• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.12
• /
• pp.1101-1106
• /
• 2014

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.5
• /
• pp.550-555
• /
• 2007

The effective fracture toughness testing of materials intended for application in Micro Electro Mechanical Systems (MEMS) devices is required in order to improve understanding of how micro sized material used in device may be expected to perform upon the micro scale. ${\gamma}$-TiAl based materials are being considered for application in MEMS devices at elevated temperatures. Especially, in Alloy 4, both ${\alpha}_2$ and ${\gamma}$ lamellae were altered markedly in 3,000 h, $700^{\circ}C$ exposure. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. The materials were examined 2 types Alloy 4 on heat exposed specimen($700^{\circ}C$, 3,000 h) and no heat exposed one. Micro sized cantilever beams were prepared mechanical polishing on both side at $25{\sim}30{\mu}m$ and electro final stage polishing to observe lamellar orientation of same colony with EBSD (Electron Backscatter Diffraction Pattern). Through lamellar orientation as inter-lamellae or trans-lamellae, Cantilever beam was fabricated with Focused Ion Beam(FIB). The directional behavior of the lamellar structure was important property in single material, because of the effects of the different processing method and variations in properties according to lamellar orientation. In MEMS application, it is first necessary to have a reliable understanding of the manufacturing methods to be used to produce micro structure.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.345-345
• /
• 2011

MgO는 암염구조를 가진 전형적인 이온 결합성 화합물로서 7.8eV의 띠틈을 갖고 흡습성이 강하다. 면 방전 구조 PDP에서 MgO 보호막은 면 방전으로 인한 유전층의 식각을 보호하고 2차 전자 방출을 통해 방전 전압을 낮추는 역할을 한다. 하지만 MgO 보호막은 증착시 흡수된 수분이 제거되어야 하고, 방전 특성 개선 및 방전 효율 향상을 위해 가공 처리에 관한 연구가 진행 되어야 한다. 본 연구는 MgO 보호막의 전자적 특성의 변화를 알아보기 위해 $O_2$ 분위기에서 전자빔 증착법을 이용해 MgO Powder를 사용하여 시료를 제작하였다. 표면에 흡착된 수분제거로 인한 특성 변화를 알아보기 위해 진공 챔버내에서 시료를 $500^{\circ}C{\sim}550^{\circ}C$의 열처리를 실시한 후 XPS(X-ray Photoelectron Spectroscopy), REELS(Reflection Electron Energy Loss Spectroscopy), UPS(Ultraviolet photoelectron Spectroscopy)를 이용하여 전자적 특성을 연구하였다. XPS 측정결과 시료의 열처리를 통해 C1s spectrum의 O-C=O(289eV) binding energy가 없어져 박막에 흡착된 불순물이 제거 되었으며 O1s spectrum에서 Hydroxides가 감소하고 530.0eV의 MgO 결합에너지쪽으로 커짐으로써 박막의 구조를 확인할 수 있었다. 그리고 $O^2$ 분위기에서 성장시킨 MgO 박막 기판을 열처리 후 REELS를 이용해 띠틈을 얻어보면 Ep=500eV에서 띠틈이 6.77eV, Ep=1500eV에서 띠틈이 7.33eV로 각각 측정되었다. Ep=500eV의 REELS 스펙트럼으로부터 산소 결함에 의한 표면 F Center는 4.22eV로 확인되었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.06a
• /
• pp.430-430
• /
• 2007

In this study, the nematic liquid crystal (NLC) alignment effects treated on the ZnO thin film layers using ion beam irradiation were successfully studied for the first time. The ZnO thin films were deposited on indium-tin-oxide (ITO) coated glass substrates by rf-sputter and The ZnO thin films were deposited at the three kinds of rf power. The used DuoPIGatron type ion beam system, which can be advantageous in a large area with high density plasma generation. The ion beam parameters were as follows: energy of 1800 eV, exposure time of 1 min and ion beam current of $4\;mA/cm^2$ at exposure angles of $15^{\circ}$, $30^{\circ}$, $45^{\circ}$, and $60^{\circ}$. The homogeneous and homeotropic LC aligning capabilities treated on the ZnO thin film surface with ion beam exposure of $45^{\circ}$ for 1 min can be achieved. The low pretilt angle for a NLC treated on the ZnO thin film surface with ion beam irradiation for all incident angles was measured. The good LC alignment treated on the ZnO thin film with ion beam exposure at rf power of 150 W can be measure. For identifying surfaces topography of the ZnO thin films, atomic force microscopy (AFM) was introduced. After ion beam irradiation, test samples were fabricated in an anti-parallel configuration with a cell gap of $60{\mu}m$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.06a
• /
• pp.398-398
• /
• 2007

Most recently, the Liquid Crystal (LC) aligning capabilities achieved by ion beam exposure on the diamond-like carbon (DLC) thin film layer have been successfully studied. The DLC thin films have a high mechanical hardness, a high electrical resistance, optical transparency and chemical inertness. Nitrogen doped Diamond Like Carbon (NDLC) thin films exhibit properties similar to those of the DLC films and better thermal stability than the DLC films because C:N bonding in the NDLC film is stronger against thermal stress than C:H bonding in the DLC thin films. Moreover, our research group has already studied ion beam alignment method using the NDLC thin films. The nematic liquid crystal (NLC) alignment effects treated on the SiNx thin film layers using ion beam irradiation for three kinds of N rations was successfully studied for the first time. The SiNx thin film was deposited by plasma-enhanced chemical vapor deposition (PECVD) and used three kinds of N rations. In order to characterize the films, the atomic force microscopy (AFM) image was observed. The good LC aligning capabilities treated on the SiNx thin film with ion beam exposure for all N rations can be achieved. The low pretilt angles for a NLC treated on the SiNx thin film with ion beam irradiation were measure.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.11 no.6
• /
• pp.1115-1121
• /
• 2007

[ $Bi_2Sr_2Ca{_{n-1}}Cu_nO_x$ ](n=0,1,2) thin fans have been fabricated by co-deposition at an ultra-low growth rate using ion beam sputtering(IBS) method. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, $PO_3$ dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with $T_c$(onset) of about 90 K and $T_c$(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as $CaCuO_2$ was observed in all of the obtained films.

• Proceedings of the Mineralogical Society of Korea Conference
• /
• 2001.06a
• /
• pp.141-142
• /
• 2001

남서부 경기육괴의 편마암류로부터 분리된 저어콘(zircon) 입자를 대상으로, 이온현미분석기(ion microprobe)를 사용한 U-Pb 연대를 구하였다. 그 결과는 후기 원생대(약 820 Ma) 뿐만 아니라 오르도비스기에 상당한 화성활동이 한반도에 있었음을 지시한다. 우리 나라 후기 원생대의 화성-변성 활동에 대해 알려져 있는 바는 극히 제한적이어서 후속연구가 필수적이며, 이러한 연구는 한반도의 지체구조적 변천사를 로디니아 초대륙(Rodinia supercontinent)의 생성-분리와 관련해 재조명할 수 있는 기회를 제공할 것이다. 또한 오르도비스기의 화성작용은 그동안 논란이 되어 왔던 소위 “칼레도니아(Caledonian)” 변동 (cf. 조문섭, 2000)에 대한 또 다른 증거를 제공해준다. 저어콘의 연대측정은 서호주의 커튼공업대학교에 설치되어 있는 SHRIMP-II(Sensitive High-Resolution Ion Microprobe-II; 고감도-고분해능 이온현미분석기)를 사용하였으며, 시료 준비 및 분석방법은 기존에 보고된 바와 같다 (e.g., Kinny et al., 1999). 분석된 3개의 암석 시료(1006-5, 8, 9)는 경기육괴의 남서부에 위치한 홍성 지역의 정편마암들이다. 1006-8 시료는 Turek and Kim (1996)이 전통적인 방법을 사용해 687$\pm$5 Ma의 U-Pb 저어콘 연대를 보고한 바 있는 화강암질 편마암 (시료번호, KJ43)에 해당된다. 두 개의 다른 시료는 1006-8 주변에서 산출하는 전형적인 경기육괴의 편마암류로서 화강암질 정편마암이다. 이들 시료로부터 분리된 저어콘 입자들은 대부분 화성기원의 누대구조와 자형의 결정형태를 보여준다. 과성장띠(overgrouth rims)는 1006-5 시료에서 흔하게, 그리고 1006-9 시료에서 매우 드물게 관찰된다. 음극선발광(cathodoluminescence) 영상의 해석을 통해 저어콘 결정의 성장사를 유추하였으며, 이를 바탕으로 이온현미분석 점(spot)을 정하였다. U-Pb-Th 자료는 퍼스(Perth) 저어콘 스탠다드 (CZ3, 564 Ma, $^{206}$Pb/$^{238}$U=0.0914)를 사용하였다. 아래에 기술하는 연대는 모두 $^{206}$Pb/$^{238}$U 연대에 해당된다. 두 개의 화강암질 편마암 시료로부터 구한 U-Pb 저어콘 연대는 각각 812 $\pm$ 14 Ma(1006-8)와 822 $\pm$ 17 Ma(1006-9)로 분석오차 내에서 서로 일치한다. 이 결과는 춘천 및 전곡 지역의 석류석 각섬암에서 보고된 Sm-Nd 전암연대(852 $\pm$ 24 Ma 및 824 $\pm$ 143 Ma; Lee and Cho, 1995; Ree et al., 1996)와 잘 부합한다. 따라서 후기 원생대 기간 중 화성활동이 한반도에서 광범위하게 일어났음을 시사한다. 한편, 1006-9 시료에서는 예외적으로 한 개의 저어콘 입자 주변부(rim)에서 매우 얇은 과성장띠가 관찰되었으며, 두 개의 점 분석으로부터 구한 U-Pb 저어콘 연대는 약 235 Ma이다. 이 띠는 또한 변성기원의 저어콘에서 흔히 관찰되는 작은 W (<0.05) 비를 보인다. 1006-5 시료는 위 두 시료로부터 수 km 떨어진 지점에서 채집하였으나, 저어콘 연대는 상이한 기록을 보여준다. 즉 매우 작은 Th/U (<0.01) 값을 갖는 저어콘의 주변부에서 223 $\pm$ 5 Ma의 연대가 잘 정의되며, 이는 1006-9 시료에서 관찰된 결과와 함께 트라이아스기의 고온변성작용이 백립암상에 가까운, 매우 높은 온도에 달하였음을 지시한다. 한편 저어콘의 중심부는 335-473 Ma의 비교적 넓은 연대 분포를 보인다. 이는 저어콘이 실제 성장한 연대를 지시하기보다는 트라이아스기의 변성작용에 따른 납손실(Pb loss) 그리고 누대 규모보다 더 큰 빔 크기(beam size, 약 30 $\mu\textrm{m}$)의 영향일 것으로 해석된다. 또한 저어콘이 다양한 외래물질로부터 기원했다는 증거가 관찰되지 않으므로, 이 정편마암의 모암은 오르도비스기(약 430-470 Ma)에 관입하였을 것으로 생각된다. 따라서 그동안 논란이 되어 왔던 소위 “칼레도니아” 변동이 한반도 내에 실존하였을 가능성을 시사한다. 이상의 결과를 종합하여 볼 때, 경기육괴의 변성암류는 후기 원생대 이후 다양한 저어콘의 성장사를 기록하고 있음을 알 수 있다: 즉 (1) 후기원생대(약 820 Ma)의 화성작용; (2) 오르도비스기(약 450 Ma)의 화성작용: 그리고 (3) 트라이아스기 (약 223 Ma)의 부분용융을 수반한 고온 변성작용으로 대표된다. 이러한 지질연대는, 옥천변성대에서 얻어진 756 Ma의 저어콘 연대(Lee et al., 1998)와 더불어, 친링-다비-수루(Qinling-Dabie-Sulu) 대륙 충돌대와 양쯔 지괴에서 보고된 지질연대 결과와 잘 부합한다. 따라서 지구연대학적으로 경기육괴가 북중국보다는 대륙충돌대를 포함하는 남중국지괴에 속할 것으로 결론지을 수 있다.

• Progress in Medical Physics
• /
• v.21 no.1
• /
• pp.113-119
• /
• 2010

Software for GafChromic EBT2 film dosimetry was developed in this study. The software provides film calibration functions based on color channels, which are categorized depending on the colors red, green, blue, and gray. Evaluations of the correction effects for light scattering of a flat-bed scanner and thickness differences of the active layer are available. Dosimetric results from EBT2 films can be compared with those from the treatment planning system ECLIPSE or the two-dimensional ionization chamber array MatriXX. Dose verification using EBT2 films is implemented by carrying out the following procedures: file import, noise filtering, background correction and active layer correction, dose calculation, and evaluation. The relative and absolute background corrections are selectively applied. The calibration results and fitting equation for the sensitometric curve are exported to files. After two different types of dose matrixes are aligned through the interpolation of spatial pixel spacing, interactive translation, and rotation, profiles and isodose curves are compared. In addition, the gamma index and gamma histogram are analyzed according to the determined criteria of distance-to-agreement and dose difference. The performance evaluations were achieved by dose verification in the $60^{\circ}$-enhanced dynamic wedged field and intensity-modulated (IM) beams for prostate cancer. All pass ratios for the two types of tests showed more than 99% in the evaluation, and a gamma histogram with 3 mm and 3% criteria was used. The software was developed for use in routine periodic quality assurance and complex IM beam verification. It can also be used as a dedicated radiochromic film software tool for analyzing dose distribution.

• Progress in Medical Physics
• /
• v.19 no.1
• /
• pp.80-88
• /
• 2008

Recent radiotherapy dose planning system (RTPS) generally adapted the kernel beam using the convolution method for computation of tissue dose. To get a depth and profile dose in a given depth concerened a given photon beam, the energy spectrum was reconstructed from the attenuation dose of transmission of filter through iterative numerical analysis. The experiments were performed with 15 MV X rays (Oncor, Siemens) and ionization chamber (0.125 cc, PTW) for measurements of filter transmitted dose. The energy spectrum of 15MV X-rays was determined from attenuated dose of lead filter transmission from 0.51 cm to 8.04 cm with energy interval 0.25 MeV. In the results, the peak flux revealed at 3.75 MeV and mean energy of 15 MV X rays was 4.639 MeV in this experiments. The results of transmitted dose of lead filter showed within 0.6% in average but maximum 2.5% discrepancy in a 5 cm thickness of lead filter. Since the tissue dose is highly depend on the its energy, the lateral dose are delivered from the lateral spread of energy fluence through flattening filter shape as tangent 0.075 and 0.125 which showed 4.211 MeV and 3.906 MeV. In this experiments, analyzed the energy spectrum has applied to obtain the percent depth dose of RTPS (XiO, Version 4.3.1, CMS). The generated percent depth dose from $6{\times}6cm^2$ of field to $30{\times}30cm^2$ showed very close to that of experimental measurement within 1 % discrepancy in average. The computed dose profile were within 1% discrepancy to measurement in field size $10{\times}10cm$, however, the large field sizes were obtained within 2% uncertainty. The resulting algorithm produced x-ray spectrum that match both quality and quantity with small discrepancy in this experiments.

• Progress in Medical Physics
• /
• v.23 no.4
• /
• pp.219-228
• /
• 2012

The tangential breast intensity modulated radiotherapy (T-B IMRT) technique, which uses the same tangential fields as conventional 3-dimensional conformal radiotherapy (3D-CRT) plans with physical wedges, was analyzed in terms of the calculated dose distribution feature and dosimetric accuracy of beam delivery during treatment. T-B IMRT plans were prepared for 15 patients with breast cancer who were already treated with conventional 3D-CRT. The homogeneity of the dose distribution to the target volume was improved, and the dose delivered to the normal tissues and critical organs was reduced compared with that in 3D-CRT plans. Quality assurance (QA) plans with the appropriate phantoms were used to analyze the dosimetric accuracy of T-B IMRT. An ionization chamber placed at the hole of an acrylic cylindrical phantom was used for the point dose measurement, and the mean error from the calculated dose was $0.7{\pm}1.4%$. The accuracy of the dose distribution was verified with a 2D diode detector array, and the mean pass rate calculated from the gamma evaluation was $97.3{\pm}2.9%$. We confirmed the advantages of a T-B IMRT in the dose distribution and verified the dosimetric accuracy from the QA performance which should still be regarded as an important process even in the simple technique as T-B IMRT in order to maintain a good quality.