구와의 거리가 짧을수록 좋아졌으며, 그림과 같이 안테나의 디자인이 4 turn으로 1층인 경우, 두 turn의 안테나만 사용하여 기판표면에서 20~30%의 플라즈마 균일도를 4.7%까지 낮출 수 있었다

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A Heuristic Approach to Scheduling Multiple Cranes for Intra-Block Remarshalling (복수 크레인을 활용한 블록 내 컨테이너 이적 계획)

  • Oh, Myung-Seob;Kang, Jae-Ho;Ryu, Kwang-Ryel;Kim, Kap-Hwan
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • v.29 no.1
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    • pp.413-421
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    • 2005
  • Intra-block remarshalling is the task of rearranging into some target bays those containers which are scattered within around the block. If multiple transfer cranes installed in the block are all used together we may be able to complete the remarshalling task as early as possible. However, when multiple cranes are used simultaneously, there may occur significant delays if we do not carefully consider interferences between the cranes at the time of scheduling. Especially, delays caused by interferences occur more frequently in case of using non-crossing cranes. This paper presents an efficient heuristics method for assigning moves of containers to each crane and for determining an appropriate container moving order in a manner sensitive to the interferences. Simulation experiments have shown that the proposed method can effectively reduce delays in various environments.

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Simulator for Management of Tracking Information of Digital Content (콘텐츠추적정보 관리 시뮬레이터)

  • Lee, Seung-Won;Choi, Hoon
    • The Journal of the Korea Contents Association
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    • v.12 no.6
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    • pp.48-55
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    • 2012
  • The number of digital content used in mobile devices such as smartphones or tablet PCs has been rapidly increasing along with the development of IT industry. At the same time, studies on digital content management are actively conducted. One of the previous studies defined CTI(Content Tracking Information) for efficient management of the information on digital content usage between mobile devices in an area in which the internet is inaccessible, and suggested ways to deal with CTI management, reduction of the overhead and a technique of collecting as many CTIs as possible within a short time. This paper presents the design and implementation of a simulator capable of verifying the logic and the performance of the CTI management method. This tool simulates a mobile environment where devices move around in the internet inaccessible area and propagates digital contents each other. It shows several advantages including the efficient synchronization of CTI management and overhead reduction.

A Heuristic Approach to Scheduling Multiple Cranes for Intra-Block Remarshalling (복수 크레인을 활용한 블록 내 컨테이너 이적 계획)

  • Oh Myung-Seob;Kang Jaeho;Ryu Kwang Ryel;Kim Kap Hwan
    • Journal of Navigation and Port Research
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    • v.29 no.5 s.101
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    • pp.447-455
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    • 2005
  • Intra-block remarshalling is the task of rearranging into some target bays those containers which are scattered within around the block. If multiple transfer cranes installed in the block are all used together we may be able to complete the remarshalling task as early as possible. However, when multiple cranes are used simultaneously, there may occur significant delays if we do not carefully consider interferences between the cranes at the time of scheduling. Especially, delays caused by interferences occur more frequently in case of using non-crossing cranes. This paper presents an efficient heuristic method for assigning moves of containers to each crane and for determining an appropriate container moving order in a manner sensitive to the interferences. Simulation experiments have shown that the proposed method can effectively reduce delays in various environments.

Cooperative 3D Modelling System based on WebGL (WebGL기반 협업 3D 모델링 시스템)

  • Pyun, Hae-Gul;An, Haeng-A;Park, Jinho
    • Journal of Digital Contents Society
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    • v.16 no.2
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    • pp.189-196
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    • 2015
  • The proposed cooperative 3D modelling system enables more efficient modeling works by improving current cooperation systems. Current 3D modeling tasks work on off-line and most of works are cooperation systems which communicate by files. These cooperation system cannot be interactive, occurs time delay while feedback and must have some programs which can read the files. This paper solves these problems using web that has the characteristics of network and proposes new cooperation system form. Using WebGL(Web Graphics Library) which is proposing technology in technical realization of Web 3D modeling, we make 3D objects in web browser and these objects can be manipulated by server-client communication. Therefore, if people use this system, they can use real time interaction and feedback. Also this system lowers a software installation necessity and can access everytime if web browser is installed.

Analysis on the Tourist's Behaviors and Satisfaction of the Gwangneung Area (문화.생태지역에 대한 관광행태와 만족도 분석: 광릉지역을 사례로)

  • Kim, Sun-Hee
    • Journal of the Korean association of regional geographers
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    • v.11 no.3
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    • pp.336-350
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    • 2005
  • The prime objective of this study is to analyze tourist's behaviors and satisfaction of the Gwangneung area and get a reading on the tourist's socio-economic traits and the propensity of activities. In addition, it highlights surveys of the tourist's consciousness of cultural, ecological and environmental tourism resources available in the Gwangneung area and the possibility for sustainable development and ways to make the most of these resources. This study found that even though Gwangneung is mostly a place for one day family outings. the tourist's demand for actually unreachable ecological resources is high while existing cultural tourism resources have less than the expected drawing power. It was also found that tourists recognize the need for preservation of the tourism resources of Gwangneung and its potential for further sustainable development. In particular, most tourists to Gwangneung are relatively satisfied with the status of preservation of its cultural and ecological resources and environment On the other hand, accessibility, tourism facilities, and management are estimated at less than desired. Gwangneung would benefit by making efforts for the positive use of its tourism resources and improvement of convenience facilities, management and operation.

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Approximate Dynamic Programming Based Interceptor Fire Control and Effectiveness Analysis for M-To-M Engagement (근사적 동적계획을 활용한 요격통제 및 동시교전 효과분석)

  • Lee, Changseok;Kim, Ju-Hyun;Choi, Bong Wan;Kim, Kyeongtaek
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.50 no.4
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    • pp.287-295
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    • 2022
  • As low altitude long-range artillery threat has been strengthened, the development of anti-artillery interception system to protect assets against its attacks will be kicked off. We view the defense of long-range artillery attacks as a typical dynamic weapon target assignment (DWTA) problem. DWTA is a sequential decision process in which decision making under future uncertain attacks affects the subsequent decision processes and its results. These are typical characteristics of Markov decision process (MDP) model. We formulate the problem as a MDP model to examine the assignment policy for the defender. The proximity of the capital of South Korea to North Korea border limits the computation time for its solution to a few second. Within the allowed time interval, it is impossible to compute the exact optimal solution. We apply approximate dynamic programming (ADP) approach to check if ADP approach solve the MDP model within processing time limit. We employ Shoot-Shoot-Look policy as a baseline strategy and compare it with ADP approach for three scenarios. Simulation results show that ADP approach provide better solution than the baseline strategy.

Estimation of Fire Emissions Using Fire Radiative Power (FRP) Retrieved from Himawari-8 Satellite (히마와리 위성의 산불방사열에너지 자료를 이용한 산불배출가스 추정: 2017년 삼척 및 강릉 산불을 사례로)

  • Kim, Deasun;Won, Myoungsoo;Lee, Yangwon
    • Korean Journal of Remote Sensing
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    • v.33 no.6_1
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    • pp.1029-1040
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    • 2017
  • Wildfires release a large amount of greenhouse gases (GHGs) into the atmosphere. Fire radiative power (FRP) data obtained from geostationary satellites can play an important role for tracing the GHGs. This paper describes an estimation of the Himawari-8 FRP and fire emissions for Samcheock and Gangnueng wildfire in 6 May 2017. The FRP estimated using Himawari-8 well represented the temporal variability of the fire intensity, which cannot be captured by MODIS (Moderate Resolution Imaging Spectroradiometer) because of its limited temporal resolution. Fire emissions calculated from the Himwari-8 FRP showed a very similar time-series pattern compared with the AirKorea observations, but 1 to 3 hour's time-lag existed because of the distance between the station and the wildfire location. The estimated emissions were also compared with those of a previous study which analyzed fire damages using high-resolution images. They almost coincided with 12% difference for Samcheock and 2% difference for Gangneung, demonstrating a reliability of the estimation of fire emissions using our Himawari-8 FRP without high-resolution images. This study can be a reference for estimating fire emissions using the current and forthcoming geostationary satellites in East Asia and can contribute to improving accuracy of meteorological products such as AOD (aerosol optical depth).

Tutorial on the Principle of Borehole Deviation Survey - An Application of the Coordinate Transforms (시추공 공곡 측정의 원리 - 좌표계 변환의 응용)

  • Song, Yoonho
    • Geophysics and Geophysical Exploration
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    • v.23 no.4
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    • pp.243-252
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    • 2020
  • To share an understanding of trajectory measurement in surveys using borehole, this tutorial summarizes the relevant mathematical principles of the borehole deviation survey based on coordinate transform. For uncased or open holes, calculations of the azimuth-deviation-tool face rotation using three-component accelerometer and magnetometer measurements are summarized. For the steel-cased holes, calculations are based on the time-derivative formula of the coordinate transform matrix; yaw-pitch-roll angles through time are mathematically determined by integrating the threecomponent angular velocity measurements from the gyroscope while also removing the Earth's rotation effect. Sensor and data fusion to increase the accuracy of borehole deviation survey is explained with an example of the method. These principles of borehole deviation surveys can be adapted for attitude estimation in air-borne surveys or for positioning in tunnels where global positioning system (GPS) signals cannot be accessed. Information on the optimization filter that must be incorporated in sensor fusion is introduced to help future research.

Multi-purpose Geophysical Measurements System Using PXI (PXI를 이용한 다목적 물리탐사 측정 시스템)

  • Choi Seong-Jun;Kim Jung-Ho;Sung Nak-Hun;Jeong Ji-Min
    • Geophysics and Geophysical Exploration
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    • v.8 no.3
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    • pp.224-231
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    • 2005
  • In geophysical field surveys, commercial equipments often fail to resolve the subsurface target or even sometimes fail to be applied because they do not fit to the various field situations or the physical properties of the medium or target. We developed a geophysical measurement system, which can be easily adapted for the various field situations and targets. The system based on PXI with A/D converter and some stand alone equipment such as Network Analyzer was applied to borehole radar survey, borehole sonic measurement and electromagnetic noise measurement. The system for borehole radar survey consists of PXI, Network Analyzer, dipole antennas, GPIB interface is used for PXI to control Network Analyzer. The system for borehole sonic measurement consists of PXI, 24 Bit A/D converter, high voltage pulse generator, transmitting and receiving piezoelectric sensors. The electromagnetic noise measurement system consists of PXI, 24 Bit A/D converter, 2 horizontal component electric field sensors and 2 horizontal and 1 vertical component magnetic filed sensors. The borehole radar system has been successfully applied to detect the width of the artificial tunnel through which the borehole pass and to image buried steel pipe, while the commercial borehole radar equipment failed. The borehole sonic system was tested to detect the width of artificial tunnel and showed a reasonable result. The characteristic of electromagnetic noise was grasped at an urban area with the data from the electromagnetic noise measurement system. The system is also applied to characterize the signal distortion by induction between the electric cables in resistivity survey. The system can be applied various geophysical problems with a simple modification of the system and sensors.