Mechanical Properties of TiAlSiN Films prepared by hybrid process of cathodic arc deposition and sputtering (음극아크증착과 스퍼터링의 하이브리드 공정으로 제조된 TiAlSiN 코팅층의 물성)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2016.11a
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- pp.104-104
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- 2016