• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2018.05a
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• pp.175-176
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• 2018

We have developed liquis precursotr delivery system (LDS) for ultra thin film preparation in semiconductor devices. The LDS concists of 3 major parts : aerosol generator, vaporizer and vapor storage. By uaing LDS which was attached to plasma enhanced chemical vapor deposition system, thin Al2O3 layer was prepared at extremely low temperature and characterized.