• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.45-47
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• 2002

반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2～7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10～15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

• Radiation Oncology Journal
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• v.14 no.3
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• pp.237-244
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• 1996

Purpose : The accurate dosimetry of independent collimator equipped for 6MV and 15MV X-ray beam was investigated to search for the optimal correction factor. Materials and Methods : The field size factors, beam quality and dose distribution were measured by using 6MV, 15MV X-ray Field size factors were measured from $3{\times}3cm^2$ to $35{\times}35cm^2$ by using 0.6cc ion chamber (NE 2571) at Dmax. Beam qualities were measured at different field sizes, off-axis distances and depths. Isodose distributions at different off-axis distance using $10\times10cm^2$ field were also investigated and compared with symmetric field. Result: 1) Relative field size factors was different along lateral distance with maximum changes in $3.1\%$ for 6MV and $5\%$ for 15MV. But the field size factors of asymmetric fields were identical to the modified central-axis values in symmetric field, which corrected by off-axis ratio at Dmax. 2) The HVL and PDD was decreased by increasing off-axis distance. PDD was also decreased by increasing depth For field size more than $5{\times}cm^2$ and depth less than 15cm, PDD of asymmetric field differs from that of symmetric one ($0.5\~2\%$ for 6MV and $0.4\~1.4\%$ for 15MV). 3) The measured isodose curves demonstrate divergence effects and reduced doses adjacent to the edge close to the flattening filter center was also observed. Conclusion . When asymmetric collimator is used, calculation of MU must be corrected with off-axis and PDD with a caution of underdose in central axis.

• Journal of the Korea Organic Resources Recycling Association
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• v.26 no.1
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• pp.5-12
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• 2018

As many local governments have faced increasing conflicts on landfill use and the time of end use, it is difficult to provide an alternative landfill or conclude a consensus of lifespan extension for the existing landfill site. Therefore, the purpose of this study is to contribute improving of the landfill capacity by calculating the resource recovery potentials of landfilled waste previously and in the future by landfill mining. For this, rate of volume increase, weight ratio, and apparent density were adopted as major parameters and their values were calculated through previous cases. The rate of volume increase was calculated to 1.42 by averaging previous cases of three areas. The average weight ratio of soil matter was 45.6% by calculating for the three areas. For the combustible waste and incombustible waste, statistical data can be used. The apparent densities were divided by combustible waste, incombustible waste, and soil matter using an average of two areas value, i.e., $0.35ton/m^3$, $1.40ton/m^3$ and $1.58ton/m^3$. We analyzed the resource recovery potential of Cheongju landfill by using the estimated parameters. The additional landfill capacity was 45% of the existing landfill capacity by recovering landfilled waste by landfill mining. In addition, it is analyzed that the lifespan is extended to 20 years, if the combustible waste of new inputting waste is sorted and combusted for energy recovery and incineration ash, incombustible waste, and soil matter are only reclaimed into the existing Cheongju landfill. It is expected that the methodology and parameters of this study will be used as basic data when resource recovery potential is analyzed for another case study of landfill mining.

• Journal of Biomedical Engineering Research
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• v.25 no.1
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• pp.11-19
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• 2004

Stage 1 sleep provides important information regarding interpretation of nocturnal polysomnography, particularly sleep onset. It is a short transition period from wakeful consciousness to sleep. Lack of prominent sleep events characterizing stage 1 sleep is a major obstacle in automatic sleep stage scoring. In this study, we attempted to utilize simultaneous EEC and EOG processing and analyses to detect stage 1 sleep automatically. Relative powers of the alpha waves and the theta waves were calculated from spectral estimation. Either the relative power of alpha waves less than 50％ or the relative power of theta waves more than 23％ was regarded as stage 1 sleep. SEM (slow eye movement) was defined as the duration of both eye movement ranging from 1.5 to 4 seconds and regarded also as stage 1 sleep. If one of these three criteria was met, the epoch was regarded as stage 1 sleep. Results f ere compared to the manual rating results done by two polysomnography experts. Total of 169 epochs was analyzed. Agreement rate for stage 1 sleep between automatic detection and manual scoring was 79.3％ and Cohen's Kappa was 0.586 (p＜0.01). A significant portion (32％) of automatically detected stage 1 sleep included SEM. Generally, digitally-scored sleep s1aging shows the accuracy up to 70％. Considering potential difficulties in stage 1 sleep scoring, the accuracy of 79.3％ in this study seems to be robust enough. Simultaneous analysis of EOG provides differential value to the present study from previous oneswhich mainly depended on EEG analysis. The issue of close relationship between SEM and stage 1 sleep raised by Kinnariet at. remains to be a valid one in this study.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.34 no.3
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• pp.218-224
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• 2001

Olive flounder is one of the most important aquaculture species in Korea. Interest in the aquaculture of olive flounder has increased recently because of its good growth characteristics and high market price, However, the productivity of olive flounder aquaculture depends on economic inputs such as fuels, facilities, and labor, In this study, EMERGY concepts was used to compare the environment and economy of two olive flounder production methods, fishing fisheries and aquaculture, and to evaluate the sustainability of olive flounder production, EMERGY spelled with an 'm' is a universal measure of real wealth of the work of nature and society made on a common basis. Calculations of EMERGY production and storage provide a basis for making choices about environment and economy following. the general public policy to maximize real wealth, production and use. EMERGY flows from environment were $94.13\%$ for olive flounder fishing fisheries, and $2.20\%$ for aquaculture. EMERGY yield ratio, environmental loading ratio and sustainability index were 17.05, 1.02 and 274 for fishing fisheries and 0.06, 44.41 and 0.023 for aquaculture, respectively. These ratios indicate that the fishing fisheries will yield more net EMERGY, while the aquaculture requires a lower investment of EMERGY.

• Journal of the Korean Society of Food Science and Nutrition
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• v.44 no.11
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• pp.1700-1707
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• 2015

The effects of drying temperature on drying characteristics of soybeans with different grain sizes [6.0 (S), 7.5 (M), and 9.0 mm (L) (${\pm}0.2$)] with 25.0% (${\pm}0.8$) initial moisture content were studied. Drying temperatures varied at 25, 35, and $45^{\circ}C$, with a constant air velocity (13.2 m/s). Thin-layer drying models were applied to describe the drying process of soybeans. The Midilli-Kucuk model showed the best fit ($R^2$ >0.99). Based on the model parameters, drying time to achieve the target moisture content (10%) was successfully estimated. Drying time was strongly dependent on the size of soybeans and the drying temperature. The effective moisture diffusivity ($D_{eff}$) was estimated by the diffusion model based on Fick's second law. $D_{eff}$ values increased as grain size and drying temperature increased due to the combined effect of high temperatures and high drying rates, which promote compact tissue. Deff values of S, M, and L estimated were in the range of $0.83{\times}10^{-10}$ to $1.51{\times}10^{-10}m^2/s$, $1.17{\times}10^{-10}$ to $2.17{\times}10^{-10}m^2/s$, and $1.53{\times}10^{-10}$ to $2.95{\times}10^{-10}m^2/s$, respectively, whereas activation energy ($E_a$) based on drying temperature showed no significant differences in the size of soybeans.

• Journal of the Korea Concrete Institute
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• v.23 no.6
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• pp.711-722
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• 2011

Beam-column gravity or Intermediate Moment frames subjected to unexpected large displacements are vulnerable when no seismic details are provided, which is typical. Conversely, economic efficiency of those frames is decreased if unnecessary special detailing is applied as the beam and column size becomes quite large and steel congestion is caused by joint transverse reinforcement in beam-column connections. Moderate seismic design is used in Korea for beam-column connections of buildings with structural walls, which are to be destroyed when the unexpected large earthquake occurs. Nonetheless, performance of such beamcolumn connections may be substantially improved by the addition of steel fibers. This study was conducted to investigate the effect of steel fibers in reinforced concrete exterior beam-column connections and possibility for the replacement of some joint transverse reinforcement. Ten half-scale beam-column connections with non-seismic details were tested under cyclic loads with two cycles at each drift up to 19 cycles. Main test parameters used were the volume ratio of steel fibers (0%, 1%, 1.5%) and joint transverse reinforcement amount. The test results show that maximum capacity, energy dissipation capacity, shear strength and bond condition are improved with the application of steel fibers to substitute transverse reinforcement of beam-column connections. Furthermore, several shear strength equations for exterior connections were examined, including the proposed equation for steel fiber-reinforced concrete exterior connections with non-seismic details.

• Journal of Bio-Environment Control
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• v.24 no.2
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• pp.100-105
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• 2015

The calculation method of infiltration loss in greenhouse has different ideas in each design standard, so there is a big difference in each method according to the size of greenhouses, it is necessary to establish a more accurate method that can be applied to the domestic. In order to provide basic data for the formulation of the calculation method of greenhouse heating load, we measured the infiltration rates using the tracer gas method in plastic greenhouses equipped with various thermal curtains. And then the calculation methods of infiltration loss in greenhouses were reviewed. Infiltration rates of the multi-span and single-span greenhouses were measured in the range of $0.042{\sim}0.245h^{-1}$ and $0.056{\sim}0.336h^{-1}$ respectively, single-span greenhouses appeared to be slightly larger. Infiltration rate of the greenhouse has been shown to significantly decrease depending on the number of thermal curtain layers without separation of single-span and multi-span. As the temperature differences between indoor and outdoor increase, the infiltration rates tended to increase. In the range of low wind speed during the experiments, changes of infiltration rate according to the outdoor wind speed could not find a consistent trend. Infiltration rates for the greenhouse heating design need to present the values at the appropriate temperature difference between indoor and outdoor. The change in the infiltration rate according to the wind speed does not need to be considered because the maximum heating load is calculated at a low wind speed range. However the correction factors to increase slightly the maximum heating load including the overall heat transfer coefficient should be applied at the strong wind regions. After reviewing the calculation method of infiltration loss, a method of using the infiltration heat transfer coefficient and the greenhouse covering area was found to have a problem, a method of using the infiltration rate and the greenhouse volume was determined to be reasonable.

• Progress in Medical Physics
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• v.3 no.2
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• pp.1-12
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• 1992

For intraoperative radiation therapy using electron beams, a cone system to deliver a large dose to the tumor during surgical operation and to save the surrounding normal tissue should be developed and dosimetry for the cone system is necessary to find proper X-ray collimator setting as well as to get useful data for clinical use. We developed a docking type of a cone system consisting of two parts made of aluminum: holder and cone. The cones which range from 4cm to 9cm with 1cm step at 100cm SSD of photon beam are 28cm long circular tubular cylinders. The system has two 26cm long holders: one for the cones larger than or equal to 7cm diamter and another for the smaller ones than 7cm. On the side of the holder is an aperture for insertion of a lamp and mirror to observe treatment field. Depth dose curve. dose profile and output factor at dept of dose maximum. and dose distribution in water for each cone size were measured with a p-type silicone detector controlled by a linear scanner for several extra opening of X-ray collimators. For a combination of electron energy and cone size, the opening of the X-ray collimator was caused to the surface dose, depths of dose maximum and 80%, dose profile and output factor. The variation of the output factor was the most remarkable. The output factors of 9MeV electron, as an example, range from 0.637 to 1.549. The opening of X-ray collimators would cause the quantity of scattered electrons coming to the IORT cone system. which in turn would change the dose distribution as well as the output factor. Dosimetry for an IORT cone system is inevitable to minimize uncertainty in the clinical use.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.6
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• pp.425-433
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• 2000

The stochiometric mix of evaporating materials for the $CuGaTe_2$single crystal thin films was prepared from horizontal furnance. Using extrapolation method of X-ray diffraction patterns for the $CuGaTe_2$polycrystal, it was found tetragonal structure whose lattice constant $a_0 and c_0$ were 6.025 $\AA$ and 11.931 $\AA$, respectively. To obtain the single crystal thin films, $CuGaTe_2$mixed crystal was deposited on throughly etched semi-insulator GaAs(100) substrate by the Hot Wall Epitaxy (HWE) system. The source and substrate temperature were $670^{\circ}C$ and $410^{\circ}C$ respectively, and the thickness of the single crystal thin films is 2.1$\mu\textrm{m}$. The crystalline structure of single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). Hall effect on this sample was measured by the method of van der Pauw and studied on carrier density and mobility dependence on temperature. The carrier density and mobility of $CuGaTe_2$single crystal thin films deduced from Hall data are $8.72{\times}10{23}$개 $\textrm m^3$, $3.42{\times}10^{-2}$ $\textrm m^2$/V.s at 293K, respectively. From the photocurrent spectrum by illumination of perpendicular light on the c-axis of the $CuGaTe_2$single crystal thin film, we have found that the values of spin orbit coupling $\Delta$s.o and the crystal field splitting $\Delta$cr were 0.0791 eV and 0.2463 eV at 10 K, respectively. From the PL spectra at 10 K, the peaks corresponding to free bound excitons and D-A pair and a broad emission band due to SA is identified. The binding energy of the free excitons are determined to be 0.0470 eV and the dissipation energy of the donor-bound exciton and acceptor-bound exciton to be 0.0490 eV, 0.0558 eV, respectively.