• 마이크로전자및패키징학회지
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• 제20권1호
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• pp.1-5
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• 2013

3D integration 기술 특히 W2W integration 기술은 전자산업의 디바이스 scaling 문제를 해결하고 고성능화 소형화 추세에 맞춘 가장 핵심적인 기술 방향이다. 그러나 W2W integration 기술은 현재 가격과 생산수율의 장애를 가지고 있고, 이를 해결하기 위해서 웨이퍼 매칭, 리던던시, 다이 면적 축소, 배선 층 수 축소와 같은 디자인 연구들이 진행되고 있다. W2W integration 기술이 대량생산으로 연결되기 위해서는 우선적으로 웨이퍼 본딩, 실리콘연삭, TSV 배선 공정의 최적화가 이루어져야 하겠지만, 가격을 포함한 생산수율을 높이기 위해서는 반드시 디자인 연구가 선행되어야 하겠다.

• 한국기계가공학회지
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• 제18권11호
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• pp.41-46
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• 2019

The purpose of this study is to examine and propose a high quality blade manufacturing method by applying ELID grinding technology to machining the tungsten carbide blade edge for MLCC sheet cutting. In this study, experiments are performed according to the abrasive type of grinding wheel, grinding method and grinding direction using the non-stop continuous dressing ELID grinding technology. By comparing and analyzing the chipping phenomena and surface roughness of both the blade grinding surface and the processed surface, a method for machining the tungsten carbide blade for cutting MLCC sheet is proposed. From the analysis of the surface roughness and chipping phenomena, it is confirmed that the use of diamond abrasive is advantageous for the blade machining. In addition, it succeeds in the machining of $6{\mu}m$ fine blade without any chipping, by using the grinding wheel #4000 with the diamond abrasive.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.508-511
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• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools(wc) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID(Electrolytic In-process Dressing) technique and good dimensional accuracy was achieved. Furthermore we researched the characteristics of machining on the micro drilling using micro drills and manufactured micro tools. Finally it is confirmed that manufactured micro tools can be used for micro machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.24-27
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• 2002

The environmental problems by using coolant demanded the new cooling methods. As one of them, the studies on the finding with compressed cold air and oil mist have been done. The cooling method using compressed cold air was effective through going down the temperature of compressed air supplied below $-25^{\circ}$ and increasing the amount of compressed cold air, but had not enough cooling effect due to the low performance of lubrication. Therefore, the cooling methods using oil mist newly were suggested. This method can satisfy both cooling effect and lubrication with only small amount of coolant, also have the benefit in the point of decreasing the environmental pollution. This paper focused on analyzing the grinding characteristics of the cooling method using oil mist. The grinding test according to compressed cold air, oil mist spray pressure and oil mist supply direction were done.

• 한국정밀공학회지
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• 제12권4호
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• pp.5-18
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• 1995

공작기계는 금속가공 공업에 있어서 가장 중요한 생산수단의 요소이며, 공작기계의 발달없이 인류의 생활수준을 향상시킨다는 것은 생각도 할 수 없는 일이다. 선진국에서는 제조된 기계의 약 10%가 공작기계이며, 기계공업 노동력의 악 10%가 공작기계 산업에 종사하고 있다. 공작기계는 금속재료를 절삭(Cutting) 또는 연삭(Grinding)하여 원하는 모양, 치수 표면정도의 제품을 얻는 것이고 기계본체와 공구의 두부분으로 되어있어 동력에 의해 기계를 운전하고 절삭공구로써 가공을 한다. 국제 규격의 ISO에서는 '한 운동원에 의해서 작동하고 물리적, 화학적 또는 기타의 방법으로 성형해서 공작물을 생산하는, 수작업은 하지 않는 기계'라고 정의 하고 있으며 미국에서는 금속가공기계를 두가지로 나누어 정형형을 Forming machine이라 하고 절삭형을 Cutting machine 이라 분류하며 이 둘을 합하여 공작기계(Machine Tool)라고 부르고 있다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1897-1901
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• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• 한국정밀공학회지
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• 제30권12호
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• pp.1227-1235
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• 2013

Ceramic materials are classified by oxide, nitride and carbide material and have high brittleness, strength and hardness. Ceramic materials are strong in compression but weak in shearing and tension. This review paper has focused on technology trends and mechanism analysis of ceramics removal machining. The ceramic materials have superior mechanical, physical and chemical properties, but it is very hard to machining and the use of ceramics has been limited because of high strength and brittleness. In this paper, technology trends of ceramic removal-machining was introduced for types of machining technology, abrasive machining, cutting process, laser machining and so on.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.

• 한국정밀공학회지
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• 제14권11호
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• pp.147-153
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• 1997

Fault diagnosis technique in machining system which is one of engineering techniques absolutely necessary to automation of manufacturing system has been proposed. As a whole, diagnosis process is explained by two steps: sensor data acquisition and reasoning current state of system with the given sensor data. Flexible disk grinding process implemented in milling machine was employed in order to obtain empirical manufacturing process information. Resistance force data during machining were acquired using tool dynamometer known as sensor which is comparably accurate and reliable in operation. Tool status during the process was analyzed using influnece diagram assigning probability from the statistical analysis procedure.

• 한국정밀공학회지
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• 제10권1호
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• pp.62-69
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• 1993

The accuracy of machine tools is the major factor concerned with the acuracy of the processed work. The feed errors of feed system in machine tool, therfore, make the machining errors of work directly on processing. In this point, this study focused on the generative elements of feed errors in CNC cylindrical grinding machine, such as supporting method of ball screw, the effect of pitch and yaw error and the position detecting method in servo system when operating its shaft of grinding wheel head. Furthermore, in order to improve the driving accuracy of this machine tool, feed errors are measured by a laser interferometer. Results obtained in this study provide some useful informations to attain high accuracy of CNC machine tool.