An analysis and assessment of transient vibration phenomenon for precision equipment due to adjacent utility operation in TFT-LCD Fab (TFT-LCD 생산공장 내 유틸리티 가동으로 인한 정밀장비 과도진동 현상 및 평가)
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- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 2007.05a
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- pp.993-999
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- 2007