• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.36 no.9
• /
• pp.961-964
• /
• 2012

This paper presents a sensing system to measure the deflection of a microcantilever in an atomic force microscope. In general, the optical lever method and interferometry are used for the sensing system; however, their size and cost leaves considerable room for improvement. Therefore, we used an optical pickup head whose operating principle is based on the astigmatism of the commercial optical disk drives. The developed sensing system was applied to a laboratory atomic force microscope, and satisfactory results were obtained.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.31 no.2
• /
• pp.174-180
• /
• 2011

Nondestructive surface imaging of elastic characteristic and mechanical property has been studied on nanoscale surface with ultrasonic AFM. Resonance frequency variation of cantilever is theoretically analyzed with respect to contact mechanics as well as experimentally measured. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian model in accordance with the resonance frequency of UAFM cantilever measured experimentally. Consequently, the topography and amplitude images could be obtained successfully and the elastic characteristic at the nanoscale surface was evaluated qualitatively by amplitude signals.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.30 no.2
• /
• pp.132-138
• /
• 2010

Vibro-contact of cantilever tip is studied with respect to contact mechanics and an elastic characteristic of nanoscale surface is imaged. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian models, and the variation of resonance frequency of cantilever was analyzed when the cantilever was free and contact. The elasticity imaging was also achieved successfully using phase and amplitude signals obtained from the spheroidized steel specimens by prototype ultrasonic AFM.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.6 no.2
• /
• pp.22-27
• /
• 2007

In this study, the two methods of stiffness measurement(Spring constant) of cantilever were proposed for quantitative measurement in Atomic Force Microscopy(AFM). As the 1st method for the measurement of stiffness, the probe method, which is used in the measurement of the semiconductor mechanical and electrical properties, was applied to the measurement of the cantilever. Experiments by the probe method were performed finding the resistance value of cantilever. As the results, the resistance was measured differently along with the dimension and the thickness of cantilever that determined the stiffness(spring constant) of the lever. As the 2nd method, the vibration characteristics(Dunkerley expression) is used to obtain the stiffness of the complex structure which is combined by AFM cantilever and the standard cantilever. We measured the resonant frequency from the complex structure using the micro stages and stereo microscope. As the results, we confirmed that the vibration characteristics(Dunkerley expression) is effected the micro complex structure of AFM cantilever.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.10a
• /
• pp.81-82
• /
• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.605-606
• /
• 2011

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.39 no.5
• /
• pp.461-466
• /
• 2015

Atomic force microscopy (AFM) is powerful tool for determining properties of samples based on interactions between the sample surface and an approaching probe tip. In this study, we modeled the interactions between the sample and the tip of the AFM microcantilever as a single nonlinear spring with an equivalent stiffness element and simulated the dynamic behaviors of the AFM microcantilevers using the finite element method (FEM) and ANSYS software. With the simulation results, we analyzed the complex dynamic responses of the AFM cantilever using proper orthogonal decomposition (POD). In addition, we compared the simulation and experimental results using the same method. Consequently, we suggest an effective method to express the interaction between the tip and sample, and we confirm that the influence of the higher order model due to the interaction between the tip and sample is increased.

• Proceedings of the KSME Conference
• /
• 2005.11a
• /
• pp.152.2-152.2
• /
• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.505-506
• /
• 2012

• Journal of the Korean Vacuum Society
• /
• v.12 no.2
• /
• pp.144-149
• /
• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.