• Title/Summary/Keyword: 압축 잔류응력

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Si 함유 DLC 필름의 탄성특성 평가

  • 정진원;조성진;이광렬;고대흥
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.136-136
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    • 1999
  • 박막의 탄성특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 최근에는 탄성특성을 평가할 수 있는 간단한 방법으로 기판 식각 기법을 이용한 freehang, bridge 방법이 제시되었다. 이중에서 bridge 방법은 간단한 식각 기법을 이용하여 얇은 박막에서도 탄성 특성을 평가할 수 있는 방법으로 제시되었다. 그러나 식각 과정에서 발생하는 patch 부분의 under-cut으로 인해 정확한 bridge의 길이를 측정할 수 없게 되어 오차가 발생하고 있다. 본 연구에서는 bridge 방법에서 발생하는 오차를 줄이기 위한 방법으로, patch 부분에 etch-stop을 제작해 줌으로서 식각 과정에서 발생하는 under-cut을 효과적으로 제거시켰다. Etch-stop은 2장의 mask를 align key를 이용하여 제작하였다. 먼저 산화막이 형성되어 있는 Si 기판위에 mask 1을 이용하여 patch 부분을 lithography 작업하고, 습식 식각 공정을 한 뒤 DLC 필름을 증착시킨다. 다음으로 mask 2를 이용하여 bridge pattern을 제작하고, DLC 필름을 증착시킨 후 lift-off 기술과 산화막 등방식각 공정을 통해 bridge를 제작하였다. 이렇게 제작된 bridge를 통해 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류응력과 함께 박막의 응력-변형률 관계식에 적용시켜 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. Sidl 첨가된 DLC 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400V로 합성압력은 10mTorr로 고정하였다. 사용한 반응가스는 벤젠(C6H6)과 희석된 실렌(SiH4:2H=10:90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 함유된 Si의 양을 조절하였다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 조절하였다. 필름의 잔류응력은 압축잔류 응력에 의해 발생한 필름/기판 복합체의 곡률을 laser 반사법을 이용하여 측정하고, 이 결과를 Brenner 등에 의해 유도된 식을 대입하여 계산하였다.

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Buckling과 Freehang을 이용한 DLC 필름의 접착에너지 평가

  • 정진원;문명운;이광렬;고대홍
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.127-127
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    • 2000
  • 다이아몬드상 카본(Diamond-like Carbon, DLC) 필름은 비정질 재료로서 다이아몬드와 유사한 높은 경도, 내마모성, 화학적 안정성, 그리고 광학적 특성을 가지고 있으며, 낮은 마찰계수와 높은 탄성률 등으로 인해 많은 분야에서 응용이 연구되고 있는 재료이다. 그러나 DLC 필름이 이러한 우수한 특성이 가지고 있음에도 불구하고 수 GPa에 이르는 높은 압축 잔류 응력으로 인해 응용에 제약을 받고 있다. 이러한 압축 잔류 응력이 상당한 값에 이르게 되면 기판의 구속에서 벗어나게 되어, 기판으로부터 떨어지게 되고 굽힘을 받게 되는 delamination buckling 현상이 일어나기도 한다. 본 연구에서는 높은 잔류 응력으로 인해 자연적으로 발생하는 buckling 현상과 식각 과정을 통해 인위적으로 기판의 제한으로부터 필름을 완화시키는 freehang 방법을 이용하여 필름이 기판에 접착되는데 필요한 에너지를 평가하려고 한다. 본 실험에서는 rf-PACVD 장비를 이용하여 필름을 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -100~700 Vb로 변화를 주었으며, 합성압력은 9mTorr로 고정하였다. 사용한 반응 가스는 메탄(CH4)이고, 아르곤(Ar)을 이용하여 모든 실험에서 동일하게 기판을 전처리 하였다. buckling 현상을 관찰하기 위해 사용된 기판은 slide glass이고, freehang을 제작하기 위해 사용된 기판은 (100) p-type Si wafer 이다. freehang 제작시 사용한 식각 용액은 KOH(5.6mol)이며 외부 요인을 제거하기 위해 7$0^{\circ}C$ 항온조를 사용하였다. Buckling 된 필름과 freehang은 광학 현미경과 전자 주사 현미경에 의해 관찰되었으며, 사인 함수 형태의 곡면을 가지고 있었다. 또한 freehang 제작시 각각의 주기와 진폭을 통해, 필름과 기판사이의 계면에너지와 buckling 되면서 새로 생성된 두 표면에너지 차이를 구할 수 있게 되고, 이를 통해 접착에너지를 평가할 수 있었다.

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Analysis of residual drying stress in Larix Kaempferi wood used as glulam laminar (집성재 라미나용 낙엽송 재내 잔류 건조응력 변화 분석)

  • Han, Yeonjung;Chang, Yoon-Seong;Park, Yonggun;Jeong, Gi-Young;Hong, Jung-Pyo;Lee, Jun-Jae;Yeo, Hwanmyeong
    • Journal of the Korean Wood Science and Technology
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    • v.41 no.6
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    • pp.535-543
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    • 2013
  • The objective of this study was to analyse the residual stress in Larix kaempferi board during and after kiln-drying. The boards were primarily intended for using as laminar of cross laminated timber (CLT). In this study, the equivalence of moisture content by equalizing treatment was proved and reduction of residual stress by conditioning treatment was quantified. Prong test and slice test were carried out to analyse the residual stress in wood during drying. Transverse casehardening was measured immediately after making prong sample. Residual stress of four parts in wood from surface to center was analyzed quantitatively based on elastic deformation after just cutting slices from board. Tensile stress and compressive stress on the surface of board during drying did not exceed 2.2 MPa when boards were dried by kiln-drying schedule of T10-C4 and T12-D5. Because the tensile strength and compressive strength of transverse direction of Larix kaempferi lumber are 2.65 MPa and 4.60 MPa, application of more severe drying schedule can be recommended. Cup and twist were reduced by about 40% by equalizing and conditioning treatments after drying.

Evaluation of Forming Performance of Cold Rolled Steel Pipes & Tubes for Building Structure (건축구조용 냉간성형 강관의 가공성능 평가)

  • Im, Sung Woo;Choi, Kwang;Chang, In Hwa
    • Journal of Korean Society of Steel Construction
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    • v.16 no.1 s.68
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    • pp.33-42
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    • 2004
  • Making use of SN steel in the building structure should be a prerequisite to adopt the design strength of said steel. As a preceding study, the material properties of STKN400B/490B tubes and SPAP235/325 and SPAR295 square pipes manufactured using SN400B/490B plates were evaluated. Compared with the yield and ultimate strengths of SN400B/490B plates, those of STKN400B/490B tubes increase. Nonetheless, the yield and ultimate strengths of STKN400B/490B tubes satisfied the design codes of STKN400B/490B tubes even though the tubes were fabricated via roll bending or press forming. On the other hand, the yield and ultimate strengths at the edges of SPAP235/325 square pipes did not satisfy the design codes based on the values at the sides. The maximum tensile and compressive residual stresses at the SN490B tube were equal to and 40% of the yield strength of the SN490B plate, respectively, In the case of the SPAP325 square pipe, both the maximum tensile and compressive residual stresses were 80% of the yield strength of the SN490B plate. The axial compressive loaded column test results snowed that the buckling strengths were not very different regardless of the mode of fabrication of STKN490B tunes. i.e., through roll bending or press forming. On the other hand, the buckling strength of the SPAP325 square pipe was higher than that of the built-up square pipe.

Evaluation of weld joint properties with length of inserted short pipe at the time of pipeline welding (배관용접시 단관삽입길이에 따른 용접부 특성 평가)

  • Kim Cheol-man;Kim Woo-sik;Kim Young-seob;Kwon Jeong-rock
    • 한국가스학회:학술대회논문집
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    • 2003.10a
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    • pp.53-58
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    • 2003
  • API 5L X65 배관에 50mm이상의 단관을 삽입하여 용접하였을 경우, 삽입된 단관 길이 변화에 따른 용접부 기계적 특성 평가 결과를 요약하면 다음과 같다. 1. 단관삽입 용접부위의 거시적 조직관찰, 미소경도측정, 인장시험, 굽힘시험을 수행한 결과, 단관삽입 용접부의 건전성에는 문제가 없는 것으로 평가되었다. 2. 단관삽입 용접부의 원주방향 최대 인장 잔류응력의 크기는 단관 삽입 길이에 관계없이 약 150MPa로서 그리고 최대 압축 잔류응축은 약 300MPa로 측정되었다. 모재의 항복강도가 492MPa인 것과 비교하여보면 단관 삽입 용접에 의한 잔류응력의 영향은 매우 작은 것으로 평가되었다.

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Finite Element Analyses on Local Buckling Strength of Polygonal-Section Shell Towers (축방향 압축을 받는 다각형 단면 쉘 기둥구조의 국부좌굴강도에 관한 해석적 연구)

  • Park, Seong-Mi;Choi, Byung-Ho
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.4
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    • pp.1900-1907
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    • 2012
  • Since the subpanels of polygonal-section shell have the corners of an obtuse angle larger than 90 degree unlike general plate or box-section structures, this could have an influence on forming nodal lines against local plate buckling or stress distributions. However, there is not sufficient material in the relevant study results or design recommendations. The very feasible models of the initial imperfections were acquired through the literature studies and then the parametric studies were conducted along with the initial imperfection models by using the finite element method. The parameters like the size of residual stresses, the portion of compressive residual stresses, and steel grades were considered. From the parametric studies, it was found that the maximum residual stress is more influential factor than the distribution pattern of residual stresses. In addition, The design strength equations for the simply supported plates can be applicable to the determination of the local buckling strength of the polygonal cross-section shell structures.

A Study on the Autofrettage Analysis in Single and Compound Cylinders (단일 및 복합실린더에서 자긴가공 해석에 관한 연구)

  • Shim, Woo-Sung;Kim, Jae-Hoon;Lee, Young-Shin;Cha, Ki-Up;Hong, Suk-Kyun
    • Journal of the Korean Society of Propulsion Engineers
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    • v.12 no.4
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    • pp.7-15
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    • 2008
  • In manufacturing aircraft, safety and lightness of structure are important factors. Utilizing autofrettage technique, these benefits can be obtained. This technique is most frequently applied to a single cylinder. However, the Bauschinger effect reduces the benefits of autofrettage process Therefore, there is increasing interest in the use of compound cylinder that combine shrink fit and autofrettage. In this paper, single and compound cylinders that has same geometry were considered. It was found that compound cylinder which was autofrettaged has lower tangential hoop stress and plastic strain than single cylinder at bore. This means a reduction in the impact of the Bauschinger effect after shrink-fitting which produces the beneficial bore hoop stress.

A Study on Fatigue Behavior considering Effects of Redistributing Compressive Residual Stress and Crack Closure in SS330 Weldment (SS330 용접재에서 재분포 압축잔류응력 및 균열닫힘의 영향을 고려한 피로거동에 관한 연구)

  • 이용복
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.6 no.2
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    • pp.26-33
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    • 1997
  • In this study effect of residual stress and its redistribution in weldment on the fatigue crack propagation was investigated. Fatigue tests were conducted by the center notched specimens machined with welded plate. The residual stress and its redistribution after the crack growth were measured by the magnetizing stress indicator and hole-drilling method. Fatigue crack propagation was estimated by the specimens having residual stress redistributed after the cracks growth and having the effects of crack closure. Crack growth rates were predicted and compared with experimental results. It had been found that the predicted crack propagation rates have a good agreement with experimental results when the redistribution of residual stress was considered.

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Buckling Strength of Concentrically Loaded High-Strength Steel Columns with Intermediate Slenderness (중심압축을 받는 고강도강 중간주의 좌굴강도 평가)

  • Kim, Dae Kyung;Lee, Cheol Ho;Han, Kyu Hong;Kim, Jin Ho;Lee, Seung Eun;Kim, Jin Won
    • Journal of Korean Society of Steel Construction
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    • v.27 no.4
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    • pp.377-386
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    • 2015
  • In this study, inelastic buckling strength of HSA800 steel columns were tested to investigate the applicability of current column curve (KBC2009, 2010 AISC-LRFD) to HSA800 steel. Key test variables included width-thickness ratio, plate-edge restraints, and column slenderness ratio. Specimens made of ordinary steel (SM490) were also tested for comparison purposes. All the concentrically loaded HSA800 specimens exhibited sufficient buckling strength compared to the current column curve, but some of SM490 specimens showed understrength. This difference can be explained by the lower residual stress present in HSA800 specimens.

The Effect of Compressive Residual Stress on Computer Corrosion Fatigue Crack of SAE 5155 (SAE 5155강의 컴퓨터부식피로 균열에 미치는 압축잔류응력의 영향)

  • Park, Sung-Mo;Moon, Kwang-Seok;Park, Kyung-Dong
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.6 no.2
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    • pp.34-40
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    • 2007
  • Antifatigue failure technology take an important part of current industries. Currently, the shot peening is used for removing the defect from the surface of steel and improving the fatigue strength on surface. Therefore, this paper the effect of compressive residual stress and corrosion of spring steel(SAE 5155)by shot-peening on fatigue crack growth characteristics in stress ratio(R=0.05)was investigated with considering fracture mechanics. By using the methods mentioned above, We arrived at the following conclusions. The fatigue crack growth rate(da/dN) of the shot-peening material was lower than that of the un-peening material. And in stage I, ${\Delta}Kth$, the threshold stress intensity factor, of the shot-peen processed material is high in critical parts unlike the un-peening material. Also m, fatigue crack growth exponent and number of cycle of the shot-peening material was higher than that of the un-peening material. That is concluded from effect of da/dN. Finally fracture of shot-peening material and un-peening material was identified and discussed in this study.

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