• Title/Summary/Keyword: 이산-분산모델

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Thickness Measurement of Nanogate Oxide Films by Spectroscopic Ellipsometry (SE를 사용한 나노게이트 산화막의 두께측정)

  • 조현모;조용재;이윤우;이인원;김현종;김상열
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.40-41
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    • 2002
  • 차세대 반도체 및 나노소자 산업에 대한 국제적 기술은 고밀도 직접화의 추세에 따라서 .게이트 산화막의 두께가 급속히 작아지는 추세이다. 지금까지 이산화규소(A1₂O₃)가 게이트 산화막으로 주로 사용되어 왔으나 점차 SiON 혹은 high k 박막으로 바뀌고 있다. 본 연구에서는 차세대 반도체 소자에 사용될 게이트 산화막 물질인 SiON 박막과 Al₂O₃박막에 대한 SE(Spectroscopic Ellipsometry)분석 모델을 확립하였고, SE 측정결과를 TEM, MEIS, XRR의 결과들과 비교하였다. SiON 박막의 굴절률 값은 Si₃N₄와 SiO₂가 물리적으로 혼합되어 있다고 가정하여 Bruggeman effective medium approximation을 사용하여 구하였다. 동일한 시료를 절단하여 TEM, MEIS, 그리고 XRR에 의하여 SiON 박막의 두께를 측정하였으며, 그 결과 SE와 XRR에 의해 얻어진 박막두께가 TEM과 MEIS의 결과 값보다 약 0.5 nm 크게 주어짐을 알 수 있었다(Table 1 참조). 본 연구결과는 비파괴적이며 비접촉식 측정방법인 SE가 2~4nm 두께의 초미세 SiON 박막의 두께와 N 농도의 상대적 값을 빠르고 쉽게 구할 수 있는 유용한 측정방법 임을 보여주었다. 기존의 게이트 산화물인 SiO₂를 대체할 후보 물질들 중의 하나인 A1₂O₃의 유전함수를 구하기 위하여 8 inch, p-type 실리콘 기판 위에 성장된 5 nm, 10 nm, 및 20 nm 두께의 A1₂O₃ 박막의 유전함수와 두께를 측정하였다. 이 시료들에 대한 SE data는 vacuum-UV spectroscopic ellipsometer를 사용하여 세 개의 입사각에서 0.75 eV에서 8.75 eV까지 0.05 eV 간격으로 측정되었다. A1₂O₃ 박막의 유전함수와 두께를 얻기 위하여 공기층/A1₂O₃ 박막/Si 기판으로 구성된 3상계 모델을 사용하였다. Si 기판에 대한 복소 유전함수는 문헌상의 값(1)을 사용하였고, A1₂O₃ 박막의 유전함수는 5개의 미지상수를 갖는 Tauc- Lorentz(TL) 분산함수(2)를 사용하였다. A1₂O₃ 박막의 경우 두께가 증가함에 따라서 굴절률이 커짐을 알 수 있었다.

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A Finite Memory Structure Smoothing Filter and Its Equivalent Relationship with Existing Filters (유한기억구조 스무딩 필터와 기존 필터와의 등가 관계)

  • Kim, Min Hui;Kim, Pyung Soo
    • KIPS Transactions on Computer and Communication Systems
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    • v.10 no.2
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    • pp.53-58
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    • 2021
  • In this paper, an alternative finite memory structure(FMS) smoothing filter is developed for discrete-time state-space model with a control input. To obtain the FMS smoothing filter, unbiasedness will be required beforehand in addition to a performance criteria of minimum variance. The FMS smoothing filter is obtained by directly solving an optimization problem with the unbiasedness constraint using only finite measurements and inputs on the most recent window. The proposed FMS smoothing filter is shown to have intrinsic good properties such as deadbeat and time-invariance. In addition, the proposed FMS smoothing filter is shown to be equivalent to existing FMS filters according to the delay length between the measurement and the availability of its estimate. Finally, to verify intrinsic robustness of the proposed FMS smoothing filter, computer simulations are performed for a temporary model uncertainty. Simulation results show that the proposed FMS smoothing filter can be better than the standard FMS filter and Kalman filter.

A Tracer Study on Mankyeong River Using Effluents from a Sewage Treatment Plant (하수처리장 방류수를 이용한 추적자 시험: 만경강 유역에 대한 사례 연구)

  • Kim Jin-Sam;Kim Kang-Joo;Hahn Chan;Hwang Gab-Soo;Park Sung-Min;Lee Sang-Ho;Oh Chang-Whan;Park Eun-Gyu
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.11 no.2
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    • pp.82-91
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    • 2006
  • We investigated the possibility of using effluents from a municipal sewage treatment plant (STP) as tracers a tracer for hydrologic studies of rivers. The possibility was checked in a 12-km long reach downstream of Jeonju Municipal Sewage Treatment Plant (JSTP). Time-series monitoring of the water chemistry reveals that chemical compositions of the effluent from the JSTP are fluctuating within a relatively wide range during the sampling period. In addition, the signals from the plant were observed at the downstream stations consecutively with increasing time lags, especially in concentrations of the conservative chemical parameters (concentrations f3r chloride and sulfate, total concentration of major cations, and electric conductivity). Based on this observation, we could estimate the stream flow (Q), velocity (v), and dispersion coefficient (D). A 1-D nonreactive solute-transport model with automated optimization schemes was used for this study. The values of Q, v, and D estimated from this study varied from 6.4 to $9.0m^3/sec$ (at the downstream end of the reach), from 0.06 to 0.10 m/sec, and from 0.7 to $6.4m^2/sec$, respectively. The results show that the effluent from a large-scaled municipal STP frequently provides good, multiple natural tracers far hydrologic studies.

A Post-Quantum Multi-Signature Scheme (양자 컴퓨팅 환경에서 안전한 다중 서명 기법)

  • Ko, Chanyoung;Lee, Youngkyung;Lee, Kwangsu;Park, Jong Hwan
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.31 no.3
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    • pp.517-526
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    • 2021
  • Recently, the acceleration of the development of quantum computers has raised the issue of the safety of factorization and discrete logarithm based digital signature schemes used in existing Internet environments. To solve the issue, several digital signature schemes are presented that are safe in post-quantum computing environments, including standardization work by the National Institute of Standards and Technology(NIST). In this paper, we design and present a multi-signature scheme based on the TACHYON announced by Behnia et al. in 2018 CCS conference, and prove the security. Multi-signature schemes are key techniques that can distribute the dependence of cryptocurrency-wallet on private keys in the cryptocurrency field, which has recently received much attention as an digital signature application, and many researchers and developers have recently been interested. The multi-signature scheme presented in this paper enables public key aggregation in a plain public key model, which does not require additional zero-knowledge proof, and can construct an effective scheme with only an aggregated public key.

Design and Implementation of DEVSim++ and DiskSim Interface for Interoperation of System-level Simulation and Disk I/O-level Simulation (시스템수준 시뮬레이션과 디스크 I/O수준 시뮬레이션 연동을 위한 DEVSim++과 DiskSim 사이의 인터페이스 설계 및 구현)

  • Song, Hae Sang;Lee, Sun Ju
    • Journal of the Korea Society of Computer and Information
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    • v.18 no.4
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    • pp.131-140
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    • 2013
  • This paper deals with the design and implementation of an interface for interoperation between DiskSim, a well-known disk simulator, and a system-level simulator based on DEVSim++. Such inter-operational simulation aims at evaluation of an overall performance of storage systems which consist of multiple computer nodes with a variety of I/O level specifications. A well-known system-level simulation framework, DEVSim++ environment is based on the DEVS formalism, which provides a sound semantics of modular and hierarchical modeling methodology at the discrete event systems level such as multi-node computer systems. For maintainability we assume that there is no change of the source codes for two heterogeneous simulation engines. Thus, we adopt a notion of simulators interoperation in which there should be a means to synchronize simulation times as well as to exchange messages between simulators. As an interface for such interoperation DiskSimManager is designed and implemented. Various experiments, comparing the results of the standalone DiskSim simulation and the interoperation simulation using the proposed interface of DiskSimManager, proved that DiskSimManager works correctly as an interface for interoperation between DEVSim++ and DiskSim.

New Synthesis of the Ternary Type Bi2WO6-GO-TiO2 Nanocomposites by the Hydrothermal Method for the Improvement of the Photo-catalytic Effect (개선된 광촉매 효과를 위한 수열법에 의한 삼원계 Bi2WO6-GO-TiO2 나노복합체의 쉬운 합성 방법)

  • Nguyen, Dinh Cung Tien;Cho, Kwang Youn;Oh, Won-Chun
    • Applied Chemistry for Engineering
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    • v.28 no.6
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    • pp.705-713
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    • 2017
  • A novel material, $Bi_2WO_6-GO-TiO_2$ composite, was successfully synthesized using a facile hydrothermal method. During the hydrothermal reaction, the loading of $Bi_2WO_6$ and $TiO_2$ nanoparticles onto graphene sheets was achieved. The obtained $Bi_2WO_{6-GO-TiO2}$ composite photo-catalysts were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, transmission electron microscopy (TEM), Raman spectroscopy, ultraviolet-visible diffuse reflectance spectroscopy (UV-vis-DRS), and X-ray photoelectron spectroscopy (XPS). The $Bi_2WO_6$ nanoparticle showed an irregular dark-square block nanoplate shape, while $TiO_2$ nanoparticles covered the surface of the graphene sheets with a quantum dot size. The degradation of rhodamine B (RhB), methylene blue trihydrate (MB), and reactive black B (RBB) dyes in an aqueous solution with different initial amount of catalysts was observed by UV spectrophotometry after measuring the decrease in the concentration. As a result, the $Bi_2WO_6-GO-TiO_2$ composite showed good decolorization activity with MB solution under visible light. The $Bi_2WO_6-GO-TiO_2$ composite is expected to become a new potential material for decolorization activity. Photocatalytic reactions with different photocatalysts were explained by the Langmuir-Hinshelwood model and a band theory.

A Study on Characteristics of Lincomycin Degradation by Optimized TiO2/HAP/Ge Composite using Mixture Analysis (혼합물분석을 통해 최적화된 TiO2/HAP/Ge 촉매를 이용한 Lincomycin 제거특성 연구)

  • Kim, Dongwoo;Chang, Soonwoong
    • Journal of the Korean GEO-environmental Society
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    • v.15 no.1
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    • pp.63-68
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    • 2014
  • In this study, it was found that determined the photocatalytic degradation of antibiotics (lincomycin, LM) with various catalyst composite of titanium dioxide ($TiO_2$), hydroxyapatite (HAP) and germanium (Ge) under UV-A irradiation. At first, various type of complex catalysts were investigated to compare the enhanced photocatalytic potential. It was observed that in order to obtain the removal efficiencies were $TiO_2/HAP/Ge$ > $TiO_2/Ge$ > $TiO_2/HAP$. The composition of $TiO_2/HAP/Ge$ using a statistical approach based on mixture analysis design, one of response surface method was investigated. The independent variables of $TiO_2$ ($X_1$), HAP ($X_2$) and Ge ($X_3$) which consisted of 6 condition in each variables was set up to determine the effects on LM ($Y_1$) and TOC ($Y_2$) degradation. Regression analysis on analysis of variance (ANOVA) showed significant p-value (p < 0.05) and high coefficients for determination value ($R^2$ of $Y_1=99.28%$ and $R^2$ of $Y_2=98.91%$). Contour plot and response curve showed that the effects of $TiO_2/HAP/Ge$ composition for LM degradation under UV-A irradiation. And the estimated optimal composition for TOC removal ($Y_2$) were $X_1=0.6913$, $X_2=0.2313$ and $X_3=0.0756$ by coded value. By comparison with actual applications, the experimental results were found to be in good agreement with the model's predictions, with mean results for LM and TOC removal of 99.2% and 49.3%, respectively.