• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.285-285
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.162-162
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• 2004

위치결정 기술은 초정밀 미세 기술의 발달과 제품의 소형화, 경량화에 대한 요구가 늘어나면서 고정밀화가 가속화되어 현재는 나노미터 수준의 위치정밀도를 요구하고 있다 현재 널리 사용되어지는 표면형상 측정기인 AFM은 분해능과 정밀도는 우수하지만, 이송 스테이지의 제한으로 측정영역이 좁은 단점이 있다. 이를 극복하기 위해서 이중서보를 사용한 방식들이 많이 제안되어 왔고 단일 서보를 사용하는 방식들도 연구되고 있다. 하지만 이중서보 방식은 여러 가지 액츄에이터와 컨트롤러를 사용해야하므로 제어알고리즘과 시스템이 복잡해지는 단점을 가지고 있다.(중략)

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.156.1-156.1
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• 2005

• Journal of the Korean Society for Precision Engineering
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• v.25 no.4
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• pp.26-31
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• 2008

본 논문은 정밀 위치결정 시스템의 잔류진동을 효과적으로 제거할 수 있는 입력성형기법을 소개하고, 실시간 입력성형기법을 적용하는 방법을 설명하였다. 또한 두 가지 응용 분야에 대한 실험결과를 바탕으로 입력성형기법의 성능을 고찰하였다. 일반적으로 입력성형기법은 정밀 위치결정 시스템에 대해 동작 완료시간을 단축시키는 효과가 있을 뿐만 아니라 위치결정 정밀도를 향상시키는 효과가 있다. 그리고 되먹임제어 방법에 비해 적용방법도 간단하며 저렴하게 구성할 수 있다는 장점이 있으므로 많은 정밀 위치결정 시스템에 유용할 것으로 생각된다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.3
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• pp.255-260
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• 2009

This paper presents an experimental result of virtual mode input shaping for positioning stage. Input shaping is liable to increase the rise time of the system, which often degrades the performance of system. The virtual mode input, shaping is an input shaper design method to improve this problem. Experiments are performed with a precise positioning stage with a flexible beam of which natural frequency is adjustable. The experimental results show that the virtual-mode shaper is useful to reduce the rise time as well as the residual vibration of precise positioning stages.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.476-484
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• 2010

Precise positioning stages are often employed for precise machinery. For the purpose of vibration isolation, these precise positioning stages are mounted on a heavy base structure which is supported by compliant springs. Then the base structure is subjected to residual vibration due to the reactive force and vertical moving load induced by the stage motion. This paper investigates the vibration behavior of a positioning stage base and the associated vibration suppression technique. A dynamic model is developed to investigate the base vibration due to the reactive force and moving load effects by the moving stage. An input shaping technique is also developed to suppress the residual vibrations in base structures. Simulations and experiments show that the developed dynamic model adequately represents the base vibration and that the proposed input shaping technique effectively removes the residual vibrations from the positioning stage base.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.10
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• pp.122-129
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• 2008

This paper deals with precise positioning of a high-speed positioning stage without inducing residual vibration by using an input shaping technique. Input shaping is well known to be a very effective tool for suppressing the residual vibration of flexible structures. However, the ordinary input shaping for positioning stages is designated mostly for velocity regulation, not for the residual vibration at the target position. The main difficulties in implementing input shaping along with precise positioning are the time delay caused by the servo system characteristics and the s-curve feature often employed in some motor controllers. This paper analyzes the dynamic responses of a single-mode-dominate stage system subjected to input shaping. A theoretical model is developed io investigate the nature of system. In order to overcome the difficulty, this paper proposes an improved input shaper based on modified command profile generation. The proposed method is proved effective through experiments and simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.320-320
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• 2004

반도체용 노광장비나 검사장비, 초정밀 광학렌즈, 비구면 렌즈 가공 등의 핵심이 되는 것은 초정밀결정기술이다. 서브미크론의 정밀도를 갖는 장비는 한치의 오차도 허용치 야고 계획된 경로대로 정확하게 목표지점에 도달해야 초정밀 가공을 기대 할 수 있다 초정밀 공기정압 스테이지는 저마찰 특성과 높은 운동정밀도, 청정환경유지가 가능하여 반도체 노광장비에서 PDP 나 LCD검사장비, 초정밀가공 가공기 등 다양한 정밀장비에서 활용된다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.668-671
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00${\mu}{\textrm}{m}$ using laser scale. We confirm the laser scale compensate error motion of ballscrew, so acquire 1.12${\mu}{\textrm}{m}$ positioning accuracy.