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Characteristics of Schottky Barrier Thin Film Transistors (SB-TFTs) with PtSi Source/Drain on glass substrate

  • O, Jun-Seok;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.199-199
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    • 2010
  • 최근 평판 디스플레이 산업의 발전에 따라 능동행렬 액정 표시 소자 (AMOLED : Active Matrix Organic Liquid Crystral Display) 가 차세대 디스플레이 분야에서 각광을 받고있다. 기존의 TFT-LCD에 사용되는 a-Si:H는 균일도가 좋지만 전기적인 스트레스에 의해 쉽게 열화되고 낮은 이동도는 갖는 단점이 있으며, ELA (Eximer Laser Annealing) 결정화 poly-Si은 전기적인 특성은 좋지만 uniformity가 떨어지는 단점을 가지고 있어서 AMOLED 및 대면적 디스플레이에 적용하기 어렵다. 따라서 a-Si:H TFT보다 좋은 전기적인 특성을 보이며 ELA 결정화 poly-Si TFT보다 좋은 uniformity를 갖는 SPC (Solid Phase Crystallization) poly-Si TFT가 주목을 받고있다. 본 연구에서는 차세대 디스플레이 적용을 위해서 glass 기판위에 증착된 a-Si을 SPC 로 결정화 시킨 후 TFT를 제작하고 평가하였다. 또한 TFT 형성시에 저온공정을 실현하기 위해서 소스/드레인 영역에 실리사이드를 형성시켰다. 소자 제작시의 최고온도는 $500^{\circ}C$ 이하에서 공정을 진행하는 저온 공정을 실현하였다. Glass 기판위에 a-Si이 80 nm 증착된 기판을 퍼니스에서 24시간 동안 N2 분위기로 약 $600^{\circ}C$ 에서 결정화를 진행하였다. 노광공정을 통하여 Active 영역을 형성시키고 E-beam evaporator를 이용하여 약 70 nm 의 Pt를 증착시킨 후, 소스와 드레인 영역의 실리사이드 형성은 N2 분위기에서 $450^{\circ}C$, $500^{\circ}C$, $550^{\circ}C$에서 열처리를 통하여 형성하였다. 게이트 절연막은 스퍼터링을 이용하여 SiO2를 약 15 nm 의 두께로 증착하였다. 게이트 전극의 형성을 위하여 E-beam evaporator 을 이용하여 약 150 nm 두께의 알루미늄을 증착하고 노광공정을 통하여 게이트 영역을 형성 후 에 $450^{\circ}C$, H2/N2 분위기에서 약 30분 동안 forming gas annealing (FGA)을 실시하였다. 제작된 소자는 실리사이드 형성 온도에 따라서 각각 다른 특성을 보였으며 $450^{\circ}C$에서 실리사이드를 형성시킨 소자는 on currnet와 SS (Subthreshold Swing)이 가장 낮은것을 확인하였다. $500^{\circ}C$$550^{\circ}C$에서 실리사이드를 형성시킨 소자는 거의 동일한 on current와 SS값을 나타냈다. 이로써 glass 기판위의 SB-TFT 제작 시 실리사이드 형성의 최적온도는 $500^{\circ}C$로 생각되어 진다. 위의 결과를 토대로 본 연구에서는 SPC 결정화 방법을 이용하여 SB-TFT를 성공적으로 제작 및 평가하였고, 차세대 디스플레이에 적용할 경우 우수한 특성이 기대된다.

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Evaluations of Swaging Process for Rotor Core of Induction Motors II (유도전동기 회전자 제작시 압입작업 평가 II)

  • Park, Sang-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.6
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    • pp.464-469
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    • 2017
  • This study evaluated the displacements of a Cu bar in the Y-direction and the relationship between swaging pressures and total contact forces to increase the productivity of the rotor core swaging process. Elastic-plastic numerical analyses of four different Cu bar shapes were performed with a constant swaging pressure to evaluate the displacements of the Cu bar in the Y-direction and the contact force distributions at the contact surfaces during the swaging process. Based on the numerical analysis results, the following conclusions were obtained. First, a simplified 2-dimensional cyclic symmetric analysis model was developed for the numerical analysis of the rotor core swaging process. Second, the final displacements of the Cu bar in the Y-direction were nearly the same as the change of the Cu bar size at a constant swaging pressure. Third, a linear relationship between the swaging pressures and the total contact forces, the so called resistance forces, was suggested.

Location and Urban Network Hierarchy Analysis of the Seven Major Test and Certification Institutions in Korea (시험인증 기관의 입지 및 도시 네트워크 위계 분석: 국내 7대 시험인증기관을 대상으로)

  • Hong, Sung-Ho;Kim, Jung-Eun
    • Journal of the Economic Geographical Society of Korea
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    • v.25 no.3
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    • pp.380-396
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    • 2022
  • In this study, the location and network hierarchy of the seven major test and certification institutions in Korea were analyzed. First, like other APS, the test and certification institutions are concentrated in the metropolitan area, and the spatial spread of the branch is developing. Second, unlike other APS, branches do not accumulate in large cities. It is deeply related to regional economic geography characteristics such as proximity to manufacturers and specificity of regional strategic industries. Third, despite the spatial spread, workers are concentrated in the metropolitan area. Fourth, urban-regions are mainly formed between the metropolitan area of test certification and the Chungbuk(Cheong) area.

Evaluation of the Color Adjustment Potential of Single-Shade Composite Resin in Primary Teeth (유치에서의 단일 색조 복합레진의 색조 적응력 평가)

  • Yongsoon Kim;Howon Park;Juhyun Lee;Haeni Kim
    • Journal of the korean academy of Pediatric Dentistry
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    • v.50 no.1
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    • pp.113-120
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    • 2023
  • Restoring composite resins with the optimal shades for all primary teeth is a great challenge for pediatric dentists. A newly developed single-shade composite resin can exhibit a color similar to that of the surrounding tooth structure based on the structural color phenomenon. This study aims to evaluate the color adjustment potential (CAP) of a single-shade composite resin compared to conventional multi-shade composite resins in primary teeth. A single-shade composite resin and two conventional multi-shade composite resins were included in this study. Two types of specimens, a single specimen and a dual specimen, were evaluated. For single specimens, duplications of the primary second molar denture teeth were made using experimental composite resins. For dual specimens, cavities were prepared on the buccal surfaces of extracted primary second molars and restored with experimental composite resins. The L*, a*, and b* values were measured using a colorimeter for the extracted teeth and specimens. The mean ΔEab* values for single and dual specimens and CAP were calculated. Bonferroni post-hoc analysis was performed to confirm the statistical significance between the ΔEab* and CAP values of the experimental resins. Among the single specimens, the single-shade composite resin showed significantly higher ΔESingle compared to other composite resins (p < 0.0167). There was no significant difference between ΔEDual for all experimental resins. The single-shade composite resin showed highest CAP compared to other multi-shade composite resins. A single-shade composite resin exhibited the most prominent color adaptability compared to other conventional multi-shade composite resins for primary second molars. A single-shade composite resin can simplify shade matching and provide esthetic outcomes for the restoration of primary second molars.

A Study of the Material Properties of Steel Used to Repair the Stupa of State Preceptor Jigwang from Beopcheonsa Temple, Wonju in 1957 (1957년 원주 법천사지 지광국사탑 수리에 사용된 철물(鐵物)의 재료학적 특성 연구)

  • You, Harim;Lee, Jaesung;Lee, Taejong;Park, Heejeoung
    • Korean Journal of Heritage: History & Science
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    • v.53 no.4
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    • pp.100-117
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    • 2020
  • National Treasure no. 101, the stupa of State Preceptor Jigwang from the Beopcheonsa Temple Site in Wonju has been transferred from place to place and reassembled several times since it was built. In particular, overall dismantling and repair was carried out in 1957 to restore parts damaged by bombing during the Korean War. Documented information on the repair process and materials used at that time does not exist. However, various types of metal materials used for this stupa have been identified during conservation work. Besides clamps anchor bolts, 9mm-thick circular rebars were mainly used for joining the parts of this stupa, while circular rebars and wires of various thicknesses were used for joining the parts with mortar restoration materials. Although deformed bars are typically used for stone pagodas classified as architectural structures, smooth circular rebars were used in this case. In terms of restoration using mortar, material shapes were transformed, bound alternately, and twisted irregularly to improve bonding strength and coherence in order to insert restoration materials and to bolster structural weaknesses. In addition, metallographic analysis showed the material to be hypo-eutectoid steel with low carbon content. Many non-metallic inclusions in the shape of drops of different sizes were included, which do not affect the whole elemental composition due to the very small quantities involved. Qualitative and EPMA analysis of Mn and S, which were not identified by SEM-EDS area analysis, established an even distribution of MnS in crystal grains of the microstructure, regardless of the shape of the samples. It is presumed that secondary homogenization and softening might have been conducted after manufacturing to facilitate the working process. Furthermore, in consideration of properties indicating that the thinner the steel is, the less carbon content contained and the greater the elasticity and elongation, it is judged that restoration work was ordered.

An Analytical Study on the Seismic Behavior and Safety of Vertical Hydrogen Storage Vessels Under the Earthquakes (지진 시 수직형 수소 저장용기의 거동 특성 분석 및 안전성에 관한 해석적 연구)

  • Sang-Moon Lee;Young-Jun Bae;Woo-Young Jung
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.27 no.6
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    • pp.152-161
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    • 2023
  • In general, large-capacity hydrogen storage vessels, typically in the form of vertical cylindrical vessels, are constructed using steel materials. These vessels are anchored to foundation slabs that are specially designed to suit the environmental conditions. This anchoring method involves pre-installed anchors on top of the concrete foundation slab. However, it's important to note that such a design can result in concentrated stresses at the anchoring points when external forces, such as seismic events, are at play. This may lead to potential structural damage due to anchor and concrete damage. For this reason, in this study, it selected an vertical hydrogen storage vessel based on site observations and created a 3D finite element model. Artificial seismic motions made following the procedures specified in ICC-ES AC 156, as well as domestic recorded earthquakes with a magnitude greater than 5.0, were applied to analyze the structural behavior and performance of the target structures. Conducting experiments on a structure built to actual scale would be ideal, but due to practical constraints, it proved challenging to execute. Therefore, it opted for an analytical approach to assess the safety of the target structure. Regarding the structural response characteristics, the acceleration induced by seismic motion was observed to amplify by approximately ten times compared to the input seismic motions. Additionally, there was a tendency for a decrease in amplification as the response acceleration was transmitted to the point where the centre of gravity is located. For the vulnerable components, specifically the sub-system (support columns and anchorages), the stress levels were found to satisfy the allowable stress criteria. However, the concrete's tensile strength exhibited only about a 5% margin of safety compared to the allowable stress. This indicates the need for mitigation strategies in addressing these concerns. Based on the research findings presented in this paper, it is anticipated that predictable load information for the design of storage vessels required for future shaking table tests will be provided.

Relationship Between Tumor Angiogenesis, Stage and Prognosis in Non-Small Cell Lung Cancer (비소세포 폐암에서 종양 혈관신생과 병기 및 예후와의 관련성)

  • Lee, Won-Yeon;Kim, Chong-Ju;Shin, Pyo-Jin;Cho, Mee-Yon;Yong, Suk-Joong;Shin, Kye-Chul
    • Tuberculosis and Respiratory Diseases
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    • v.50 no.5
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    • pp.557-567
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    • 2001
  • Background : Tumor angiogenesis is required for tumor growth and metastasis. In this study, we investigated the correlation between the intensity of angiogenesis and stage, nodal status, histologic type, metastasis and survival rate of non-small cell lung cancer. Method : Formalin fixed, paraffin embedded surgical specimens of 45 patients who had surgically resected primary non-small cell lung cancers without pre or post operative adjuvant chemotherapy or radiotherapy were examined. The microvessel count(MVC) was demonstrated by immunohistochemical staining for CD31(platelet endothelial cell adhesion molecule, PECAM). Results : Microvessel counts(MVCs) in stage IIIA and IIIB were higher than in stage I and II(p<0.05). The MVC in patients with lymph node metastasis was higher than that in patients without lymph node metastasis, although the difference was not statistically significant(p>0.05). However, in adenocarcinoma, the MVC in patients with lymph node metastasis was significantly higher than that seen in patients without lymph node metastasis(p<0.05). The MVC in adenocarcinoma was higher than that in squamous cell carcinoma(p<0.05). The difference between the MVCs of adenocarcinoma and squamous cell carcinoma was not statistically significant in stage I and II or N0 stage(p>0.05). However, in stage IIIA and IIIB or N1~3 stage, the MVC in adenocarcinoma was higher than that in squamous cell carcinoma(p<0.05). MVC was more increased when metastasis developed within 12 months. In the same histologic type and stage, the duration of survival time in patients with high MVC was shorter than in patients with low MVC, however the difference was not statistically significant(p>0.05). The survival rate in patients with high MVCs was lower than that in patients with low MVCs(P<0.05). Conclusion : In non-small cell lung cancer, MVC correlated relatively well with pathologic stage, nodal status(limited in patients with adenocarcinoma), histologic type, postoperative metastasis and survival rate. However, in the same histologic type and stage, MVC was not significantly related to the duration of survival. Therefore the assessment of the intensity of angiogenesis in non-small cell lung cancer may be helpful in predicting prognosis and in selecting patients for systemic adjuvant therapy of potential metastasis according to the results.

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Investigation of characteristic on Solution-Processed Al-Zn-Sn-O Pseudo Metal-Oxide-Semiconductor Field-Effect-Transistor using microwave annealing

  • Kim, Seung-Tae;Mun, Seong-Wan;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.206.2-206.2
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    • 2015
  • 최근 비정질 산화물 반도체 thin film transistor(TFT)는 차세대 투명 디스플레이로 많은 관심을 받고 있으며 활발한 연구가 진행되고 있다. 산화물 반도체 TFT는 기존의 비정질 실리콘 반도체에 비하여 큰 on/off 전류비, 높은 이동도 그리고 낮은 구동전압으로 인하여 차세대 투명 디스플레이 산업에 적용 가능하다는 장점이 있다. 한편 기존의 sputter나 evaporator를 이용한 증착 방식은 우수한 막의 특성에도 불구하고 많은 시간과 제작비용이 든다는 단점을 가지고 있다. 따라서 본 연구에서는 별도의 고진공 시스템이 필요하지 않을 뿐만 아니라 대면적화에도 유리한 용액공정 방식을 이용하여 박막 트렌지스터를 제작하였으며 thermal 열처리와 microwave 열처리 방식에 따른 전기적 특성을 비교 및 분석하고 각 열처리 방식의 열처리 온도 및 조건을 최적화 하였다. 제작된 박막 트렌지스터는 p-type bulk silicon 위에 산화막이 100 nm 형성된 기판에 spin coater을 이용하여 Al-Zn-Sn-O 박막을 형성하였다. 연속해서 photolithography 공정과 BOE (30:1) 습식 식각 과정을 이용해 활성화 영역을 형성하여 소자를 제작하였다. 제작 된 소자는 Pseudo-MOS FET구조이며, 프로브 탐침을 증착 된 채널층 표면에 직접 접촉시켜 소스와 드레인 역할을 대체하여 동작시킬 수 있어 전기적 특성평가가 용이하다는 장점을 가지고 있다. 그 결과, microwave를 통해 열처리한 소자는 100oC 이하의 낮은 열처리 온도에도 불구하고 furnace를 이용하여 열처리한 소자와 비교하여 subthreshold swing(SS), Ion/off ratio, field-effectmobility 등이 개선되는 것을 확인하였다. 따라서, microwave 열처리 공정은 향후 저온 공정을 요구하는 MOSFET 제작 시의 훌륭한 대안으로 사용 될 것으로 기대된다.

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A Study on Tooth Profile Error in Internal Gear Shaping (내치차 절삭시의 치형오차에 관한 연구)

  • 박천경;최영석
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.15 no.1
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    • pp.154-162
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    • 1991
  • In this study, the simulation program is developed where the tooth profile error in internal gear shaping is calculated considering several factors which affect it. This factors are the circular feed of the pinion cutter, the interference by the geometric conditions of the cutter and the internal gear, the deviation from the theoretical involute profile of the cutter and the eccentricity of the cutter and the internal gear. With this program, the effects are investigated which the geometric conditions and the cutting conditions in internal gear shaping have on the tooth profile error of the internal gear. The condition for the minimization of it is derived and then the results of simulation are adequately verified by measurements of internal gears cut by a pinion cutter.

방향성 다공질금속의 제조 및 기계적성질

  • Hyeon, Seung-Gyun;Nakajima, Hideo
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.19.2-19.2
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    • 2009
  • 금속을 용해 응고시킬 때 생성되는 소위, 주조 결함이나 소결금속 내의 기공은 재료의 성능이나강도를 현저하게 낮추는 결함으로서 예전부터 기피되어 왔다. 또한, 재료공정에있어서도 여하의 기공이나 기포가 없는 치밀한 고강도 및 고기능성 재료를 개발하는 것에 최대한의 주의와 관심을 기울여 왔다. 그렇지만, 우리가 자연계의 천연물이나 인공물을 둘러보면 그 대부분이다공질임을 쉽게 눈치챌 수 있다. 예를 들어 목재, 지엽등의 생물을 시작해서 콘크리트 등의 인공물, 우리 체내의 뼈도 전형적인 다공질구조로 구성되어 있다. 이러한 구조로부터 재료의 재질제어 이외에 구조제어라는 새로운 어프로치를 고려할 수 있고, 최근 들어, 금속재료에 있어서도 이러한 다공질구조에 관한 연구가활성화되어 충격흡수재, 생체재료, 베어링재료 등의 다양한응용이 전개되고 있다. 특히, 원주상의 방향성 기공을 갖는 로터스금속은 기존의 복잡한구조의 다공질금속보다 뛰어난 기계적 성질을 갖는다. 이러한 다공질금속은 일방향응고할 때 생성하는 과포화가스원자를 석출시켜 기공을 일방향으로 성장시킨다. 즉, 융점에서의 고상과 액상의 가스 용해도 차를 이용하는 것으로서 응고시에 고용할 수 없는 가스원자가 기공을 형성한다. 이와같이 제조한 방향성 다공질금속은 BT (인플란트, 생체적합성, 저탄성, 경량), ST (초음속기엔진부품, 경량), IT (고성능수냉모듈), ET(고온촉매, 필터)의 분야로의 응용이 기대된다. 본 강연에서는 방향성 다공질금속의 제조법, 특성 및 응용을 포함하여그 동안의 연구성과 및 앞으로의 과제 등을 소개하고자 한다.

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