• Proceedings of the Materials Research Society of Korea Conference
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• 2006.11a
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• pp.32.1-32.1
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• 2006

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.125-127
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• 2007

에어 베어링은 높은 강성과 낮은 마찰력과 같은 장점들로 인하여 높은 정밀도를 요구하는 반도체나 디스플레이 장비의 선형 스테이지에 주로 사용 되어지고 있다. 하지만 현재까지 높은 정밀도를 요구하는 회전형 스테이지에는 아직까지 크로스 롤러링을 이용하여 가이드를 하고 있다. 본 논문에서는 높은 정밀도를 갖는 회전 스테이지의 설계를 위하여 구동 성능과 오차요소에 대한 성능에 대해 설계 목표를 제시 하였고 이러한 스테이지를 구현하기 위해 에어베어링을 적용한 회전형 스테이지를 설계하였다.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1996.04b
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• pp.68-72
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• 1996

본 연구에서는 에어오일 윤활하의 고속용 앵귤러 콘택트 볼베어링에 있어서, 여러 축방향의 하중과 윤활량의 변화에 대하여 회전속도에 따른 베어링의 마찰 토오크를 변화를 측정하고, 또한 회전속도, 하중 및 윤활량의 변화가 베어링 접촉부에서의 유막형성에 어떠한 영향을 미치는가를 알아보고자 한다.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.103-109
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• 2007

LCD (Liquid Crystal Display) is widely used electronic product. It needs too many processes such as PECVD (Plasma Enhanced Vapor Deposition), Sputtering, Photo-lithography, Dry etch. Each process is important but inspection process is more important because most companies emphasis on the six sigma. Recently, LCD inspection system is composed with inlet, inspector, outlet air pads. LCD is inspected on air pad which is shooting air from air hole. This paper studies on pad design of air bearing for LCD inspection to minimize LCD fluctuation. This design is able to reduce fluctuation and then satisfies CCD inspectional range. Also inspection pad needs to adequate stable area.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.159-159
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• 2003

• Tribology and Lubricants
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• v.36 no.6
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• pp.332-341
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• 2020

High-speed turbomachinery implements gas foil bearings (GFBs) due to their distinctive advantages, such as high efficiency, lesser part count, and lower weight. This paper provides the test results of the static structural stiffnesses and loss factors of bump-type foil thrust bearings with increasing preload and bearing deflection. The focus of the current work is to experimentally quantify variability in structural stiffnesses and loss factors among the four test thrust bearings with identical design values and material of the bump and top foil geometries using the same (open-source) fabrication method. A simple test setup, using a rigidly mounted non-rotating shaft and thrust disk, measures the bearing bump deflections with increasing static loads on the test bearing. The inner and outer diameters of the test bearings are 41 mm and 81 mm, respectively. The loss factor, best-representing energy dissipation in the test bearings, is estimated from the area inside the local hysteresis loop of the load versus the bearing deflection curve. The measurements show that structural stiffnesses and loss factors of the test bearings significantly rely on applied preloads and bearing deflections. Local structural stiffnesses of the test bearings increase with applied preloads but decrease with bearing deflections. Changes of loss factors are less sensitive to applied preloads and bearing deflections compared to those of structural stiffnesses. Up to 35% variability in static load structural stiffnesses is found between bearings, while up to 30% variability in loss factors is found between bearings.

• Composites Research
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• v.28 no.4
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• pp.219-225
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• 2015

Air spoiler, which can reduce the drag during operation, can be considered as a possible means to reduce carbon dioxide emission and to increase fuel efficiency. In this study, a composite air spoiler was designed and tested by static and repeated loads. The Green Water Pressure of 0.1 MPa a ship experiences during operation was perpendicularly applied to the air spoiler. Air spoiler was manufactured with sandwich panel which has glass fabric face and balsa core. Multiple sandwich panels were assembled to steel frame by bolt joint. The joint was designed to have bearing failure and examined by static and fatigue tests. Tests showed that the designed joint has enough margin of safety to endure joint failure. The developed sandwich panel to air spoiler is planned to be applied to a large scale commercial ship.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.101-105
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• 2001

고속절삭을 통해서 생산성과 가공정밀도의 향상을 도모할 수 있기 때문에, 최근 머시닝센터를 중심으로 한 공작기계 주축계의 고속화는 눈부시게 발전하고 있다. 그러나 주축계가 고속화될 수록 증가하는 베어링에서의 발열은 베어링의 수명단축, 주축계의 열변형 증대 등을 초래하고, 궁극적으로 공작기계의 성능을 저하시키게 된다. 따라서 고속으로 회전하는 베어링에서의 발열을 효과적으로 억제할 수 있는 윤활방법에 대한 연구들이 활발히 진행되고 있다. 따라서 본 연구에서는 공작기계용 고속주축계의 냉각특성을 규명하기 위한 노력의 하나로 압축공기를 이용한 고속주축 계의 냉각실험을 수행하였다. 고속주축계의 실험모델은 오일에어윤활방법, 앵귤러콘택트 볼베어링, 이중분사노즐, 냉각 자켓등을 사용해서 제작하였으며, 특히 고속주축계의 공기냉각방법에 대한 유용성은 실험결과로 부터 입증하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.467-468
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.463-464
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• 2008