• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.44-51
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• 2005

In this paper, a new polishing head with the variable pressure structure was studied to improve the planarization uniformity of the conventional template-metal head. Metal surface waviness and slurry distribution on the pad have been known to affect the polishing uniformity even in the synchronized quill and platen velocities. A polishing head with silicon rubber sheet was used to get a curved pressure distribution. In the experiment, the vertical deflection behavior on the pad was characterized with back pressure in the air chamber. Quill force increased linearly with backpressure. However, backpressure under a quill force made the upward movements of the quill. In the wafer polishing experiments, polishing rate and polishing thickness distribution were severely changed with backpressure. The best uniformity was observed with the standard deviation off.5％ level of average polishing removal 215nm at backpressure 12.1kPa.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.850-853
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• 2000

최근에 초정밀 제조업 분야에서 볼의 이용에 관한 연구가 급속히 진행되고 있으며, 일부 반도체 분야에서는 BGA(Ball Grid Array)와 같은 용도로 이용되기도 하며, 볼 자체를 반도체 칩으로 응용하려는 시도가 제안되어 있다. 이러한 적용분야들에서 볼의 진구도, 정밀도 및 청정도 등을 만족시킬 수 있는 가공기술이 선결되어야 한다. 본 연구에서는 초정밀 볼의 가공기술 개발을 목적으로 하여 유리 볼을 대상으로 하고 $H_2O$와 CeO$_2$를 혼합한 연마재를 사용하여 부상회전에 의한 비접촉식 연마방법을 제안하고 가공특성을 조사하였다 연구 결과로서, 비 접촉식 볼의 가공에서는 가공에 앞서 $H_2O$와의 전처리 과정을 거침으로 해서 가공속도를 촉진시킬 수 있다는 사실이 확인되었다.

• Journal of Korea Foundry Society
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• v.43 no.5
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• pp.260-263
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• 2023

이 보고서에서는 무기 공정에서의 무기 인공 재생 모래의 특성을 중심으로 다음과 같이 정리할 수 있다. 1) ICP 발광 분광 분석을 통한 재생 모래의 Na⁺ 용출량, TP 휨강도 및 충전 밀동에는 높은 상관 관계가 확인되었다. 2) 현행 재생 방법 대비, 습식 연마 처리를 첨가함으로써 잔류 점결재가 제거되고 Na+ 용출량이 저감된 결과, 재생 모래의 TP 휨강도를 보다 개선 가능한 것이 확인되었다. 3) 재생 처리 공정 순서를 건식 연마 → 습식 연마 → 배소 처리로 함으로써, 가장 Na⁺ 용출량이 낮고, 높은 휨강도를 얻을 수 있는 것이 확인되었다. 4) 습식 연마 단계를 거치지 않고 배소 처리 온도와 처리 시간을 궁리함으로써 충분한 품질의 재생 모래를 얻을 수 있는 가능성이 시사되었다. 마지막으로, 무기 공정은 유기 공정에 비해 압도적으로 냄새가 적고 생산성이 높으며 인공 모래와의 병용을 통한 재생 처리시의 폐기물량 저감, 주조품의 고품질화 등 이점이 기대되는 공정이다.

• The korean journal of orthodontics
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• v.26 no.5 s.58
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• pp.613-622
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• 1996

The purposes of this study were to evaluate and compare the frequency of ceramic bracket fracture, frequency of enamel fracture, bond fracture site, adhesive remnant index after mechanical and electrothermal debracketing, to evaluate effectiveness of high and low speed rotary instrument and ultrasonic instrument during residual adhesive remnants removal, and to measure resin film surface(percentage) using by image analyser(Leco 300). Bond fracture site, bracket fracture, and enamel surface damage were examined by scanning electron microscope. The following results were obained : 1. In the mechanical debracketing group, the bond failed predominantly at enamel-adhesive interface with the bulk of adhesive remaining on bracket base. 2. In the eletrothermal debracketing group, the bond failed predominantly at adhesive-bracket interface with the bulk of adhesive remaining on enamel surface. 3. The most effectiveness of residual resin removal was obtained by means of the resin polishing bur and the order of scratch formation was the procedure using tungsten carbide bur, ultrasonic scaler, sof-lex disc, and polishing bur. 4. The order of the resin film surface percentage was ultrasonic scaler, tungsten carbide bur, sof-lex disc, and resin polishing bur.

• Restorative Dentistry and Endodontics
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• v.33 no.1
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• pp.1-8
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• 2008

The purpose of this study was to evaluate the effect of a new resin monomer, filler size and polishing technique on the surface roughness of composite resin restorations using confocal laser scanning microscopy. By adding new methoxylated Bis-GMA (Bis-M-GMA, 2,2-bis[4-(2-methoxy-3-methacryloyloxy propoxy) phenyl] propane) having low viscosity, the content of TEGDMA might be decreased. Three experimental composite resins were made: EX1 (Bis-M-GMA/TEGDMA = 95/5 wt%, 40 nm nanofillers); EX2 (Bis-M-GMA/TEGDMA = 95/5 wt%, 20 nm nanofillers); EX3 (Bis-GMA/TEGDMA = 70/30 wt%, 40 nm nanofillers). Filtek Z250 was used as a reference. Nine specimens (6 mm in diameter and 2 mm in thickness) for each experimental composite resin and Filtek Z250 were fabricated in a teflon mold and assigned to three groups. In Mylar strip group, specimens were left undisturbed. In Sof-lex group, specimens were ground with #1000 SiC paper and polished with Sof-lex discs. In DiaPolisher group, specimens were ground with #1000 SiC paper and polished with DiaPolisher polishing points. The Ra (Average roughness), Rq (Root mean square roughness), Rv (Valley roughness), Rp (Peak roughness), Rc (2D roughness) and Sc (3D roughness) values were determined using confocal laser scanning microscopy. The data were statistically analyzed by Two-way ANOVA and Tukey multiple comparisons test (p = 0.05). The type of composite resin and polishing technique significantly affected the surface roughness of the composite resin restorations (p < 0.001). EX3 showed the smoothest surface compared to the other composite resins (p < 0.05). Mylar strip resulted in smoother surface than other polishing techniques (p < 0.05). Bis-M-GMA. a new resin monomer having low viscosity, might reduce the amount of diluent, but showed adverse effect on the surface roughness of composite resin restorations.

• Restorative Dentistry and Endodontics
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• v.36 no.6
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• pp.483-489
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• 2011

Objectives: The purpose of this study was to examine the effect of glycerin topical application on the surface hardness of composite after curing. Materials and Methods: A composite (Z-250, 3M ESPE) was packed into a disc-shaped brass mold and light cured according to one of the following protocols. Group 1 (control) was exposed to air and light cured for 40 sec, group 2 was covered with a Mylar strip and light cured for 40 sec, group 3 was surface coated with glycerin and light cured for 40 sec, and group 4 was exposed to air and light cured for 20 sec and then surface coated with glycerin and cured for additional 20 sec. Twenty specimens were prepared for each group. The surface hardnesses of specimens were measured with or without polishing. Five days later, the surface hardness of each specimen was measured again. Data were analyzed by three-way ANOVA and Tukey's post hoc tests. Results: The surface hardnesses of the unpolished specimens immediately after curing decreased in the following order: group 2 > 3 > 4 > 1. For the polished specimens, there was no significant difference among the groups. Within the same group, the hardness measured after five days was increased compared to that immediately after curing, and the polished specimens showed greater hardness than did the unpolished specimens. Conclusions: The most effective way to increase the surface hardness of composite is polishing after curing. The uses of a Mylar strip or glycerin topical application before curing is recommended.

• The Journal of Engineering Geology
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• v.8 no.3
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• pp.235-245
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• 1998

Adquate friction resistance is needed to prevent pavement slipperiness and to allow vehicles to stop in a reasonable distance. Performance of the aggregates is reduced over time by wear and polishing as a consequence of vehicular traffic. In this research, the objective was to develop a laboratory method to test Indiana gravel aggregates to predict field performance, and determine causes for the range of values amang gravel aggregates. The assessment of gravel sources was primarily on the basis of individual rock types and those proportions comprising the gravel. Polish and friction values were determined in the laboratory with the British Wheel and Pendulum. The gravels of this study were composed primarily of carbonate aggregates that showed considerable variability in polishing thresholds. Igneous and metamorphic constituents polished to a lesser degree and are expected to improve overall aggregate performance. Estimates of the IFV (Initial Friction Value) and PV (Polished Value) for crushed gravel samples can be made based on the percentage of rock types present in the sample. A weighted average is used to make this calculation.

• Applied Microscopy
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• v.34 no.2
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• pp.95-102
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• 2004

The TEM samples prepared by ion milling have the advantage that thin area can be obtained from almost any materials. However, it has the disadvantage that the amount of thin area can often be quite limited. For the cross-sectioned samples and grossly heterogeneous materials, the thickness of less than $0.1{\mu}m$ can be achieved by mechanical grinding and polishing (tripod polisher) and then the TEM samples may be ion-milled for final thinning or cleaning. These approaches were described in this paper. Examples of TEM observations were taken from cross-section samples of thin films on silicon and sapphire, from diffusion layers between $Mo_5Si_3\;and\;Mo_2B$, and from rapidly solidified 304 stainless steel powders embedded in electroplated copper.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.6
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• pp.1401-1406
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• 2014

Knowledge of the manufacturing process of semiconductor devices in order to obtain a copper pattern using chemical mechanical polishing (CMP) planarization using a Wafer polishing process is applied with a thickness of the copper measured in real time, which need to be precisely controlled by, where the acquisition the actual thickness of the sensor value with the calculated value in terms of error can occur in the process. Approximated the actual measurement values so as to obtain a method using a simple average, moving average, compared to the results using filters onggo Strom real-time measurements of the thickness of the units of the control system to reduce the variation in the implementation of the method described for the.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.150.1-150.1
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• 2013

가속기 건설과 운영 기반기술을 접목시켜 일반적인 진공 소재로 많이 사용되는 스테인리스강에 두꺼운 크롬산 피막을 형성하여 극 고진공용 우주환경 모사용으로 적용 가능한 표면처리에 대해서 알아보았다. 산 처리제를 사용한 부동태피막 형성 방법, 전해연마에 의한 방법, 전해연마 부동태 피막형성 후 다시 산 처리제에 침전하는 방법을 비교하였다. 본 발표에서는 인위적으로 강하고 두꺼운 크롬산 피막을 형성하는 방법을 제시하고 그 방법에 따른 크롬 산화층 두께 변화를 관찰하였다.